Attachment 1-Statement of Work (SOW).pdf

STATEMENT OF WORK

Title: High Resolution Confocal Raman – Photoluminescence Microscope

Lab: Materials Measurement Laboratory/Applied Chemicals and Materials Division (647)

I. BACKGROUND INFORMATION

As part of the CHIPS Act, researchers at the National Institute of Standards and Technology (NIST) are engaged in metrology research and development to promote innovation and industrial competitiveness in U.S. semiconductor device manufacturing.

NIST has identified seven Grand Challenges in metrology research and development that require critical attention. As part of efforts to advance metrology tools and measurement science for Metrology for Materials Purity, Properties, and Provenance (Grand Challenge 1), NIST requires instruments for measurement of semiconductor microelectronic devices and their constituent materials.

Pursuant to the CHIPS mission, the Grand Challenge 1 Program’s strategy is to develop measurement technologies, properties data, and standards focused on defect and contaminant identification to support uniform materials quality and traceability across the supply chain. One specific effort within this program performs research and development to enable evaluation of two-dimensional and wide bandgap materials to further device reliability. This work is led by NIST’s Applied Chemicals and Materials Division, which characterizes the properties and structures of industrially important materials.

As part of this program to characterize two-dimensional and wide bandgap materials, NIST requires a High-Resolution Confocal Raman-Photoluminescence microscope to allow for optical measurement capabilities.

II. PURPOSE

The work under this contract is: to supply, install, and train new users on a High- Resolution Confocal Raman- Photoluminescence (PL) Microscope for the Applied Chemicals and Materials Division. This microscope will allow for the identification and characterization of 2D materials and their defects as needed for the CHIPS 1.01 project on Evaluation of 2D and WBG Material Quality toward Device Reliability. This equipment adds the ability to do chemical characterization at the same time testing occurs to allow for quick identification of detects. Addressing defects as they happen will allow for higher manufacturability and reliability in these innovative next generation electronics.

This microscope is critically necessary to establish 2D materials are present and their unique chemical state in these electronic test structures. NIST Boulder has no other Raman-PL microscopes on site and thus, has no spectroscopic capabilities that this microscope will deliver. Shipping samples to NIST Gaithersburg can lead to weeklong delays in the process and critical sample damage due to shipping, exposure to air/humidity/temperature changes in shipping. This project has key deliverables in FY25 and a CRADA in process with a large manufacturer to work on these deliverables which require agile responses to industry samples. This equipment will offer key

2 | P a g e measurements on industry samples and allow for correlation with NIST Boulder techniques of STEM in SEM (unique to Boulder) and conductive AFM to address high impact questions critical to establishing US industry as leaders in this technology.

The Contractor shall deliver a Raman-PL microscope with 532 nm and 785 nm laser lines, high quality detectors, automated spectroscopic mapping of samples, appropriate software for sampling and analysis, and any required isolation tables, inclusive of FOB Destination delivery, installation, warranty and training, and option line items.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered.

The use of “gray market” components are not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001:

Description: High Resolution Confocal Raman- Photoluminescence (PL) Microscope Quantity: 1

A. Technical Specifications

a. High resolution confocal microscope with all associated gradings, multichannel CCD detector, and spectroscopy software for analysis, Czerny-turner spectrograph with all reflective optics, computer laser power selection working from 200 – 2200 nm, adjustable kinematic mount for Rayleigh rejection filter, motorized exchange of excitation wavelengths, software controlled continuously adjustable confocal pinhole, 800 nm focal length astigmatic flat field spectrograph,1 inch 1024 x 2546 pixels CCD, open space microscope,

b. 532 nm narrow bandwidth 100 mW/1MHz laser with edge and bandpass filters for Raman measurements from 50 cm-1 and photoluminescence measurements up to the CCD limit with all necessary coupling motorized optics,

c. 785 nm narrow bandwidth 100 mW laser with edge and bandpass filters for Raman measurements from 50 cm-1 and photoluminescence measurements up to the CCD limit with all necessary coupling motorized optics,

d. Fully motorized XYZ stage (X = 75 mm, Y = 50 mm) with repeatability <= 1 µm, accuracy +/- 1 µm, resolution (minimum step size) = 50 nm, Z resolution 0.01 µm, including positioning joystick, external controller, integrated software package and Raman autofocus capability

e. Ultrafast Raman imaging with scan speed of < 5 ms per point, continuous improvement in S/N ratio over time, and extended spectral range,

f. Video Raman matching to attain perfect spatial calibration for high precision Raman, 3 | P a g e

g. Glass stage insert

h. Multichannel, deep cooled EMCCD detector, front illuminated UV CCD, software and triggering options applicable for 200 – 1100 nm

i. Mechanical Adaption for an additional multichannel detector with motorized detector exit

