Amendment 001.pdf

PD 3 (NOV 2021)

AMENDMENT OF SOLICITATION

INFORMATION

1. Amendment No.: 2. Effective Date: 3. Solicitation No.:

4. Solicitation Date: 5. Requisition No.:

6. Name & Address of Subcontractor:

Name:

Street:

City,State:

Zip:

7. Issued and Administered by:

Jefferson Science Associates, LLC 628 Hofstadter Rd, Suite 5 Newport News, VA 23606 ATTENTION: Procurement Office

AMENDMENT

8. Receipt of Offers:

THE HOUR/DATE FOR RECEIPT OF OFFERS ☐ IS EXTENDED OR ☐ IS NOT EXTENDED.

9. Description of Amendment:

Except as provided herein, all terms and conditions of the document referenced in Item 1, remain unchanged and in full force and effect.

10. Acknowledgment of Amendment

The above numbered solicitation is amended as set forth in Item 9. Offerors must acknowledge receipt of this amendment prior to the hour and date specified in the solicitation or as amended by one of the following methods:

(a) By completing Items 6 and 11A-E, and returning 1 copy of the amendment or (b) By acknowledging receipt of this amendment on the signed and submitted form PD 6 required with submission of the offer. If by virtue of this amendment you desire to change an offer already submitted, such change may be made as long as it makes reference to the solicitation and this amendment and is received prior to the hour and date specified.

Acknowledgment of Amendment must be received at the place designated (physical location or email address) for offer submission prior to the date and hour specified for receipt of offers. Failure to do so may result in rejection of the offer.

SIGNATURES

11A. Name/Title of Signer: 12A. Procurement Officer Signature (may be digital):

11B. Offeror (Signature of Person Authorized to Sign):

12B. Telephone:

(757) 269 -

12C. Email:

11C. Date Signed: 11D. Telephone:

11E. Email:

Page 1 of 2 PD 6 (DEC 2022)

REQUEST FOR PROPOSAL (RFP)/REQUEST FOR QUOTE (RFQ)

SOLICITATION, OFFER AND AWARD

RFP/RFQ No.: JSA -______-_________ Date Issued:

Proposals/Quotes Are Due:

No later than _____ PM EST on ________

Site Visit:

☐ Will Be Held At ______ PM EST on ______ (See #4 Below) ☐ Will Not Be Held

Procurement Officer: Telephone: Email:

Alternate Contact: Telephone: Email:

1. PROPOSAL/QUOTE INSTRUCTIONS – SUBMIT ALL OF THE FOLLOWING WITH YOUR PROPOSAL:

a. Completed/Signed PD 6 Form

b. Proposal or Bid Schedule

c. Completed/Signed Representations and Certifications

d. Other Information as described in the attached Proposal/Quote Instructions

2. BASIS FOR AWARD – AWARD WILL BE MADE AS INDICATED BY BOX MARKED BELOW:

☐ Best Value – Tradeoff Process ☐ Best Value – Low Price Technical Acceptability ☐ Specific evaluation factors apply to this solicitation. See the Evaluation and Award criteria.

3. CONSTRUCTION MAGNITUDE (Minimum: $ , Maximum: $ , Not Applicable: )

4. SITE VISIT – ATTENDANCE AT A PRE-PROPOSAL SITE VISIT ☐ IS ☐ IS NOT REQUIRED

If required, offerors must attend a site visit to be eligible for award of any subcontract resulting from this solicitation. Attendees must report to the Support Service Center (SSC) building (Building No. 28), 628 Hofstadter Road, Newport News, VA, no later than the date and time specified above. Additional site visits / conferences will only be held if the Procurement Officer determines they are in the best interest of Jefferson Lab. The following are applicable if box is checked:

☐ Hard hats, safety shoes, and safety glasses are required.

☐ Attendees must pre-register for the site visit by sending an e-mail to the Procurement Officer with the company name and number of attendees. Registration deadline for the site visit is _______ on ________.

Non-U.S. citizens see International Visitors for additional requirements for international visitors.

☐ All attendees must have a valid picture ID.

5. ☐ QUESTIONS –

Any questions related to the RFP/RFQ must be in writing and should be sent by email or by fax to the attention of the Procurement Officer or mailed to the Procurement Office business address. For expediency, email is highly preferred. All inquiries regarding this solicitation must be received no later than to allow JSA sufficient time to respond. Please reference the solicitation number in your correspondence.

6. SHIPPING TERMS: FOB Destination unless otherwise specified

7. NOTICE OF TOTAL SMALL BUSINESS SET-A SIDE:

☐ If the box to the left is marked “ ” this solicitation is set aside to small business firms only. Offers/bids received from concerns that are not small business concerns shall be considered non-responsive and will be rejected. The North American Industry Classification System (NAICS) code for this requirement is: ________. The Small Business size standard in millions of dollars is _______, and the Small Business size standard in number of employees is ________.

8. STATE AND LOCAL TAXES –

Unless otherwise indicated below or elsewhere in the solicitation or purchase order, prices shall include all applicable Federal, State, and Local Taxes.

https://www.jlab.org/visiting/international-visitors https://www.jlab.org/visiting/international-visitors

Page 2 of 2 PD 6 (DEC 2022)

☐ This requirement is exempt from Commonwealth of Virginia Sales and Use Taxes. A Certificate of Exemption form will be provided at award.

☐ Any Virginia Sales and Use Tax shall be included in the total price, however, shall be detailed separately in the quote and invoice.

