Attachment 1 SOW.pdf

TEMPLATE

STATEMENT OF WORK

Title: Commercial Trace Gas Analyzer Lab: Chemical Sciences Division

I. BACKGROUND INFORMATION

The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps NIST will conduct the measurement science, or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing.

As part of CHPS Grand Challenge 1: Metrology for Materials Purity, Properties, and Provenance, we will create measurement technology, reference data and materials to perform trace impurity gas analysis at new levels of precision. Success will enable next-generation diagnostics to reliably identify impurities in process gases at sub-parts-per-billion (<1 ppb) levels. Results will drive partners to develop industry ready reference materials, point-of-use diagnostics and models to achieve breakthroughs in critical tooling like extreme ultra-violet lithography. Our diagnostics and metrology-grade data will enhance quality systems by establishing a framework for impurity fingerprinting with traceability to new gas primary standards, reference materials and documentary standards.

NIST requires a commercial trace gas analyzer to serve as a benchmark for newly developed ultra-sensitive optical diagnostics. Current optical diagnostics relied upon by the semiconductor industry suffer from trade-offs between sensitivity and quantitation.

This analyzer will be used in tandem with NIST-developed cavity ring-down spectroscopy (CRDS) to verify the performance of new analytical instrumentation and contribute to the certification of gas reference materials (RMs). This acquisition supports the CHIPS R&D Metrology Program's goal of establishing reliable data for trace impurities.

II. PURPOSE

The Chemical Sciences Division (CSD) is part of the Materials Measurement Laboratory (MML) at NIST. MML serves as the national reference laboratory for measurements in the chemical, biological, and materials sciences. MML provides the measurement science, standards, technology, and data required to support the nation's need to design, develop, manufacture, and use materials. This acquisition directly supports the Division's mission by providing a standardized tool for the verification of primary gas standards and the characterization of new high-quality semiconductor and electronics gases.

The Gas Sensing Metrology Group (GSMG) of the CSD will develop primary standards and reference materials for “zero gas” semiconductor and electronics-grade gases.

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Development of such standards will require specialized instrumentation to properly separate, identify, and quantify trace impurities at sub-parts-per-billion levels. One of the instruments needed is a trace gas analyzer. This system will be utilized to confirm impurities in pure semiconductor grade gases purchased from vendors to qualify for use in gas mixture preparations, to verify the performance of new analytical instrumentation being developed, to validate new primary gas standards blended in-house, and to contribute to the certification of gas reference materials.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered.

The use of “gray market” components are not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001:

Description: Trace Gas Analyzer Quantity: One (1)

A. Technical Specifications

a. System

i. The trace gas analyzer shall be configured for the analysis of gases to be delivered through a regulator from a gas cylinder.

ii. The trace gas analyzer shall also have capability for online sampling, with gas flow delivered by a mass flow controller.

iii. The trace gas analyzer shall have a detection limit of less than 1 part-per-billion (< 1 ppb) of impurities including, but not limited to, hydrogen (H2), carbon monoxide (CO), Nitrogen (N2), carbon dioxide (CO2), and argon (Ar) in pure gases including, but not limited to, helium (He), N2, and Ar.

iv. The trace gas analyzer shall provide automated data acquisition suitable for routine laboratory diagnostics.

b. Software

i. The trace gas analyzer shall have software to control all functions.

ii. Software documentation shall provide the user with information on how to control sample sequence, and method development.

Line Item 0002 Description: Operations and Maintenance Manual Quantity: One (1)

a. Manual

iii. The contractor shall provide paper and/or electronic versions of the operations and maintenance manuals, which cover proper operation, routine maintenance, and troubleshooting for all system components and controlling software.

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IV. SCHEDULE OF DELIVERABLES

Define all deliverables and indicate (1) the quantity desired; (2) the format in which each deliverable is to be supplied; (3) the delivery date (based on the number of weeks/days); (4) the place of delivery. The context of each deliverable shall be clear.

Keep in mind that every task does not require a deliverable. Deliverables are always tangible items (i.e., report, minutes, etc.)

Complete the table providing the information for all the tasks identified above.

Deliverable

Number Description Quantity Due Date

Place of Delivery 1 Trace Gas

Analyzer One (1)

No later than 90 days from the date of award.

NIST (Gaithersburg)

2 Operations and maintenance manual

One (1) No later than 90 days from the date of award.

NIST (Gaithersburg) or electronic delivery if digital format

3 Installation Once No later than 30 days from receipt of instrument

NIST (Gaithersburg)

4 Training Once No later than 30 days from receipt of instrument

NIST (Gaithersburg)

Standards of Acceptance: The NIST POC or COR shall review all the above deliverables and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within 30 days of receipt of deliverable. This section applies to deliverables which must be reviewed and approved for acceptances (e.g., draft plans, drawings, etc.)

PLACE OF PERFORMANCE

The Contractor shall provide instrument delivery, installation, and training at the National Institute of Standards and Technology, 100 Bureau Dr., Gaithersburg, MD 20899, Building 227.

Regular Business Hours (usually pertains if work is being performed onsite at NIST; otherwise, delete if not needed).

Regular business hours are Monday through Friday, (8:30 am to 5:00 pm) Eastern Time, excluding Federal holidays and NIST closures.

PERIOD OF PERFORMANCE

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Instrument delivery shall occur within 90 days after date of award. Installation shall occur within 30 days after receipt of instrument, unless laboratory repairs prohibit installation. In the case of such repairs, instrument installation will be scheduled once laboratory conditions are suitable. Training shall occur within 30 days of installation.

