Attachment 1 - Statement of Work (SOW).pdf

STATEMENT OF WORK

Title: Optical Frequency Comb Systems Lab: Material Measurement Laboratory

I. BACKGROUND INFORMATION

The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps NIST will conduct the measurement science, or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing.

The CHIPS Metrology Program includes research in Grand Challenge 1, Metrology for Materials Purity, Properties and Provenance. To address this Grand Challenge, the project Optical Impurity Analysis of Semiconductor Gases for Enhanced Quality Systems seeks to purchase Optical Frequency Comb Systems, quantity three (2), to perform broadband spectroscopy in support of spectral reference databases with tens of thousands of users, as well as enable new laser diagnostics for complex semiconductor processes.

Additionally, the heat signatures of objects large and small, as well as the spectral signatures of the gas species between a heat source and the observer, are critical pieces of information for the space, defense, and satellite industries. These industries require innovative optical technology and metrology to support mission reliability and to establish traceability and calibration procedures for infrared spectroradiometry out to wavelength of 100 μm.

The Far InfraRed Virtually Imaged Radiometry (FIRVIR) project aims to address a critical gap in NIST’s spectroradiometry and molecular spectroscopy programs, namely the long-wave infrared wavelength range from 5 μm to 100 μm. To address this need, the FIRVIR project seeks to purchase an Optical Frequency Comb System, quantity one (1), to perform broadband spectroscopy and spectroradiometer calibrations to enable improved reliability and growth in the space, defense, and satellite industries.

These projects are led by the Chemical Sciences Division of the NIST Material Measurement Laboratory, the nation’s premier metrology laboratory for measurement science, standards, technology, and data in the area of chemical sciences. In total, these projects seek Optical Frequency Comb Systems, quantity three (3).

II. PURPOSE

To improve and enable laser diagnostics in the semiconductor research and development space, spectral reference data is required to enable the quantitative detection of trace species in gases, plasmas, and at interfaces. The acquisition of spectral reference data benefits from laser sources with broad spectral coverage and intrinsic frequency accuracy. Additionally, broadband spectroradiometry in the long-wave infrared requires accurate optical frequencies to be delivered to test newly designed dispersive spectrometers using light sources with high spectral brightness and

2 | P a g e excellent spatial and temporal coherence. Therefore, we require Optical Frequency Comb Systems to interrogate gas samples, generate broadband spectral reference data of numerous molecular species, and evaluate dispersive spectrometer performance and establish traceable calibration protocols. This requires frequency comb laser sources in the infrared wavelength region, including the mid-wave infrared and far-wave infrared.

III. MINIMUM REQUIREMENTS

The Contractor shall provide systems that meet all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental or prototype items will not be considered. The use of “gray market” components are not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001:

Description: Long-wave infrared frequency combs Quantity: Quantity two (2)

A. Technical Specifications

a. Pump laser is a mode-locked optical frequency comb laser source.

b. Pump laser source shall have actuators to phase lock the laser repetition rate (frep) and carrier-envelop-offset frequency (fceo) to radiofrequency (RF) and optical references.

i. Laser repetition rate (frep) shall be stabilizable by electronic feedback to the laser cavity length.

ii. Laser carrier-envelop-offset frequency (fceo) shall be stabilizable by electronic feedback to the laser current or other laser actuator (e.g., an acousto-optic modulator, electro-optic modulator, etc.).

c. Pump laser is amplified to an average power of greater than or equal to 2 W.

d. Pump laser pulse duration is less than or equal to 80 femtoseconds (fs).

e. Pump laser repetition rate (frep) is nominally between 75 MHz and 105

MHz.

f. Long-wave infrared frequency comb output generated by use of the pump laser and difference frequency generation (DFG) or optical rectification nonlinear process or processes.

g. Long-wave infrared frequency comb output wavelength range shall be from less than or equal to 5 µm to greater than or equal to 15 µm.

i. Continuous coverage of the wavelength range shall be achieved either instantaneously or by wavelength tuning of the comb output.

1. Long-wave infrared frequency comb instantaneous average output power shall be greater than or equal to 10 mW.

2. Optical power spectral density of the long-wave infrared frequency comb shall be greater than or equal to 10−4 mW/nm.

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3. Long-wave infrared frequency comb instantaneous spectral 3-dB bandwidth shall be greater than or equal to 100 cm−1.

