Attachment 1 - Statement of Work.pdf

Statement of Work: NanoFab Lab Services

BACKGROUND

The National Institute of Standards & Technology (NIST) seeks commercial vendors that can provide laboratory support services for the Center for Nanoscale Science and Technology (CNST) NanoFab cleanroom and laboratories. The NanoFab is a shared resource accessible to researchers from industry, academia, NIST, and other government agencies that provides researchers with rapid access to state-of-the-art, commercial nanoscale measurement and fabrication tools and methods, along with associated technical expertise, at economical hourly rates. It is well equipped to process and characterize a wide range of nanoscale materials, structures, and devices.

The CNST NanoFab consists of a 19,000 sq. ft. cleanroom with 8,000 sq. ft. of class 100 space in building 215, and several other temperature and humidity controlled labs outside of the cleanroom in building 215 and building 216. There are physical and exposure hazards present in most labs and the cleanroom has an NFPA hazard rating of 4-health, 4-flammability, 4-instability.

Minimum Requirements:

These requirements apply to all CLINs under this solicitation.

1. QUALIFICATIONS

a. Vendor

i. Vendor must have experience providing services for class 100 cleanroom environments in accordance with ISO specification 14644, Cleanrooms and Associated Controlled Environments.

ii. Vendors must provide their proposed staff with basic safety, chemical safety, and cleanroom protocol training relevant to working in a lab environment and class 100 cleanroom in accordance with the requirements outlined in ISO specification 14644, Cleanrooms and Associated Controlled Environments.

iii. Vendors must have a staffing strategy for providing backup that ensures continued, uninterrupted service.

b. Vendor Staff

i. All vendor staff onsite must pass a background security check.

ii. All vendor staff onsite must satisfactorily complete the NanoFab safety training which consists of online training, a one hour in person safety orientation tour, and passing a quiz.

iii. All vendor staff onsite must satisfactorily complete the vendors required training.

c. The government reserves the right to reject the vendors proposed onsite staff based on the requirements of sections (1.a) and (1.b).

2. REQUIRED SERVICES

a. Schedule

i. The NanoFab core business hours are Monday through Friday from 7 am to 6 pm.

ii. The vendors proposed daily schedule shall fall within this time window.

b. Service and supply each lab per the detailed lab tasks in section 3.

c. Daily

i. Check receiving locations for inventory deliveries, check-in chemicals as needed, stock inventory items to inventory locations.

1. All inventory deliveries to NanoFab must be stocked within two business days of arrival.

a. Move all NanoFab chemicals to D107, check-in using chemical tracking system, then store in appropriate cabinets.

b. Non-chemical deliveries shall be unpacked and stocked in appropriate inventory locations.

c. Promptly dispose of packing materials.

d. Weekly

i. Request chemical waste pickups

1. There is limited space for storing chemical waste. Coordinate weekly pickups and if waste starts to build up, request additional pickups.

ii. Service cleanroom garments

1. OUT: Pull down garments from building 215 cleanroom and two labs in building 216, load in transport bin, then take to loading dock for pickup.

2. IN: Take garments from loading dock to cleanroom, stock on shelves, confirm quantity delivered on invoice, take invoice to COR. Stock locations are in building 215 cleanroom and two labs in building 216.

iii. Inventory all chemicals

1. Perform physical inventory of 50 chemical types located in chemical cabinets in the cleanroom using a bar code scanner. Scan the bar code on the cabinet door, enter quantity in cabinet, scan next. Deliver scanner to TPOC staff.

iv. Test and date eyewash stations

1. Use rolling eyewash station test rig to test 13 eyewash stations inside of cleanroom and 7 in non-cleanroom areas.

e. Bi-weekly

i. Inventory user supplies

1. Perform physical inventory of 20 user supplies located in cabinets in cleanroom using the bar code scanner. Scan bar code on the cabinet door, enter quantity in cabinet, scan next. Deliver scanner to TPOC.

ii. Inventory safety supplies

1. Perform physical inventory of 20 safety supplies located in cabinets in cleanroom and storage room behind cleanroom using the bar code scanner. Scan bar code on cabinet door, enter quantity, scan next. Deliver scanner to TPOC.

iii. Inventory lab supplies

1. Perform physical inventory of 25 lab supplies located in cabinets in cleanroom and storage room behind cleanroom using the bar code scanner. Scan bar code on cabinet door, enter quantity, scan next.

