STATEMENT OF REQUIREMENT

TITLE: Field-Emission Scanning Electron Microscope (FE-SEM) with electron backscatter diffraction (EBSD) and energy dispersive spectroscopy (EDS) detectors and analytical software.

I. BACKGROUND

Several mission-critical research projects such as Creating Helpful Incentives to Produce Semiconductors (CHIPS) program, Additive Manufacturing Benchmark Test Series (AM-Bench), Computational Materials for Qualification and Certification (CM4QC), and the NIST Center for Automotive Lightweighting (NCAL), rely on Field-Emission Scanning Electron Microscope (FE-SEM) measurements with Energy Dispersive Spectroscopy (EDS) and Electron Backscatter Diffraction (EBSD) for mission-critical tasks and deliverables.

Current instrumentation is insufficient to meet current and projected needs. Procuring an additional analytical FE-SEM with EDS and EBSD will support materials measurement, microstructural characterization, compositional analysis, crystallographic analysis, research collaborations, and industrial interactions aligned with MML measurement science priorities.

II. SCOPE

The purpose of this acquisition is to procure a high-resolution, analytical Field-Emission Scanning Electron Microscope (FE-SEM) system equipped with high-sensitivity EDS and EBSD detectors, integrated control hardware, and advanced analytical software. The scope of work includes a comprehensive pre-installation site survey, freight delivery, full hardware and software installation, validation of performance specifications, operation and software training for NIST personnel, an initial one (1) year comprehensive warranty, and three (3) subsequent one (1) year option periods for Extended Warranty/Maintenance Services.

The Contractor shall provide a FE-SEM with EDS and EBSD meeting the following minimum requirements.

III. MINIMUM REQUIREMENTS

Line Item 0001 Description: FESEM System Quantity: One (1) analytical FESEM instrument with EDS and EBSD analytical detectors and software.

1. Site Survey: The Contractor shall perform a comprehensive pre-installation site survey within 30 calendar days after award at the intended installation location at: NIST Gaithersburg, 100 Bureau Drive, Building 223, Room B115, Gaithersburg, MD 20899. The purpose is to verify the environment meets all necessary site utility, acoustic, electromagnetic, and vibration tolerances prior to shipment. The Contractor shall document site survey findings and provide recommendations for site preparation. Site visit will be coordinated 14 calendar days prior to the visit with the Contract Officer Representative (COR).

2. Basic System Components

2.1. Electron column

2.1.1. Schottky Thermal emitter

2.1.2. Non-Immersion lens for magnetic samples

2.1.3. Spot size (electron beam resolution) shall be:

2.1.3.1. ≤ 2.0 nm for imaging conditions (probe current 25 pA to 100 pA, at 1 keV)

2.1.3.2. ≤ 5.0 nm for analytical conditions (probe current above 50 nA at 15 keV)

2.1.4. Acceleration and landing voltages

2.1.4.1. Accelerating voltage range shall include 500 V through 30 kV

2.1.4.2. Stage bias voltages that allow landing energy (soft/gentle landing) to be reduced to ≤ 200 V. The stage bias must meet or exceed 2000 V.

2.1.5. Probe current shall include range from 10 pA through 100 nA

2.1.6. Scanning system image resolution of ≥ 6 megapixels with a dwell time range including at least 50 ns to 10 ms

2.1.7. Selectable image focus correction to account for depth of field on tilted samples (dynamic focus)

2.1.8. This microscope will be used to perform Electron Channeling Contrast Imaging (ECCI) measurements where small convergence angles improve the quality of the measurement. Contractors shall specify the convergence angle when operating at 20 kV, 1 nA, and 10 mm working distance. Additional value will be assessed for smaller convergence angles under these ECCI conditions and/or any automation capabilities.

2.1.9. Additional value will be assessed for probe current stability. Contractors must provide the specification for probe current stability over 24 hours with submittal. The target probe current for this data shall be in the range of 500 pA ± 200 pA at 20 kV.

2.2. Stage

2.2.1. Include≥ 100 mm of travel in X and Y direction

2.2.2. Include ≥ 40 mm of Z height control

2.2.3. Include a tilt range of −5° through 70°

2.2.4. Include continuous 360° rotation of the stage

2.2.5. All axes shall be motorized and provide compucentric rotation

2.3. Chamber

2.3.1. Chamber size shall allow for a 200 mm diameter sample to be loaded in and moved through the full x and y travel without contacting the chamber wall.

