Attachment 1-Statement of Work (SOW).docx

STATEMENT OF WORK

Title: Bond Strength Tester Lab: Physical Measurements Laboratory

I. BACKGROUND INFORMATION

The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps NIST will conduct the measurement science, or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing.

The Physical Measurements Laboratory (PML) Device Fabrication Group (DFG) in the Quantum Sensors Division is part of a project to develop bond strength measurements and bond strength standards for dielectric, metal to metal, and hybrid bonding. As part of this program, the DFG intends to acquire and demonstrate the use of a commercial bond tester for these measurements and potential standards. The available lab spaces necessitate the acquisition of a bench top unit which can operate with minimal utility requirements. DGF micro-fabricate our own bond test structures that can be tested in shear or pull test mode depending on the fixturing. DFG will require the ability to design, produce, and install custom fixturing as we survey the possible measurement types.

II. PURPOSE

A bond tester machine that can conduct multiple types of force testing is requested. This machine will permit the goal of the development of new bond strength standards. New bond strength standards will better meet Semiconductor industry requirements for standards that are more repeatable and are more efficient requiring less time to implement.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components are not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001:

Description: Bond Tester Quantity: 1 A. Physical- Characteristics

a. Size Envelope of 32 inches (in) by 32 inches (in) by 32 inches (in) or lower.

b. Weight of 200 pounds (lb) or lower.

B. Utility Requirements

a. Able to operate with a 120 Volt (V) single phase 60 hertz (Hz) 20 Amp (A) circuit

b. Able to operate with a clean dry air source of 75 pounds per inch (psi).

c. Able to operate with vacuum supply of 20 inch mercury (20 in Hg)

C. Stage and Head Motion

a. Minimum: X-Y range of 100 mm – 100 mm.

b. Minimum: Z range of 40 mm.

c. Minimum: X-Y-Z resolution 1 micro-meter.

d. Motorized X-Y-Z with joystick or computer control.

D. Testing Type, Force, and Accuracy

a. Wire Pull, 100 gram-Force (g-F), better than 1% accuracy.

b. Pull, 10 kilogram-Force (kg-F), better than 1% accuracy

c. Die Shear, 10 kilogram-Force (kg-F), better than 1% accuracy.

d. Die Shear, 100 kilogram-Force (kg-F), better than 1% accuracy.

e. Stud Pull, 100 kilogram-Force (kg-F), better than 1% accuracy.

E. Tooling

a. Pull Hook suitable for 1 mil wire.

b. Pull Hook suitable for up to 10 kg-F measurement.

c. Shear Tool between 2mm and 3 mm wide.

d. Shear Tool between 12 and 13.5 mm wide.

e. Stud pull tooling appropriate for up 100 kg-F measurement.

F. Device Under Test Fixturing

a. Configurable fixturing for chip sizes from 5 mm to 50mm chips.

b. Wafer fixturing for up to 150 mm wafers.

c. Availability for end user to fabricate custom fixtures with an available volume for fixtures greater than 75 mm wide by 75 mm deep by 50 mm high.

G. Part and Test viewing

a. Operator Stereoscope.

b. Video Camera.

H. Testing and Monitoring Capability

a. Module exchange less than 5 minutes (min).

b. Re-calibration not required upon module exchange.

c. Operator positions stage and module for stage and actual test is automatically done.

d. Recording of full force vs distance profile.

e. Adjustable force limits for non-destructive testing.

f. Video monitoring and video recording of test.

I. Test Methods and Test Data Storage

a. Ability to store and recall test method information.

b. Storage and backup of all data sets.

J. Test Methods Compliance

a. Compliance with applicable MIL-STD-883 Test Methods.

IV. SCHEDULE OF DELIVERABLES

Complete the table providing the information for all the tasks identified above.

Place of Delivery

Standards of Acceptance: The NIST POC or COR shall review all the above deliverables and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within 21 weeks of receipt of deliverable. This section applies to deliverables which must be reviewed and approved for acceptances (e.g., draft plans, drawings, etc.)

Regular Business Hours Regular business hours are Monday through Friday, (revise as applicable 8:00 am to 5:00 pm) Eastern Time, excluding Federal holidays and NIST closures. (Add applicable language if applicable)

V. DELIVERY TERMS

Delivery shall be FOB Destination or equivalent INCOTERMS Delivery Duties Paid (DDP) and shall occur in accordance with the delivery due dates provided in the below table.

The contractor shall deliver all Line Items to:

National Institute of Standards and Technology Shipping and Receiving 325 Broadway Boulder, CO 80305

VI. INSTALLATION

The system shall be installed by the Contractor and meet contract specifications no later than 4 weeks after delivery. Installation, at a minimum, shall include uncrating/unpackaging of all equipment, rigging, set-up and hook-up of the system, demonstration of all specifications, and removal of trash. Onsite installation and demonstration shall be done at NIST, Boulder CO.

