Attachment 1 - SOW.pdf

STATEMENT OF WORK

Title: CW OPO Laser System

Lab: Material Measurement Laboratory

I. BACKGROUND INFORMATION

The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps NIST will conduct the measurement science, or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing.

The CHIPS Metrology Program includes research in Grand Challenge 1, Metrology for Materials Purity, Properties and Provenance. To address this Grand Challenge, the project Optical Impurity Analysis of Semiconductor Gases for Enhanced Quality Systems seeks to purchase a CW OPO Laser System to perform ultrasensitive cavity ring-down and cavity-enhanced spectroscopy on gas-phase samples. The project is led by the Chemical Science Division of the NIST Material Measurement Laboratory, the nation’s premier metrology laboratory for measurement science, standards, technology, and data in the area of chemical sciences.

II. PURPOSE

NIST seeks to procure a Continuous Wave (CW) Optical Parametric Oscillator (OPO) Laser System capable of performing high resolution laser spectroscopy with incredible precision, sensing trace impurities in specialty-grade semiconductor and electronics gases at the part-per-trillion level and below. To improve sensitivity, optical cavities are used to enhance the interaction pathlength between a laser source and a gas-phase sample. Here we aim to detect trace impurities in gas-phase samples relevant to the semiconductor industry like the detection of small molecules in bulk zero gases like nitrogen (N2) and argon (Ar). To achieve this goal, we seek a CW OPO Laser System for use at wavelengths throughout the near- and mid-infrared wavelength regions.

We will create measurement technology, reference data and materials to perform trace impurity gas analysis at new levels of precision. Success will enable next-generation diagnostics to reliably identify impurities in process gases at sub-parts-per-billion (<1 ppb) levels. Results will drive the development of industry-ready reference materials, point-of-use diagnostics and models to achieve breakthroughs in critical tooling like extreme ultra-violet lithography. Our diagnostics and metrology-grade data will enhance quality systems by establishing a framework for impurity fingerprinting with traceability to new gas primary standards, reference materials and documentary standards. Missing crucial equipment will severely jeopardize the timeline of the CHIPS Metrology Program, resulting in failure to meet specific project plan deliverable like “New primary standards blending” due in FY26 and lead to a cascade of impacts on future deliverables like “Certify SRMs, RMs” related to standards and semiconductor/electronics grade gases in support of metrology for materials purity, properties, and provenance.

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III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental or prototype items will not be considered. The use of “gray market” components are not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001:

Description: Continuous Wave Optical Parametric Oscillator (CW OPO) Laser System Quantity: Quantity one (1)

A. Technical Specifications

a. CW OPO Laser System shall comprise a pump laser source, signal laser output, idler laser output, laser system control electronics, wavelength meter, and wavelength stabilization controls.

b. Pump laser source specifications

i. CW OPO laser source shall include a fiber-coupled pump laser output pickoff port with pump laser power greater than 0.5 mW.

c. Signal laser output specifications

i. Signal output tunable range inclusive of 1500 nm to 2000 nm.

ii. Signal output power greater than 1 mW for all signal wavelengths.

iii. Peak signal output power greater than 200 mW.

iv. Free-running signal laser linewidth less than 1 MHz.

d. Idler laser output specifications

i. Idler output tunable range inclusive of 2300 nm to 4000 nm.

ii. Idler output power greater than 1 mW for all idler wavelengths.

iii. Peak idler output power greater than 200 mW.

iv. Free-running idler laser linewidth less than 1 MHz.

v. Idler mode-hope-free tuning range greater than 15 GHz.

e. Laser system control electronics specifications

i. Power supply compatible with standard US electrical outlets, 110 V and 60 Hz.

ii. Communication with a Windows-based personal computer available over ethernet, USB, and/or GPIB.

iii. Fast frequency modulation and frequency locking tools provided for frequency stabilization of the pump laser source.

f. Wavelength meter specifications

i. Wavelength measurement range inclusive of 1000 nm to 2000 nm.