j. 600 gr/mm holographic grating blazed at 500 nm (spectral range 360 –

1250 nm) with pre-aligned holder, calibration and tests

k. 1800 gr/mm holographic grating for the range 450 – 850 nm with pre-aligned holder, calibration and tests

l. Microscope visualization with LED fibered source (150 W halogen), and

Koehler illumination system with Abbe condenser (BrightField)

m. Microscope objectives including 5X visible objective NA = 0.10 WD 19.6 mm, 10x visible objective NA = 0.25 WD = 10.6 nm, 50X visible objective NA = 0.75 WD = 0.37 mm, 100x visible objective NA =0.90 WD 0.21 mm, 50X LWD visible objective NA 0.50 WD 10.6 mm, 50X NIR objective NA =0.65 WD from 4.8-5.1 mm correction up to 1.2 mm,

n. Side port for AFM coupling with motorized switching mirror and covered beam path,

o. Spectroscopic software for instrument control, data acquisition, analysis and display with licenses for running instrument as well as separate licenses for data processing.

p. Autofocus capabilities while navigating the sample and producing ‘flat’ micrograph and surface topography of a rough sample

q. Installation and operational training at the worksite

r. Full support program including instruction in theory and practice of Raman

Spectroscopy, ongoing training options, one-on-one discussions with technical experts and additional consultation for 2 years.

s. UV-visible-NIR area scanning mode and stepping mode that can record large area of sample and stepping mode with a minimum step size of 50 nm,

t. 300 gr/mm grating blazed at 600 nm with pre-aligned holder, calibration and tests

u. 2400 gr/mm holographic grating blazed at 400 nm (spectral range 250 – 800 nm) with pre-aligned holder, calibration and tests

v. Internal sample reference for intensity and spectral correlation.

Line Item 0002: OPTION LINE ITEM Description: Optical Table Quantity: 1

A. Technical Specifications

a. Passively damped optical table with pneumatic isolated frame that is 4 ft by 8 ft with 4.8 mm skin and two tuned dampers

Line Item 0003: OPTION LINE ITEM Description: Bandpass and Notch Filters at 532 nm Quantity: 1

4 | P a g e

A. Technical Specifications

a. A set of bandpass and notch filters at 532 nm for ultra-low frequency measurements (down to 10 cm-1).

Line Item 0004: OPTION LINE ITEM Description: Bandpass and Notch Filters at 785 nm Quantity: 1

A. Technical Specifications

a. A set of bandpass and notch filters at 785 nm for ultra-low frequency measurements (down to 10 cm-1).

Line Item 0005: OPTION LINE ITEM Description: Polarized Raman Kit Quantity: 1

A. Technical Specifications

a. A set of visible and NIR half wave plate for 90-degree rotation of the incoming laser polarization and a visible analyzer to analyze the Raman signal for the range (400-700 nm) and (700 -1100 nm) with holders and fixed scrambler (230 -2500 nm) for complete depolarization of the Raman signal

Line Item 0006: OPTION LINE ITEM Description: Heating and Freezing Stages Quantity: 1

A. Technical Specifications

a. A thermometric cell working from -196 °C to 600 °C controlled by software with the following specifications:

i. Sample area: 22 mm diameter

ii. Light aperture: 2 mm with 16 mm, X, Y sample manipulation

iii. Stage body size: 137 x 92 x 22 mm

iv. Gas tight chamber for atmospheric control

v. Water cooled stage body for high temperature measurements

vi. LN2 cooing device for low temperature measurements

Line Item 0007: OPTION LINE ITEM Description: AFM-Raman/TERS/TEPL Upgrade Quantity: 1

A. Technical Specifications

a. Scanning probe microscope and optical coupling platform with full performance SPM capabilities including contact, semi-contact, non-contact, lateral force microscopy, piezo force microscopy, phase contrast, magnetic force microscopy, single pass MFM, electrostatic force microscopy, single force electrostatic force microscopy, scanning kelvin probe microscopy,scanning capacitance microscopy, nanolithography

5 | P a g e

b. Top/side optical access for external laser illumination with objective lens up to 100 xx for colocalized optical measurements

c. Low vibration sensitive setup

d. Motarized XY stage

e. Registration AFM system noise less than 0.1 nm

f. Fully automated AFM feedback laser in the visible NIR range (532, 633,m

638, 785 nm) using a spectrometer with a silicon CCD,

g. Integrated USB color camera

h. TERS read setup for tip enhanced Raman scattering with 100x objective

i. 10x 0.28 NA objective

j. 100x 0.7 NA objective

k. Setup tips for TERS (10 boxes of various tips)

l. Set of test samples

m. Conductive unit for low current conductive AFM. 100 fA +/- 10 uA, 3 current ranges (1 nA, 100 nA and 10 uA) switchable from program, voltage range 10 +/- 7V, RMS current noise 60 fA for 1 nA range, conductive Kelvin probe mode switchable from program

n. Stand for conductive AFM unit

o. Signal access module that allows the user to apply external signals to the4 instrument as well as output a number of internal instrument signals to external devices.

