Attachment_A_Scanning_Electron_Microscope_Specifications.pdf
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- Attached to
- P25-1661 - IFB -Scanning Electron Microscope
- Solicitation number
- P25-1661
- Issued by
- California
About this file
This is a technical specifications document for a Scanning Electron Microscope (SEM) procurement by the California Department of Food & Agriculture, specifically for the Plant Pest Diagnostics Branch to conduct morphological identifications of pest insects and weed seeds. The specification details a Tescan VEGA LMS SingleVac Tungsten Filament SEM as the primary instrument, with a quantity of one unit required. The system includes essential components such as a motorized retractable annular backscattered electron (BSE) detector, a dedicated USB control panel, a pre-centered tungsten filament spare cathode, and comprehensive training services including two days of on-site training by a Tescan USA Applications Specialist and one credit to the Tescan USA SEM User School in Warrendale, Pennsylvania, valid for one year from installation. Shipping is provided through white glove service.
The SEM specifications establish detailed technical requirements including a tungsten heated cathode electron source, operating pressure capabilities in high vacuum mode (10⁻³ Pa or below) and SingleVac mode (30-10 Pa), magnification range from 2 to 1,000,000x, electron beam resolution of 3 nanometers at 30 keV, and a motorized five-axis compucentric stage with extensive specimen handling capacity. The system is equipped with an Essence EDS energy dispersive X-ray spectroscopy detector with standardless, ZAF-corrected quantification and reporting capabilities, advanced imaging software with customizable interface, and automated scanning routines including drift-corrected frame accumulation and dynamic focus. The control PC specifications offer multiple configuration options ranging from Intel Core i3 with 16GB RAM to Intel Core i7-6700 with higher specifications, all operating on Windows 11 Pro 64-bit, with additional advanced modules available for measurement, image processing, remote control, and 3D collision modeling.
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Text version
SCANNING ELECTRON MICROSCOPE Tescan Vega
1-Tescan VEGA LMS SingleVac™ Tungsten Filament SEM
Part Number Quantity
S5123-00 Tescan VEGA LMS SingleVac™ Tungsten Filament SEM 1
• WideField™ Electron Optics
• Standard LM Chamber
• SingleVac™ mode for charge suppression
• Includes installation and introductory training
*** Product Datasheet appended ***
BSEYAG2 Tescan Motorized Retractable Annular, Single-Crystal Scintillator BSE 1
Detector
• Motorized Retractable Annular Backscattered Electron Detector utilizing a high-efficiency, fast response proprietary single-crystal scintillator design
UR-0008-A Tescan Control Panel 1
• Dedicated USB knobset for control of the most common parameters, including programmable buttons
S-TAE-00-A§1 Pre-Centered Tungsten Filament (spare Cathode-Wehnelt unit) 1
TNOS2 Advanced On-site training by a Tescan USA Applications Specialist 1
- 2 days total
TNUSA Tescan USA SEM User School 1
• Includes one credit tuition to the Tescan USA SEM training school conducted several times per year in Warrendale PA
• Valid one year from installation of SEM
• Additional training credits available
Shipping - White glove service 1
Description
Essential Specifications:
Column GM Chamber
- Electron source: Tungsten heated cathode - Width: 340 mm
- Electron beam landing energy range: 200 - Depth: 315 mm eV–30 keV - Ports: 20+
- Setup of beam current by electromagnetic - Chamber view (IR) camera beam aperturecontrol (Intermediate Lens™) - Motorized retraction of chamber mounted
- Probe current: 1 pA–2 μA, continuously adjustable detectors
- Maximum field of view: 7.7 mm @ WD=10 mm, GM Stage
>50 mm @ max. WD - Motorized, 5-Axis Compucentric Stage
- Magnification: 2× to 1,000,000× - X & Y axis travel range: 130 mm
Electron Beam Resolution - Z axis travel range: 100 mm
High Vacuum Mode - Tilt range: compucentric, -70° to +90°
- 3 nm @ 30 keV with SE detector - Rotation: compucentric, 360 degrees (continuous)
- 8 nm @ 3 keV with SE detector - Max. specimen height*°: 92 mm (133 mm without stage rotation)
Vacuum Chamber - Max. specimen size: 180 mm diameter with
LM Chamber full XY moves, rotation, no tilt (larger samples
- Internal diameter: 230 mm possible with limited stage travel and rotation)
- Ports: 12+ - Max. specimen weight: 8000 g
- Chamber view (IR) camera - Full XYZRT moves: 1000g
- Manual or motorized retraction of chamber - Full XYZ moves: 8000 g mounted detectors Note: The range of movements is dependent on the
LM Stage configuration and WD/Z
- Motorized, 5-axis compucentric Stage Vacuum System
- X & Y axis travel range: 80 (X) x 60 (Y) mm - High vacuum: Operating pressure in order
- Z axis travel range: 50 mm of 10-3 Pa or below*¹
- Tilt range: compucentric, -80° to +80° � SingleVac™: 30 ±10 Pa*ª
- Rotation: compucentric, 360 degrees (continuous)
- Max. specimen height*°: 39 mm (65 mm without stage rotation) ƒ Vacuum buffer*b
- Max. specimen size: 100 mm diameter with full Detectors and Analyzers
XY moves, rotation, no tilt (larger samples - pA meter including touch alarm function possible with limited stage travel and rotation) - Everhart-Thornley chamber detector (SE)
- Max. specimen weight: 1000 g - Optical Navigation and Correlation Camera
- Full XYZRT moves: 500g (ONCam)*²
- Full XYZ moves: 1000 g
*b - Cannot be ordered if SEM is equipped with Load Lock and/or decontaminator.
