Attachment A - SOW.pdf

Attachment A March 2023

STATEMENT OF WORK

TO

PURCHASE SEMICONDUCTOR CHEMICALS

FOR

THE DETECTOR DEVELOPMENT

LABORATORY

ACRONYMS

NASA – National Aeronautics Space Administration

GSFC – Goddard Space Flight Center

DOT – Department of Transportation

DDL – Detector Development Laboratory

FAR – Federal Acquisition Requirements

SDS – Safety Data Sheet

HAZMAT – Hazardous Materials

CMOS – Complementary Metal-Oxide-Semiconductor

IDIQ – Indefinity Delivery Indefinity Quantity

1.0 - Background

1.1 - NASA-GSFC intends to purchase semiconductor or higher grades chemicals.

These items are critical for the continuous daily operation of the Government’s laboratories located in Building 11 and Building 30-DDL. These laboratories are cleanrooms class 100 and class 10 respectively. The mission of these labs is to research, develop and fabricate semiconductors devices, Microelectromechanical Systems structures, and to support other NASA related projects. Most chemicals needed will be, but not limited to, Solvents (i.e. Acetone, Isopropyl, Methanol, Ethanol, Toluene, 1165 RR, RR4, RD2, HMDS, etc.), various acids (i.e. HF, HCL, CH3COOH, HNO3, BOE 7;1, E6, H2SO4, etc.), various bases (i.e. NaHCO3, NaOH, H2O2, NH4OH, NH4F, MF312, MF319, AZ400K, TMAH, HMDS, etc.) several types of photoresists (i.e. SC1811, SC1827, AZ4330, AZ4620, AZ 10XT, mr-I T140 series, etc.), and thinners, developers, epoxies, metal plating solutions are also required. See Attachment B, IDIQ Fixed Price Matrix for the complete list of chemicals. Additionally, new chemicals, not listed may be added in the future and required to be purchased as projects develop new processes throughout the life of the contract.

2.0 - Objectives and scope

2.1 - Contractors shall be able to supply Semiconductor Equipment and Materials International grade 1 chemicals, and at the Government’s discretion supply higher grades as necessary; the chemicals shall be cleanroom bagged bottles suitable for use in critical clean room areas, except when directed by the Government not to be bagged.

2.2 - The chemicals will be ordered in small quantities at the time and as needed, usually one order per week because of storage restrictions onsite.

2.3 - Most chemicals are generally ordered in gallon size bottles, and occasionally in larger five-gallon sizes pails, but in some instances quart size or smaller bottles will be required. For some chemicals, the Government cannot handle large sizes, the contractor shall notify the Government of size changes and gain pre-approval before shipping. If the contractor chooses to re-package a chemical into a smaller container, the contractor shall provide certification of product meeting the specified grade such as a certificate of compliance with the original manufacturer, or Certificate of Analysis after re-packing.

2.4 - The laboratories perform several research activities; from time-to-time new chemicals will be required, and the contractor shall be able to acquire and deliver such products in accordance with section 4.0 Deliverables.

2.5 - While this contract is in force, the Government will issue individual delivery orders for materials needed for its operations, based on the usage of the DDL facility.

These orders will be used to purchase a quantity of products to be delivered and the contractor shall keep a reasonable inventory for immediate shipment of products with the expiration date of no more than three months.

3.0 - Tasks and requirements

3.1 - The delivery time shall be in accordance with section 4.0 Deliverables. The contractor shall keep an inventory in their facility of the most commonly used chemicals for immediate shipment when a delivery order is placed. For products with a shorth shelf life, or impractical contractor storage; those shall be ordered directly from the manufacturer, drop shipped to NASA- Goddard and the shipping time should not exceed three weeks. If there is a known shortage of a specific chemical, the contractor shall notify the Government immediately and work to find alternate suppliers. The contractor shall supply Safety Data Sheet (SDS) for each chemical ordered and the SDS shall accompany each shipment.

3.2 - The contractor shall provide chemicals suitable for the semiconductor industry produced by the following manufacturers and others as deemed necessary:

Avantor Performance Materials, formally known as JT Baker, AZ Electronics Materials, Microchem Corporation, Futurex Inc, KMG Corporation, Microresist, EMD Performance Materials, Allresist, Technic Inc, Alfa Aesar, Fisher Scientific, Brewer Science, Dupont, Dow Chemicals, Transene, Microposit, Appli-tec, Zeon Specialty Materials, Cyantek Corporation, and others as deemed necessary.

In the event that a specific brand is not available and a change of manufacturer or chemical substitute is needed, the Government or its representatives shall approve the change before the order is placed.

3.3 - The contractor shall be responsible for all licenses for the purchase and sale of chemicals, when importation from overseas of certain products is necessary, the contractor will place the order with the manufacturer, release the products from US Customs and arrange for the transport of such chemicals to NASA-GSFC. The transport of most products must follow Department of Transportation regulations for hazardous materials shipment.

If the end product(s)/chemical purchased is not a domestic end product(s) as defined in the clause entitled "Buy American Act -- Supplies," the offeror shall so state and notify the Government for approval prior to purchase. The contractor shall provide the Government with the country of origin and any other requested information.

4.0 - Deliverables

4.1 - The chemicals must be delivered to Goddard Space Flight Center within TBD days after receipt of individual orders as specified on each individual delivery order. All chemicals must be delivered in the original manufacturer packaging including all pertinent documents, such as, lot numbers, expiration dates, certifications of quality and Safety Data Sheet.

If the Contractor determines that a chemical cannot be delivered within 7 days period, the Contractor shall notify the CO and the COR within four (4) days.

For products with a shorth shelf life, or impractical contractor storage, shipping time should not exceed three weeks. If there is a known shortage of a specific chemical, the contractor shall notify the Government immediately and work to find alternate suppliers.

5.0 - Security

6.1 - The chemicals shipments shall be delivered to GSFC at 8800 Greenbelt Rd, Greenbelt MD 20771, at the shipping and receiving department located at NASA-GSFC with access from Soil Conservation Rd – Building # 35. The final location for chemicals will be Building 30 – chemical storage room or at a building location to be provided by the Government.

7.0 - Period of performance

7.1 - The period of performance for this contract shall be for a one-year base with four 1-year options.