Attachment 1 SOW (1).docx

STATEMENT OF WORK

Title: Vector Network Analyzer

I. BACKGROUND INFORMATION

The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps NIST will conduct the measurement science, or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing.

This SOW describes equipment needed for a project “RF Waveform and Rapid Frequency-Comb Diagnostics for Plasma Etching”, which is part of the CHIPS metrology program’s Grand Challenge 5, “Modeling/Simulating Semiconductor Manufacturing Processes”. The equipment will be purchased by NIST’s RF Technology Division. Part of the mission of the RF technology division is to develop techniques for fundamental electromagnetic metrology.

In this case, the research project “RF Waveform and Rapid Frequency-Comb Diagnostics for Plasma Etching” focuses on high-power waveform metrology. High-power RF waveforms are used in semiconductor plasma processing, including etching and deposition processes. These processing steps are very common in semiconductor manufacturing. The characteristics of the waveforms impact the quality of the resulting chips. But industry lacks the ability to accurately measure these waveforms. We aim to close that gap by developing high-power waveform measurement techniques.

One of the key tools for our approach to waveform metrology is a Vector Network Analyzers (VNA). The VNA will be used to characterize the measurement system, including the waveguides, couplers, connectors, and other components that complicate the interpretation of radiofrequency (RF) measurements. This characterization will be accomplished by well-established techniques such as the Short-Open-Load calibration, with additional amplitude and phase calibrations. By characterizing these components, we aim to measure the amplitudes and phases of RF waves at a specified reference plane (i.e., the RF connector of a plasma chamber).

We plan to measure RF signals at kilowatt power levels. External directional couplers with an approximately 60 dB coupling ratio will be used to sample the high-power waveform, so that the VNA is not damaged. To use this technique, we require direct access to the a-wave and b-wave receivers to bypass the VNA’s internal couplers. Many models of VNAs have front jumpers to allow for direct receiver access.

The planned measurements involve signals with both milliwatt and kilowatt power levels at the device under test (DUT) reference plane. Thus, high dynamic range and low noise floor are important for this application.

Plasma is nonlinear and generates harmonics and intermodulation products. Some VNAs are able to perform phase-coherent measurements of harmonics and intermodulation products, so that repetitive time-domain waveforms can be reconstructed from measurements of the different frequency components. This approach is called Large Signal Network Analysis (LSNA). To use VNA as an LSNA, there are two requirements for the VNA.

· First, the VNA must allow for frequency-offset measurements. In frequency-offset measurements, the receivers are set to a different frequency that the source(s). This allows for the VNA to measure harmonics of the source frequency.

· Second, the VNA needs to be able to coherently and simultaneously measure the forward and backward waves at all of the DUT ports, as well as an additional port where a phase reference (such as a comb generator) is attached.

II. PURPOSE

Project 5.04 requires a Vector Network Analyzer (VNA). VNAs are a ubiquitous and fundamental tool in RF measurement science. In the semiconductor industry, S-parameters are integral to establishing the reliability of electrical measurement tools that monitor and control the RF signals delivered during etching and deposition processes. These tools ensure processes are consistent from wafer to wafer, thus increasing yield. Project 5.04 aims to establish traceability for these measurements. Traceability will help manufactures make these measurements more accurate and consistent.

The VNA is critical for project 5.04 to establish traceability for high power signals. In the 5.04 Project Plan, all of the deliverables related to RF measurements we have planned rely on the VNA being delivered at NIST by early FY26. These measurements are a key part of our effort to establish traceability for high-power waveform measurements is, which is one of the main goals of Project 5.04. We anticipate that traceability for high-power RF signals will allow NIST to support the semiconductor industry by disseminating precision RF measurement techniques and allowing us to perform high-quality measurements to inform models of manufacturing processes.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components are not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001:

Description: Vector Network Analyzer Quantity: one (1) A. Technical Specifications

a. The VNA shall operate between 200 kHz and 8 GHz, at least.

b. The VNA shall have direct receiver access. When using direct receiver access, the VNA will be able to both source and measure frequencies across the entire bandwidth of operation (at least 200 kHz to 8 GHz).

c. The VNA shall have 4 measurement ports.

d. The VNA shall have the ability to measure harmonics and intermodulation products by setting the receivers to a different frequency than the source. These capabilities shall exist across the entire bandwidth of operation (at least 200 kHz to 8 GHz).

e. The VNA shall be able to coherently and simultaneously acquire signals from the forward and backward wave receivers on all ports.

Line Item 0002: OPTION LINE ITEM Description: Source step attenuators (port 1) Quantity: 1 A. Technical Specifications

a. The source step attenuators are variable attenuators that diminish the output power of the source on port 1.

Line Item 0003: OPTION LINE ITEM Description: Source step attenuators (port 2) Quantity: 1 A. Technical Specifications

a. The source step attenuators are variable attenuators that diminish the output power of the source on port 2.

Line Item 0004: OPTION LINE ITEM Description: Receiver step attenuators (port 1) Quantity: 1 B. Technical Specifications

a. The receiver step attenuators diminish the power reaching the receiver on port 1.

Line Item 0005: OPTION LINE ITEM Description: Receiver step attenuators (port 2) Quantity: 1 B. Technical Specifications

a. The receiver step attenuators diminish the power reaching the receiver on port 2.

Line Item 0006: OPTION LINE ITEM Description: 2nd LO and RF source Quantity: 1 A. Technical Specifications

a. The VNA shall have two signal generators to facilitate mixing product measurements.

b. The VNA shall have two local oscillators, so that the phases of signals at two different frequencies can be simultaneously measured.

IV. SCHEDULE OF DELIVERABLES

Define all deliverables and indicate (1) the quantity desired; (2) the format in which each deliverable is to be supplied; (3) the delivery date (based on the number of weeks/days); (4) the place of delivery. The context of each deliverable shall be clear. Keep in mind that every task does not require a deliverable. Deliverables are always tangible items (i.e., report, minutes, etc.)

Complete the table providing the information for all the tasks identified above.

Place of Delivery

Standards of Acceptance: The NIST POC or COR shall review all the above deliverables and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within 4 weeks of receipt of deliverable. This section applies to deliverables which must be reviewed and approved for acceptances (e.g., draft plans, drawings, etc.)

PLACE OF PERFORMANCE

The VNA will be manufactured at the manufacturer’s site and delivered to NIST in Boulder.

PERIOD OF PERFORMANCE

The VNA will be delivered within 10 weeks of receipt of order. This does not include warranty.

V. DELIVERY TERMS

Delivery shall be F.O.B Destination (or equivalent incoterms, such as DDP) and shall occur in accordance with the delivery due dates provided in the below table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

The contractor shall deliver all Line Items to:

National Institute of Standards and Technology Shipping and Receiving 325 Broadway Boulder, CO, 80305

VI. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in the specific FAR clause that allows the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

1. Most VNA manufacturers recommend test procedures to verify the VNA’s performance. If available, the NIST POC will perform these procedures.

2. The NIST POC will measure a nonlinear device over a range of frequencies, including high frequencies (above 10 MHz), low frequencies (below 10 MHz), and situations where both high and low frequencies are relevant. The VNA will pass the test if meaningful data can be acquired in all of these ranges.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST POC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 30 working days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

VII. PAYMENT SCHEDULE

The Contractor will be paid, in accordance with the payments clause in the contract and as otherwise noted in this document, upon receipt of a proper invoice and acceptance by the POC.

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer. Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

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