VII. TRAINING

The contractor shall conduct training session for up to three users at NIST. The training shall provide a thorough demonstration of all system/solution functions, maintenance, data administration, and basic troubleshooting. The training may be completed at NIST Monday – Friday during the operating hours of 8 am to 5 pm immediately after installation and demonstration of specifications and must be completed no later than 10 days after installation.

VIII. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in the specific FAR clause that allows the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

1. Site Acceptance Test equivalent to Factory Acceptance Test.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST POC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 7 of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

IX. WARRANTY

The contractor shall warranty the entire system for a period of a minimum of 1 years after receipt of the equipment and shall be in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government and at a minimum shall include the following:

Products manufactured by vendor are warranted to meet its written specifications for a period of 12-months from date of shipment from DDP point of shipment. Components not manufactured by vendor will conform to warranties provided by the original equipment manufacturer and transferable to government.

X. PAYMENT SCHEDULE

The Contractor will be paid, in accordance with the payments clause in the contract and as otherwise noted in this document, upon receipt of a proper invoice.

1. 35% upon receipt of machine drawings and installation documents

2. 50% upon delivery

3. 15% after the successful completion of the installation, testing requirements set forth in this document, and training

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer. Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

XI. CYBERSECURITY PRIVACY REQUIREMENTS

NIST seeks a solution that provides security and privacy protection consistent with requirements defined by applicable federal laws, regulations, policies, and standards (e.g., the Federal Information Security Management Act (FISMA), OMB Circular A-130, and FIPS Publication 200). The solution provider (including subcontractors) may meet these requirements through various means, including but not limited to FedRAMP authorization, current third-party assessments (e.g., SSAE, PCI), and/or responses to NIST special publication control set SP 800-171.

Minimally Acceptable Controls

· System security plan describing physical, technical, and administrative controls implemented to protect systems and sensitive personally identifiable information (SPII).

· IT management processes to establish and manage secure configuration baselines including routine patching for all operating systems and applications.

· Access to SPII is restricted to those with a need to know. Personnel with access to SPII have background investigations performed (e.g. criminal, financial etc.), and are trained on secure handling of SPII.

· Access Controls for SPII meet or exceed industry best practices for access and identification control including, but not limited to, connectivity to servers and databases, multi-factor authentication for remote accesses for administration, secure configurations for any devices accessing the system, and strong physical security for any place where the data is accessed.

· The solution supports multifactor authentication for users and/or supports integration with customer federation services for Single-Sign capability.

· Processes for scanning on a continual basis for vulnerabilities and proper configurations for all aspects of the system, as well as processes for timely mitigation of findings.

· Auditing and Incident Response processes including customer notification of suspected or actual incidents and logging with sufficient information to perform forensics on any incident. Processes for notifying and providing appropriate mitigations, including but not limited to credit monitoring services, for subsidy applicants in the event of suspected or actual incidents.

· SPII is encrypted in transit using TLS 1.2 or better and encrypted at rest in all places the SPII is stored. All encryption algorithms and modules are FIPS 140-2/140-3 validated.

If unable to meet any of the requirements listed above, the solution provider may provide details of mitigations or alternative protections in place to ensure the appropriate handling and protection of SPII.

If the solution provider provides services to other Federal agencies, provide a general description of the security risk management approach and client point of contact.

XII. REQUIREMENTS FOR CONTRACTOR PERSONNEL (Remove if not applicable) Identify all qualifications that the Contractor and/or their personnel working on this contract must possess.

Safety: The Contractor employee must be responsible for knowing and complying with all installation safety prevention regulations. Such regulations include, but are not limited to, general safety, fire prevention, and waste disposal.

Security: NIST is a restricted campus. An identification badge is required for access for entry into buildings and is shown to the armed Security Police when entering the campus.

Identification Badges: Contractor employees must comply with NIST identification and access requirements. Each Contractor employee must wear a visible identification badge provided by the NIST Security Office.

Vehicle Registration: All Contractor employees must register their vehicles with the NIST Security Office to gain access to the campus. A valid driver’s license, Government-furnished civilian ID, proof of insurance and current registration must be presented to the NIST Security Office, at which time a NIST vehicle pass will be issued. The pass must be displayed on the vehicle in accordance with NIST Security Office instructions.

Media Inquiries: The Contractor shall not respond to any media inquiries. Any inquiries from the media shall be immediately relayed to the NIST COR and/or Contracting Officer (CO). There shall be no interviews, comments, or any other response without the knowledge and approval of the NIST COR or Designated Government Official.

2 | Page image1.jpeg