Deliver scanner to TPOC.

f. Monthly

i. Perform cleanroom air particle counts

1. Use air particle counter and check each cleanroom lab, center hall way, class 1000 halls, and D106. 17 locations total, particle counter runs unattended. Deliver memory stick to TPOC.

3. DETAILED LAB TASKS

a. Each lab space has specific tasks that must be performed periodically. The chart below shows the requirements for each lab space and the intervals for service.

D=Daily, W=Weekly, M=Monthly. Detailed descriptions of each task are provided starting in section 3.b.

Fr eq ue nc y

R ef ill g lo ve s

R ef ill g ow ni ng su pp lie s

C he ck a nd e m pt y ge ne ra l u se tr as h ca ns

C he ck a nd e m pt y so lv en t t ra sh c an s

R ef ill W ip es

R ef ill A ci d

W ip es

R ef ill P ip et s

C le an a nd re st oc k la b di sh w ar e

Pu ll ne w ta ck y m at re pl ac e if em pt y

C he ck a nd re m ov e em pt y/ w as te c he m ic al b ot tle s

C ha ng e ou t w as te c ap tu re c on ta in er s

C ha ng e ou t o ra ng e ac id g lo ve s

C he ck a nd d is po se /re pl ac e sh ar ps c on ta in er s

W ip e do w n sh el ve s a nd ta bl es a s n ee de d.

V ac uu m o r s w ee p la b as n ee de d

Labs Lab Name

215/A101

JEOL E-Beam Litho / Zeiss

SEM D D M M M

215/A102 Spray Clean / Contact Litho D D D D D D D W W W M M M

215/A103 Laser Writer / Contact Litho D D D D D D W W W M M M

215/A104 Cluster Dep / E-beam coat D D D D D D W W W M M M

215/A105 Stepper Litho D D D D D D W W W M M M 215/A106 ALD / Dry Etch D D D M M M 215/A-Class

Class 1000 hallway M M

215/B101 General Chemistry D D D D D D W W W M M M

215/B102

CMOS

Chemistry D D D D D D W W W M M M

215/B103 AFM D D M M M

215/B104 Deposition D D D D D W W W M M M 215/B105 Dry Etch D D D M M M

215/B106 PECVD/Furnac e D D D M M M

215/B-Class

Class 1000 hallway M M

215/C02-2 Post Process D D M M M

215/D101 Cleanroom Entrance D W D M M M

215/D102-2 Womens Pre-gowning D D M M M

215/D102-3 Mens Pre-gowning D D M M M

215/D105 Gowning D D M M M 215/D106 Gemini SEM D D M M M

215/D107

Chemical Receiving/ Removal W D M M M

215/A01 Sub Fab W W M M 215/Bunker Pyro Bunker M 216/F102 Soft Litho W D W D M M M

216/F108 AFM W W M M

216/F110 TEM Prep W W M M

216/G107 JEOL E-Beam Litho W W M M

216/G113 FEI FIB W W D M M

216/G115 FEI TEM W W M M

b. Refill gloves.

i. In each lab, refill white glove and purple glove containers with appropriate sizes. Load gloves such that they can be picked up by the cuff. New gloves go on the bottom of the stack. Wear clean gloves during this process.

c. Refill gowning supplies

i. Includes bouffant caps, booties, face mask, beard covers, gloves

ii. In each lab with gowning supplies, maintain bouffant caps, booties, face masks, beard covers, and gloves.

d. Check and empty general use trash cans

i. In each lab, remove bags, take to outside of D108 for pickup. Place new bag in can.

e. Check and empty solvent trash cans

i. In each lab with solvent processes, remove bags, take to 215/D107 for disposal as solvent waste. Place new bag in can.

f. Refill Wipes

i. In each lab, refill wipe holders. New wipes go on the bottom.

g. Refill Acid Wipes

i. In each lab with acid/base processes, refill acid (blue) wipe holders. New wipes go on the bottom.

h. Refill Pipets

i. In the lithography labs, refill the pipet holders.

i. Clean and restock lab dishware

i. In each lab with chemical processing, remove dish cart, clean using dishwashers in 215/B102, and restock in dish cabinets. This task must be performed twice per day, two dishwashers, two runs per day.

j. Pull new tacky mat / replace if empty

i. In each lab with tacky mats, pull off top layer and throw away. Replace tacky mat when layers run out.