*c - Integration of 3rd party equipment depends on the availability of a 3D CAD model
Pump type: Dry Scroll Pump (will accept Oil rotary pump but Dry Scroll is preferred)
Essence™ EDS* Microscope Control PC
EDS analysis is available in live SEM scanning - PC: Intel Core i3 or equivalent, 16 GB RAM window of Essence™ software using fully integrated - 500 GB SDD, nVIDIA GT1030 or equivalent energy dispersive X-ray spectroscopy (EDS) detector- 500 GB SSD + 4 TB HDD, Nvidia GTX1660 or
- Acquisition modes: Spectrum from region, equivalent point & ID, line scan and elemental - Intel® Core i7-6700 Quad Core 3.40 GHz, RAM 16 GB mapping are included - 2TB HDD, AMD FirePro W5100 4GB
- EDS detector chip/window size 30 mm2 - Windows 11 Pro 64-bit
- EDS detector with Si3N4 window - 32” QHD monitor
- 129 eV resolution @ Mn Kα - (Details available upon request)
- Number of pulse processing settings: 3 TESCAN Essence™ Software**
- Maximum input count rate: up to 1,000,000 CPS - Customizable GUI layout
- Maximum output count rate: up to 300,000 CPS - Multi-user account management
- Quantification: standardless, ZAF corrected - Quick search bar
- Reporting: Yes -Single, dual, quad or hexa live image(s) display
Accessories -Multi-channel colored live image
- Single, dual, quad or hexa live image(s) display - Undo/Redo commands
- Multi-channel colored live image - In-Flight Beam Tracing™
SEM Scanning Systems Automated and Semi-Automated Routines
- Dwell time: 20 ns–10 ms, in steps or continuously - SEM emission control adjustable - Electron source heating
- Full frame, selected area, line or point - Electron source centering
- Image shift, scan rotation, tilt correction - Column centering
- Line and frame accumulation - Vacuum control
- Drift-corrected frame accumulation (DCFA) - Auto diagnostic
- Dynamic focus - Electron source alignment
Image Acquisition - Contrast and brightness, autofocus
- Max. frame size: 16k x 16k - Switch-off Timer
- Aspect ratio: 1:1, 4:3 and 2:1 Advanced Essence™ Modules
- Up to 8 channels can be acquired simultaneously - Measurement, Tolerance Measurement
- Color mapping and multi-channel signal mixing - Image Processing
- Multitude of image formats including TIFF, - Presets
PNG, BMP, JPEG and GIF - Histogram and LUT
- Dynamic range: 8 or 16 bits - SharkSEM™ Basic (Remote Control)
User Interface - 3D Collision Model*c
- Keyboard and Mouse - Object Area
- Trackball - Positioner
- TESCAN Essence™ graphical user interface
* ° - Clearance to analytical WD
* ¹ - <5x10-2 Pa measured with standard gauge, <1x10-3 Pa measured with optional wide range gauge
* ² - Navigation image can be acquired for samples with maximum height 40 mm.
*ª - Vacuum pressure is factory preset at 30 Pa. Value can gradually change during actual use. Exact value of pressure is not subjected to any kind of measurement during the acceptance protocol at customer’s site. SingleVac™ pressure cannot be adjusted or measured by user or service engineer at customer's site.
**Any software that is not Tescan Essence software will be required to undergo additional CDFA Information Technology approval
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