9. APPLICABLE TERMS AND CONDITIONS- The Sections marked below are applicable and attached to this solicitation.

☐ Fixed Price Supply- Form TC-1 Commercial ☐ Fixed Price Supply- Form TC-2 Non-Commercial ☐ Fixed Price Services- Form TC-3 Commercial ☐ Fixed Price Services- Form TC-4 Non-Commercial ☐ Fixed Price Construction - Form TC-5 Construction ☐ Environment, Safety and Health Requirements (included in Specification) ☐ Service Contract Act Age Determination ☐ Davis-Bacon Act Wage Determination

10. SPECIFICATIONS, DRAWINGS, AND/OR EXHIBITS LISTED BELOW ARE ATTACHED IF BOX MARKED Required Bonds (Sample Bonds – See SF24, SF25 and SF25A here: GSA Forms)

☐ Bid Bond ☐ Performance Bond ☐ Payment Bond

Attachments included in package ☐ Instruction to Offerors ☐ Proposal or Bid Schedule ☐ Combined Specification/ Drawings ☐ Terms and Conditions ☐ Terms and Conditions Certification ☐ Davis-Bacon Rates ☐ Representations and Certifications ☐ Amendments Issued under

OFFER (COMPLETE AND SIGN)

Acknowledgement of Amendments:

Amend. No. Amend. No. Amend. No. Amend. No. Amend. No.

Payment Terms: Indicate any prompt payment discounts; otherwise, payment terms shall be Net 30 days. _________

FIRM SUBMITTING OFFER INFORMATION:

Company Name: Phone Number: Email / Fax Number:

Address: City: State: Zip:

AUTHORIZED PERSONAL TO SIGN OFFER INFORMATION:

Name: Title:

Signature: Offer Date:

RFP/RFQ NUMBER:

https://www.gsa.gov/reference/forms https://www.gsa.gov/reference/forms

SUBJECT: TECHNICAL SPECIFICATION

TITLE: SRF CAVITY HIGH PRESSURE RINSE SYSTEM

REVISION: - August 29, 2024

Philip J. Denny Date:

Project Lead / TR

08/29/2024

Table of Contents

1.0 PURPOSE

2.0 SUMMARY

3.0 COMMON TERMS / DEFINITION

4.0 TECHNICAL SPECIFICATION / REQUIREMENTS

5.0 PERFORMANCE CRITERIA

6.0 MATERIALS/PRODUCTS

7.0 CONTROLS/ELECTRICAL REQUIREMENTS

8.0 PROJECT MANAGEMENT / SUBMITTALS

9.0 ACCEPTANCE, START-UP, AND COMMISSIONING

1.0 PURPOSE

This document is to serve as a technical specification and design requirements for equipment described as outlined below.

2.0 SUMMARY

Jefferson Lab (JLab) will procure a High-Pressure Rinse (HPR) Machine/ System to be installed in the SRF Cavity Processing Facility. The HPR system will be used to clean the interior surfaces of superconducting radio frequency (SRF) cavities within its ISO 4 cleanroom. The system will use high pressure ultrapure water as the cleaning agent.

3.0 COMMON TERMS / DEFINITION

3.1 Contractual terms as used in this document that indicate that an action or actions are:

Shall Required or mandatory

Should Considered good practice in most cases, but is not considered mandatory and, in some cases, such action may not be appropriate

May Fully optional action(s)

Preferably Strongly recommended method or action. Alternatives solutions may be acceptable after discussion with JLab.

3.2 Technical Terms:

JLab Jefferson Lab (aka JSA-Jefferson Science Associates)

SRF Superconducting Radio Frequency

Cavity Fabricated SRF part made out of niobium metal to accelerate particles

UPW

Ultra-Pure Water as used by JLab and rated as ASTM D5127-07 Type E-1.1. HUPW is Hot Ultra-Pure Water.

Cleanroom JLab main cleanroom rated ISO-4 under ISO 14644-1 rev 2015.

TR Technical Representative

PSA

Process Support Area (aka “T-Trench”): Room located adjacent to SRF Cleanroom used for process equipment.

4.0 TECHNICAL SPECIFICATION / REQUIREMENTS

4.1 Project Scope

4.1.1 Design and build HPR system per this specification.

4.1.2 Performance test HPR system at manufacturer’s location and JLab location per this specification.

4.1.3 Provide all design documents, calibrations, manuals, and software per this specification.

4.1.4 Any deviation from this specification will be formally documented and approved by JLab Technical Representative.

4.2 System Description

4.2.1 The HPR system will be used to clean the interior surfaces of SRF cavities. The system will use high pressure ambient UPW and HUPW as the cleaning agent.

4.2.2 The UPW will be sprayed at high pressure onto the interior surface of the SRF cavity via wand and spray nozzle head. The wand traverses vertically upwards at a higher traverse speed to the top flange or port where it starts it high pressure spraying as it returns downward.

Typically, high pressure spraying occurs only on the down stroke.

4.2.3 JLab fabricates a wide array of cavities. Many are multi-cell, weigh less than 100lbs and have an axial centered port. However, some cavities weigh up to 1600lbs and may have multiple off-center ports that requiring cleaning. The center ports vary in size, which makes the wand, table, and cavity alignment mechanism a critical design feature of this equipment.

4.2.4 The operation of the HPR system will be an operator or time delayed initiated pre-programmed cycle. The system shall have the capability of storing multiple programmed cycles (aka “recipes”).

