Attachment 1 - Statement of Work (SOW).pdf

STATEMENT OF WORK

Title: Metrology of Purity and Contaminants in Solid Materials

Lab: Inorganic Chemical Metrology Group (ICMG)

I. BACKGROUND INFORMATION

The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps, NIST will conduct the measurement science, or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing.

The National Institute of Standards and Technology (NIST), Inorganic Chemical Metrology Group (ICMG) performs elemental measurements using a variety of instrumental methods. With these methods, we fulfill the customer needs through the provision of NIST Standard Reference Materials (SRMs) and development of methods used for the value assignment of elemental data to SRMs. For this project, we will develop new SRMs, Reference Materials (RMs), and Research Grade Test Materials (RGTMs) of high-purity solids currently lacking in chips manufacturing. This will enable more effective, efficient, and comparable characterizations of source materials, as well as process control improvements.

To achieve these goals, we will develop new NIST capabilities laser-based analytical methods, specifically a tandem Laser Induced Breakdown Spectroscopy (LIBS) and Laser Ablation-Inductively Coupled Plasma-Mass Spectrometry (LA-ICP-MS) instrument. Research and development will be conducted in our laboratories on the Gaithersburg campus. We will provide spatial ,depth profiling and elemental content information materials. We will measure the impurities in the semiconductors and evaluate the homogeneity of these materials.

II. PURPOSE

Purity is critical to the semiconductor industry and the reliable production of chips manufacturing. The industry needs the ability to accurately and reproducibly characterize the purity and to quantify potential contaminants in bulk solids and on otherwise clean surfaces. We will be purchasing a tandem Laser Induced Breakdown Spectroscopy (LIBS) and Laser Ablation (LA) instrument to accomplish this task. The LIBS/LA instrument will be used for spatial analysis and depth profiling to determine the heterogeneity of the RGTMs, while also allowing the fast screening of the RGTMs to identify potential contaminants. LIBS also has the capacity to measure almost all the elements in the periodic table simultaneously, making it a powerful screening tool.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new, existing commercial “off the shelf” products. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components are not

2 | P a g e acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001: Laser Induced Breakdown Spectroscopy (LIBS) requirements Description: Instrument for elemental analysis and laser ablation Quantity: one (1) A. System

a. Must be a benchtop LIBS system that can be situated on a manufacture’s pullies cart with locking wheels and stabilization of the instrument during analysis.

b. Must have a UV laser that operates at nominally 20 amp and 120 volt AC power.

c. The laser must have the following characteristics: > 5 mJ pulse energy, < 6 ns pulse width, a flat energy profile, fluence (laser power) of 5 – 25 J/cm2, stabilized thermally and mechanically, and a pulse repetition rate of 1 – 20 Hz. A laser of 193 nm would be preferred.

d. The laser must be computer controlled to produce a single shot, burst or continuous output while scanning, raster scanning or positioned at a fixed point; software must be capable of controlling the laser and XYZ stage movement to maintain constant fluence.

e. The laser spot size must be able to be reduced to 5 µm diameter and increased to 100 µm; it must have variable aperture wheel for selection of any spot size within this range. The ability to have different options for analysis spot shape will be given additional consideration.

f. The laser energy must be continuously adjustable, and computer controlled with the ability to measure the laser energy. Adjustments and presets for optimal settings for LIBS and LA on a variety of surface types will be given additional consideration.

B. Microscope/ Chamber/ Gas

a. The laser must be a Class-1 that is fully interlocked for safe operation.

b. The microscope must have an imaging video camera that can also provide still pictures with the following requirements: variable optical zoom (60x magnification) with parfocal magnification that must clearly resolve a 2 µm diameter particle, wide field of view, and capable of mosaic images.

c. Lighting must be computer controlled high intensity LED, reflected and transmitted.

d. Must have a precision stage with submicron resolution.

e. Must have a high accuracy/precision XY stage 10 cm x 10 cm with < 1 µm resolution and return accuracy of 2-4 µm; also, Z travel computer control and documented XYZ position in metafile.

f. Must have a second software-controlled mass flow controller for an additional carrier or makeup gas.

g. Must have a two-volume ablation cell (chamber) to reduce the volume with the following characteristics: exhibit signal homogeneity (spatial reproducibility) across the entire range of cell to 2 % RSD; have no interference between stage movement and collection efficiency; have zero

3 | P a g e stage hesitation across the stage; have fast washout times (< 1 s to return to background). This will allow for quick washout and transfer of particulate to an ICP-MS after LIBS analysis.

h. Sample chamber must accommodate large format (10 cm x 10 cm) drawer and include at least one insert to accommodate special samples.

i. Chamber must include high intensity LED lighting.

