Attachment 1 - Statement of Work.pdf

Statement of Work BMF Precious Metal Sources and Reclaim

1. Background Information:

a. NIST has two ISO class 5 cleanroom facilities, located in Gaithersburg, Maryland and Boulder, CO, that support the most sensitive research done at NIST. Many of the devices that are made in the cleanrooms require the deposition of thin films of precious metals. Additionally, the cleanrooms collect spent sources and scraps and requires that this metal is reclaimed. NIST requires a vehicle to procure and reclaim these precious metals.

2. Scope of Work:

a. Objectives:

i. The goal of this contract is to provide the Government with a vehicle to procure and reclaim these precious metals required for microfabrication.

b. Specific Requirements:

i. Purchase of Precious Metals: The Government requires deposition sources composed of precious metals. These deposition sources shall be consistent with industrial standard for the semiconductor, and micro-and nano- fabrication industries, such as thermal and e-beam evaporation materials (pellets) and sputter targets. The contractor shall supply the required precious metal sources to the Government.

1. A precious metal is defined as any source that is composed of an element, or an alloy of multiple elements that includes one or more elements from the following list:

a. Gallium

b. Germanium

c. Gold

d. Indium

e. Iridium

f. Palladium

g. Platinum

h. Rhenium

i. Rhodium

j. Ruthenium

k. Silver

l. Titanium

m. Tantalum

2. The size of the required precious metal sources will vary, but examples of typical sizes are:

a. Evaporation Sources:

i. Rods: cylinders that are 0.125 to 0.25 inches high,

0.125 to 0.25 inch in diameter.

ii. Pellets: Roughly 1 – 3 mm in diameter.

b. Sputter Targets:

i. Disks and squares from 2 to 14 inches in diameter, .125 to .25 inch thick.

c. The government reserves the right to specify the exact shape and size of the required precious metal sources.

3. The quantity of the required precious metal sources will vary, but examples of typical amounts are:

a. Evaporation Sources:

i. 100 mg to 1 kg per request.

b. Sputter Targets:

i. 1 to 2 targets per request.

c. The government reserves the right to specify the exact quantity of the required precious metal sources.

4. The purity of the required precious metal sources shall be consistent with industry standards for electron and thermal evaporation sources and sputter targets and will vary by metal.

The requires that the contractor shall be able to provide the precious metals at the following minimum purity and the Government reserves the right to specify either a higher of lower purity of the required precious metal sources if it is required.

a. Gallium 99.99 %

b. Germanium 99.999%

c. Gold 99.999 %

d. Indium 99.999 %

e. Iridium 99.9 %

f. Palladium 99.95%

g. Platinum 99.99 %

h. Rhenium 99.99 %

i. Rhodium 99.9 %

j. Ruthenium 99.9 %

k. Silver 99.998 %

l. Titanium 99.995 %

m. Tantalum 99.95%

5. The precious metal sources shall be constructed to industrial standards for the corresponding source in a method that is compatible with ISO class 5 cleanrooms. The contractor shall also bond sputter targets to backing targets upon the request of the BMF using industry standard techniques such as indium bonding.

6. The precious metal sources shall be cleaned according to industrial standards (for example by chemical etching or CO2 snow clean) to remove any contamination introduced during the pellet fabrication process in a method that is compatible with ISO class 5 cleanrooms.

7. The sputter targets and pellets shall be packed in industrial standard packaging materials that are compatible with ISO class 5 cleanrooms. An example of this could include vacuum packing in a cleanroom compatible material.

8. The contractor shall supply an analysis of purity indicating the contaminants in the actual post-production precious metal source that is shipped to the Government.

ii. Reclamation services for used metal waste: When an order of precious metals is placed, the contractor shall assay and reclaim the existing stock of the Government’s precious metals and apply the value as a credit towards the order.

1. The contractor shall be able to recover precious metals from items including but not limited to:

a. Pellets

b. Crucibles used in thermal and electron beam evaporation.

c. Sputter targets.

d. General scrap of mixed metals.

e. Aluminum foil that has been coated with various of metals.

f. Vacuum cleaner bags filled with flakes of metals.

g. Bead blast media that contains metals.

2. The contractor shall be able to reclaim the following list of materials, including but not limited to:

a. Gold

b. Indium

c. Palladium

d. Palladium/Gold Alloy

i. Typically in the form of 53 % PD / 47 % Au weight percentage, but may vary.

e. Platinum

f. Silver

3. The contractor shall be able to reclaim the precious metals from general evaporator scrap and must be able to separate the precious metals from scrap that also contains but is not limited to:

a. Aluminum

b. Copper

c. Germanium

d. Nickel

e. Titanium

f. Vanadium

4. The Government reserves the right to send the contractor other materials for reclaim according to the contractors’ abilities.

5. The Government will send the contractor its precious metal stock separated by metal and labeled where possible.

6. The contractor shall supply the Government with the results of the assay and the value of the reclaim.

3. Period of Performance:

a. 5 year ordering period

4. Place of Performance:

a. NIST Boulder

b. NIST Gaithersburg

5. Government Furnished Property:

a. The Government will send the contractor its precious metal stock, as listed in section 2, separated by metal and labeled where possible.

6. Deliverables

a. The contractor shall supply the Government with the results of the assay and the value of the reclaim.

b. The contractor shall supply an analysis of purity indicating the contaminants in the actual post-production precious metal source that is shipped to the Government.

7. Attachments:

a. N/A

8. Performance Requirement Summary

Task Performance

Indicators Performance Standards

Acceptable Quality Level

Surveillance Method

The contractor shall provide the Government precious metal sources and assay and reclaim the Governments current precious metal stock according to the specifications in Section 2.

The contractor provides the Government with precious metal sources that meet the specifications in section 2, and provide the Government with a credit in accordance with the guidelines in section 2

The technical requirements defined in the statement of work section 2 are performed in a timely manner.

The precious metal sources that the contractor provides the Government are of a quality as defined in section 2.

The contractor shall supply the Government with the results of the assay and the value of the reclaim and a report that shows the major contaminants in the representative stock material of the precious metal sources.

9. Travel:

a. The contractor shall cover all travel expenses.

10. Contractor Supplied Materials

a. N/A

11. Contractor’s Minimum Qualifications

a. The contractor shall have the ability to provide the required precious metals to the Government

b. The contractor shall have the ability to assay and reclaim the precious metals that the Government will provide to the contractor.