2.3.2. Two chamber ports (available after all other required accessories are installed), sized to allow feed throughs for electronics and cooling lines for future in-situ experiments.

2.3.3. Available port for future cathode luminescence detector

2.3.4. Liquid nitrogen cold trap/cold finger that can maintain cryogenic temperatures for ≥ 4 hours to reduce sample contamination.

2.3.5. Plasma cleaner mounted on chamber.

2.3.6. Additional value will be given for systems offering a chamber plasma cleaner that can do scheduled iterative plasma and pump cycles.

2.3.7. Chamber camera to monitor positioning of in-chamber components and sample during operation

2.4. Load Lock – Additional value will be assessed for systems offering a load lock with the following capabilities:

2.4.1. Sample insertion time (from closing the load lock door to beam on operations) of less than 5 minutes while maintaining vacuum within the analytical chamber

2.4.2. A load lock mounted plasma cleaner capable of cleaning samples in the load lock chamber for up to 5 minutes before opening the gate valve between the load lock and analysis chamber.

2.4.3. The load lock system shall be capable of loading cylindrical samples (metallurgical mounts) that are 25 mm tall and 32 mm in diameter.

2.4.4. The load lock system shall be capable of loading 100 mm wafers.

2.4.5. The following load lock compatible sample holders shall be included:

2.4.5.1. 2 each - holder for a single 32 mm diameter cylindrical sample (metallurgical mount)

2.4.5.2. Vise clamp holder capable of holding plate like sample for cross-section imaging

2.4.5.3. 100 mm wafer holder

2.4.5.4. Transmission Kikuchi Diffraction (TKD) holder

2.4.5.5. 3.2 mm pin stub holder

2.4.6. The load lock system shall be integrated into the control system of the microscope to provide interlocks that prevent users from loading sample while stage is not at the exchange position or when a sample is already loaded on the stage.

2.5. Detectors

2.5.1. Probe current detector or built-in faraday detector (need for pure element standards for compositional EDS)

2.5.2. In-chamber electron detector (Everhart Thornley type)

2.5.3. In-lens electron detectors that can be configured to simultaneously collect electrons with an adjustable energy distribution between the detectors. Additional value will be assessed for in-lens detector systems that expand imaging and analysis capabilities.

2.5.4. Insertable back-scatter detector (BSE) capable of both topography and composition. Additional value will be given for systems offering a segmented BSE detector. Additional value for detectors that can acquire BSE during EDS/EBSD acquisition.

2.6. OXFORD EDS/EBSD with EXPERT software package

2.6.1. Symmetry S3 EBSD detectors with 5 forescatter detector (FSD) diodes

2.6.2. Ultim Max Infinity 100 EDS detector

2.6.3. Aztec EXPERT software tools package

2.6.4. OXFORD system shall include a dedicated control personal computer (PC).

2.6.5. Software shall include licenses for online (quantity ≥ 1) and offline (quantity ≥ 1).

2.7. Vacuum system

2.7.1. The system shall be equipped with an automatically controlled vacuum system that includes control of the analysis chamber and any load lock compartments. The base vacuum pressure of the chamber shall be below 1×10−6 mbar.

2.7.2. Oil-less vacuum pumps

3. Automation Capabilities

3.1. The system must include scripting capabilities through a documented application program interface (API). The government anticipates the interface will be python, but other languages may meet this requirement. The following capabilities must be included with the documented API:

3.1.1. Control of all axes (x, y, z, rotation, tilt) that respects the safe stage motion controls of the graphical user interface.

3.1.2. Acquisition and saving images.

3.1.3. Control of detector selection for an image as well as brightness and contrast.

3.2. Additional value will be given for systems that offer more capable API features, including but not limited to:

3.2.1. Control of beam parameters including probe current and accelerating voltage.

3.2.2. Automated features such as auto alignment, auto focus, auto brightness and contrast, and auto stigmation.

3.2.3. Control of scanning parameters including dwell time and resolution.

3.3. Contractor must include documentation of the available API features with submittal to be considered for extra value.

