Attachment 1 SOW.pdf

NIST Requirements Document Heated probing station with optical access and a controlled environment

I. Background The National Institute of Standards and Technology (NIST) Nanoscale Spectroscopy Group harnesses light-matter interactions for nanoscale metrology of materials and devices in critical and emerging technologies. The group’s current expertise includes nanoscale scanned-probe spectroscopy, optical techniques for spectroscopy and dynamics, manipulation of matter on the nanoscale, electronic and photonic physics, optoelectronic characterization of individual nano structures, and advancing metrology for defect-based devices. These capabilities are applied in research programs that support development in applications such as optoelectronics, future semiconductor electronics, quantum sensing, and quantum information science. NIST requires a heated probing station with optical access and a controlled environment to integrate into a home-built optics system. The project is being pursued to support the development of electo-optical measurements of defect states to support projects in diamond magnetometry and wide-bandgap semiconductors. The probe station will be used for testing the optoelectronic behavior of defects by allowing low noise electrical measurements of defects.

II. Scope To support our research activities into the electro-optic behavior of functional defect states in photoelectronic devices, The Nano Spectroscopy Group requires the purchase of one (1) heated probing station with optical access and a controlled environment. This probing station will be used for photoelectric spectroscopic studies of color centers in diamond and other semiconductors at varying electric fields and temperatures. The system must be compatible with the existing spectroscopic and electronic infrastructure.

III. Minimum Requirements The system shall meet or exceed the minimum requirements identified below. All items must be new. Used or remanufactured equipment will not be considered for award.

Experimental, prototype, or custom items will not be considered. The use of “gray market” components not authorized for sale in the U.S. by the Contractor is not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

The Contractor shall provide the following: one (1) heated probing station with optical access and a controlled environment that meet the following minimum specifications:

(1) The system must have a minimum of four electrical probes with 10 fA or lower noise, including low noise during heated measurements. System must allow for electrical isolation of the sample stage.

(2) The system must allow movement of the probes using micromanipulators without breaking the environmental control (vacuum). XYZ micromanipulators can be mechanically or remotely controllable (i.e., through piezo-electric positioners) and have positional accuracy of > 20 microns with < 40 micron probe tips.

(3) The sample mounting plate must be electrically isolated from the chamber, with external electrical connection such as a BNC or triaxial connector.

(4) Environmental control to include vacuum down to 0.01 Torr or better, and access for gas purging

(5) The system must evenly heat sample substrates of up to 10 mm x 10 mm up to temperature of 400° C with temperature stability of < 0.1° C and a controllable heating rate between 0.05° C to 20° C per minute.

(6) Sample area must allow samples of 10 mm x 10 mm with thickness of up to 1 mm.

(7) The system must be within the dimensions required by the current optics set up: the footprint of the system must be no larger than 600 mm x 300 mm and chamber must be no higher than 130 mm in the direction of optical axis. The optical access area must have clearance to allow positioning of optics such that peripheral items, such as micromanipulators for probe positioning or screwheads on the chamber, must be no be taller than the optical access area by 50 mm if located more than 40 mm from the optical access window.

(8) The sample area must be optically accessible for wavelength ranges from 900 nm to 300 nm, which can be accomplished by periodically changing out the optical access window.

(9) The optical access shall be reflection mode from the same side as the probes.

(10) The optically accessible area should be large enough to allow for access to the entire

10 mm x 10 mm sample area.

(11) To facilitate external optics, the external top of the sample chamber optical access window should be a maximum of 12 mm from the sample mounting area with a diameter of no less than 40 mm in the horizontal plane to allow access for objectives with 12 mm working distance.

(12) Any mechanical or electrical components to control the heating or chamber environment cannot be mounted to the same table as the probe station to allow vibrational isolation.

(13) Probe station must be mountable to a standard 1-inch grid optics table.

(14) The sample chamber must be able to be mounted with the sample oriented horizontally.

(15) Weight of the sample chamber and probes must not exceed 10 kg.

(16) The software control must be compatible with Python programming.

(17) All electrical facilities requirements are 60Hz and based on 120 volts.

IV. Optional items(to be determined at time of award) s:

(1) Option to purchase additional windows to extend wavelength accessibility

(2) Option for pump and connections

(3) System installation

V. SCHEDULE OF DELIVERABLES

Deliverable

Number Description Quantity Due Date

Place of Delivery 1 heated probing station with optical access One (1)

No later than 24 weeks after receipt of order

NIST Gaithersburg

2 Training of NIST users N/A No later than two

(2) months after installation

NIST Gaithersburg

3 Optional Item additional windows to extend wavelength accessibility

1 No later than 24 weeks after receipt of order

NIST Gaithersburg

4 Optional Item for pump and connections

1 No later than 24 weeks after receipt of order

NIST Gaithersburg

5 Optional Item System installation

1 No later than 24 weeks after receipt of order

NIST Gaithersburg

VI. Site Preparation NIST will prepare a vibration-insulated optical table in a laboratory with space for the probe station. This table will be in a room with temperature and humidity control, and the system will be housed in an enclosure to protect from ventilation drafts.

VII. Delivery Delivery shall be FOB Destination (or equivalent terms, such as INCOTERMS Delivered Duties Paid) are required and shall occur not later than (NLT) 24 weeks ARO.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver all Line Items to:

The National Institute of Standards and Technology 100 Bureau Drive, Building 216 Gaithersburg, MD 20899-6831

VIII. Inspection and Acceptance In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Ability to meet all the specifications under minimum requirements and as evidenced by quoted specifications from the vendor. The heated probe station system will be tested using flat photodetectors, a monochromator, thermocouples for temperature set point, infrared sensor for temperature uniformity, and high resistance samples and mounted resistors and capacitors for electrical performance. Temperature control, spectral accessibility, ability to pull vacuum, and electrical performance will be tested.

The Government will test, inspect, and accept the equipment onsite within 15 business days of the install of the heated probing station with optical access and a controlled environment. A visual inspection of the heated probing station with optical access and a controlled environment will be performed by the NIST TPOC to identify surface defects or any form of indication that the heated probing station with optical access and a controlled environment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject heated probing station with optical access and a controlled environment due to defects and/or nonconformance.

IX. Training The contractor shall offer 1 training session for up to 5 users at NIST. The training shall provide a thorough demonstration of all system/solution functions, maintenance, data administration, and basic troubleshooting. The training can be offered remotely within 2 months of installation.

X. Warranty The contractor shall warrant the entire system for a period of a minimum of 1 year after receipt of the equipment and shall be in accordance with terms in FAR 52.212-4

XI. Payment Schedule The Contractor will be paid, in accordance with the payments clause in the contract and as otherwise noted in this document, upon receipt of a proper invoice.

1. 100% after acceptance by the POC of fully installed system, AND

2. After the successful completion of the testing requirements set forth in this document under section set forth in this document, AND

3. After successful demonstration by the instrumentation that it performs in accordance with the requirements set forth in this document