Attachment 1 -Statement of Work (SOW).pdf

STATEMENT OF WORK

Title: High-Temperature In-Situ (HT-IS) Indenter

Lab: MML/643/Group 09

I. BACKGROUND INFORMATION

The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps NIST will conduct the measurement science, or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing.

The Material Measurement Laboratory (MML) is one of seven metrology laboratories within the National Institute of Standards and Technology (NIST). The laboratory supports the NIST mission by serving as the national reference laboratory for measurements in the material sciences. Our activities range from fundamental and applied research on the composition, structure and properties of industrial, materials and processes, to the development and dissemination of tools including reference measurement procedures, certified reference materials, critically evaluated data, and best practice guides that help assure measurement quality. Our research and measurement services support areas of national importance, such as the CHIPS Metrology Program (as part of the CHIPS and Science Act).

The CHIPS Metrology Program emphasizes the development of measurement science and instrumentation within seven grand challenges that addresses the highest metrology priorities in semiconductor manufacturing. Grand Challenge (GC) 3 focusses on enabling metrology for integrating components in advanced packaging.

Under the programmatic umbrella of GC 3, MML is aiming to study the deformation behavior and measure mechanical properties (e.g., modulus, creep, yield stress, fracture toughness) as function of temperature of materials (such as, dielectrics and metals) and structures relevant to the semiconductor industry (such as, film stacks and dies).

For this purpose, NIST is seeking to acquire an instrumented indentation device that is designed to be operated inside a scanning electron microscope (SEM) to enable the in-situ observation of deformation phenomena during mechanical testing. Further, this instrumented indentation device (also referred to as “High-Temperature In-Situ Indenter” or “HT-IS Indenter” or “Instrument”) shall be capable of conducting instrumented indentation testing at elevated temperatures up to 400 °C and under vacuum conditions to study the effect of elevated temperatures on the deformation behavior and to measure temperature-dependent mechanical properties of structures and materials used in advanced packaging.

II. PURPOSE

https://nvlpubs.nist.gov/nistpubs/CHIPS/NIST.CHIPS.1000.pdf

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The purpose of this procurement is to:

• acquire a HT-IS Indenter (including probes for the HT-IS Indenter) that is capable of being installed inside the FEI Quanta 200 FEG ESEM (Environmental Scanning Electron Microscope) and conducting instrumented indentation tests under vacuum conditions and at temperature up to 400 °C. Further, the HT-IS Indenter shall meet all the minimum requirements listed under Line Item 001 in section III.

• acquire training for up to 2 new users in operating the HT-IS Indenter (including operation of all system components/modules, maintenance, data administration, and basic troubleshooting, installation and de-installation in the SEM chamber).

• obtain a 1-year service level agreement (service contract) for preventive maintenance and repair services for the HT-IS Indenter for up to 2 years.

• obtain a 1-year extended warranty for the HT-IS Indenter for up to 2 years.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a instrument that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered.

The use of “gray market” components are not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001: HT-IS Indenter Description: Instrumented indentation device that shall be compatible with being installed and operated inside the FEI Quanta 200 FEG ESEM (S/N D8439), and shall be capable to conduct mechanical tests under vacuum conditions and at temperatures up to 400 °C.

Quantity: 1

A. Mechanical Testing Capabilities

a. The Instrument shall be capable to conduct quasi-static and dynamic

(continuous stiffness measurement) indentation testing at force up to 500 mN at temperatures ranging from room temperature (RT) up to 400 °C.

b. The Instrument shall be capable of high-speed indentation mapping with speeds of at least 30 indents per minute at temperatures ranging from RT up to 400 °C.

c. The Instrument shall be capable to conduct scratch testing at normal forces up to 200 mN.

d. The Instrument shall be capable of performing scanning probe microscopy (SPM) with an indenter probe over a scan range of at least 10 µm by 10 µm.

B. In-situ Operability

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a. The Instrument shall be capable to be mounted and operated inside the FEI Quanta 200 FEG ESEM (S/N D8439). The mounting solution for installation of the Instrument shall be removable (non-permanent).

b. The Instrument shall be capable to operate in vacuum conditions as generated inside an Scanning Electron microscope (SEM).

c. The Instrument shall be compatible with in-situ imaging using the secondary electron (SE) and backscattered electron (BSE) detectors of the FEI Quanta 200 FEG ESEM during mechanical testing.

C. High-Temperature Capabilities

a. The Instrument shall be capable of active, independent heating of sample and indenter probe up to 400 °C.

b. The Instrument shall be capable of monitoring the temperatures of sample and indenter probe up to 400 °C.