4. Service supplies required from Contractor

4.1. Water-to-water chiller that uses house 55 F degree chilled water.

4.2. Uninterruptable Power Supply (UPS) to provide temporary backup power, will operate the SEM in normal operating mode for >15 minutes in the event of power loss.

5. Software and Control Capabilities

5.1. The system must operate from a Windows PC running a graphical user interface (GUI).

5.2. The GUI must allow output files (e.g. images, movies, spectra, etc) to be saved in non-proprietary formats. At least one of each format for each class of data from this list of non-proprietary formats: tiff, jpg, bmp, png, mpg4, avi, msa, txt, csv.

5.3. Additional value will be given for systems that are capable of performing stitching for large area images. The software must include stage controls, auto focus, auto contrast/brightness, and the ability to import external images from other microscopy techniques or the chamber scope image.

6. Facilities Requirements Contractors shall include a site preparation document detailing space, electrical, compressed air, and gas requirements with proposals.

7. Service Personnel The Contractor’s primary service engineer shall be a US citizen and shall be required to obtain a NIST badge to perform service work without being escorted.

8. Installation The system shall be installed by the Contractor and meet the contract specifications no later than 30 calendar days after delivery. At a minimum, installation shall include unpackaging of all equipment, assembly, demonstration of all manufacturer's specifications, and removal of trash. Installation shall take place during normal business hours: 8:30am to 5:00pm Eastern Time, Monday through Friday except Federal Holidays and official closures. Installation and demonstration shall be conducted at: NIST Gaithersburg, 100 Bureau Drive, Building 223, Room B115, Gaithersburg, MD 20899. The Contractor shall coordinate this with the NIST COR 2 weeks prior to installation.

9. Training Initial training: After installation is complete, the Contractor shall demonstrate the operation to the contract specifications and conduct an initial training. This shall take place on site for approximately 4 persons. The training shall provide a demonstration of all functions, maintenance, calibration, data analysis, and basic troubleshooting. The Contractor shall coordinate training with the NIST COR 2 weeks prior to training and shall take place during normal business hours: 8:30am to 5:00pm Eastern Time, Monday through Friday except Federal Holidays and official closures. Training shall take place at the installation site: NIST Gaithersburg, 100 Bureau Drive, Building 223, Room B115, Gaithersburg, MD 20899.

Applications training: Specific training topics shall also include microscope operations, detector operations, scripting, and large area mapping. Training shall be completed within 365 calendar days of installation and during normal business hours. The Contractor shall coordinate training with the NIST COR 2 weeks prior to training and shall take place during normal business hours: 8:30am to 5:00pm Eastern Time, Monday through Friday except Federal Holidays and official closures. Training shall take place remotely or on-site at NIST Gaithersburg, 100 Bureau Drive, Building 223, Room B115, Gaithersburg, MD 20899.

10. Initial Warranty/Maintenance Services The Contractor shall provide, at a minimum, a one-year warranty for the entire system, which shall include repair, maintenance and software upgrades for FESEM and EBSD/EDS Systems. The government definition of entire system also includes the water chiller and UPS that are supplied by the Contractor with the instrument purchase. The warranty shall cover all parts, labor and travel. The warranty shall commence upon formal Government acceptance.

Option Line Items 0002 through 0004: are for Extended Warranty/Maintenance Services - The Contractor shall provide options to extend the initial one (1) year warranty/maintenance, for up to an additional three (3) years. Option years to be exercised at the Government’s discretion, in one-year increments.

Option Line Item 0002 Description: Option Year 1 of Extended Warranty/Maintenance Services Quantity: One (1) Year

Option Line Item 0003 Description: Option Year 2 of Extended Warranty/Maintenance Services Quantity: One (1) Year

Option Line Item 0004 Description: Option Year 3 of Extended Warranty/Maintenance Services Quantity: One (1) Year

11. Excepted Contract Status This is NOT an Excepted Contract. In the event of a government shutdown, this requirement will not have access to NIST facilities.

IV. PERIOD OF PERFORMANCE

One 1-year base period for the initial Warranty/Maintenance Service, plus three 1-year option periods for the Extended Warranty/Maintenance Services. Option years to be exercised at the Government’s discretion, in one-year increments as follows:

Base Year: FY26 to FY27 Option Year 1: FY27 to FY28 Option Year 2: FY28 to FY29 Option Year 3: FY29 to FY30

Exact period of performance dates will be provided in the award document.