4.2.5 Primary system components:

a) High purity process chamber/cabinet

b) High pressure pump(s) skid with VFD controls

c) Linear traversing high pressure rinse wand

d) 360-degree rotating turntable (CW and CCW)

e) Point of use high pressure particulate filter for ultrapure water (UPW/HUPW)

f) High purity valves and internal piping

g) UPW resistivity probe/analyzer

h) UPW flow and pressure meter/transmitter (supply and high pressure UPW)

i) PLC (programmable logic controller) based control system & Human Machine Interface (HMIs)

j) Internal zoom camera and separate monitor from HMI.

k) External cavity high pressure cleaning.

4.2.6 The HPR system, not including the high-pressure pump(s), will be enclosed in a single package as a unit. Some assembly onsite is acceptable. The enclosure will include separated compartments for cavity processing, electrical controls, mechanical, and plumbing systems.

4.2.7 The high-pressure pump(s) and associated components, piping and controls will be skid mounted with heavy-duty isolation feet (pads). Pump controls (VFD, disconnect, etc.) shall be enclosed in a wash down enclosure (Nema 4X or higher) separated from the HPR cabinet and collocated in the PSA (T-Trench) area.

4.2.8 Cavities will be loaded into the process chamber using a lift cart in the cleanroom. The lift cart will have out-rigger style legs that will protrude into or underneath the body of the HPR cabinet at cleanroom floor grade.

4.3 Process Description

4.3.1 Operator procedure for loading and operating HPR machine

a) When the system is idle or not in use, a trickle flow of water flows out of the wand head under UPW supply pressure and not pump pressure.

b) Operator turns off UPW trickle flow manually and/or it is automatically stopped upon opening door. The wand is then retracted to a home Position or lower height for loading of a cavity.

c) Operator opens cabinet door and loads cavity in a cavity cage via lift cart. The machine will have “cups” that locate the cavity cage. Cavities are centered in the cage prior to rinsing.

d) Operator uses pendant or push buttons (momentary action) to raise/lower wand and rotate the cavity while visually verifying the run-out and clearance of wand head to cavity ID via camera and monitor. The HPR door is open, and the operator may shim or adjust the cavity cage as necessary.

e) Operator uses the wands encoder position readout to identify upper limit and lower limit in inches. Operator will use these encoder position values to input into program recipe.

f) Operator will start preprogrammed recipe cycle or set a time for starting.

g) When the cycle completes, the operator will turn off the trickle flow, open the doors and remove the cavity via the lift cart.

4.3.2 The typical HPR cycle on a cavity will use (1-10) passes of the UPW. High pressure spraying only occurs on the “down stroke” of the wand. One pass = wand traversing from upper to lower limits as programmed. The traversing of the wand to the upper start position (or “up stroke”) is done at a higher rate of travel than the cleaning down stroke.

4.3.3 The cavity must remain rotating while wand is traversing high-pressure spray cleaning.

Machine must incorporate safety features that fault machine if motion stops.

4.3.4 Program Inputs for recipe:

a) Lower Return position (in)

b) Upper Stop Position (in)

c) Table RPM (rev/min)

d) Rotation direction (CW/CCW)

e) Wand Traverse Rate (in/min)

f) Cycle Repeat (quantity 1-99)

g) HUPW (Y/N) on a per pass basis

h) Wand Return Rate (in/min)

4.3.5 Minimum Program/HMI Features

a) Test Run: Ability to test run a cycle (or pass) without water pressure.

b) Delayed Start: Operator will have ability to program in a start time.

c) Recipe Screen: Screen to program key recipe data as itemized above.

d) Main Screen: Showing running status, current running values, wand limits, and other basic controls.

e) Pump Screen: Shows current running vales of pump

f) Access Control Screen: Interface to login and set access levels for protected features. (i.e.

operator vs maintenance vs programmer modes)

g) Alarm and Reset page: This screen will itemize faults in order and allows operator to reset or acknowledge machine faults and alarms.

h) Event/Fault log page. (e.g. cycle start, fault, cycle end, door open/close). Event log shall also have wand position at time of event or fault.

i) Chart Screen: Ability to chart real-time data metrics (i.e. pressure, temperature, wand position, time etc..) and view historic data

j) P&ID Screen(s): Show current states of valves, meters, etc… This screen will also have a control for overriding valves in manual mode under maintenance login. Screen may be broken up into main chamber and pump.

k) Other screens: May have additional screens for controlling, homing, or adjusting critical electro-mechanical systems such as the wand lift and/or rotation.

l) Log off Screen: Ability to log off, power down, or exit to windows if using windows-based

HMI.

4.4 Design Requirements

4.4.1 Facilities

a) The following utilities are readily available in the PSA as shown in Table 1. Further facility details will be provided upon design review.

Table 1

Facility Available Notes:

UPW Pres./Temp. 50-65psi @ 68-75°F ASTM D5127 type 1.1 18.2 MOhm

UPW Flow 20 gpm Max available. 1” supply and return Flaretek style fitting*

HUPW Pres./Temp. 50-65psi @ 170-180°F ASTM D5127 type 1.1 18.2 MOhm

HUPW Flow 12 gpm Max available. 3/4” supply and return Flaretek style fitting*

Nitrogen 70-80psi General Purpose N2

CDA 90-110psi

Exhaust 350cfm @ .5 in of H20 Max available via scrubber system

Power 208/480V, 125A Est breaker size**

Power 120v, 30A Est breaker size

*Note: All UPW connection will have a return loop within machine.

