Attachment 1 - Statement of Work (SOW).docx

STATEMENT OF WORK

Title: Fourier-Transform Infrared Spectrometer Lab: Material Measurement Laboratory

I. BACKGROUND INFORMATION

The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps NIST will conduct the measurement science, or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing.

With this goal, the Chemical Process and Nuclear Measurements Group is seeking a research-grade Fourier Transform Infrared (FT-IR) Spectrometer. The Group is involved in a CHIPS R&D Metrology project to characterize the stability of biofunctional semiconductor interfaces in chip-based biosensors with a focus on improving manufacturability. As a part of this program, NIST aims to develop operando methods for biointerface characterization using optical, electrical, and electrochemical measurements on surfaces functionalized with self-assembled monolayers (SAMs) and bioreceptors. The Chemical Process and Nuclear Measurements Group in the Chemical Science Division has specialized expertise in developing in situ and operando infrared measurements on various chemical systems. In support of this work, the group requires a research-grade Fourier Transform Infrared (FT-IR) Spectrometer.

II. PURPOSE

The Chemical Process and Nuclear Measurements Group is seeking a research-grade Fourier Transform Infrared (FT-IR) Spectrometer, which will be used to measure the stability and failure mechanisms of chip-based biosensors. The measurements are a critical component of a CHIPS R&D Metrology program to develop a relationship between functionalization, performance, and lifetime of biosensors built using semiconductor technology. Understanding the specific mechanisms of interface fabrication and degradation will accelerating biosensor development and improve manufacturing processes critical for commercial viability.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components are not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001: Brand Name only Bruker FT-IR Spectrometer Description: Infrared spectrometer configured with KBr beamsplitter and windows, DLaTGS detector, fast scan option, external detector positions, trigger electronics, time-resolved measurement capability, and data processing software Quantity: 1 A. Technical Specifications for Hardware

a. Spectral range: 8,000 cm-1 to 350 cm-1

b. Spectral range extension: Field-upgradable to 15 cm-1 to 28,000 cm-1

c. Spectral resolution: 0.16 cm-1 or better

d. Wavenumber accuracy: 0.005 cm-1 or better at 1,554 cm-1

e. Photometric accuracy: 0.1% transmission or better

f. Signal-to-noise ratio: 10,000:1 or better at 2,000 cm-1, 4 cm-1 resolution, 5 s acquisition time (sample and reference channels)

g. Interferometer type: Permanently aligned interferometer with no adjustments for maximal long-term stability

h. Interferometer speed: 2 kHz to 160 kHz, or faster

i. Laser: Stabilized HeNe

j. Scan type: Rapid scan (continuous scan)

k. Spectral acquisition rate: 70 spectra/s or greater at 16 cm-1 resolution

l. Analog-to-digital converter (ADC):

i. Dual-channel, 24-bit

ii. On-detector pre-amp and ADC

m. Optics bench purging:

i. Built-in desiccant cartridges

ii. Dry air or nitrogen purging from external supply

n. Light source: Stabilized, air-cooled, globar

o. Beamsplitter: Broadband KBr, 10,000 cm-1 to 400 cm-1

p. Detector:

i. Temperature-controlled DTGS installed in internal compartment

ii. Additional internal detector position for one MCT or InSb detector

iii. Software-controlled motorized beam steering to each detector position

q. Beam outlet ports: Two outlets

i. First outlet on the right side of the spectrometer bench

ii. Second outlet on the left side of the spectrometer bench

iii. Software-controlled motorized beam steering for each output

r. Windows:

i. Sample compartment: KBr

ii. Beam outlets (2): KBr

s. Aperture wheel (J-stop): 250 um to 8 mm in diameter, at least 10 positions

t. Filter wheel:

i. Compatible with 25 mm filters, at least 8 position

ii. Installed filters: NG-4 glass, NG-9 glass, NG-11 glass, polystyrene

u. External input-output: At least 4 digital I/O channels to send or receive TTL signals

i. Hardware interface: BNC connectors

v. External detector interface: At least 2 external detector channels

w. Compatibility with Bruker optics and accessory plates:

i. Compatible with Bruker beamsplitters from Invenio R

ii. Compatible with Bruker sources from Invenio R

iii. Compatible with Bruker detectors from Vertex 70 and Invenio R

iv. Compatible with Bruker QuickLock baseplates for accessories

x. Communications interface: Ethernet

B. Technical Specifications for Software

a. Scope: Single software package for data acquisition, automation, and analysis

b. Operating system compatibility: Windows 11 64-bit

c. Installation: User-installable on government owned PC

d. Data acquisition:

i. Time-resolved rapid-scan mode with double-sided forward/backward interferogram processing (split interferograms)

ii. Repetitive rapid-scan measurements initiated by external TTL signals

iii. Sequence-based data acquisition, including nested loops for spectral co-adding over multiple iterated acquisitions