V. PLACE OF PERFORMANCE

Work shall be accomplished at NIST, Gaithersburg, Maryland. Normal duty hours are Monday through Friday, 8:30 a.m. to 5:00 p.m.

with the exception of Federal holidays.

VI. GOVERNMENT FURNISHED PROPERTY

Government Property will NOT be provided.

VII. DELIVERY

Delivery shall be F.O.B Destination and shall occur in accordance with the delivery due dates provided in the Schedule of Deliverables.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The Contractor shall coordinate shipping method and tracking with the NIST COR. The delivery address is:

NIST - Shipping and Receiving Div 642, [INSERT CONTRACT NUMBER] 100 Bureau Drive, Building 301 Gaithersburg, MD 20899

Additional delivery coordination: The analytical FE-SEM instrument with EDS and EBSD analytical detectors, analytical software, control PC(s), required accessories, chiller, UPS, manuals, reference materials, factory calibration metrics, and calibration report shall be delivered 180 calendar days after award of this requirement. The Contractor shall coordinate delivery, shipment tracking, receiving, internal movement, and staging with the NIST COR.

VIII. DELIVERABLES

Description Quantity Due Date

Analytical FESEM instrument with analytical detectors and software

One (1) 180 calendar days after the award of this requirement.

Installation of the analytical FESEM instrument with analytical detectors and software

Once 30 calendar days after delivery of this requirement.

Operations and maintenance manual for the analytical instrument

One (1) Upon delivery

Operations and maintenance manual for the analytical detectors and software

One (1) Upon delivery

Instrument familiarization for up to 4 experienced SEM operators.

Once Within 14 calendar days of completing installation.

On-site applications training for up to 4 NIST staff. Once Within 365 calendar days of acceptance.

Initial one-year warranty, repair, maintenance, software updates/upgrades, service, support, enhancements, for the FE-SEM and EDS/EBSD systems.

One (1) year

Upon acceptance.

Telephone technical support for the FE-SEM and EDS/EBSD systems.

One (1) year

Upon acceptance. Provide telephone technical support with a response time of 16 business hours, during normal business hours (8:30 am to 6:00 pm Eastern Time).

IX. INSPECTION & ACCEPTANCE

Upon delivery, a visual inspection will be performed by the NIST COR to identify defects, damage, or nonconformity. The Government shall have sole discretion to reject, require repair, or require replacement of such items at no cost to the Government.

Ownership of the equipment shall transfer to NIST upon acceptance by NIST. Acceptance will be determined after the Contractor has successfully provided the delivery, installation, demonstration, and initial training. NIST will then conduct testing and inspection for acceptance. Confirmation of acceptance will be provided by the NIST COR within 10 business days. The Contractor shall assist in troubleshooting and resolving any issues detected during this time within 3 business days after being notified.

X. PERFORMANCE REQUIREMENT SUMMARY

1. The Contractor shall demonstrate that the spatial resolution of the microscope meets the Contractors quoted specification. This will be done in accordance with the Contractor’s site acceptance testing methods.

2. The Contractor shall demonstrate the beam current stability over twenty-four (24) hours. The Contractors preferred probe current measurement technique will be used. Plots of probe current vs time will be provided to the government. The range must be within the quoted range.

3. The Contractor shall demonstrate fully integrated EDS and EBSD operation in accordance with Oxford Instruments site acceptance testing.

XI. TRAVEL

All travel expenses are the responsibility of the contractor.

XII. ACCESS AND SECURITY

1. Security: NIST is a restricted campus. A site access badge is required for campus and building access and must always be visible.

Contractor personnel must comply with NIST identification and access requirements. At a minimum, each Contractor personnel must provide a government ID (active, unexpired, REAL ID Act compliant) to get a site access badge. The Contractor shall coordinate site access with the NIST COR at least 1 week prior to arrival. NIST site access is required for installation and training activities.

2. Safety: Contractor personnel are responsible for knowing and complying with all applicable safety regulations. The Contractor shall coordinate this with the NIST COR.

3. Vehicle Registration: All vehicles entering the site must be registered with the NIST Security Office. A valid driver's license (REAL ID compliant), active proof of insurance, and current registration must be presented to the NIST Security Office for a vehicle pass. The pass must be displayed on the vehicle in accordance with NIST Security Office instructions.