Line Item 0002:

Description: Mid-wave infrared frequency comb Quantity: Quantity one (1)

A. Technical Specifications

a. Pump laser is a mode-locked optical frequency comb laser source.

b. Pump laser source shall have actuators to phase lock the laser repetition rate (frep) and carrier-envelop-offset frequency (fceo) to radiofrequency (RF) and optical references.

i. Laser repetition rate (frep) shall be stabilizable by electronic feedback to the laser cavity length.

ii. Laser carrier-envelop-offset frequency (fceo) shall be stabilizable by electronic feedback to the laser current or other laser actuator (e.g., an acousto-optic modulator, electro-optic modulator, etc.).

c. Pump laser is amplified to an average power of greater than or equal to 2 W.

d. Pump laser pulse duration is less than or equal to 80 femtoseconds (fs).

e. Pump laser repetition rate (frep) is nominally between 75 MHz and 105

MHz.

f. Mid-wave infrared frequency comb output generated by use of the pump laser and difference frequency generation (DFG) or optical rectification nonlinear process or processes.

g. Mid-wave infrared frequency comb output wavelength range shall be from less than or equal to 2.6 µm to greater than or equal to 5 µm.

i. Continuous coverage of the wavelength range shall be achieved either instantaneously or by wavelength tuning of the comb output.

1. Mid-wave infrared frequency comb instantaneous average output power shall be greater than or equal to 100 mW.

2. Optical power spectral density of the long-wave infrared frequency comb shall be greater than or equal to 10−3 mW/nm.

3. Mid-wave infrared frequency comb instantaneous spectral 3-dB bandwidth of greater than or equal to 50 cm−1.

Line Item 0003:

Description: Comb locking and powering electronics Quantity: Quantity three (3)

A. Technical Specifications

a. One comb locking and powering electronics system shall power all lasers, actuators, and control systems required for nominal operation of one (individual) infrared frequency comb listed in Line Item 0001 or Line Item 0002.

i. The sum of items from Line Item 0001 and Line Item 0002 is quantity 3 infrared frequency combs. Therefore, we request

4 | P a g e quantity 3 of Line Item 0003: comb locking and powering electronics.

ii. Each system may comprise multiple boxes and or integrated units.

b. Comb locking and powering electronics shall be either identical or individualized to meet normal operating conditions of each infrared frequency comb system listed in Line Item 0001 and Line Item 0002.

c. Electronics and power systems shall include all power supplies, power adapters, plugs, and electronic connectors required to operate the infrared frequency combs individually.

d. All power supplies and power adapters requiring input from a wall output shall be compatible with standard US wall outlet voltage of 120 V.

e. Comb locking electronics shall include any and all high-voltage drivers, servo controllers, RF sources, and cables required to perform stabilization of the pump laser repetition rate frequency (frep).

i. This requirement excludes the phase lock reference frequency or optical set-ups required to create a phase lock reference frequency (e.g., atomic clock source, stabilized optical frequency, optical beat-note platform, etc.).

f. Comb locking electronics shall include any and all high-voltage drivers, servo controllers, RF sources, and cables required to perform stabilization of the pump laser carrier envelope offset frequency (fceo).

i. This requirement excludes the phase lock reference frequency or optical set-ups required to create a phase lock reference frequency (e.g., atomic clock source, stabilized optical frequency, optical beat-note platform, etc.).

g. Comb locking electronics shall have an external RF time base input for 10 MHz.

Line Item 0004:

Description: Installation Quantity: Quantity three (3)

A. Technical Specifications

a. Install the system on an optical bench.

b. Start the laser system.

c. Demonstrate infrared frequency comb output.

i. Demonstrate that minimum specifications for wavelength range and average output power are met.

d. Identify input and output system parameter to user.

