Attachment 1 - Statement of Work.docx

STATEMENT OF WORK

Title: CHIPS R&D Laser and Optical Parametric Amplifiers for Multiphoton Microscopy Lab: Physical Measurement Laboratory

I. Background

The National Institute of Standards and Technology (NIST) Nanoscale Device Characterization Division (NDCD) develops and advances the measurement and knowledge infrastructure to characterize nano- and atom-scale engineered materials and solid-state devices for innovation in information processing, sensing, and future quantum technologies. The NDCD’s technical activities span atom scale devices, nanoscale spectroscopy, advanced electronics, nanoscale processes and measurements, and alternative computing. To meet mission requirements, the NDCD needs to procure a laser and optical parametric amplifiers (OPA). This acquisition will allow the NDCD to expand its measurement capabilities in ultrafast nonlinear optical spectroscopy and microscopy.

The Nanoscale Spectroscopy Group requires the acquisition of a laser and optical parametric amplifier system to generate ultrashort, intense infrared light pulses. This system will be used to develop new methods for thermal imaging metrology of semiconductor materials and devices. The intensity of the pulses from this system will be sufficient to produce significant nonlinear absorption beneath the surface of samples, which will allow imaging of thermal properties with both lateral and depth resolution. Achieving depth resolution in thermal imaging is a goal of the CHIPS Metrology Program’s Grand Challenge to advance metrology for future microelectronics manufacturing. This research investment will benefit the public and industry by enabling three-dimensional thermal imaging metrology, which will enable device optimizations leading to improved product reliability and performance.

II. Purpose To develop novel nonlinear spectroscopy techniques, one (1) Laser and two (2) Optical Parametric Amplifiers are required to produce intense near-infrared and mid-infrared light pulses that will be used for nonlinear absorption-based thermal metrology. The application leads to certain requirements on the pulse duration, pulse energy, wavelength tuning range, and repetition rate. The need to generate broadband continuum from a portion of the laser output sets requirements on the pulse duration. The need to produce multiphoton absorption in the sample sets a minimum pulse energy specification for the optical parametric amplifiers. The types of materials that will be studied sets the requirement on the wavelength tuning ranges of the optical parametric amplifiers. The need to pump two optical parametric amplifiers and generate supercontinuum sets a requirement on the pulse energy output of the laser. The signal to noise ratio of the experiment sets the upper limit of the repetition rate.

III. Minimum Requirements The system shall meet or exceed the minimum requirements identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components not authorized for sale in the U.S. by the Contractor is not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001:

Description: Laser Quantity: 1

1. Laser must operate at a center frequency of 1035 nm ± 8 nm.

2. Laser must have a maximum average power output of at least 40 Watts, maximum pulse energy of at least 80 µJ per pulse at a repetition rate of 500 kHz.

3. The pulse duration from the Laser must be 300 fs or less.

4. Laser output must be variable from single shot operation up to 500 kHz repetition rate.

5. Must provide a TEM00 spatial mode at the output of the Laser with beam quality factor M2 of 1.2 or less.

6. Must have a vertical output polarization direction with a polarization ratio of at least 500:1.

7. Laser must provide long term power stability of lower than 1%.

8. Laser must provide pulse-to-pulse stability over 24 hours of lower than 1%.

Line Item 0002:

Description: First Optical Parametric Amplifier Quantity: 1

i. The signal output must be continuously tunable over a range of at least 1450-1900 nm.

ii. The pulse energy of the signal output over the range 1450-1900 nm must be 1 µJ or greater for 30 µJ pump pulse energy.

iii. The pulse-to-pulse stability must be 2% or lower.

iv. The long term power stability must be 2% or lower.

Line Item 0003:

Description: Second Optical Parametric Amplifier Quantity: 1

v. The signal output must be continuously tunable over a range of at least 650-880 nm and spectral bandwidth of no greater than 250 cm-1.

vi. The idler output must be continuously tunable over a range of at least 1100-1600 nm.

vii. The pulse energy of the signal output over the range 650-880 nm must be 0.8 µJ or greater for 30 µJ pump pulse energy.

viii. The pulse energy of the idler output over the range 1100-1600 nm must be 0.6 µJ or greater for 30 µJ pump pulse energy.

ix. Must include second harmonic generation of the signal output to provide continuously tunable output from 320-505 nm.

x. The pulse-to-pulse stability must be 2% or lower.

xi. The long term power stability must be 2% or lower.

I. SCHEDULE OF DELIVERABLES

Place of Delivery

Regular Business Hours Regular business hours are Monday through Friday, 8:30 am to 5:00 pm Eastern Time, excluding Federal holidays and NIST closures.

IV. Delivery Delivery shall be FOB Destination (or equivalent terms, such as INCOTERMS Delivered Duties Paid) are required and shall occur in accordance with the deliverable schedule above.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver all Line Items to:

The National Institute of Standards and Technology 100 Bureau Drive, Building 221 Gaithersburg, MD 20899-1640

II. INSTALLATION

The system shall be installed by the Contractor and meet contract specifications no later than 4 weeks after delivery to install after delivery. Installation, at a minimum, shall include uncrating/unpackaging of all equipment, rigging, set-up and hook-up of the system, demonstration of all specifications, and removal of trash. Onsite installation and demonstration shall be done at NIST, Gaithersburg, MD- Building 221.