D. Software and Hardware

a. The Contractor shall provide all hardware and software components necessary to install and operate the HT-IS Indenter inside the FEI Quanta

200 FEG ESEM (S/N D8439).

b. The Contractor shall provide two indenter probes (one Berkovich, one Cube Corner) compatible with the HT-IS Indenter. The indenter probes shall be suitable for usage at temperatures up to 400 °C and for in-situ operation inside an SEM.

c. The contractor shall provide a set of sample mounts (sample stubs) for initial testing (quantity 10).

Line Item 0002: Service Contract -Year 1 Description: Maintenance service and technical support for HT-IS Indenter Quantity: 1

a. The Contractor shall provide one (1) preventive maintenance visit during the one-year term of the service agreement.

b. Preventive maintenance visit shall occur during NIST’s regular business hours. The Contractor shall contact the NIST TPOC to schedule a mutually acceptable date and time for the specific preventive maintenance visit.

c. The Contractor shall provide technical assistance (phone/email) and on-line diagnostic support (where applicable).

Line Item 0003: Service Contract -Year 2 Description: Maintenance service and technical support for HT-IS Indenter Quantity: 1

a. The Contractor shall provide one (1) preventive maintenance visit during the one-year term of the service agreement.

b. Preventive maintenance visit shall occur during NIST’s regular business hours. The Contractor shall contact the NIST TPOC to schedule a

4 | P a g e mutually acceptable date and time for the specific preventive maintenance visit.

c. The Contractor shall provide technical assistance (phone/email) and on-line diagnostic support (where applicable).

Line Item 0004: Extended Warranty - Year 1 Description: Extension of the Contractor’s standard factor warranty.

Quantity: 1

The Contractor shall provide one (1) year of extended warranty. The extended warranty shall provide all the benefits with the same terms and conditions as the standard factor warranty coverage offered by the Contractor at the point of sale of instrument.

Line Item 0005: Extended Warranty - Year 2 Description: Extension of the Contractor’s standard factor warranty.

Quantity: 1

The Contractor shall provide one (1) year of extended warranty. The extended warranty shall provide all the benefits with the same terms and conditions as the standard factor warranty coverage offered by the Contractor at the point of sale of instrument.

IV. SCHEDULE OF DELIVERABLES

Define all deliverables and indicate (1) the quantity desired; (2) the format in which each deliverable is to be supplied; (3) the delivery date (based on the number of weeks/days); (4) the place of delivery. The context of each deliverable shall be clear.

Keep in mind that every task does not require a deliverable. Deliverables are always tangible items (i.e., report, minutes, etc.)

Complete the table providing the information for all the tasks identified above.

Deliverable

Number Description Quantity Format Due Date Place of

Delivery 1 Specification of complete set of requirements for the installation of the HT-IS Indenter related to lab infrastructure and the Implementation inside the SEM

1 Electronic (PDF, .doc, .docx, etc.)

No later than 14 days after receipt of order

NIST

Gaithersburg

2 Delivery of HT-IS Indenter

1 Hardware and software

No later than 30 weeks of receipt of order

NIST

Gaithersburg

3 Installation of HT-IS Indenter

1 Labor activity by awardee

No later than 21 days after delivery

NIST

Gaithersburg

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4 Demonstration of full functionality of HT-IS

Indenter

1 Labor activity by awardee

No later than 7 days after installation

NIST

Gaithersburg

5 Manual of HT-IS Indenter

1 Electronic (PDF) and paper copy

No later than 7 days after installation

NIST

Gaithersburg

6 Training in operation of HT-IS Indenter for up to

2 users at NIST

1 Teaching activity by awardee

No later than 21 days after installation

NIST

Gaithersburg

7 Extended warranty

– Year 1

1 No later than 365 days after installation

NIST

Gaithersburg

8 Extended warranty

– Year 2

1 No later than 730 days after installation

NIST

Gaithersburg

9 Service contract

– Year 1

1 Labor activity by awardee

No later than 365 days after installation

NIST

Gaithersburg

10 Service contract

– Year 2

1 Labor activity by awardee

No later than 730 days after installation

NIST

Gaithersburg

Standards of Acceptance: The NIST POC or COR shall review all the above deliverables and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within 14 days of receipt of deliverable. This section applies to deliverables which must be reviewed and approved for acceptances (e.g., draft plans, drawings, etc.)

PLACE OF PERFORMANCE

Installation and training shall take place during regular business hours at the NIST campus in Gaithersburg, MD, Building 223, Lab A126, which is the location of the FEI Quanta FEG 200 ESEM.

Maintenance and repair services performed under the service contract or extended warranty must be rendered on-site at NIST unless otherwise agreed upon by the parties.

If a component needs to be repaired off-site, the Contractor shall be responsible for all packaging, shipping and transportation costs as well as liability for the shipment to and from NIST. The Contractor shall be responsible for providing a RMA or other information authorizing return of the shipment to Contractor's facility prior to the shipment.

