Attachment 1 - SOW.docx

STATEMENT OF WORK

Title: X-ray tube source

I. BACKGROUND INFORMATION

The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps NIST will conduct the measurement science, or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing.

The CHIPS Research and Development Office is sponsoring a NIST research project to study the x-ray properties of materials used in the semiconductor industry. Specifically, the project aims to perform complete, accurate, modern measurements of the fundamental atomic parameters that govern x-ray emission and absorption processes for semiconductor-relevant chemical elements. These atomic x-ray data are used by vendors who make x-ray analysis tools used in the industry, such as x-ray fluorescence spectroscopy analyzers. NIST’s Physical Measurements Laboratory (PML), Quantum Sensors Division (QSD) uses novel cryogenic microcalorimeters to perform x-ray spectroscopic measurements of unprecedented energy resolution.

NIST seeks an x-ray emission source to enable these measurements. The source will be used in a standard laboratory setting, exciting x-ray fluorescence from a range of solid samples. NIST’s cryogenic calorimeter spectrometers will then characterize the fluorescence emission. The objective of the required x-ray source is to enable wholesale updating of the standard x-ray data relevant to the analytical needs in the semiconductor industry.

II. PURPOSE

NIST seeks an x-ray emission source to enable measurements of the fundamental atomic properties of materials used in semiconductor manufacturing. The source will emit x rays of energy up to 15 keV. It will be used in a standard laboratory setting, to excite x-ray fluorescence from a range of solid samples. NIST’s cryogenic calorimeter spectrometers will then characterize the fluorescence emission spectra. Standard x-ray data tables will be expanded to include these new, improved information. The objective of this acquisition is an x-ray source, capable of varying key source parameters (accelerating voltage, output intensity) and offering some degree control over the source spectrum, by use of two or more anode materials. Built-in x-ray safety systems are required.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components is not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001:

Description: X-ray tube source with multiple anodes Quantity: 1 A. Technical Specifications

a. Operation with electron acceleration voltage of at least 15 kV.

b. Power of at least 10 watts.

c. Include power supply and necessary wiring.

d. Safety system to include:

i. Hand-operated shutoff switch

ii. Physical key required to energize the source

iii. Safety interlock: source can only be energized when its output is under partial vacuum.

OPTION Line Item 0002:

Description: Additional anodes Quantity: 1 to 6 A. Technical Specifications

a. Additional anode materials to vary the x-ray output spectrum. This can be accomplished by either:

a. Supplying a single x-ray source with user-exchangeable anodes

b. Supplying a second separate sources with a distinct anode

OPTION Line Item 0003:

Description: Higher-voltage operation Quantity: n/a B. Technical Specifications

a. Electron acceleration potential up to 20 kV, 25 kV, or 30 kV, at vendor’s discretion, only required as an option if the base model (line item 0001) does not operate above 15 kV.

OPTION Line Item 0004:

Description: X-ray focusing or collimating optics Quantity: 1 A. Technical Specifications

a. An optic to focus x rays to a mm-scale spot, or an optic to collimate into a parallel beam, or both.

IV. SCHEDULE OF DELIVERABLES

Place of Delivery

Standards of Acceptance: The NIST POC or COR shall review all the above deliverables and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within 4 weeks of receipt of deliverable. This section applies to deliverables which must be reviewed and approved for acceptances (e.g., draft plans, drawings, etc.)

V. DELIVERY TERMS

Delivery shall be F.O.B Destination (or equivalent incoterms, such as DDP) and shall occur in accordance with the delivery due dates provided in the above table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

The contractor shall deliver all Line Items to:

National Institute of Standards and Technology Shipping and Receiving 325 Broadway, Building 24 Boulder, Colorado 80305

VI. TRAINING

The contractor shall conduct training session for up to five users at NIST. The training shall provide a thorough demonstration of all system/solution functions, maintenance, data administration, and basic troubleshooting. The training may be completed remotely Monday – Friday during the operating hours of 9 am – 5 pm Mountain Time immediately after installation and demonstration of specifications and must be completed no later than 30 days after installation. Further training requirements are identified below:

a. After the system passes the site acceptance test, the contractor shall train users on the operation and maintenance of the system.

b. The contractor shall supply the initial installation manual, utility requirements, full system design schematics, and a diagram showing the tool footprint, measurements, and wall penetrations for the system at the time of award.

VII. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in the specific FAR clause that allows the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

1. List performance tests here if applicable

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST POC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 30 days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

VIII. WARRANTY

The contractor shall warranty the entire system for a period of a minimum of 1 year after acceptance of the equipment and shall be in accordance with terms in FAR 52.212-4.

IX. PAYMENT SCHEDULE

The Contractor will be paid, in accordance with the payments clause in the contract and as otherwise noted in this document, upon receipt of a proper invoice.

1. 100% after installation and acceptance by the POC of fully installed system, AND

2. After the successful completion of the testing requirements set forth in this document, AND

3. After successful demonstration by the instrumentation that it performs in accordance with the requirements set forth in this document.

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer. Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

X. CYBERSECURITY PRIVACY REQUIREMENTS

NIST seeks a solution that provides security and privacy protection consistent with requirements defined by applicable federal laws, regulations, policies, and standards (e.g., the Federal Information Security Management Act (FISMA), OMB Circular A-130, and FIPS Publication 200). The solution provider (including subcontractors) may meet these requirements through various means, including but not limited to FedRAMP authorization, current third-party assessments (e.g., SSAE, PCI), and/or responses to NIST special publication control set SP 800-171.

Minimally Acceptable Controls

· System security plan describing physical, technical, and administrative controls implemented to protect systems and sensitive personally identifiable information (SPII).

· IT management processes to establish and manage secure configuration baselines including routine patching for all operating systems and applications.

· Access to SPII is restricted to those with a need to know. Personnel with access to SPII have background investigations performed (e.g. criminal, financial etc.), and are trained on secure handling of SPII.

· Access Controls for SPII meet or exceed industry best practices for access and identification control including, but not limited to, connectivity to servers and databases, multi-factor authentication for remote accesses for administration, secure configurations for any devices accessing the system, and strong physical security for any place where the data is accessed.

· The solution supports multifactor authentication for users and/or supports integration with customer federation services for Single-Sign capability.

· Processes for scanning on a continual basis for vulnerabilities and proper configurations for all aspects of the system, as well as processes for timely mitigation of findings.

· Auditing and Incident Response processes including customer notification of suspected or actual incidents and logging with sufficient information to perform forensics on any incident. Processes for notifying and providing appropriate mitigations, including but not limited to credit monitoring services, for subsidy applicants in the event of suspected or actual incidents.

· SPII is encrypted in transit using TLS 1.2 or better and encrypted at rest in all places the SPII is stored. All encryption algorithms and modules are FIPS 140-2/140-3 validated.

If unable to meet any of the requirements listed above, the solution provider may provide details of mitigations or alternative protections in place to ensure the appropriate handling and protection of SPII.

If the solution provider provides services to other Federal agencies, provide a general description of the security risk management approach and client point of contact.

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