C. Hardware/ Software

a. System must have a computer that operates Windows 11.

b. Must include all necessary hardware to connect directly to an ICP-MS system with minimal effort by the user. Additional consideration will be given if the laser system has the ability to have laser firing controlled by ICP-MS software.

c. Must have specialized software to control laser parameters, sample viewing, stage position, gas routing, triggering ICP-MS and fully automated ablation process.

d. Must be capable of combining XY-timestamp files of position with corresponding ICP-MS timestamp signal files to map either a single image or mosaic using IOLITE software or equivalent (included in the price). Software updates that automate this process must be provided at no charge. The computer system must include all necessary hardware (e.g., RAM, hard drive, video cards, IEEE adapters, etc) and software to control the instrument, monitor all adjustable mechanical and electronic parameters, and capture and process data. A “full install” CD and/or memory stick for the operating system must be provided.

e. Software must be capable of real time monitoring and control of all adjustable mechanical, parameters including gas flows, laser energy, spot size, XYZ stage position, and other relevant parameters.

f. The software system supplied with the instrument must be supported for a minimum period of five years from date of delivery. If the operating system is changed or upgraded within five years, the supplier will provide, at no additional cost, all software and hardware necessary to accommodate an upgrade to a new operating system.

g. The instrument software will be provided on CD and/or other convenient media (e.g., memory stick) so that software can be reloaded in the event of computer malfunction or accidental corruption of software.

h. Two (2) site licenses (dongles) must be provided to permit offline data processing and access for the purpose of processing data from a remote location, required only if one installation is allowed per license.

i. Data export must include all relevant data and machine parameters to permit full offline processing of the data that capture the parameters of the instrument at the time of samples analysis.

j. An index of functions and protocols used by the software to treat the raw data must be provided. All relevant algorithms or full and complete reference to published methodologies must be provided. This will include baseline corrections; dead-time corrections; fractionation correction models; gain

4 | P a g e corrections; yield corrections; data outlier discrimination models; peak centering routine and mass calibration.

k. Instrument software must be compatible with current industry standard laser ablation.

l. The software and data processing algorithms must include procedures for time-resolved isotopic analyses (e.g., using laser ablation, chromatographic separation systems and other sources of transient signals).

D. Operating Environment

a. NIST requires that the instrument be supplied ready for use and be compatible with United States standard electrical power. If transformers are required for operation with U.S. standard electrical power, such transformers and line conditioners shall be included with the instrument.

E. Documentation

a. Documentation and manuals shall be provided describing all aspects of operations, data reduction methods, data calculations, maintenance, and troubleshooting of every sub-system of which the instrument is comprised.

Software refers to all instrument control, host computer to instrument computer/controller interface, and data acquisition, reduction, and display functions. One electronic (pdf) and one paper (hardcopy) version of all manuals shall be provided.

Line Item 0002: Option line items Quantity: One (1)

A. Consumables

a. The contractor shall provide a one-year supply of consumables and expendables including, at a minimum, a replacement set of optics, gas for the laser if applicable, and any items that are routinely consumed during regular use.

B. Service Contract

a. The contractor shall provide on-site field service (commencing after the one-year warranty) for preferably 2 years after receipt and acceptance.

Service shall be provided within 5-10 business days of the initial telephone call from the end user. The service shall include an on-site visit covering all travel, labor, related parts (parts include general parts of the instrument, and consumables), shipping, one preventive maintenance visit per year, unlimited telephone support and software upgrades.

IV. SCHEDULE OF DELIVERABLES

Complete the table providing the information for all the tasks identified above.

Deliverable

Number Description Quantity Due Date

Place of Delivery 1 Laser Induced Breakdown

Spectroscopy (LIBS) instrument capable of laser ablation

One (1) No later than 90 calendar days after receipt of order.

NIST

Gaithersburg, MD

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2 Manufacturer’s cart One (1) No later than 90 calendar days after receipt of order.

NIST

Gaithersburg, MD

3 Windows Workstation One (1) No later than 90 calendar days after receipt of order.

NIST

Gaithersburg, MD

4 Operations and maintenance manual for the LIBS

One (1) No later than 90 calendar days after receipt of order.

NIST

Gaithersburg, MD

5 Power supply compatible with standard US voltage

One (1) No later than 90 calendar days after receipt of order.

NIST

Gaithersburg, MD

6 Power conditioner One (1) No later than 90 calendar days after receipt of order.

NIST

Gaithersburg, MD

7 Consumables Kit One (1) No later than 90 calendar days after receipt of order.

NIST

Gaithersburg, MD

8 Installation Once No later than 30 calendar days after receipt of instrument.

NIST

Gaithersburg, MD

9 Training of NIST personnel at NIST Once No later than 60 calendar days after receipt of instrument.

NIST

Gaithersburg, MD

10 Warranty One (1) year

Commence upon successful installation and meeting specifications.

NIST

Gaithersburg, MD

Standards of Acceptance: The NIST POC or COR shall review all the above deliverables and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within 2 weeks of receipt of deliverable. This section applies to deliverables which must be reviewed and approved for acceptances (e.g., draft plans, drawings, etc.).