Furthermore, if the off-site repair of a component is projected to exceed 14 calendar days including shipping and transportation, the Contractor shall make commercially reasonable efforts to provide a temporary replacement component to maintain operation of the tool.

Regular Business Hours Regular business hours for Gaithersburg, MD are Monday through Friday, 8:00 am to 5:00 pm Eastern Time, excluding Federal holidays and NIST closures.

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PERIOD OF PERFORMANCE

The period of period is defined as follows for the individual line items:

• Line Item 0001: HT-IS Indenter (including delivery of instrument, installation and training): 40 weeks from the date of award.

• Line Item 0002: Service Contract -Year 1: 12 months from the date of award.

• Line Item 0003: Service Contract -Year 2: 12 months from the date of award.

• Line Item 0004: Extended Warranty - Year 1:12 months from the date of award.

• Line Item 0005: Extended Warranty - Year 2:12 months from the date of award.

V. DELIVERY TERMS

Delivery shall be F.O.B Destination (or equivalent incoterms, such as DDP) and shall occur in accordance with the delivery due dates provided in the below table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

The contractor shall deliver all Line Items to:

National Institute of Standards and Technology Shipping and Receiving 100 Bureau Drive, Building 301 Gaithersburg, MD 20899 C/O/ POC Yvonne Gerbig Building 217

VI. INSTALLATION

The system shall be installed by the Contractor and meet contract specifications no later than 21 days after delivery. Installation, at a minimum, shall include uncrating/unpackaging of all equipment, rigging, set-up and hook-up of the system, demonstration of all specifications, and removal of trash. Onsite installation and demonstration shall be done at NIST, Gaithersburg, MD- Building 223 (lab A126).

VII. TRAINING

The contractor shall conduct training session for up to 2 users at NIST. The training shall provide a thorough demonstration of all system/solution functions, maintenance, data administration, and basic troubleshooting. The training may be completed at NIST Monday – Friday during the operating hours of 8:00 am to 5:00 pm Eastern Time (excluding Federal holidays and NIST closures) immediately after installation and

7 | P a g e demonstration of specifications and must be completed no later than 21 days after installation.

VIII. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in the specific FAR clause that allows the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST POC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 20 working days after completion of training on the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

IX. WARRANTY

The contractor shall warranty the entire system for a period of a minimum of one (1) year after acceptance of the equipment and acceptance by the TPOC and shall be in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government and at a minimum shall include the following:

a. The Contractor shall warrant that the new equipment will be free of defects in material and workmanship for a period of one (1) year commencing on final acceptance or ninety (90) days from shipping, whichever occurs first.

b. The warranty shall cover costs of parts and labor (including, where applicable, field service labor and travel required to restore the equipment to normal operation).

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c. The Contractor shall warrant that replacement parts will be new or of equal functional quality ad warranted for the remaining portion of the original warranty or ninety (90) days, whichever is longer.

X. PAYMENT SCHEDULE

The Contractor will be paid, in accordance with the payments clause in the contract and as otherwise noted in this document, upon receipt of a proper invoice. The payment schedule is defined as follows:

1. 100% after installation and acceptance by the POC of fully installed system, AND

2. After successful demonstration by the instrumentation that it performs in accordance with the requirements set forth in this document, AND

3. After successful training of up to 2 users at NIST.

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer.

Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

XI. REQUIREMENTS FOR CONTRACTOR PERSONNEL

Personnel Qualifications: The Contractor shall provide Contractor-trained engineers or technicians. Contractor personnel shall have at least two (2) years of experience.

Safety: The Contractor employee must be responsible for knowing and complying with all installation safety prevention regulations. Such regulations include, but are not limited to, general safety, fire prevention, and waste disposal.

Security: NIST is a restricted campus. An identification badge is required for access for entry into buildings and is shown to the armed Security Police when entering the campus.

Identification Badges: Contractor employees must comply with NIST identification and access requirements. Each Contractor employee must wear a visible identification badge provided by the NIST Security Office.

Vehicle Registration: All Contractor employees must register their vehicles with the NIST Security Office to gain access to the campus. A valid driver’s license, Government-furnished civilian ID, proof of insurance and current registration must be presented to the NIST Security Office, at which time a NIST vehicle pass will be issued.

The pass must be displayed on the vehicle in accordance with NIST Security Office instructions.

Media Inquiries: The Contractor shall not respond to any media inquiries. Any inquiries from the media shall be immediately relayed to the NIST COR and/or Contracting

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Officer (CO). There shall be no interviews, comments, or any other response without the knowledge and approval of the NIST COR or Designated Government Official.