1. Control over digital IO lines during a sequence

2. Ability to add arbitrary time delays to a sequence

3. Ability to wait for multiple trigger signals at different points during a sequence

e. Data storage: Single data file for storing single channel, interferogram, and absorbance/transmittance data with traceable log of all data transformations for both single spectra and time-series spectra

f. Data processing:

i. Ability to set FT parameters such as phase resolution, phase correction, apodization, and zero filling

ii. Ability to reprocess single channel data

iii. Ability to perform arbitrary spectral calculations such as addition, subtraction, averaging, and ratioing

iv. Ability to perform peak fitting and integration with adjustable peak models and background subtraction

g. Data visualization:

i. 2D and 3D plotting of single spectra and time-series spectra

ii. Arbitrary scaling and manipulation of plotted spectra

iii. Stacked, tiled, and cascaded display of multiple single spectra

iv. Contour and surface plots of time-series spectra

h. Time-resolved data processing:

i. Ability to co-add and extract spectra from rapid-scan data

ii. Ability to reprocess rapid-scan interferograms using arbitrary reference spectra as background

i. Data export: Batch exporting of multiple data files to human-readable text format such as CSV

j. Instrument control: Graphical representation of beam path in spectrometer bench with software-controlled mirrors for path selection

k. Optical component recognition: Automated recognition and configuration of installed optical components (sources, beamsplitter, detectors, accessories)

l. Saved instrument configuration:

i. Ability to save and recall the complete hardware configuration and acquisition parameters used for a given measurement using a single file

ii. Ability to save and recall rapid-scan automated sequences using a single file

m. Programming interfaces:

i. LabVIEW-compatible programming interface to execute measurements, acquire spectra, and read data files for post-processing

ii. Python programming interface to execute measurements, acquire spectra, and read data files for post-processing; ability to execute Python code in the FT-IR software

Line Item 0002: Brand Name only Bruker InSb Detector Description: Cryogenic InSb detector Quantity: 1 A. Technical Specifications

a. Liquid-nitrogen cooled InSb detector

i. 10,000 to 1,850 cm-1 spectral range

ii. D* = 1.5x1011 cmHz1/2/W or better

iii. On-detector pre-amplifier and 24-bit ADC

b. Mountable inside spectrometer bench

c. Interface cable for connecting externally mounted detector to spectrometer bench

d. External mounting hardware, such as dovetail guide to mount detector to custom optical apparatus

Line Item 0003: Brand Name only Bruker MCT Detector Description: Cryogenic MCT detector Quantity: 1 A. Technical Specifications

a. Liquid-nitrogen cooled MCT detector

i. 12,000 to 600 cm-1 spectral range

ii. D* = 2x1010 cmHz1/2/W or better

iii. On-detector pre-amplifier and 24-bit ADC

b. Mountable inside spectrometer bench

c. Interface cable for connecting externally mounted detector to spectrometer bench

d. External mounting hardware, such as dovetail guide to mount detector to custom optical apparatus

Line Item 0004: Brand Name only Bruker Wafer ATR Accessory Description: Prism coupled wafer ATR accessory Quantity: 1 A. Technical Specifications

a. For attenuated total reflection (ATR) analysis of impurities in silicon wafers

b. Silicon prism based unit for non-destructive mechanical coupling to wafers

c. 40 mm spacing between points coupling the wafer to the prism

d. Silicon wafer samples act as internal reflection elements

e. Sufficiently larger number of reflections for analysis of organic monolayers

f. Mountable inside purged spectrometer bench

g. Compatible with Bruker QuickLock baseplates

IV. SCHEDULE OF DELIVERABLES

Place of Delivery

Standards of Acceptance: The NIST POC or COR shall review all the above deliverables and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within 30 days of receipt of deliverable.

PLACE OF PERFORMANCE

a. All work shall be completed at the Contractor’s facility.

b. Equipment will be delivered to NIST Gaithersburg for installation and acceptance testing.