PLACE OF PERFORMANCE

The instrument is to be installed in Building 227 Room B329 at the NIST Gaithersburg, MD

REGULAR BUSINESS HOURS

Regular business hours are Monday through Friday, (revise as applicable 8:00 am to 5:00 pm) Eastern Time, excluding Federal holidays and NIST closures, and must be coordinated with the NIST Technical Point of Contact (TPOC).

PERIOD OF PERFORMANCE

The instrument will be received within 3 months of the date of purchase.

V. DELIVERY TERMS

The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery

6 | P a g e specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

The contractor shall deliver all Line Items to:

National Institute of Standards and Technology Shipping and Receiving 100 Bureau Drive, Building 301 Gaithersburg, MD 20899 C/O/ POC/COR (Name and Building Number): Korina Menking-Hoggatt Building 227/B328

VI. INSTALLATION

The system shall be installed by the Contractor and meet contract specifications no later than 30 days after delivery during normal business hours. Installation, at a minimum, shall include uncrating/unpackaging of all equipment, rigging, set-up and hook-up of the system, demonstration of all specifications, and removal of trash. Onsite installation and demonstration shall be done at NIST, Gaithersburg, MD- Building 227. All installation requirements are identified below:

• Adequate power supply as specified by the contractor.

• Proper ventilation for the instrument (ICP-MS only) as specified by the contractor.

• Access to house gas lines or gas cylinders determined by the instrument purchased.

• Proper laboratory space for the instrument determined by the instrument purchased.

VII. TRAINING

The contractor shall conduct training session for up to four (4) users at NIST. The training shall provide a thorough demonstration of all system/solution functions, maintenance, data administration, and basic troubleshooting. The training may be completed at NIST Monday – Friday during the operating hours (see REGULAR BUISNESS HOURS section above and will be coordinated with the NIST Technical Point of Contact (TPOC) to ensure maximum availability of NIST personnel. Training is to be completed 60 days after delivery..

VIII. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in the specific FAR clause that allows the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

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Performance Tests:

• Visual-Physical check at NIST laboratory for adherence to design specifications.

• Performance check at NIST will be to demonstrate that no damage or misalignment issues arose during transportation and installation in the laboratory.

• The tests will be performed as soon as the instrument is installed and ready.

• The following specific acceptance criteria will be evaluated. Criteria must be satisfactorily met prior to acceptance of the system by NIST.

Offerors must meet the following performance specifications by supplying data taken on the instrument being delivered to NIST. The data is intended to be a baseline for instrument performance and, as such, may be taken at the factory during assembly and final test. On-site measurements can therefore be specifically focused on measurements used to test or benchmark that no damage or misalignment issues have arisen due to transportation and installation.

A visual inspection of the equipment will be performed by the NIST POC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

IX. WARRANTY

The contractor shall warranty the entire system for a period of a minimum of 1 year after FULL ACCEPTANCE of the equipment and shall be in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government and at a minimum shall include the following:

• Unlimited telephone/e-mail support for questions regarding operation

• All costs including parts, shipping, labor, travel, and other expenses necessary to replace or repair the system will be borne solely by the contractor at no additional cost to the U.S. Government.

• All defects in materials and workmanship for a period of one year from the date of final acceptance by the Government.

• The warranty shall commence upon successful completion of delivery, installation, training and demonstration of all required specifications.

X. PAYMENT SCHEDULE

Define how the contractor will be paid if more information besides what is included in the payment clause is needed. If firm-fixed-price construction, for example, it may warrant further definition.

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The Contractor will be paid, in accordance with the payments clause in the contract and as otherwise noted in this document, upon receipt of a proper invoice.

• 100% after installation and acceptance by the POC of fully installed system, AND

• After the successful completion of the testing requirements set forth in this document under section set forth in this document, AND

• After successful demonstration by the instrumentation that it performs in accordance with the requirements set forth in this document.

XI. REQUIREMENTS FOR CONTRACTOR PERSONNEL

Safety: The Contractor employee must be responsible for knowing and complying with all installation safety prevention regulations. Such regulations include, but are not limited to, general safety, fire prevention, and waste disposal.

Security: NIST is a restricted campus. An identification badge is required for access for entry into buildings and is shown to the armed Security Police when entering the campus.

Identification Badges: Contractor employees must comply with NIST identification and access requirements. Each Contractor employee must wear a visible identification badge provided by the NIST Security Office.

Vehicle Registration: All Contractor employees must register their vehicles with the NIST Security Office to gain access to the campus. A valid driver’s license, Government-furnished civilian ID, proof of insurance and current registration must be presented to the NIST Security Office, at which time a NIST vehicle pass will be issued.

The pass must be displayed on the vehicle in accordance with NIST Security Office instructions.

Media Inquiries: The Contractor shall not respond to any media inquiries. Any inquiries from the media shall be immediately relayed to the NIST COR and/or Contracting Officer (CO). There shall be no interviews, comments, or any other response without the knowledge and approval of the NIST COR or Designated Government Official.