Attachment 1 SOW.pdf

TEMPLATE

STATEMENT OF WORK

Title: Sonic Nozzle Gas Mixing Systems Lab: Material Measurement Laboratory (MML)

I. BACKGROUND INFORMATION

The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps NIST will conduct the measurement science, or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing.ௗ

The CHIPS Metrology Program includes research in Grand Challenge 1, Metrology for Materials Purity, Properties and Provenance. To address this Grand Challenge, the project Optical Impurity Analysis of Semiconductor Gases for Enhanced Quality Systems seeks to purchase Sonic Nozzle Gas Mixing Systems to perform ultrasensitive cavity ring-down and cavity-enhanced spectroscopy on gas-phase samples, standards, and reference materials. The project is led by the Chemical Science Division (CSD) of the NIST Material Measurement Laboratory (MML), the nation’s premier metrology laboratory for measurement science, standards, technology, and intelligent data in the area of chemical sciences.

II. PURPOSE

NIST seeks to procure Sonic Nozzle Gas Mixing Systems capable of performing the precision dilution of raw gas materials to deliver high-accuracy amount-of-substance mixtures and standard reference materials. These materials are required to 1) certify specialty-grade semiconductor and electronics gases at the part-per-trillion level and 2) safely dilute toxic gases for controlled delivery to optical instruments. Here we aim to detect trace impurities in gas-phase samples relevant to the semiconductor industry like the detection of small molecules in bulk zero gases like nitrogen (N2) and argon (Ar). To achieve this goal, we seek Sonic Nozzle Gas Mixing Systems for use with blank gases, inert gases, and potentially toxic and corrosive gases.

This project will create the measurement technology, reference data, and materials to perform trace impurity gas analysis at new levels of precision. Success will enable next-generation diagnostics to reliably identify impurities in process gases at sub-parts-per-billion (<1 ppb) levels. Results will drive the development of industry-ready reference materials, point-of-use diagnostics, and models to achieve breakthroughs in critical tooling like extreme ultra-violet lithography. Our diagnostics and metrology-grade data will enhance quality systems by establishing a framework for impurity fingerprinting with traceability to new gas primary standards, reference materials, and documentary standards. Missing crucial equipment will severely jeopardize the timeline of the CHIPS Metrology Program, resulting in failure to meet specific project plan deliverables like

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“New primary standards blending” due in FY26 and lead to a cascade of impacts on future deliverables like “Certify SRMs, RMs” related to standards and semiconductor/electronics grade gases in support of metrology for materials, purity, properties, and provenance.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered.

The use of “gray market” components are not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001:

Description: Sonic Nozzle Gas Mixing Instruments Quantity: Three (3)

A. Technical Specifications

a. Gas mixing systems with sonic nozzles and/or orifices

b. Minimum of one dilution gas inlet

c. Minimum of one source gas inlet

d. Minimum of one mixed gas outlet

e. All gas inlet and outlet fittings shall be 1/4-inch metal gasket face seal fittings (i.e., VCR)

f. Number of source gas dilution points equal to 1024

g. Relative uncertainty in dilution of <1 %

h. Relative stability in dilution precision of <0.5 %

i. Compatible with both air and nitrogen dilution gases

j. Gas outlet flow rate adjustable by bypass valve

i. Maximum gas outlet flow rate of 5 L min−1

ii. Targeted gas outlet flow rate of 0.1 L min−1 achievable with bypass valve

k. Gas outlet pressure up to 100 kPa

l. Power supply voltage compatible with 120 V standard US wall outlet

m. Physical size compatible with standard 19-inch instrument rack

n. USB communication with personal computer (personal computer not included)

Line Item 0002:

Description: Silconert Coating Quantity: Two (2)

A. Technical Specifications

a. Quantity two (2) of Line Item 0001 shall be coated internally with Silconert coating

Line Item 0003:

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Description: Additional Outlets Quantity: Two (2)

A. Technical Specifications

a. In addition to Line Item 0002, the same quantity two (2) of Line Item 0001 shall have an additional four diluted gas Silconert coated inlets