**Note: High power( 480V) shall be wired directly to pump skid controls

4.4.2 Machine Location

a) HPR and pump system will be located in the PSA and will be bulk headed into an ISO 4 (class 10) clean room. Modification of clean room wall for bulk heading will occur just prior to installation by JLab. The front side (or face) of the cabinet will be flush with the cleanroom wall as shown below:

b) The HPR cabinet will rest on the PSA floor (64” to 70”) * below cleanroom floor grade elevation). Adjustable heavy-duty stainless-steel machine feet will level the HPR. *Note:

Exact HPR PSA location and measurements to be taken upon kickoff meeting.

a) Maintenance will be from the rear and one side of the HPR cabinet. Preferably, all maintenance and access panels will be from the rear of the machine.

b) Facing the machine from the cleanroom side. The left side may have access panels. The right side must have no panels and will be adjacent within a few inches of another machine.

c) All utilities connections will be located on the rear of the machine. Exact location to be agreed upon by JLab.

d) All operator controls will be accessible from the machine front (cleanroom side), but secondary control can be done from PSA side.

e) Cleanroom side protrusions such as door handles, EMO (E-STOP), light stacks must not break plane of fire shutter door (6.5” from clean room wall) at any time.

4.4.3 Machine Construction

a) General Cabinet Construction

All materials used for the process chamber will be suitable for an ISO 4 (class 10) clean room.

Cabinet construction exposed to the clean room must use FM Global 4910 materials such as white FM4910 PVC.

Cabinet construction outside the clean room may be other flame-retardant materials such as FRPP, PVC, or stainless steel.

b) Operator Door

If the door is a vertical sash type. It must include an automatic locking pin when sash is fully open.

If design calls for a door that breaks this plane (i.e. hinged door), then a sensor will trigger an audible alarm and an additional discreet PLC output will be added for when the door is opened. Program will allow a password protect timer setting to determine the time before alarm sounds.

Door must have >=75% transparent window. Clear or light blue tint (>= 70% light transmittance)

c) Rigging:

The HPR Package to be shipped to meet the move-in height restrictions 144”.

The maximum width for moving between equipment must not be more than 68” on one side. Maximum footprint for the machine shall be no larger than 78” x 68”.

The HPR and pump skids will have lifting lugs to move via connection to an overhead crane and forklift slots for movement by forklift.

JLab will be responsible for local rigging company to place equipment onsite.

d) Rinse Chamber:

The internal process chamber of the HPR system will be capable of housing a variety of cavity geometries in a holding fixture (Cavity Cage).

The working height (load/unload) of the HPR process chamber (top of turntable) will be no more than 35 inches from the cleanroom raised metal floor.

Chamber inner footprint must allow a 40” rotational clearance.

The chambers internal dimensions must consider the largest of cavities and must accommodate the loading of cavities with clearance. For example Table 2 itemizes the next two largest cavities JLab will produce. Models and drawings will be provided to aid with machine design upon kickoff meeting.

Table 2:

Cavity Bare Cavity Height

Cavity w/cage Height

(estimated)

Cavity w/HV Diameter

Weight w/HV and cage

591 5-Cell 81” ~86” 18” 1000lbs

RFD 197 62” ~70” ~31” 1100lbs

Large Cavity RFD 197 Example

e) Turntable:

The cavity turntable will have the capability to rotate clockwise and counterclockwise at programmable speeds. See performance criteria.

The turntable will need to support and rotate a minimum of 1600 pounds load without machine frame, cabinet, or deflection. Wand alignment specification cannot be compromised due to table load deflection.

The turntable center shall be no more than 25” from the outer most front edge or face of the cabinet.

Turntable shall be no smaller than 36” diameter.

The turntable will have threaded mounting holes for 4 “cups” that locate the cavity cage (16” post on-center). Additional cup locations and details will be provided upon before the first design review for larger cavities cages.

JLab Standard Cage

Cavity turntable and cage “cups” must be electrically grounded.

f) Off-Axis Rinsing The turntable table will be capable of supporting off-center load of up to 1600lbs at

6.5” off center axis. For Example, the RFD 197 cavity shown below will be positioned so that rinsing can occur through the wave-guide port. The method for rinsing of off-center cavities may be rotating or stationary. The method shall be discussed and approved during initial design reviews.

Off center Rinsing Example

g) Proposed Air Flow Management

To eliminate potential contamination from the operator to the cavity, the flow of clean air should be from the top down of the machine. See figure 6 below:

The process exhaust should be located along the lower front, side edges or the back of the chamber.

Clean air supply should be feed via ULPA fan filter unit ducted from the cleanroom and directed vertically down as shown.

4.4.4 Hydraulic System Network Features

a) Materials:

All wetted components will be suitable for ultra-high purity and will be compatible with ultrapure water. (e.g. PVDF, PFA, Electro polished 316SS)

b) Wand/Spray Head:

Wand must extended a minimum of 75.5” above the top surface of the turntable. This excludes the spray head as shown below:

The maximum allowable outside diameter for the wand is 1 inch and will be 316SS electro polished OD & ID.

The spray head and wand mechanical connection will be 1/4” FNPT. A MNPT to

MNPT Swagelok coupling will be used to interchange wand heads.

One spray head will be provided.

c) Trickle Flow Provisions will be made for a “trickle” flow of ambient UPW through the high pressure pumps, filter, wand, and lines when not in operation.

Trickle flow shall be adjustable between (.25-1.5 gpm) will have the ability to be turned off (manually or automatic) when the operator loads/unloads a cavity. Trickle flow control valve must be in the front of the machine for cavity loading process.

d) Pump & Supply UPW High Pressure Pump shall be LEWA EconoFlow Type LDE.

LEWA Pump VFD and disconnect control should be mounted in close proximity to the

LEWA Pump skid.