p. Microscope visualization analyzer and two polarizers with 150W white lamp.

q. Source meter unit for photocurrent, photovoltage and electroluminescence applications with DC power source 200 mV – 200V, true current source 10 nA – 7A with pA precision, IV capability and trigger controller

r. Automated DLC coating analysis

s. Evaluation kit for correlative measurements of SEM -Raman

IV. SCHEDULE OF DELIVERABLES

Define all deliverables and indicate (1) the quantity desired; (2) the format in which each deliverable is to be supplied; (3) the delivery date (based on the number of weeks/days); (4) the place of delivery. The context of each deliverable shall be clear.

Keep in mind that every task does not require a deliverable. Deliverables are always tangible items (i.e., report, minutes, etc.)

Complete the table providing the information for all the tasks identified above. Add/delete cells as needed.

Deliverable

Number Description Quantity Due Date

Place of Delivery 1 High Resolution

Confocal Raman- Photoluminescence (PL) Microscope

No later than 150 days after receipt of order.

NIST Boulder

6 | P a g e

2 Optical table 1 No later than 150 days after receipt of order.

NIST Boulder

3 Bandpass and Notch Filters at 532 nm

1 No later than 150 days after receipt of order.

NIST Boulder

4 Bandpass and Notch Filters at 785 nm

1 No later than 150 days after receipt of order.

NIST Boulder

5 Polarized Raman Kit

1 No later than 150 days after receipt of order.

NIST Boulder

6 Heating and Freezing Stages

1 No later than 150 days after receipt of order.

NIST Boulder

7 AFM-

Raman/TERS/TEPL Upgrade

1 No later than 150 days after receipt of order.

NIST Boulder

8 Installation of Raman-PL Microscope and accessories

1 No later than 150 days after receipt of order

NIST Boulder

9 Acceptance of Raman-PL microscope

1 No later than 30 days after installation

NIST Boulder

10 Training on Raman- PL microscope

1 No later than 30 days after installation

NIST Boulder

Standards of Acceptance: The NIST POC or COR shall review all the above deliverables and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within 1 week of receipt of deliverable. This section applies to deliverables which must be reviewed and approved for acceptances (e.g., draft plans, drawings, etc.)

PLACE OF PERFORMANCE

All work, including installation, site acceptance, and training, shall be performed at NIST (325 Broadway, Boulder CO 80305) in either Building 2 or Building 81. The government will provide access to the Building for the contractor for the entire period of performance

7 | P a g e of this contract. The day-to-day supervision and direct control over the work performed by the on-site contractor personnel shall be the sole responsibility of the contractor.

Regular Business Hours (usually pertains if work is being performed onsite at NIST; otherwise, delete if not needed).

Regular business hours are Monday through Friday, (8:00 am to 4:00 pm) Mountain Time, excluding Federal holidays and NIST closures.

PERIOD OF PERFORMANCE

Up to 105 days from the date of award, not including warranty or extended service agreement options.

V. DELIVERY TERMS

Delivery shall be F.O.B Destination (or equivalent incoterms, such as DDP) and shall occur in accordance with the delivery due dates provided in the below table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

The contractor shall deliver all Line Items to:

National Institute of Standards and Technology Attn: TPOC 325 Broadway Boulder, CO 80305

To be clear, delivery is not complete until the items have been placed inside of the laboratory room designated by a NIST representative. Delivery to a loading dock does not constitute a completed “Delivery”.

VI. INSTALLATION

The system shall be installed by the Contractor and meet contract specifications no later than 30 days after delivery. Installation, at a minimum, shall include uncrating/unpackaging of all equipment, rigging, set-up and hook-up of the system, demonstration of all specifications, and removal of trash. Onsite installation and demonstration shall be done at NIST, Boulder, CO – Building 2 or Building 81. All installation requirements are identified below:

A. Contractor shall provide all personnel necessary for installation B. Contractor shall provide all tools necessary for installation

8 | P a g e

VII. TRAINING

The contractor shall conduct on-site training session for up to five (5) users at NIST Boulder. The training shall provide a thorough demonstration of all system/solution functions, maintenance, data administration, and basic troubleshooting. The training may be completed at NIST Monday – Friday during the operating hours of 8:00 AM to 5:00 PM Mountain Time (with the exception of Federal holidays and unanticipated closures) immediately after installation and demonstration of specifications and must be completed no later than thirty (30) days after installation. Further training requirements are identified below:

a. The training shall include an overview of all safety features of the instrument and safe operating procedures.

b. Additional training shall be made available to NIST staff for 2 additional years after installation including theory and practical aspects of Raman-PL spectroscopy, one-on-one discussions with Contractor experts (virtual or in-person) on experiments and data analysis, and visits to training facilities or attendance at virtual training applications.

c. The contractor shall supply the initial installation manual, utility requirements, full system design schematics, and a diagram showing the tool footprint, measurements, and any anticipated wall penetrations for the system at the time of award.

