Attachment 1 - Statement of Work (SOW).docx

STATEMENT OF WORK

67 GHz microwave source Physical Measurement Laboratory

I. BACKGROUND INFORMATION

The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps, NIST will conduct the measurement science, or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing.

With this goal in mind, the Photonics and Optomechanics Group is seeking a microwave source, or signal generator, for characterizing microwave acoustic devices. This source will be used to electrically drive piezoelectric microwave acoustic resonators at frequencies up to 67 GHz. Electrical and optical measurements will be performed on these devices to better understand their dynamics, loss mechanisms, and material properties.

II. PURPOSE

The project is investigating the dynamics of piezoelectric microwave acoustic resonators and their materials at unprecedented frequencies. Electrical and optical measurements are being used to measure resonance frequencies, mode shapes, acoustic velocities, loss mechanisms, and nonlinear behavior. A 67 GHz microwave source will be used to excite these resonators with varying frequency and power while measuring the output current and displacement of the resonators. Swept-frequency measurements will provide a complete analysis of microwave acoustic resonators and provide critical information needed to develop the next generation of 5G and millimeter-wave filters and oscillators.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components are not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001:

67 GHz microwave source Quantity: 1

A. Key Capabilities

1. A digital display that shows all relevant operational parameters, including frequency, power, and frequency sweep information

2. A manual keypad interface for setting operational parameters.

3. A remote control interface including a USB communications port and communications protocols for setting operational parameters.

4. Upgradeable capabilities for amplitude, frequency, and phase modulation. These capabilities are not needed at this time but the instrument must be capable of the upgrade.

B. Technical Specifications

1. RF output connector: 1.85 mm

2. RF output connector impedance: 50 ohms

3. Frequency range: 250 kHz to 67 GHz or higher

4. Frequency resolution: at least 0.001 Hz

5. Phase offset resolution: at least 0.01 deg

6. Maximum output power at specified frequencies:

a. At least 23 dBm at 3 GHz

b. At least 20 dBm at 15 GHz

c. At least 18 dBm at 30 GHz

d. At least 15 dBm at 65 GHz

7. Specified single sideband phase noise:

a. ≤ -97 dBc/Hz @ 1 GHz for an offset of 10 Hz

b. ≤ -147 dBc/Hz @ 1 GHz for an offset of 10 kHz

c. ≤ -71 dBc/Hz @ 20 GHz for an offset of 10 Hz

d. ≤ -122 dBc/Hz @ 20 GHz for an offset of 10 kHz

e. ≤ -63 dBc/Hz @ 50 GHz for an offset of 10 Hz

f. ≤ -112 dBc/Hz @ 50 GHz for an offset of 10 kHz

8. Broadband noise: ≤ -140 dBc/Hz

9. Harmonics for frequencies above 1 GHz: ≤ -55 dBc for output power < +10dBm

10. Internal reference output frequency: 10 MHz

11. Internal reference relative accuracy at time of calibration: ≤ 4 x 10-8

12. Oscillator aging rate: ≤ +/- 3 x 10-8/year after one year of operation

13. External reference input frequency: 10 MHz

IV. DELIVERY TERMS

Delivery shall be F.O.B Destination (or equivalent incoterms, such as DDP) and shall occur within three months of placement of the order.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

The contractor shall deliver all Line Items to:

National Institute of Standards and Technology Shipping and Receiving 100 Bureau Drive, Building 301 Gaithersburg, MD 20899

V. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in the specific FAR clause that allows the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

A sinusoidal signal will be generated with the microwave source at 1 GHz and with 0 dBm power and measured with an oscilloscope. The amplitude and frequency of the signal measured with the oscilloscope must be within the stated technical specifications.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST POC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 10 working days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

VI. WARRANTY

The contractor shall warranty the entire system for a period of a minimum of 12 months after acceptance of the equipment and shall be in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government and at a minimum shall include the following all parts and labor associated with repair or replacement of defective components.

VII. PAYMENT SCHEDULE

The Contractor will be paid, in accordance with the payments clause in the contract and as otherwise noted in this document, upon receipt of a proper invoice.

1. 100% after acceptance by the POC, AND

2. After the successful completion of the testing requirements set forth in this document under section set forth in this document.

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer. Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

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