Incoming pump high power (480V) shall be connected directly to pump controls on skid.

No high power shall traverse through the HPR cabinet to the pump.

e) Internal Filter

A high pressure/high purity filter (0.05um or smaller) will be installed after the high-pressure pump outlet and just prior to the wand.

Filter housing must be electro-polished, and rated per temperature and pressure.

f) Sensors

Incoming UPW resistivity probe (sensor) will be measured. The measured value will be incorporated into the HMI via the sensors transmitter (controller). This probe will be located just upstream of the LEWA pump inlet.

Pressure transducer and flow meter will be mounted on the high-pressure UPW supply (i.e. downstream of the LEWA pump). The measured values will be incorporated into the HMI via the sensors transmitter (controller).

The machine will be interlocked to stop the process if low pressure is out of range.

UPW Temperature shall be measured on the high-pressure side of the LEWA pump.

All incoming utilities will be monitored for loss of pressure or flow and will fault the machine as necessary.

See acceptable manufacturers section of this specification.

g) High-pressure flow must stop under any fault condition such as wand transverse error, table rotation error, emo activated, or machine safety fault. Upon error/fault wand returns home.

i) External Rinse

External rinse must utilize high pressure UPW.

External rinse cycle shall be initiated by operator. This process will not be performed at the same time as the internal rinse.

Nozzle type and quantity (i.e. spray pattern, volume, and material) shall be decided at design review.

Rinse coverage shall be no less than 60” of vertical distance.

If a manifold style of spray bar is to be used, then manual valves shall be incorporated into each nozzle to stop flow to individual nozzles.

A stainless high pressure quick connect will be used to connect the spray bar via a short high-pressure hose. The connection will be located within the rinse chamber.

j) Nitrogen Purge

A nitrogen purge shall be added to the end of the process to force moisture out of the wand at the end of wash cycle. This will be programmable or manually initiated.

Automatic valve(s) shall be incorporated after the pump and upw filters to direct clean N2 gas (line pressure ~80-90PSI) via the high-pressure wand & nozzle.

k) Wastewater A small portion of the UPW wastewater shall be diverted so that resistivity and particles counts can be measured. To ensure accurate measurement a constant and uninterrupted flow of water must be maintained over the resistivity sensor and to the particle counter. This flow shall be free of air bubbles or significant turbulence.

UPW wastewater plumbing shall incorporate a method of entrained gas (air) separation to ensure good measurements by sensors/meters. This can be a cyclone or other available “off the shelf” technology. Alternatives methods may be proposed.

Wastewater plumbing shall incorporate a port for a Thornton model 240-201 resistivity sensor. This will be the same as the incoming UPW resistivity sensor.

Resistivity port shall be down stream of the gas separator and will maintain a constant sampling flow when machine is in process.

An additional sampling port (1/4” Flaretek style) will also be added downstream of the gas separation and will provide constant sampling flow for the particle counter when machine is in process.

Both ports shall be blanked off. JLab to provide meters and sensors. Spare inputs to the PLC shall be used for future integration.

4.4.5 Additional Features

a) Camera System: A camera mounted on the top the cabinet will provide the operator a live view, looking down on the centerline of the wand/turntable. The live image will be used by the operator to visually verify the alignment of the wand nozzle head to internal cavity ID run-out, and will have the following features;

The camera must be mounted outside the chamber environment or protected from water ingress.

Camera must have a bracket that has +/-0.5 inch X-Y-Z adjustments for centering.

Lens must have a variable focal length.

The zoom lens must be remotely controlled by the system operator. The connection to computer or view screen shall be wired. (i.e. no wireless)

The lens must auto-focus or provide for remote focusing by the system operator.

Minimum low-light sensitivity camera. Additional lighting should be added to the chamber, or an LED ring light added to the camera lens, if needed.

A separate flat-panel LED monitor, with 12-18” diagonal screen size, will be provided to view the live image from the clean room. The monitor should have an aspect ratio matching that of the camera, so that round images are not distorted.

b) Secondary operator interface (HMI) will be mounted on the rear or PSA side of the cabinet for maintenance purposes.

c) Operator nitrogen gun and UPW gun inside the process chamber.

d) Separate operator pendant with manual jog buttons (momentary) for wand traverse and table rotation. These controls shall be within immediate reach of the operator during cavity loading.

5.0 PERFORMANCE CRITERIA

5.1 General Performance Criteria

5.1.1 The table below list the minimum set of performance criteria and the respective operating ranges. All parameters will be adjustable throughout the range and increments will be determined during design review.

Performance Criteria Parameter Minimum Maximum Unit Pressure at HPR wand 300 1500 PSIG UPW flow at wand* 2 10 GPM Duration of rinse 1 720 Minutes Rate of rotation of turntable 0 5 RPM Rate of wand traverse during rinse (“down stroke”)

0.1 50 Inches per minute

Wand “up stoke” and jog speed 55 80 Inches per minute Wand extension 0 75.5 Inches above table plane *Note: GPM based on set pressure and wand nozzles size.

5.1.2 Wand alignment

Wand alignment is critical to ensure to possibility of the wand striking the inside of a cavity.

Wand alignment is the perpendicularity of the wand to the table as it rotates. This can be refined as the runout and the true position of the wand at 2 positions.

Wand alignment will be checked both at manufacturer pre-acceptance and acceptance on-site at JLab.

JLab will supply an alignment fixture.

Alternative methods of measurement can be proposed but the specification for run-out below will still apply.

