Attachment 1 - Statement of Work (SOW).docx

STATEMENT OF WORK

Title: Mid-infrared femtosecond laser system and optical frequency reference Lab: Material Measurement Laboratory

I. BACKGROUND INFORMATION

The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps NIST will conduct the measurement science, or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing.

The CHIPS Metrology Program includes research in Grand Challenge 5, Modeling/Simulating Semiconductor Manufacturing Processes. To address this Grand Challenge, the project RF Waveform and Rapid Frequency-Comb Diagnostics for Plasma Etching seeks to purchase a Mid-Infrared Femtosecond Laser Source, Femtosecond Laser Control Electronics, and an Optical Frequency Reference, quantity one (1) each. The laser system and optical reference will enable the application of novel optical diagnostics like broadband laser spectroscopy to the study of chemical transformations in key plasma etching processes.

The project is led by the Chemical Sciences Division of the NIST Material Measurement Laboratory, the nation’s premier metrology laboratory for measurement science, standards, technology, and data in the area of chemical sciences.

II. PURPOSE

Plasma etching—performed across the semiconductor manufacturing ecosystem—is a highly nonlinear process involving arbitrary radiofrequency (RF) waveforms, dynamic electrical properties, and complex chemistry in a confined non-equilibrium environment. Metrology tools are needed to better correlate reactor inputs with etching outcomes, and to precisely evaluate consistency across plasma etching tools. To do so, we will develop µs time-resolved frequency comb diagnostics to meet industry needs including reliable in-situ monitoring of plasma chemistry and real-time data generation for intelligent design of next-generation plasma etching processes. This requires a mid-infrared femtosecond laser system (laser source and control electronics) and an optical frequency reference.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. The use of “gray market” components are not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001:

Description: Mid-Infrared femtosecond laser source Quantity: One (1) A. Technical Specifications

a. Mid-infrared laser pulse repetition rate 100 MHz ± 5 MHz.

i. Radiofrequency (RF) monitoring output port for measured repetition rate signal.

b. Mid-infrared laser pulse width <400 femtoseconds (fs).

c. Minimum tunable laser output wavelength from 3.0 μm to 4.8 μm.

i. Output wavelength tuning is fully automated via software control.

d. For mid-infrared laser output tunable from 3.0 μm to 4.0 μm:

i. Pulse bandwidth ≥100 cm−1.

ii. Laser average power ≥100 mW.

e. For mid-infrared laser output tunable from 4.0 μm to 4.8 μm:

i. Pulse bandwidth ≥50 cm−1.

ii. Laser average power ≥25 mW.

f. Higher confidence rating will be given for mid-infrared laser output tunable from 2.6 μm to 3.0 μm:

i. Pulse bandwidth ≥50 cm−1.

ii. Laser average power ≥25 mW.

g. Higher confidence rating will be given for mid-infrared laser output tunable from 4.8 μm to 5.2 μm:

i. Pulse bandwidth ≥50 cm−1.

ii. Laser average power ≥25 mW.

h. Mid-infrared laser output is free space.

i. Mid-infrared laser output is linearly polarized.

j. Laser, laser drivers, and laser controllers operable with power from standard US wall output voltage of 120 V.

k. Laser head dimensions of:

i. Width ≤450 mm.

ii. Length ≤450 mm.

iii. Height ≤100 mm.

Line Item 0002:

Description: Femtosecond laser control electronics Quantity: One (1) A. Technical Specifications

a. Rack mountable control unit.

i. Compatible with standard 19-inch instrument rack.

b. Umbilical cord to laser head of length 2 m ± 1 m.

c. Control unit interfaces vis USB with personal computer running Windows.

i. Personal computer not included.

d. Control electronic compatible with mid-infrared femtosecond laser source as described in Line Item 0001.