IV. SCHEDULE OF DELIVERABLES

Deliverable

Number Description Quantity Due Date

Place of Delivery

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1 Long-wave infrared frequency combs

2 No later than 40 weeks after receipt of award

NIST Gaithersburg

2 Mid-wave infrared frequency comb

1 No later than 40 weeks after receipt of award

NIST Gaithersburg

3 Comb locking and powering electronics

3 No later than 40 weeks after receipt of award

NIST Gaithersburg

4 Installation 3 No later than 44 weeks after receipt of award

NIST Gaithersburg

Standards of Acceptance: The NIST POC or COR shall review all the above deliverables and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within 30 working days of receipt of deliverable. This section applies to deliverables which must be reviewed and approved for acceptances (e.g., draft plans, drawings, etc.).

PLACE OF PERFORMANCE

Contractor’s site.

Installation at Government site (NIST Gaithersburg).

Regular Business Hours (NIST Gaithersburg).

Regular business hours are Monday through Friday, (9:30 am to 5:00 pm) Eastern Time, excluding Federal holidays and NIST closures.

PERIOD OF PERFORMANCE

Line Item 0001: No later than 40 weeks after receipt of award.

Line Item 0002: No later than 40 weeks after receipt of award.

Line Item 0003: No later than 40 weeks after receipt of award.

Line Item 0004: No later than 44 weeks after receipt of award.

V. DELIVERY TERMS

Delivery shall be F.O.B Destination (or equivalent incoterms, such as DDP) and shall occur in accordance with the delivery due dates provided in the below table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment

6 | P a g e by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

The contractor shall deliver all Line Items to:

National Institute of Standards and Technology Shipping and Receiving 100 Bureau Drive, Building 301 Gaithersburg, MD 20899 C/O Adam J. Fleisher, Building 221, Room A117

VI. INSTALLATION

The system shall be installed by the Contractor and meet contract specifications no later than 4 weeks after delivery. Installation, at a minimum, shall include uncrating/unpackaging of all equipment, rigging, set-up and hook-up of the system, and demonstration of all specifications. Onsite installation and demonstration shall be done at NIST, Gaithersburg, MD - Building 227 and Building 221.

VII. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in the specific FAR clause that allows the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

1. Direct frequency comb spectroscopy

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST POC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 30 working days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given

7 | P a g e instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

VIII. WARRANTY (Remove if no warranty is required) The contractor shall warranty the entire system for a period of a minimum of one year after acceptance of the equipment and shall be in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government.

IX. CYBERSECURITY PRIVACY REQUIREMENTS

NIST seeks a solution that provides security and privacy protection consistent with requirements defined by applicable federal laws, regulations, policies, and standards (e.g., the Federal Information Security Management Act (FISMA), OMB Circular A-130, and FIPS Publication 200). The solution provider (including subcontractors) may meet these requirements through various means, including but not limited to FedRAMP authorization, current third-party assessments (e.g., SSAE, PCI), and/or responses to NIST special publication control set SP 800-171.

Minimally Acceptable Controls

• System security plan describing physical, technical, and administrative controls implemented to protect systems and sensitive personally identifiable information

(SPII).

• IT management processes to establish and manage secure configuration baselines including routine patching for all operating systems and applications.

• Access to SPII is restricted to those with a need to know. Personnel with access to SPII have background investigations performed (e.g. criminal, financial etc.), and are trained on secure handling of SPII.

• Access Controls for SPII meet or exceed industry best practices for access and identification control including, but not limited to, connectivity to servers and databases, multi-factor authentication for remote accesses for administration, secure configurations for any devices accessing the system, and strong physical security for any place where the data is accessed.

• The solution supports multifactor authentication for users and/or supports integration with customer federation services for Single-Sign capability.

• Processes for scanning on a continual basis for vulnerabilities and proper configurations for all aspects of the system, as well as processes for timely mitigation of findings.

• Auditing and Incident Response processes including customer notification of suspected or actual incidents and logging with sufficient information to perform forensics on any incident. Processes for notifying and providing appropriate

8 | P a g e mitigations, including but not limited to credit monitoring services, for subsidy applicants in the event of suspected or actual incidents.

• SPII is encrypted in transit using TLS 1.2 or better and encrypted at rest in all places the SPII is stored. All encryption algorithms and modules are FIPS 140- 2/140-3 validated.

If unable to meet any of the requirements listed above, the solution provider may provide details of mitigations or alternative protections in place to ensure the appropriate handling and protection of SPII.

If the solution provider provides services to other Federal agencies, provide a general description of the security risk management approach and client point of contact.