Wand Alignment Specifications

Wand alignment reference drawing

5.1.3 Dynamic wand deflection under operation pressure (1500psi) may not deflect or oscillate more than .16” at the upper measurement position. The verification will be a visual measurement using a reference scale.

5.2 Quality Assurance

5.2.1 The Machine, associated equipment, accessories and control wiring, specified herein will be furnished by the vendor who will be responsible for its overall quality, performance, and warranty.

5.2.2 The Machine will be factory tested for compliance with performance specified. Certified test results will be submitted to JLab for review prior to shipment. Vendor will notify JLab14 days in advance of the tests to allow JLab time to arrange travel in order to witness the tests.

Jlab Fixture

Lower Position Max Run-out 0.010”

Upper Position (@ 72”) Max Run-out 0.1”

Datum (Feature) - Table 4-Cage Holes

Datum (Feature) – Wand Spray Head OD

5.2.3 Pressure Systems Requirements (if applicable):

a) The Applicable code , ASME B31.3-2006, shall apply to all fluid service including compressed gas service. The LEWA pump and components are excluded from ASME B31.3.

b) “Off the shelf” pressure system components shall have certification or documentation provided authenticating their pressure rating. Certificates of compliance (COC) or similar documentation is acceptable.

c) Unless specified otherwise, listed piping components shall be used (e.g. B16.11 Forged Fittings, socket welded and threaded).

d) Pressure testing shall be conducted by supplier and a pressure test plan shall be provided to JLab prior to testing.

e) Pressure testing to be performed for loose-shipped items assembled onsite at JLab.

6.0 MATERIALS/PRODUCTS

6.1 Acceptable Manufacturers

6.1.1 High Pressure Pump(s):

a) High pressure pump package shall be manufactured by LEWA Incorporated and designed for 18.2mOhm UPW.

Pump package must include the following:

Model: LDE4-M911(S)-46 (8.33) 60HZ

Wash-down duty motor-TEFC 230/460V

Variable frequency drive 6-62Hz Model: ACB530-U1-059A-2

Pump heads – qty 4 x diaphragm pump heads M911s w/46mm plungers capable of delivering maximum of 10gpm@1500psi.

Flowguard discharge pulsation damper, model FG-30-120-EPT-SS, Baseplate (open frame using A36 channel & angle, painted)

Suction & Discharge Manifolds (w/ 15Ra EP internals and mechanical polish exterior)

Pressure System Testing Requirements per this specification must be provided from pump manufacturer.

6.1.2 Analyzers and Sensors:

a) Resistivity Sensor and Meter: Mettler-Toledo (Thornton) model 240-201

b) Resistivity Analyzer Transmitter: Mettler-Toledo (Thornton) model M300

c) Pressure Sensor (Transducer): Rosemount series 3051TG4

d) High Pressure Flow Sensor: Dynasonic TFXL

6.1.3 UPW Plumbing

a) Piping / Valves: Georg Fischer (GF) SYGEF PVDF, IR or Butt Fusion.

b) Tubing / Valves: Entegris Flaretek

c) Other wet surface(s) of high pressure lines/components must be 316ss (electro-polished) or PTFE/PFA lined and approved by JLab

d) Filter Housings: Must be rated for High Purity, High Pressure, High Temperature. Mfg:

Pall preferred.

e) Filter(s): Pall Varafine T Series VTSE <=0.02um

6.1.4 Servo motor(s) and linear actuator model & manufacturer to be approved by JLab.

6.1.5 Electrical – See Controls/Electrical Requirements section of this specification.

7.0 CONTROLS/ELECTRICAL REQUIREMENTS

7.1 General Electrical Requirements

7.1.1 Electrical components and control panel(s) construction shall meet UL508 standards.

7.1.2 The preferred option is to have equipment inspected at the manufacturer’s location by a third party (NRTL) inspector shall be a separate line item on the quote. The conforming inspection report must be provided to JLab prior to shipment.

7.1.3 Alternatively, Electrical systems shall conform to JLab “Construction and Modification Requirements for Custom and Non-NRTL Electric Equipment” supplement (provided upon request).

7.2 Programmable Logic Controller (PLC)

7.2.1 The PLC shall have, to the maximum extent possible, 24V or less I/O. However analog inputs/outputs at 4-20ma +/-10v. Additionally specialty cards/modules will be communicated to JLab.

7.2.2 In the event of any loss of power for less than 2 hours during a process, the machine shall retain its memory (process state), so that the operator can reinitiate the process after resumption of power.

7.2.3 Machine PLC program shall incorporate a operator controlled “soft shutdown/start” so operator safely recover with the resumption of power

7.2.4 Preferred PLC

a) Allen Bradley Compact Logix

b) Other proposed PLC types shall require prior JLab approval

7.2.5 The PLC shall have the maximum available user memory installed and at least one extra (empty) I/O slot in the chassis. Alternatively, space within panel shall be available for addition module expansion.

7.2.6 For programming and software maintenance, each controller will be accessible via Ethernet and TCP/IP. Where applicable, the manufacturing data will be available using FTP or other non-proprietary protocols.

7.2.7 External PLC Plug

7.2.8 An Ethernet card is to be included with the PLC for external communication to user plant data historian system. Communication card and protocol is itemized in the next section.

7.2.9 Provide fully programmed and documented PLC program, including source code(s), symbol table, and cross reference table.

7.2.10 Facility Monitoring System (Data Historian) shall utilize the following interface and standards;

a) PLC must be OPC compliant software and vendor will assist in the configuring of OPC sever to machine.

b) Provide an Ethernet interface for monitoring by the FMS (facility management system) of input/output parameters, control functions and operation modes.

c) Provide remote assistance software for vendor to perform remote maintenance on machine PLC/HMI/Control program(s). (i.e. TeamViewer).

d) JLab Ethernet is 100baseT.

