A-2 Attachment 1 Requirements Document.doc

Requirements Document Electron Beam Heater I. Background Electron emission properties from the samples under electron irradiation are essential information for nanoscale dimensional metrology. The status of the sample surface has a significant influence on these properties, such as the number of emitted electrons and their energy.

To understand the sensitivities of these properties to various experimental parameters, at the National Institute of Standards and Technology (NIST), we are building an ultra-high vacuum (UHV) instrument (<2 x 10-10 torr) that has in-situ sample cleaning capabilities. NIST requires an electron (e-) beam heater system to allow sample heating up to 1500 °C in the UHV chamber.

II. Minimum Requirements The system shall meet or exceed the minimum requirements identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered except as requested. The use of “gray market” components not authorized for sale in the U.S. by the Contractor is not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

The Contractor shall provide one e-beam heater system that meets the following minimum specifications:

1. E-beam heating shall provide at least 1500 °C on the sample surface with a custom flag sample mounting holder with a window. The stage shall be designed to work with the custom sample holder described in the attached supplementary documents: Custom Sample Holder - Assembly.pdf, Custom Sample Holder - Frame.pdf, and Bottom Clamp for Custom Sample Holder.pdf . These documents provide dimensions of the custom holder to permit the contractor to insure that the heating stage receiver can accept the custom holder without interference from springs or other clamping mechanisms. The contractor is not required to actually fabricate this sample holder.

2. The system shall maintain the maximum heating temperature (1500 °C) for working distance (filament-to-sample backplane specified in Figure 1) variations up to ± 0.5 mm, centered on the best position.

3. The heater shall be provided with a UHV rated 304L or 316L Stainless Steel mounting flange. The flange shall be a standard 4.5” ConFlat (CF) flange.

4. The sample shall be centered on the CF flange central axis. The sample surface will be parallel to and facing away from the mounting flange when placed in the sample stage. All of the sample front surface shown in the drawing below (figure 1) shall be open to the pyrometer; no part shall be obscured. NIST expects the heater assembly to be mounted on an upper flange, so the mounted sample will face toward the ground. The sample mount shall hold it securely in any orientation.

Figure 1 – Sample Surface and Sample Backplane Orientation

5. The E-beam heater’s (sample-mounting) stage shall allow the sample holder to be transferred in and out of the heating stage dock using the transfer rod given in the drawing below (Figure 2). The heater stage shall tolerate lateral forces associated with docking the sample (requiring spring compression in the transfer rod release mechanism or removing the sample (spring compression to lock the sample in the transfer rod followed by friction as the sample is withdrawn from the dock).

Figure 2 – Transfer Rod End

6. The heater head system, including the mounting CF flange, shall be bakeable to 200 °C or higher temperatures.

7. The heater head system, including the mounting CF flange, shall be helium leak-tight Torr l/s and UHV comptabile. No elastomer seals shall be used.

8. The heater head shall operate with a tungsten filament, and the filament lifetime shall be more than 100 hours when held at the heater system’s normal operating temperature at a pressure < Torr).

9. The system shall allow filament exchange (with supplied tools if any special tools are required), and the system shall be shipped with five additional tungsten filaments

10. The system shall include a mechanism for at least 50 mm manual linear shift in position of the sample dock , in the direction toward or away from the mounting flange (along the axis of the head). When the stage is retracted, there will be room for the sample, its holder, and its linear transfer rod to move freely in the space beyond the stage. Any nuts, springs, or thermocouple on the stage surface shall not block this path when the stage is retracted. The sample shall be positioned such that the distance between the front face (see Fig. 1) of the sample and the vacuum face of the 4.5” mounting flange is 190 mm when the linear shift manipulator is fully extended and 140 mm or less when it is fully retracted.

11. The heater head system shall not have any feature protruding more than 10 mm beyond the top of the installed sample. This rule includes the thermocouples, the spring, wires, nuts, bolts, and cables.

12. The heater shall have (passive) sample cooling of at least 5 °C per second at 300 °C and higher temperatures. It shall work at all temperatures in its range without an active cooling system that would require a laboratory hookup.

13. The heater head system shall have a ready-to-operate control system.

14. The control system shall be fully functional and work with the heater head.

15. The control system shall be 19” rack-mountable.

16. The control system shall use standard US mains, 60 Hz, 120VAC, 15 Amps, single-phase power.

17. The control system shall have a built-in temperature controller (e.g., PID controller), which stabilizes the temperature to within (12 °C standard deviation of the set temperature for temperatures from 300 °C to 1500 °C.