V. DELIVERY TERMS

Delivery shall be F.O.B Destination (or equivalent incoterms, such as DDP) and shall occur in accordance with the delivery due dates provided in the above table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

The contractor shall deliver all Line Items to:

National Institute of Standards and Technology Shipping and Receiving 100 Bureau Drive, Building 301 Gaithersburg, MD 20899

VI. INSTALLATION

The system shall be installed by the Contractor and meet contract specifications no later than 1 month after delivery. Installation shall include uncrating/unpackaging of all equipment, rigging, set-up and hook-up of the system, software installation on Government-owned PC, demonstration of all specifications, and removal of trash. Onsite installation and demonstration shall be done at NIST, Gaithersburg, MD- Building 221.

VII. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in the specific FAR clause that allows the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

1. Spectral resolution

2. Signal to noise ratio

3. Stability

4. Energy distribution

5. Wavenumber accuracy

6. Photometric reproducibility

7. Alignment

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST POC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 10 working days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

VIII. WARRANTY

The contractor shall warranty the entire system for a period of a minimum of 1 year after acceptance of the equipment and shall be in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government and at a minimum shall include the following:

All internal spectrometer components including optics, source, detector, motors, electronics.

IX. PAYMENT SCHEDULE

The Contractor will be paid, in accordance with the payments clause in the contract and as otherwise noted in this document, upon receipt of a proper invoice.

1. 100% after installation and acceptance by the POC of fully installed system, AND

2. After the successful completion of the testing requirements set forth in this document under section set forth in this document, AND

3. After successful demonstration by the instrumentation that it performs in accordance with the requirements set forth in this document.

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer. Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

X. CYBERSECURITY PRIVACY REQUIREMENTS

NIST seeks a solution that provides security and privacy protection consistent with requirements defined by applicable federal laws, regulations, policies, and standards (e.g., the Federal Information Security Management Act (FISMA), OMB Circular A-130, and FIPS Publication 200). The solution provider (including subcontractors) may meet these requirements through various means, including but not limited to FedRAMP authorization, current third-party assessments (e.g., SSAE, PCI), and/or responses to NIST special publication control set SP 800-171.

Minimally Acceptable Controls

· System security plan describing physical, technical, and administrative controls implemented to protect systems and sensitive personally identifiable information (SPII).

· IT management processes to establish and manage secure configuration baselines including routine patching for all operating systems and applications.

· Access to SPII is restricted to those with a need to know. Personnel with access to SPII have background investigations performed (e.g. criminal, financial etc.), and are trained on secure handling of SPII.

· Access Controls for SPII meet or exceed industry best practices for access and identification control including, but not limited to, connectivity to servers and databases, multi-factor authentication for remote accesses for administration, secure configurations for any devices accessing the system, and strong physical security for any place where the data is accessed.

· The solution supports multifactor authentication for users and/or supports integration with customer federation services for Single-Sign capability.

· Processes for scanning on a continual basis for vulnerabilities and proper configurations for all aspects of the system, as well as processes for timely mitigation of findings.

· Auditing and Incident Response processes including customer notification of suspected or actual incidents and logging with sufficient information to perform forensics on any incident. Processes for notifying and providing appropriate mitigations, including but not limited to credit monitoring services, for subsidy applicants in the event of suspected or actual incidents.

· SPII is encrypted in transit using TLS 1.2 or better and encrypted at rest in all places the SPII is stored. All encryption algorithms and modules are FIPS 140-2/140-3 validated.

If unable to meet any of the requirements listed above, the solution provider may provide details of mitigations or alternative protections in place to ensure the appropriate handling and protection of SPII.

If the solution provider provides services to other Federal agencies, provide a general description of the security risk management approach and client point of contact.

XI. REQUIREMENTS FOR CONTRACTOR PERSONNEL

Identify all qualifications that the Contractor and/or their personnel working on this contract must possess.

Safety: The Contractor employee must be responsible for knowing and complying with all installation safety prevention regulations. Such regulations include, but are not limited to, general safety, fire prevention, and waste disposal.

Security: NIST is a restricted campus. An identification badge is required for access for entry into buildings and is shown to the armed Security Police when entering the campus.

Identification Badges: Contractor employees must comply with NIST identification and access requirements. Each Contractor employee must wear a visible identification badge provided by the NIST Security Office.

Vehicle Registration: All Contractor employees must register their vehicles with the NIST Security Office to gain access to the campus. A valid driver’s license, Government-furnished civilian ID, proof of insurance and current registration must be presented to the NIST Security Office, at which time a NIST vehicle pass will be issued. The pass must be displayed on the vehicle in accordance with NIST Security Office instructions.

Media Inquiries: The Contractor shall not respond to any media inquiries. Any inquiries from the media shall be immediately relayed to the NIST COR and/or Contracting Officer (CO). There shall be no interviews, comments, or any other response without the knowledge and approval of the NIST COR or Designated Government Official.

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