Attachment_1.pdf
PDF 103 KB Posted
- Attached to
- Turbomolecular Pump Federal contract opportunity
- Solicitation number
- FA940120QA003
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Attachment 1 Specifications
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| File | Type | Posted |
|---|---|---|
| Combined_synopsis_solicitation.pdf | ||
| Attachment_2.pdf |
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Text version
Specifications OSAKA TG1300MBWB Turbomolecular Pump, PN TG1300MBWB
This pump will be used to achieve the exact high vacuum conditions required for experiments conducted in the Plasma Chemistry lab. It will be used on the chamber with a laser vaporization source.
The pumps should have the following properties.
1. Should be magnetically levitated
2. Should have a ISO-B200 inlet flange
3. Should have a KF-40 outlet flange
4. Should have a 5 axis magnetic controlled bearing
5. Should include an air cooling kit
6. Should have ultimate Base Pressure of 7.5 x10-9 torr or lower.
7. Should have water cooling
8. Should include 5m cables
9. Should have a maximum backing pressure of at least 500 Pa.
10. Should have a throughput of at least 1230 sccm for N2 with a protective screen
11. Should have a vibration limit of less than 0.005 micron
12. Should have a rotation speed of 33600/min.
13. Should be mountable in any direction.
14. Ambient temperature range should be from 10-40 degrees C.
15. Should have a purge port.
16. Should have a standalone display controller
17. Should include factory installed inlet screen
18. Controller should run on 180-264V at 60Hz
19. Should include shipping
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