Line Item 0003:

Description: Ultrastable laser system Quantity: One (1) A. Technical Specifications

a. Ultrastable laser is a continuous-wave (cw) laser.

b. Laser output wavelength between 1061 nm and 1067 nm.

i. Preference for output wavelength near the lower limit of 1061 nm.

c. Ultrastable laser locked to an optical frequency cavity.

d. Optical reference cavity finesse >40 000.

e. Ultrastable laser linear drift rate <10 kHz/s.

f. Ultrastable laser relative stability ≤10−11 at 1 ms.

i. Relative laser stability metric does not include linear drift.

g. Optical reference cavity input/output ports fiber coupled with FC/APC connectors.

h. Ultrastable laser locking electronics included.

i. Minimum of three signal outputs.

ii. Proportional-integral-derivative (PID) loop for laser stabilized.

i. Optical reference cavity unit dimensions:

i. Width ≤200 mm

ii. Length ≤200 mm

iii. Height ≤100 mm

j. Beat note detection unit included for generating a laser beat note between the ultrastable laser (included) and a frequency comb laser (not included).

i. The beat note detection unit for use with a frequency comb laser (not included) with optical intensity spectrum center wavelength ≈1050 nm and full-width at one-tenth-maximum wavelength range of 1035 nm to 1070 nm.

IV. SCHEDULE OF DELIVERABLES

Place of Delivery

Standards of Acceptance: The NIST POC or COR shall review all the above deliverables and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within 30 working days of receipt of deliverable. This section applies to deliverables which must be reviewed and approved for acceptances (e.g., draft plans, drawings, etc.).

PLACE OF PERFORMANCE

Contractor’s site.

V. DELIVERY TERMS

Delivery shall be F.O.B Destination (or equivalent incoterms, such as DDP) and shall occur in accordance with the delivery due dates provided in the below table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

The contractor shall deliver all Line Items to:

National Institute of Standards and Technology Shipping and Receiving 100 Bureau Drive, Building 301 Gaithersburg, MD 20899 C/O Adam J. Fleisher, Building 221, Room A117

VI. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in the specific FAR clause that allows the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

1. Direct frequency comb spectroscopy

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST POC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 30 working days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

VII. WARRANTY

The contractor shall warranty the entire system for a period of a minimum of one year after receipt of the equipment and shall be in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government.

VIII. PAYMENT SCHEDULE

The Contractor will be paid, in accordance with the payments clause in the contract and as otherwise noted in this document, upon receipt of a proper invoice and per the following:

-100 percent after inspection and acceptance of a fully delivered system.

IX. CYBERSECURITY PRIVACY REQUIREMENTS

NIST seeks a solution that provides security and privacy protection consistent with requirements defined by applicable federal laws, regulations, policies, and standards (e.g., the Federal Information Security Management Act (FISMA), OMB Circular A-130, and FIPS Publication 200). The solution provider (including subcontractors) may meet these requirements through various means, including but not limited to FedRAMP authorization, current third-party assessments (e.g., SSAE, PCI), and/or responses to NIST special publication control set SP 800-171.

Minimally Acceptable Controls

· System security plan describing physical, technical, and administrative controls implemented to protect systems and sensitive personally identifiable information (SPII).

· IT management processes to establish and manage secure configuration baselines including routine patching for all operating systems and applications.

· Access to SPII is restricted to those with a need to know. Personnel with access to SPII have background investigations performed (e.g. criminal, financial etc.), and are trained on secure handling of SPII.

· Access Controls for SPII meet or exceed industry best practices for access and identification control including, but not limited to, connectivity to servers and databases, multi-factor authentication for remote accesses for administration, secure configurations for any devices accessing the system, and strong physical security for any place where the data is accessed.

· The solution supports multifactor authentication for users and/or supports integration with customer federation services for Single-Sign capability.

· Processes for scanning on a continual basis for vulnerabilities and proper configurations for all aspects of the system, as well as processes for timely mitigation of findings.

· Auditing and Incident Response processes including customer notification of suspected or actual incidents and logging with sufficient information to perform forensics on any incident. Processes for notifying and providing appropriate mitigations, including but not limited to credit monitoring services, for subsidy applicants in the event of suspected or actual incidents.

· SPII is encrypted in transit using TLS 1.2 or better and encrypted at rest in all places the SPII is stored. All encryption algorithms and modules are FIPS 140-2/140-3 validated.

If unable to meet any of the requirements listed above, the solution provider may provide details of mitigations or alternative protections in place to ensure the appropriate handling and protection of SPII.

If the solution provider provides services to other Federal agencies, provide a general description of the security risk management approach and client point of contact.

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