18. The heater head shall have at least one C-type thermocouple mounted on the stage assembly allowing control of the sample temperature via the control system.

19. The control system shall allow sample temperature control with external temperature input, either 4-20mA or 0-10V (e.g., from a pyrometer).

20. The heater head shall be computer controllable through an RS232 interface in the control system for all of its essential functions, including programming of the temperature setpoint, the length of time the temperature is held before switching to another setpoint, the speed of the heating or cooling ramp, the thermometer (thermocouple or pyrometer) to be used, etc.

21. The control system shall come with a manual that explains the user interface and operation and that describes step by step a standard heating and cooling operation up to the maximum temperature with different timing setups. The manual shall describe the programming interface, details of remote communication protocol, and troubleshooting.

22. The control system shall come with software that allows controlling the device. The software shall have a graphical user interface. The software interface and manual language shall be English.

23. The control system shall have an adjustable temperature ramp rate. Temperature (setpoint) ramp rate from 1 °C/s to at least 100 °C/s

24. The control system and the heater shall have a remote interlocked shut-down capability.

25. The control system electronics shall work with forced-air cooling (internal fan)

26. The interface cable(s) between the controller and the heater head: 6-foot to 10-foot long shall be provided with the system.

27. The control system shall meet pertinent safety requirements for electrical equipment for measurement, control, and laboratory use

28. The system shall have a technical documentation for the assessment of the system concerning the restriction of hazardous substances

29. The system shall come with copper gaskets, bolts, and nuts for the flange.

30. The system shall include design drawings and CAD Step files for the complete system.

31. The system shall be provided with e-beam heating test results conducted at 1500 °C for 30 seconds on a molybdenum sample holder. The contractor may use a standard flag-type molybdenum sample holder as shown in Figure 3 for the test.The data shall show the temperature (from the type C thermocouple), heater current, and the bias voltage at 100 °C intervals from room temperature to 1500 °C.

Figure 3 – Standard Flag-Type Molybdenum Sample Holder (in mm) III. Delivery Delivery shall be FOB Destination (or equivalent terms, such as INCOTERMS Delivered Duties Paid) and shall occur not later than (NLT) 16 weeks ARO.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver to:

National Institute of Standards and Technology 100 Bureau Drive, Building 301 Shipping & Receiving Gaithersburg, MD 20899-1640

IV. Inspection and Acceptance In addition to the inspection and acceptance terms articulated in FAR 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

1) Inspect to confirm all items, including cables, manuals, and the software, are delivered; and no damage has incurred.

2) Test if the sample mount can hold the custom design sample holder securely in any orientation.

3) Test if the sample position is at CF flange centerline; if the sample surface is parallel to and facing away from the mounting flange when placed in the sample stage.

4) Test if the heating stage dock allows the sample holder to be transferred in and out using the transfer rod.

5) Inspect if any part obscuring the sample surface when the sample is located into the stage

6) Test if the sample can be positioned properly: the distance between the front face of the sample and the vacuum face of the 4.5” mounting flange is 190 mm when the linear shift manipulator is fully extended and 140 mm or less when it is fully retracted.

7) Inspect if there is any feature protruding more than 10 mm beyond the top of the installed sample.

8) Test if the heater head system, including the mounting CF flange, is helium leak-tight 1x10-10 torr/l/s.

9) Test if the system is computer controllable through an RS232 interface.

10) Test if the system has a remote interlocked shut-down capability.

11) Inspect if the heater head has at least one C-type thermocouple mounted on the stage assembly allowing to control the sample temperature via the control system.

12) Test if the control system allows sample temperature control with an external input, either 4-20mA or 0-10V (e.g., a pyrometer).

13) Test if the e-beam heating can heat the sample up to1500 °C for 30 seconds on a molybdenum sample holder.

The Government will inspect, test and accept the equipment onsite within 15 business days of receipt. A visual inspection of the e-beam heater will be performed by the NIST TPOC to identify surface defects or any form of indication that the e-beam heater was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the e-beam heater due to defects and/or nonconformance.

V. Warranty The contractor shall warrant the entire system for a period of a minimum of 12 months after receipt and acceptance and shall be in accordance with terms in FAR 52.212-4 VI. Payment Schedule The Contractor shall be paid, in accordance with Net 30-day payment terms, upon receipt and acceptance of a proper invoice, in accordance with the following schedule:100% after receipt and acceptance by the TPOC of the instrument which adheres to the minimum requirements as stated above and completion of acceptance testing as set forth by the Government. Acceptance shall take place upon completion of inspection and conclusion of acceptance testing stated above.