7.3 Human Machine Interface (HMI)

7.3.1 Panel View Plus 7 model 1000 or 1250 color touch panel (HMI)

7.3.2 Other proposed HMI types shall require prior JLab approval

7.3.3 If machine is bullheaded to a wall where operator and maintenance areas are physically separated (i.e. cleanroom wall), then the machine must have 2 HMI.

7.3.4 The network topology used to connect the HMI to the PLC shall be Ethernet.

7.3.5 In addition to the normal interface for operating the machine, e.g., starting, stopping, clearing faults, monitoring operation, etc. the operator interface will show the state of controller inputs and outputs and allow for manual control of the outputs for trouble shooting purposes.

7.3.6 Fault state descriptions will be displayed on the HMI. Fault descriptions will refer to state bits or variables, and I/O points to facilitate troubleshooting both the I/O and the program.

7.4 General Hardware Requirements

7.4.1 All sensors must be quick disconnect and labeled with I/O# and description

7.4.2 Servo Drives, Pump Control, and Motors

7.4.3 Servo drives used for linear positioning and rotary speed control shall require make and model approval by JLab.

7.4.4 Pneumatic Valves / Solenoid

7.4.5 Solenoid valve manifold block shall have 4 blanked off spare socket locations. If stackable valve block, then 4 extra solenoid valves will be provided. Preferred valve make and type to be determined at design review by vendor.

7.5 Interlocks, Indicator Lights

7.5.1 Power on, E-stop, and Jog control pushbuttons will be hardwired. A Lamp test will be required to verify all indicator lamps are fully functional.

7.5.2 Indicator lights, push buttons, and stack lights shall be LED.

7.5.3 The machine will stop operation or process for the following conditions;

7.5.4 Automation safety as dictated by OSHA or other governing safety requirements.

7.5.5 Loss of critical utility/facility.

7.5.6 Machine faults as itemized in previous sections.

7.5.7 Maintenance panels or access doors are opened.

7.5.8 Other alarms are to be provided, as vendor deems necessary for the proper and safe operation of the machine, OSHA, or other applicable requirements.

8.0 PROJECT MANAGEMENT / SUBMITTALS

8.1 Project management

8.1.1 To ensure equipment delivery meets critical timing phases and final shipment date(s), it is the responsibility of the supplier to provide and maintain a project-tracking schedule. JLab expects major milestones, design reviews, runoff, and final delivery be communicated and updated as changes occur.

8.2 Design Reviews

8.2.1 Design reviews will be performed using video/web conferencing. (e.g. Zoom, MS Teams).

Vendor will coordinate compatible video/web conferencing with JLab at least 2 weeks prior to the design reviews to ensure availability and attendance.

8.2.2 A minimum of 1 kickoff meeting, 1 site visit, and 2 technical design reviews (Preliminary and Final) will be scheduled upon subcontract award.

8.2.3 The Kickoff meeting’s purpose will be to address any technical issues with the JLab specification, to understand the operational, technical, and business steps throughout the subcontract performance to include design reviews, factory acceptance, & final acceptance.

8.2.4 The site visit will be held at the JLab facility for the supplier to take measurements of the existing facilities including utilities. This visit will also serve to clarify any process details affecting the machine design or project scope.

8.2.5 Design and scope changes affecting cost and timing will be documented by vendor and agreed upon by JLab before proceeding with change.

8.2.6 Preliminary design review shall cover the following topics:

a) Provide a concept drawing of the overall system. This drawing must show the completed machine or assembly. It must have at least two views, a plan or top view, and one side or elevation view. Sufficient detail must be shown in order to convey the completed appearance of the equipment including control panels. The design shall be drawn to scale and showing height, width, length, location and dimensions of auxiliary control cabinets, the location of the work piece or part, and the direction of index travel.

b) Additional concept drawing(s) of all equipment operations and processes. Sufficient detail must be shown to communicate the operation(s) of the machine. Main components must be shown and labeled.

c) Review of ergonomics and safety.

d) Material handling overview.

e) Provide a control system overview that will contain a listing of major components.

f) Review major system components (i.e. linear actuator, servos, LEWA Pump) and provide cut-sheets or technical specifications.

g) Approval Prints: The supplier must provide copies of all of the above documentation. At the design review, the JLab Project Lead/ TR and the supplier will sign and date each copy of the approval prints to indicate that the concepts have been approved. Any changes or modifications that are required will require formal written approval by both parties. A follow-up review may be required to review modifications.

8.2.7 Final design review shall cover the following topics:

a) Mechanical assembly drawings, detail drawings, and parts lists.

b) Pneumatic and hydraulic (P&ID) schematics and parts lists.

c) Control system functional (sequence) plan.

d) Control panel layout with bill of materials

e) PLC hardware product data with model number identified

f) Electrical control system diagrams, drawings, and parts lists.

g) Review of ergonomics and safety.

h) Foundation drawings. (if applicable)

i) Approval drawings.

j) Complete Bill of Materials.

k) Recommended scheduled maintenance and consumables

8.3 Submittals:

8.3.1 Vendors shall provide the following with their technical proposals in addition to JLab procurement requirements:

a) Theory of Operation: Sequence of operations control description

b) Concept drawings

c) Any itemized exceptions and recommend alternatives.

d) Provide a concept for critical systems

e) Detailed project schedule to include all reviews & deliverables

8.4 Final Documentation / Shipping

8.4.1 Final Documentation

a) The use of the English language is mandatory on all papers, documents and machine labeling. This includes support equipment located on machine (i.e. measuring, calibration, or safety devices).

b) Two (2) sets of hardcopy documents shall be provided.

c) Operation and maintenance manual shall include:

Theory of Operation

Safety precautions and instructions

Facilities requirements and installation. (Including lift instructions).

