Attachment 1 SOW.docx

STATEMENT OF WORK

Title: Arbitrary waveform or vector signal generator Lab: CTL

I. BACKGROUND INFORMATION

The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps NIST will conduct the measurement science, or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing.

The National Institute of Standards and Technology (NIST) requires an Arbitrary Waveform Generator (AWG) and a real-time oscilloscope. These are commonly used to in radiofrequency (RF) metrology to generate waveforms and measure waveforms. In the semiconductor industry, complex electrical waveforms are used during etching and deposition processes. A variety of measurement tools are used to monitor waveforms during these processes to ensure processes are consistent from wafer to wafer. One of the key goals for Project 5.04 is to establish traceability for these measurement tools. To do this, we need an AWG to be able to generate test signals, and an oscilloscope to make precise measurements. Traceability will help manufactures make these measurements more accurate and consistent, thus increasing yield.

II. PURPOSE

This Arbitrary Waveform Generator (AWG) and a real-time oscilloscope is needed for a project “RF Waveform and Rapid Frequency-Comb Diagnostics for Plasma Etching”, which is part of the CHIPS metrology program’s Grand Challenge 5, “Modeling/Simulating Semiconductor Manufacturing Processes”. The equipment will be purchased by NIST’s RF Technology Division. Part of the mission of the RF technology division is to develop techniques for fundamental electromagnetic metrology.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components are not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001:

Description: Arbitrary Waveform Generator (AWG) Quantity: One (1):

A. Technical Specifications

a. The AWG shall have at least two channels that generate output voltage waveforms.

b. The AWG shall have a maximum sampling rate of at least 5 GS/s (5 billion samples per second). The AWG should have a sampling rate of at least 9 GS/s.

c. The AWG shall have sufficient memory to store a waveform with at least 1 ms duration at its fastest sampling rate.

d. The resolution of the AWG shall be at least 12 bits.

e. The AWG shall be capable of generating a TTL marker signal.

f. The AWG and oscilloscope should have the ability for their sample timing to be based on a shared clock.

g. The AWG should be able to attach to a PXIe chassis, along with the oscilloscope, so that it the system can be upgraded in the future.

h. The AWG shall have an output impedance of 50 Ohms

Line Item 0002:

Description: Real-Time Oscilloscope Quantity: One (1) A. Technical Specifications:

a. The Real-Time Oscilloscope shall have at least two channels that record input voltage waveforms.

b. The Oscilloscope shall have a maximum sampling rate of at least 5 GS/s (5 billion samples per second). The oscilloscope should have a sampling rate of at least 9 GS/s.

c. The resolution of the oscilloscope shall be at least 12 bits.

d. The Oscilloscope shall have sufficient memory to store a waveform with at least 1 ms duration at its fastest sampling rate.

e. The oscilloscope and AWG should have the ability for their sample timing to be based on a shared clock.

f. The oscilloscope should be able to attach to a PXIe chassis, along with the AWG, so that it the system can be upgraded in the future.

g. The oscilloscope shall have an input impedance of 50 Ohms.

Line Item 0003: OPTIONAL LINE ITEM Description: PXIe chassis Quantity: One (1) A. Technical specifications:

a. The PCIe chassis shall be capable of accommodating the AWG and oscilloscope.

b. With both AWG and Oscilloscope installed in the PXIe chassis, there shall be open slots to allow for more instruments to be installed in the future.

c. Alternatively, a vendor may describe options to upgrade the number of input or output channels available in items 0001 and 0002. A higher confidence rating will be determined through a combination of the number of channels in the product(s) the vendor offers for items 0001 and 0002, the potential for future upgrades, and the cost of future upgrades.

IV. SCHEDULE OF DELIVERABLES

Place of Delivery

Standards of Acceptance: The NIST POC or COR shall review all the above deliverables and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within thirty (30) of receipt of deliverable. This section applies to deliverables which must be reviewed and approved for acceptances (e.g., draft plans, drawings, etc.)

V. DELIVERY TERMS

Delivery shall be F.O.B Destination (or equivalent incoterms, such as DDP) and shall occur in accordance with the delivery due dates provided in the below table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

The contractor shall deliver all Line Items to:

National Institute of Standards and Technology Shipping and Receiving 325 Broadway Boulder, CO, 80305

VI. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in the specific FAR clause that allows the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

1. NIST POC may generate and measure waveforms using the items to verify that they meet their specifications.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST POC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within thirty (30) working days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

VII. WARRANTY

The contractor shall warranty the entire system for a period of a minimum of one (1) year after receipt of the equipment and shall be in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government and at a minimum shall include all materials, labor, and shipping costs.

VIII. PAYMENT SCHEDULE

The Contractor shall be paid, in accordance with Net 30-day payment terms, upon receipt and acceptance of a proper invoice, in accordance with the following schedule:

1. 100% after inspection and acceptance by the TPOC of fully installed system.

Advanced payment is not authorized.

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