ii. Absolute accuracy better than or equal to 200 MHz.

iii. Measurement speed greater than or equal to 500 Hz.

iv. Multichannel fiber optic input

v. Software based proportional-integral-derivative controller

g. Wavelength stabilization controls specifications

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i. User interface (hardware and/or software) for precision idler laser output wavelength control and stabilization via the wavelength meter.

h. All optical fibers, switches, connectors, and cables required to operate the CW OPO Laser System as specified shall be included.

i. All electronic cables, switches, and connectors required to operate the CW OPO Laser System as specified shall be included.

j. All power supply cables required to operate the CW OPO Laser System as specified shall be included.

IV. SCHEDULE OF DELIVERABLES

Deliverable

Number Description Quantity Due Date

Place of Delivery 1 CW OPO Laser

System 1 No later than

24 weeks after receipt of order

NIST Gaithersburg

Standards of Acceptance: The NIST POC or COR shall review all the above deliverables and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within 15 working days of receipt of deliverable. This section applies to deliverables which must be reviewed and approved for acceptances (e.g., draft plans, drawings, etc.).

PLACE OF PERFORMANCE

Contractor’s.

PERIOD OF PERFORMANCE

No later than 24 weeks from the date of award.

V. DELIVERY TERMS

Delivery shall be F.O.B Destination (or equivalent incoterms, such as DDP) and shall occur in accordance with the delivery due dates provided in the below table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

The contractor shall deliver all Line Items to:

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National Institute of Standards and Technology Shipping and Receiving 100 Bureau Drive, Building 301 Gaithersburg, MD 20899 C/O Adam J. Fleisher, Building 221, Room A117

VI. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in the specific FAR clause that allows the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

1. Cavity ring-down spectroscopy

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST POC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 15 working days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

VII. CYBERSECURITY PRIVACY REQUIREMENTS

NIST seeks a solution that provides security and privacy protection consistent with requirements defined by applicable federal laws, regulations, policies, and standards (e.g., the Federal Information Security Management Act (FISMA), OMB Circular A-130, and FIPS Publication 200). The solution provider (including subcontractors) may meet

5 | P a g e these requirements through various means, including but not limited to FedRAMP authorization, current third-party assessments (e.g., SSAE, PCI), and/or responses to NIST special publication control set SP 800-171.

Minimally Acceptable Controls

• System security plan describing physical, technical, and administrative controls implemented to protect systems and sensitive personally identifiable information

(SPII).

• IT management processes to establish and manage secure configuration baselines including routine patching for all operating systems and applications.

• Access to SPII is restricted to those with a need to know. Personnel with access to SPII have background investigations performed (e.g. criminal, financial etc.), and are trained on secure handling of SPII.

• Access Controls for SPII meet or exceed industry best practices for access and identification control including, but not limited to, connectivity to servers and databases, multi-factor authentication for remote accesses for administration, secure configurations for any devices accessing the system, and strong physical security for any place where the data is accessed.

• The solution supports multifactor authentication for users and/or supports integration with customer federation services for Single-Sign capability.

• Processes for scanning on a continual basis for vulnerabilities and proper configurations for all aspects of the system, as well as processes for timely mitigation of findings.

• Auditing and Incident Response processes including customer notification of suspected or actual incidents and logging with sufficient information to perform forensics on any incident. Processes for notifying and providing appropriate mitigations, including but not limited to credit monitoring services, for subsidy applicants in the event of suspected or actual incidents.

• SPII is encrypted in transit using TLS 1.2 or better and encrypted at rest in all places the SPII is stored. All encryption algorithms and modules are FIPS 140- 2/140-3 validated.

If unable to meet any of the requirements listed above, the solution provider may provide details of mitigations or alternative protections in place to ensure the appropriate handling and protection of SPII.

If the solution provider provides services to other Federal agencies, provide a general description of the security risk management approach and client point of contact.