Attachment 1 - Statement of Work_21 Mar 23.pdf

Statement of Work

For

Reflectometer Replacement

Title: Reflectometer Replacement

Document Date: 21 March 2023

1. Scope: This effort involves the manufacturing and delivery of a spectrometer for reflectance and transmittance measurements and associated software for use on a government-owned computer and with a government-owned Hamamatsu L10290 light source. The spectrometer will include the accessories required to perform thin film thickness measurements on wafers up to 4” in diameter. The software and spectrometer will provide the capability to characterize the optical properties of the materials, such as the refractive index and extinction coefficient.

1.1. Background: Spectral reflectometry is a common optical technique for measuring film thicknesses. The combination of transmittance and reflectance spectra provides a means of optical characterization and more accurate film thickness measurement. This purchase is for a new replacement of our obsolete Filmetrics F20-UV used in the solid-state device and microelectromechanical systems (MEMS) coursework. The F20-UV is capable of performing measurements of both transmittance and reflectance though not simultaneously and requiring manual reconfiguration.

2. Applicable Documents: Not applicable

3. Requirements/Salient Characteristics:

3.1. Hardware Requirements

3.1.1. Must be capable of performing reflectrance and transmittance measurement without manual reconfiguration.

3.1.2. Must be compatible with Hamamatsu L10290 light source.

3.1.3. USB connection to PC.

3.1.4. 120 VAC, 60 Hz power.

3.1.5. Type A or Type B plug.

3.1.6. Must measure wavelengths between 200 and 1000 nm.

3.1.7. Wavelength measurement accuracy: 0.5 nm or less.

3.2. Software

3.2.1. Compatible with Microsoft Windows 10.

3.2.2. Require no more than 8 GB RAM.

3.2.3. Capable of operating without internet connection. Internet will be available for installation and software updates only.

3.2.4. Allow for simultaneous analysis of reflectance and transmittance measurements for film thickness determination and optical characterization.

3.2.5. Measurements for up to 5 layers or more.

3.2.6. All data exportable to .txt, .csv, or other Excel compatible format.

3.2.7. User control of analyzed wavelength range.

3.2.8. Must provide models for metals, semiconductors, and insulators.

3.2.9. Must allow the use of custom material properties.

3.2.10. Must provide corrections in analysis for nonuinformity in layer thickness.

3.2.11. Must provide a material database including Si, Si3N4, SiO2, Au, Al, Ag, GaN, GaAs, GaP, SiC, SU-8, S1818, Polycrystalline Si, HfO2, and BSG.

3.3. Documentation

3.3.1. Must include operating manual.

3.3.2. Provide documentation of any maintenance that may be performed by the customer.

3.3.3. Provide preventative maintenance plan to be performed by customer and/or manufacturer.

3.3.4. All documentation in English.

3.4. Support

3.4.1. Must take government credit card for parts and services related to this purchase.

3.4.2. Must provide technical support for one year from original ship date.

3.4.3. Must respond to inquiries within 5 business days.

3.5. Warranty

3.5.1. Free from defects in material and workmanship, under normal and proper use in accordance with our instructions in the maintenance manual for a period of at least one

(1) year.

4. Delivery/Period of Performance: The vendor shall deliver all the products within this Statement of Work no later than 60 Calendar days after contract award. The contractor shall be responsible for the shipping, shipping insurance, and storage of all the products associated with this

Statement of Work.4.1 Delivery Address:

Air Force Institute of Technology (AFIT/EN)

ATTN: Maj Matthew Vincie

2950 Hobson Way, Building 644, Room 117

Wright-Patterson AFB, OH 45433-7765

5. Qualifying Country Products: All products delivered to satisfy this requirement shall be manufactured in a qualifying country source in accordance with Defense Federal Acquisition

Regulation Supplement (DFARS) 225.872. Products from other than qualifying countries will not be accepted, and any costs associated with products from other than qualifying countries, including shipping, etc., shall be at the contractor’s expense.

6. Payment: Full payment after delivery and proof the system operates as designed and meets the technical requirements listed above. This proof includes a signed installation document certifying those requirements have been met. 100% payment after delivery. The contractor shall be paid upon submission of a properly prepared invoice and after final inspection and acceptance has been made.

6.1. A proper invoice shall cite the contractor’s name and address, invoice number, invoice date, order number, contract line item number (CLIN), description of the supplies or service, unit of issue, unit price and extended price, terms of any prompt payment discount offered, and who to notify in the event the invoice is defective.

6.2. The invoice shall be submitted to in Wide Area Work Flow (WAWF) in accordance with the terms of the final awarded contract.

7. Delivery Procedures Commercial Vehicles: All vehicles larger than a large pick‐up truck are required to be inspected by the Wright‐ Patterson Air Force Base Commercial Vehicle

Delivery Gate (CVDG) prior to entering the installation.

7.1. Vehicles to be inspected include, but are not limited to, the following:

7.1.1. Step van/panel truck

7.1.2. Tractor/trailer, box, and flatbed containing cargo

7.1.3. Tanker trucks

7.1.4. Box Trucks

7.1.5. Tour buses

7.1.6. Garbage/recycled waste trucks

7.1.7. Concrete trucks/mixers, dump trucks

7.1.8. Cranes, recreational vehicles, petroleum tanker

7.2. This inspection will be conducted at Gate 16A located off State Route 444. The following are exceptions to vehicles utilizing the CVDG:

7.2.1. If the vehicle has the product inside (concrete and asphalt trucks) and timely delivery is necessary due to product deterioration it does not need to enter the

CVDG. To bypass the CVDG, the contractor shall submit a list containing drivers’ names, social security numbers and the state in which the driver's license is held for those drivers who will be entering the base. This shall be accomplished 24 hours prior to requested entry time. If entry is requested on Monday, this list must be submitted by Friday at 1630 hours. All lists shall be submitted to the 88th ABW/CE

Directorate contract inspector. The only gates that may be used under this exemption shall be 15A, 26A, 38A, and gate 1B. If the driver's name is not on the list, he/she will not be allowed access to the installation through these gates and the base will not assume liability for denied access.

7.2.2. If a delivery vehicle must exit, and then re‐enter the base to complete its route, the vehicle shall be resealed upon exiting the base. After initially passing through the commercial vehicle delivery gate, trucks shall be resealed at Gates 15A, 38A and

22B. The resealing of the trucks will allow them to continue to any other area of the installation (Areas A, B, or Kittyhawk) without reprocessing through the CVDG. To receive resealing assistance, the drivers shall physically stop at one of the three authorized gates and request the installation entry controller to reseal their truck and provide the next location of their delivery. The controller will reseal the truck and give the delivery driver a pre‐clearance form. The driver shall present the pre‐ clearance form to the entry controller at the next point of installation entry. This reentry can be at any base gate.

7.2.3. Wright Patterson Integrated Defense Plan, paragraph 3.10.12.9.2. All irregular deliveries will be sent to the CVDG for inspection. All visitors, which include contractors and commercial vendors without proper background checks and contractor passes, will not be allowed on WPAFB unless escorted by the receiving agency. This will take place after the individual(s) are issued a pre‐clearance form at the CVDG. After successful completion of the vehicle inspection, the receiving agency will escort the individual to and from their destination on WPAFB. An inspector at the CVDG will contact the receiving agency, informing them to send an escort to the CVDG. Escorts will remain with the vehicle at all times while it is on

WPAFB.

7.3. Vehicles may be subject to an inspection at any of installation entry control points during a directed random antiterrorism measure (RAM). Any commercial vehicle, regardless of size, can be directed to the CVDG at the discretion of the installation entry controller.