III. TRAINING

The contractor shall conduct training session for up to three users at NIST. The training shall provide a thorough demonstration of all system/solution functions, maintenance, data administration, and basic troubleshooting. The training may be completed at NIST Monday – Friday during the operating hours of 8:30 am to 5:00 pm immediately after installation and demonstration of specifications and must be completed no later than 14 days after installation. Further training requirements are identified below.

V. Inspection and Acceptance In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

The Government will test the Laser and Optical Parametric Amplifiers to verify that its performance meets the requirements.

The Government will test, inspect, and accept the equipment onsite within 7 business days of the receipt of the Laser and Optical Parametric Amplifiers. A visual inspection of the Laser and Optical Parametric Amplifiers will be performed by the NIST TPOC to identify surface defects or any form of indication that the items were damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the Laser and Optical Parametric Amplifiers due to defects and/or nonconformance.

VI. Warranty The contractor shall warrant the entire system for a period of a minimum of 1 year after receipt of the equipment and shall be in accordance with terms in FAR 52.212-4

VII. Payment Schedule The Contractor shall be paid, in accordance with Net 30-day payment terms, upon receipt and acceptance of a proper invoice, in accordance with the following schedule:

1. 100% after installation and acceptance by the TPOC of fully installed system.

2. The Government anticipates inspection will occur upon:

i. After the testing procedures set forth in this document have been completed NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer. Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

IV. CYBERSECURITY PRIVACY REQUIREMENTS

NIST seeks a solution that provides security and privacy protection consistent with requirements defined by applicable federal laws, regulations, policies, and standards (e.g., the Federal Information Security Management Act (FISMA), OMB Circular A-130, and FIPS Publication 200). The solution provider (including subcontractors) may meet these requirements through various means, including but not limited to FedRAMP authorization, current third-party assessments (e.g., SSAE, PCI), and/or responses to NIST special publication control set SP 800-171.

Minimally Acceptable Controls

· System security plan describing physical, technical, and administrative controls implemented to protect systems and sensitive personally identifiable information (SPII).

· IT management processes to establish and manage secure configuration baselines including routine patching for all operating systems and applications.

· Access to SPII is restricted to those with a need to know. Personnel with access to SPII have background investigations performed (e.g. criminal, financial etc.), and are trained on secure handling of SPII.

· Access Controls for SPII meet or exceed industry best practices for access and identification control including, but not limited to, connectivity to servers and databases, multi-factor authentication for remote accesses for administration, secure configurations for any devices accessing the system, and strong physical security for any place where the data is accessed.

· The solution supports multifactor authentication for users and/or supports integration with customer federation services for Single-Sign capability.

· Processes for scanning on a continual basis for vulnerabilities and proper configurations for all aspects of the system, as well as processes for timely mitigation of findings.

· Auditing and Incident Response processes including customer notification of suspected or actual incidents and logging with sufficient information to perform forensics on any incident. Processes for notifying and providing appropriate mitigations, including but not limited to credit monitoring services, for subsidy applicants in the event of suspected or actual incidents.

· SPII is encrypted in transit using TLS 1.2 or better and encrypted at rest in all places the SPII is stored. All encryption algorithms and modules are FIPS 140-2/140-3 validated.

If unable to meet any of the requirements listed above, the solution provider may provide details of mitigations or alternative protections in place to ensure the appropriate handling and protection of SPII.

If the solution provider provides services to other Federal agencies, provide a general description of the security risk management approach and client point of contact.

V. REQUIREMENTS FOR CONTRACTOR PERSONNEL

Identify all qualifications that the Contractor and/or their personnel working on this contract must possess.

Safety: The Contractor employee must be responsible for knowing and complying with all installation safety prevention regulations. Such regulations include, but are not limited to, general safety, fire prevention, and waste disposal.

Security: NIST is a restricted campus. An identification badge is required for access for entry into buildings and is shown to the armed Security Police when entering the campus.

Identification Badges: Contractor employees must comply with NIST identification and access requirements. Each Contractor employee must wear a visible identification badge provided by the NIST Security Office.

Vehicle Registration: All Contractor employees must register their vehicles with the NIST Security Office to gain access to the campus. A valid driver’s license, Government-furnished civilian ID, proof of insurance and current registration must be presented to the NIST Security Office, at which time a NIST vehicle pass will be issued. The pass must be displayed on the vehicle in accordance with NIST Security Office instructions.

Media Inquiries: The Contractor shall not respond to any media inquiries. Any inquiries from the media shall be immediately relayed to the NIST COR and/or Contracting Officer (CO). There shall be no interviews, comments, or any other response without the knowledge and approval of the NIST COR or Designated Government Official.