Attachment A - Statement of Work.pdf

STATEMENT OF WORK/REQUIREMENTS DOCUMENT

Title: Environmental Test Chamber for Reliability Test Requesting Lab: EL Division 735

I. BACKGROUND INFORMATION

The National Institute of Standards and Technology (NIST), Division 735 at Engineering Laboratory, seeks information on commercial vendors that can provide an Environmental Test Chamber. The environmental test chamber will stress devices with repeated cycles of extreme hot and cold temperatures which will lead to structural and functional failures over time. The environmental chamber will add new capability to produce defects in semiconductor packaging devices that will be used for defect characterization and failure analysis. The system, in support of NISTs mission, will be used for metrology development, including image acquisition, processing and optimization. This instrument will be in Building 220 in Gaithersburg, MD, and managed by the Engineering Laboratory.

The CHIPS Metrology program develops and advances cutting edge metrology capabilities for members of the US semiconductor manufacturing ecosystem. This NIST conducted research program works with device manufacturers, tool vendors, materials suppliers, and other organizations to address critical metrology gaps to spur innovation within seven grand challenge areas. For more information on CHIPS Metrology, please visit https://www.nist.gov/chips/research-development-programs/metrology-program.

Purpose/Objective: the environmental test chamber will stress devices with repeated cycles of extreme hot and cold temperatures which will lead to structural and functional failures over time. By intensifying these stresses, the chamber can simulate years of wear and tear in just a few days or weeks, helping researchers to observe how materials and devices degrade (e.g., corrosion, cracking, or electrical shorts) under the extreme thermal stress.

II. SCOPE

The Contractor shall deliver a quantity of 1 of Environmental Test Chamber, inclusive of FOB Destination delivery, installation, warranty and training.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award.

Experimental, prototype, or custom items will not be considered. The use of “gray market” components is not authorized for sale in the U.S. by the Contractor is not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001:

Description: Environmental Test Chamber https://www.nist.gov/chips/research-development-programs/metrology-program

Quantity: 1

A. Technical Specifications

1. System Configuration

a) The system shall be a benchtop compact chamber.

b) The system shall have refrigeration system with air cooled condenser.

c) The system shall have heating and air delivery system.

d) The system shall have dry air purge system.

e) The system shall have interior walls, ceiling and floor constructed with 304 stainless steel and continuously welded seams throughout.

f) The system shall have exterior dimensions not exceeding W x D x H (mm): 1000 x

600 x 900.

g) The system shall have minimum interior volume of 34 Liters.

h) The system shall have a weight not exceeding 130kg.

i) The system shall include a spare parts kit.

2. Chamber

a) The chamber shall be able to accommodate at least one 200 mm wafer.

b) The chamber shall have a cable port on the side of the chamber.

c) The chamber shall have a viewing window on the door with chamber light monitor.

d) The chamber shall have a vent port.

e) The chamber shall have at least one stainless steel wire rod shelf.

3. Operation

a) The system shall be able to cool down to -65 °C or lower.

b) The system shall be able to heat to 175 °C or higher.

c) The system shall be able to thermal cycle between the lowest temperature and highest temperature.

d) The system shall be able to test samples with live load.

4. Control System and Software

a) The system shall include controller power supplies, and all ancillary equipment required for the system to operate.

b) The system shall include process view software.

c) The system shall provide ethernet communications for computer interfaces.

d) The controller shall be capable of data logging and graphical trend charting.

e) The Controller software shall be able to support data acquisition, data logging, graphical trend chart, visual and audible notification, and email alert for test being run on the chamber.

5. Safety

a) The system shall have high/low limit over/under temperature protection.

b) The system shall have the control panel UL508A listed.

6. Calibration

a) Vendor shall provide certificate of calibration.

IV. DELIVERABLES

Description Quantity or Format Due Date

Environmental Test Chamber 1 NLT 8 weeks after receipt of offer

V. DELIVERY TERMS

Delivery shall be F.O.B Destination and shall occur in accordance with the delivery due dates provided in the above table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver all Line Items to:

National Institute of Standards and Technology Shipping and Receiving 100 Bureau Drive, Building 301 Gaithersburg, MD 20899 POC/ Jessie Zhang/301

***Due to ongoing limited site access of the NIST facilities, the Awardee SHALL confirm with the Designated Government Official and the Contracting Officer prior to ANY shipment to NIST***

VI. INSTALLATION

The system shall be installed by the Contractor and meet contract specifications no later than four (4) weeks after delivery. Installation, at a minimum, shall include uncrating/unpackaging of all equipment, rigging, set-up and hook-up of the system, demonstration of all specifications, and removal of trash. Onsite installation and demonstration shall be done at NIST, Gaithersburg, MD- Building 220.

VII. TRAINING

The contractor shall conduct training sessions for up to five users at NIST. The training shall provide a thorough demonstration of all system/solution functions, maintenance, data administration, and basic troubleshooting. The training may be completed at NIST Monday – Friday during the operating hours of 8:30 am to 5:00 pm immediately after installation and demonstration of specifications and must be completed immediately following installation.

VIII. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in the specific FAR clause, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST TPOC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 10 days of the completed installation of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

IX. WARRANTY

The contractor shall warrant the entire system for a period of a minimum of (12 months after receipt of the equipment and shall be in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government and at a minimum shall include the following:

X. PAYMENT SCHEDULE

Advance payment is not authorized. The Contractor must invoice in arrears according to the payment schedule. The Contractor shall be paid, in accordance with Net 30-day payment terms, upon receipt and acceptance of a proper invoice, in accordance with the following schedule:

1. 100% after installation and acceptance by the TPOC of fully installed system, AND

2. After the successful completion of the testing requirements set forth in this document under section set forth in this document, AND

3. After successful demonstration by the instrumentation that it performs IAW the technical requirements set forth in this document AND

4. After receiving an invoice submitted properly, IAW the purchase order terms and conditions.

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer.

XI. MISCELLANEOUS INFORMATION

Safety: The Contractor employee must be responsible for knowing and complying with all installation safety prevention regulations. Such regulations include, but are not limited to, general safety, fire prevention, and waste disposal.

Security: NIST is a restricted campus. An identification badge is required for access for entry into buildings and is shown to the armed Security Police when entering the campus.

Regular Business Hours. Regular business hours are Monday through Friday, 8:30 am to 5:00 pm Eastern Time, excluding Federal holidays and NIST closures.

Identification Badges: Contractor employees must comply with NIST identification and access requirements. Each Contractor employee must wear a visible identification badge provided by the NIST Security Office.

Vehicle Registration: All Contractor employees must register their vehicles with the NIST Security Office to gain access to the campus. A valid driver’s license, Government-furnished civilian ID, proof of insurance and current registration must be presented to the NIST Security Office, at which time a NIST vehicle pass will be issued. The pass must be displayed on the vehicle in accordance with NIST Security Office instructions.

***Due to ongoing limited site access of the NIST facilities, the Awardee SHALL confirm with the Designated Government Official and the Contracting Officer prior to ANY shipment to NIST***