VIII. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in the specific FAR clause that allows the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

1. At the NIST site the Contractor shall acquire data on the NIST instrument on contractor supplied test specimens including 2D material samples. The data shall be required to demonstrate conformance with the performance specifications defined herein.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST POC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent

9 | P a g e defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 30 days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

IX. WARRANTY

The contractor shall warranty the entire system for a period of a minimum of 1 year after full acceptance and shall be in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government and at a minimum shall include the following:

1. Replacement of any defective hardware components such as cabling, electronic components, vender-supplied optics, or mechanical components.

2. Any upgrades or patches to control, operation, or data analysis software that are released during the period of warranty.

X. PAYMENT SCHEDULE

The Contractor will be paid, in accordance with the payments clause in the contract and as otherwise noted in this document, upon receipt of a proper invoice.

1. 100% after installation and acceptance by the POC of fully installed system, AND

2. After the successful completion of the testing requirements set forth in this document under section set forth in this document, AND

3. After successful demonstration by the instrumentation that it performs in accordance with the requirements set forth in this document, AND

4. After completion of training requirements set forth in this document under section VII.

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer.

Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

XI. CYBERSECURITY PRIVACY REQUIREMENTS

10 | P a g e

NIST seeks a solution that provides security and privacy protection consistent with requirements defined by applicable federal laws, regulations, policies, and standards (e.g., the Federal Information Security Management Act (FISMA), OMB Circular A-130, and FIPS Publication 200). The solution provider (including subcontractors) may meet these requirements through various means, including but not limited to FedRAMP authorization, current third-party assessments (e.g., SSAE, PCI), and/or responses to NIST special publication control set SP 800-171.

Minimally Acceptable Controls

• System security plan describing physical, technical, and administrative controls implemented to protect systems and sensitive personally identifiable information

(SPII).

• IT management processes to establish and manage secure configuration baselines including routine patching for all operating systems and applications.

• Access to SPII is restricted to those with a need to know. Personnel with access to SPII have background investigations performed (e.g. criminal, financial etc.), and are trained on secure handling of SPII.

• Access Controls for SPII meet or exceed industry best practices for access and identification control including, but not limited to, connectivity to servers and databases, multi-factor authentication for remote accesses for administration, secure configurations for any devices accessing the system, and strong physical security for any place where the data is accessed.

• The solution supports multifactor authentication for users and/or supports integration with customer federation services for Single-Sign capability.

• Processes for scanning on a continual basis for vulnerabilities and proper configurations for all aspects of the system, as well as processes for timely mitigation of findings.

• Auditing and Incident Response processes including customer notification of suspected or actual incidents and logging with sufficient information to perform forensics on any incident. Processes for notifying and providing appropriate mitigations, including but not limited to credit monitoring services, for subsidy applicants in the event of suspected or actual incidents.

• SPII is encrypted in transit using TLS 1.2 or better and encrypted at rest in all places the SPII is stored. All encryption algorithms and modules are FIPS 140- 2/140-3 validated.

If unable to meet any of the requirements listed above, the solution provider may provide details of mitigations or alternative protections in place to ensure the appropriate handling and protection of SPII.

If the solution provider provides services to other Federal agencies, provide a general description of the security risk management approach and client point of contact.

11 | P a g e

XII. REQUIREMENTS FOR CONTRACTOR PERSONNEL

Safety: The Contractor employee must be responsible for knowing and complying with all installation safety prevention regulations. Such regulations include, but are not limited to, general safety, fire prevention, and waste disposal.

Security: NIST is a restricted campus. An identification badge is required for access for entry into buildings and is shown to the armed Security Police when entering the campus.

Identification Badges: Contractor employees must comply with NIST identification and access requirements. Each Contractor employee must wear a visible identification badge provided by the NIST Security Office.

Vehicle Registration: All Contractor employees must register their vehicles with the NIST Security Office to gain access to the campus. A valid driver’s license, Government-furnished civilian ID, proof of insurance and current registration must be presented to the NIST Security Office, at which time a NIST vehicle pass will be issued.

The pass must be displayed on the vehicle in accordance with NIST Security Office instructions.

Media Inquiries: The Contractor shall not respond to any media inquiries. Any inquiries from the media shall be immediately relayed to the NIST COR and/or Contracting Officer (CO). There shall be no interviews, comments, or any other response without the knowledge and approval of the NIST COR or Designated Government Official.