Line Item 0004:

Description: Portable Case Quantity: One (1)

A. Technical Specifications

a. Portable case for sonic nozzle mixing instruments

Line Item 0005:

Description: Installation, Startup, and Training Quantity: One (1)

A. Technical Specifications

a. Installation, startup, and training at NIST Gaithersburg

IV. SCHEDULE OF DELIVERABLES

Deliverable

Number Description Quantity Due Date

Place of Delivery 1 Sonic Nozzle Gas

Mixing Instruments

Three (3)

No later than 10 weeks after receipt of order

NIST Gaithersburg

2 Silconert Coating Two (2) No later than 10 weeks after receipt of order

NIST Gaithersburg

3 Additional Inlets Two (2) No later than 10 weeks after receipt of order

NIST Gaithersburg

4 Portable Case One (1) No later than 10 weeks after receipt of order

NIST Gaithersburg

5 Installation, Startup, and Training

One (1) No later than 14 weeks after receipt of order

NIST Gaithersburg

Standards of Acceptance: The NIST POC or COR shall review all the above deliverables and respond with an acceptance or request for revision email to the

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Contractor Point of Contact (POC) within 30 days of receipt of deliverable. This section applies to deliverables which must be reviewed and approved for acceptances (e.g., draft plans, drawings, etc.).

PLACE OF PERFORMANCE

Contractor’s site, NIST Gaithersburg.

Regular Business Hours.

Regular business hours are Monday through Friday, (revise as applicable 9:30 am to 5:00 pm) Eastern Time, excluding Federal holidays and NIST closures. (Add applicable language if applicable)

PERIOD OF PERFORMANCE

Line item 0001 no later than 10 weeks after receipt of award.

Line item 0002 no later than 10 weeks after receipt of award.

Line item 0003 no later than 10 weeks after receipt of award.

Line item 0004 no later than 10 weeks after receipt of award.

Line item 0005 no later than 14 weeks after receipt of award.

V. DELIVERY TERMS

Delivery shall be F.O.B Destination (or equivalent incoterms, such as DDP) and shall occur in accordance with the delivery due dates provided in the below table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

The contractor shall deliver all Line Items to:

National Institute of Standards and Technology Shipping and Receiving 100 Bureau Drive, Building 301 Gaithersburg, MD 20899 C/O/ Adam J. Fleisher, Bldg. 221, Room A117

VI. INSTALLATION

The system shall be installed by the Contractor and meet contract specifications no later than four weeks after delivery. Installation, at a minimum, shall include uncrating/unpackaging of all equipment, rigging, set-up and hook-up of the system, 5 | P a g e demonstration of all specifications, and removal of trash. Onsite installation and demonstration shall be done at NIST, Gaithersburg, MD- Buildings 221 and 227.

VII. TRAINING

The contractor shall conduct training session for up to three (3) users at NIST. The training shall provide a thorough demonstration of all system/solution functions, maintenance, data administration, and basic troubleshooting. The training may be completed at NIST Monday – Friday during the operating hours of 9:30 am to 5:00 pm immediately after installation and demonstration of specifications and must be completed no later than four weeks after installation.

VIII. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in the specific FAR clause that allows the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

1. No additional tests.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST POC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 30 days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

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IX. WARRANTY

The contractor shall warranty the entire system for a period of a minimum of one year after receipt of the equipment and shall be in accordance with terms in FAR 52.212-4.

Warranty shall commence upon acceptance of the system by the Government and at a minimum shall include the following:

Parts and labor.

X. PAYMENT SCHEDULE

The Contractor will be paid, in accordance with the payments clause in the contract and as otherwise noted in this document, upon receipt of a proper invoice.

1. 100% after installation and acceptance by the POC of fully installed system, AND

2. After the successful completion of the testing requirements set forth in this document under section set forth in this document, AND

3. After successful demonstration by the instrumentation that it performs in accordance with the requirements set forth in this document

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer.

Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.