k. Check and remove empty/waste chemical bottles

i. In each lab with chemical processing, check for empty chemical bottles and remove to D107.

ii. In each lab with chemical processing, check for user created chemical waste bottles. and remove to D107 if bottle is more than 3/4 full or creation date is over one month old.

l. Change out waste capture containers

i. In each lab with chemical processing, check chemical waste containers/carboys under benches and remove to D107 if bottle is more than 3/4 full. Replace waste container. For carboys, empty into waste container at bench and move container to D107.

m. Change out orange acid gloves

i. In each lab with chemical processing, replace all acid gloves. Throw away old gloves. Mark new gloves with date, size, and L or R. In each area, place size 6, 7, 8, 9, and 10. In bay B101, have second set of size 7, 8, and 9.

n. Check and dispose/replace sharps containers

i. In each lab, check the sharps container and replace when 3/4 full. Full container should have lid secured and taped then dispose in regular lab trash. Install new sharps container.

o. Wipe down shelves and tables as needed.

i. Coordinate with lab space owner for access to wipe down shelves and tables with IPA wipes as needed determined by space owner.

p. Vacuum or sweep space as needed

i. Coordinate with lab space owner for access to vacuum, sweep, and/or tacky roll lab as needed determined by space owner.

End of requirements

DELIVERABLES

1. Vendor shall provide weekly progress reports to the TPOC/COR that clearly identifies all tasks completed and any problems or issues encountered no later than COB the first business day following that Friday.

2. Vendor shall deliver all packing slips for inventory items received to TPOC/COR within one business day of unpacking

3. Vendor shall unpack and stock inventory items within two business days of arrival.

4. Vendor shall deliver inventory bar code scanner to TPOC within one business day of inventory completion.

5. Vendor shall deliver particle counter data stick to TPOC within one business day of monthly particle count completion.

6. Vendor invoice shall include copies of the weekly progress reports for the time period invoiced.

GOVERNMENT FURNISHED PROPERTY

The government shall furnish the following items for completion of the tasks above. All government furnished items remain the property of the government and shall stay on site at all times.

1. NanoFab specific safety training (about 1 hour)

2. Consumables required for the completion of each task

3. Cleanroom gowning and personal protective equipment

4. Air particle counter

5. Bar code scanner

6. Vacuum cleaner suitable for each lab environment

SITE VISIT

A SITE VISIT shall take place on April 23, 2022 at 10:00 a.m. Eastern Time. The site visit shall begin promptly at 10:00 a.m. Attendees must be on-site by 9:30 a.m. The site visit shall allow Contractors to view the NanoFab cleanroom and lab spaces where services will be provided.

Potential Contractors are strongly encouraged to attend the site visit. In no event shall failure to inspect the site constitute grounds for a claim after contract award. Attendees shall convene at NIST, Building 215, Lobby Area, 100 Bureau Drive, Gaithersburg, Maryland.

Site Visit Security Requirements

Because of heightened security, Contractors who are planning to attend the site visit shall e-mail their intention to attend to Forest Crumpler, at forest.crumpler@nist.gov, not later than 12:00pm on April 19, 2022, with the following information:

1) Company name

2) Names of all individuals attending the site visit

3) Country of Citizenship of all individuals attending the site visit

For non-US Citizens, the following additional information will be required:

1) Title

2) Employer/Sponsor

3) Address

Failure to register will result in individuals being denied access to NIST, and subsequently, the site visit.

It is the sole responsibility of each Contractor to register for the site visit.

Contractors must pick up a Visitor's Badge at the Visitor's Registration Center located at the Main Gate (Gate A, off Bureau Drive). Please ensure all individuals bring photo identification or they will be denied access to the facility.

Under the REAL ID Act of 2005, agencies, including NIST, can only accept a state-issued driver’s license or identification card for access to federal facilities if issued by states that are REAL ID compliant or have an extension.

Only Enhanced Driver’s Licenses (EDL) issued by the states of Michigan, Minnesota, New York, Vermont and Washington will be accepted for access to the NIST campus. These drivers’ licenses are easily identifiable by the American Flag on the face of the license.

NIST currently accepts other forms of federally issued identification in lieu of a state-issued driver’s license, such as a valid:

Passport; Passport Card; DOD’s Common Access Card (CAC); Veterans ID; Federal Agency HSPD-12 IDs; Military Dependents ID; Transportation Workers Identification Credential

(TWIC)

NIST COVID Policy