V. DELIVERY TERMS

Delivery shall be F.O.B Destination (or equivalent incoterms, such as DDP) and shall occur in accordance with the delivery due dates provided in the below table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

The contractor shall deliver all Line Items to:

National Institute of Standards and Technology Shipping and Receiving 100 Bureau Drive, Building 301 Gaithersburg, MD 20899 POC Jennifer Carney, Building 227

VI. INSTALLATION

The system shall be installed by the Contractor and meet contract specifications no later than 30 days after delivery. Installation, at a minimum, shall include uncrating/unpackaging of all equipment, rigging, set-up and hook-up of the system, demonstration of all specifications, and removal of trash. Onsite installation and demonstration shall be done at NIST, (Gaithersburg, MD- Building 227.) Installation shall take place during normal business hours, between 8:30 am and 5:00 pm Eastern Time, Monday through Friday except Federal Holidays, and shall be coordinated with the NIST Technical Point of Contact (TPOC). Installation shall occur within 30 days after receipt of instrument.

VII. TRAINING

The contractor shall conduct training session for up to two (2) users at NIST. The training shall provide a thorough demonstration of all system/solution functions, maintenance, data administration, and basic troubleshooting. The training may be completed at NIST Monday – Friday during the operating hours of 8:30am and 5:00pm Eastern Time immediately after installation and demonstration of specifications and must be completed no later than 30 days after installation.

VIII. INSPECTION & ACCEPTANCE

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In addition to the inspection and acceptance terms articulated in the specific FAR clause that allows the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST POC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 30 days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

IX. WARRANTY

The contractor shall warranty the entire system for a period of a minimum of one year after receipt of the equipment and shall be in accordance with terms in FAR 52.212-4.

Warranty shall commence upon acceptance of the system by the Government and at a minimum shall include the following:

The Contractor shall provide, at a minimum, a one-year warranty for the equipment.

The warranty shall cover all parts, labor and travel. The warranty shall commence upon successful completion of delivery, installation, training and demonstration of all required specifications.

X. PAYMENT SCHEDULE

The Contractor will be paid, in accordance with the payments clause in the contract and as otherwise noted in this document, upon receipt of a proper invoice.

1. 100% after installation and acceptance by the POC of fully installed system, AND

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2. After the successful completion of the testing requirements set forth in this document under section set forth in this document, AND

3. After successful demonstration by the instrumentation that it performs in accordance with the requirements set forth in this document.

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer.

Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

XI. CYBERSECURITY PRIVACY REQUIREMENTS

NIST seeks a solution that provides security and privacy protection consistent with requirements defined by applicable federal laws, regulations, policies, and standards (e.g., the Federal Information Security Management Act (FISMA), OMB Circular A-130, and FIPS Publication 200). The solution provider (including subcontractors) may meet these requirements through various means, including but not limited to FedRAMP authorization, current third-party assessments (e.g., SSAE, PCI), and/or responses to NIST special publication control set SP 800-171.

Minimally Acceptable Controls

• System security plan describing physical, technical, and administrative controls implemented to protect systems and sensitive personally identifiable information

(SPII).

• IT management processes to establish and manage secure configuration baselines including routine patching for all operating systems and applications.

• Access to SPII is restricted to those with a need to know. Personnel with access to SPII have background investigations performed (e.g. criminal, financial etc.), and are trained on secure handling of SPII.

• Access Controls for SPII meet or exceed industry best practices for access and identification control including, but not limited to, connectivity to servers and databases, multi-factor authentication for remote accesses for administration, secure configurations for any devices accessing the system, and strong physical security for any place where the data is accessed.

• The solution supports multifactor authentication for users and/or supports integration with customer federation services for Single-Sign capability.

• Processes for scanning on a continual basis for vulnerabilities and proper configurations for all aspects of the system, as well as processes for timely mitigation of findings.

• Auditing and Incident Response processes including customer notification of suspected or actual incidents and logging with sufficient information to perform forensics on any incident. Processes for notifying and providing appropriate

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• SPII is encrypted in transit using TLS 1.2 or better and encrypted at rest in all places the SPII is stored. All encryption algorithms and modules are FIPS 140- 2/140-3 validated.

If unable to meet any of the requirements listed above, the solution provider may provide details of mitigations or alternative protections in place to ensure the appropriate handling and protection of SPII.

If the solution provider provides services to other Federal agencies, provide a general description of the security risk management approach and client point of contact.

XII. ATTACHMENTS

No attachments added.

XIII. REQUIREMENTS FOR CONTRACTOR PERSONNEL (Remove if not applicable)

Identify all qualifications that the Contractor and/or their personnel working on this contract must possess.

Safety: The Contractor employee must be responsible for knowing and complying with all installation safety prevention regulations. Such regulations include, but are not limited to, general safety, fire prevention, and waste disposal.

Security: NIST is a restricted campus. An identification badge is required for access for entry into buildings and is shown to the armed Security Police when entering the campus.

Identification Badges: Contractor employees must comply with NIST identification and access requirements. Each Contractor employee must wear a visible identification badge provided by the NIST Security Office.

Vehicle Registration: All Contractor employees must register their vehicles with the NIST Security Office to gain access to the campus. A valid driver’s license, Government-furnished civilian ID, proof of insurance and current registration must be presented to the NIST Security Office, at which time a NIST vehicle pass will be issued.

The pass must be displayed on the vehicle in accordance with NIST Security Office instructions.

Media Inquiries: The Contractor shall not respond to any media inquiries. Any inquiries from the media shall be immediately relayed to the NIST COR and/or Contracting

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Officer (CO). There shall be no interviews, comments, or any other response without the knowledge and approval of the NIST COR or Designated Government Official.