Operators' manual

Operator / programmers software manual

Troubleshooting instructions

Maintenance instruction

Preventative Maintenance Schedule

Spare Parts List with manufacturer’s name, OEM part number, and estimated price.

d) Diagrams and Schematics shall include:

P&ID Diagram, with parts list

Machine Layout - including location of switches, motors, solenoid valves, etc.

Assembly, structural, and detail drawings

Electrical schematics - including internal circuit diagrams, KVA ratings, fuse amperages, parts lists, general diagram on installation position and panel layout diagram, including PLC input/output wiring.

PLC Program - program printout, symbol table and cross reference table (in that order). Software disks, including source codes. (per general hardware requirements)

Computer Program Listings

8.4.2 Vendor will provide PLC and HMI Programming Software Packages and Licenses so that changes can be made by Qualified JLAB personnel.

8.4.3 Certificates of Compliance (pressure piping, calibration, etc.).

a) Component Manuals, and associated component software / programs.

b) Documentation, Software, and License

c) Other vendor-supplied documentation will consist of all hardware/component manuals, installation instruction manuals, and sub-system operating manuals. The Vendor will provide set-up instructions for all systems and hardware. Switch and jumper setting for installed cards will be listed in tables on electrical drawings/schematics for that assembly.

Note: The above documents shall be updated within thirty (30) days after final acceptance and sent to the JLab TR.

8.5 Shipping

8.5.1 For direct shipment, all delicate equipment and parts shall be sufficiently secured or packed and labeled for the most extreme transportation conditions.

8.5.2 If airfreight is required, due to late delivery, it shall be shipped prepaid at supplier’s expense.

8.5.3 Supplier will contact JLab SOTR at least one (2) weeks prior to shipment with weight, dimensions, and an estimate of the number of trucks and types.

8.5.4 All shipments and separate partials of tools, machines, and auxiliary equipment shall be labeled in a conspicuous location with the JLab Subcontract number.

8.5.5 Special transport instructions must be visible to handlers, i.e. lift points, labels such as “This End Up”, “Protect from Rain”, etc.

8.5.6 Supplier is responsible for all U.S. packaging codes and regulations.

9.0 ACCEPTANCE, START-UP, AND COMMISSIONING

9.1 Acceptance

9.1.1 Pre-Acceptance – After supplier has presented data indicating that the equipment meets the requirements of the purchase order and specification, but prior to shipment, JLab will conduct a pre-acceptance evaluation and performance testing of the new machines at the equipment supplier’s facility.

9.1.2 Pre-Acceptance - Performance Tests

a) Machine will be evaluated and functionally tested as a portion of the pre-acceptance at the manufacture's facility.

b) JLab shall provide Cavities for mockup and set-up trials.

c) Performance testing will encompass all accepts of the machine function and range of capability. A series of performance runs will be conducted given varying recipes and process conditions.

d) Operational Acceptance Test (OAT) – Review all utility connection for size, capacity, and connection type. JLab to provide copy of checklist prior to arrival.

e) Functional Acceptance Test (FAT) – Perform test on safety systems and machine faults.

This also includes dry runs and recording operational performance. JLab to provide copy of checklist prior to arrival.

f) Fault and Utility Loss Recovery Testing

g) Quality of Construction Evaluation

h) Software Validation – All aspects of the programming and operator interface screens will be evaluated for issues.

i) Electrical Safety Evaluation

9.1.3 Final Acceptance – After Start-Up & Training, the final acceptance evaluation will be conducted under plant operating conditions. The same or better-quality level achieved during pre-acceptance trials must be achieved during final acceptance trials. Supplier installation team must remain on-site until after final acceptance has occurred at JLab.

Operation of the equipment for final acceptance will be conducted by JLab technicians.

9.1.4 All pre- and final acceptance trials shall be witnessed or conducted by JLab personnel. Cavity cage and cavity for acceptance trial shall be provided by JLab. All other supporting equipment to include, but not limited to: gages, calculators, etc., and labor shall be provided by the supplier. Acceptance plan, method of measurement and data record format must be approved by JLab.

9.2 Onsite Commissioning and Training

9.2.1 Manufacturer is responsible for equipment start-up and debugging activities.

9.2.2 Prior to manufacturer arrival, JLab is responsible for rigging and setting equipment into location and providing building utilities to equipment.

9.2.3 Timing of the start-up activity will be negotiated prior to delivery.

9.2.4 Machine start-up and final acceptance shall require manufacturer representatives to be onsite for the duration needed for the activity to be performed to successful completion.

9.2.5 Manufacturer shall provide a minimum of an electro-mechanical technician and PLC/software programmer for start-up and debug onsite.

9.2.6 Training shall be provided for JLab personnel for duration of time to be negotiated during Final Design Review but shall not be less than (16) hours. Training shall include a minimum:

routine maintenance, cavity setup, machine programming, processing, fault recovery, operation manual, and control system operation (e.g. recipe creation, data logging, HMI screens and controls).

9.2.7 JLab badging requirements to be completed 7 days prior to any vendor visit.

9.2.8 Vendor to provide proof of workers qualifications (i.e. electrical, OSHA, etc..) to JLab technical representative prior to onsite work.

END