SATPC0040734 Tab 10 3 SOW_Redacted.pdf
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- Solicitation number
- 80NSSC26929278Q
About this file
This is a Statement of Work for the procurement of customized 5-inch quartz mask plates for NASA Goddard Space Flight Center (GSFC), Code 521. NASA GSFC requires these mask plates to produce large format arrays of sensitive x-ray detector elements for the ATHENA X-IFU project and other instruments using semiconductor processing methods in the Detector Development Laboratory.
The vendor must deliver 45 quartz mask plates and provide Teflon coating for 10 of those plates. The mask plates must meet specific technical specifications including Core 2564 (Laser) or alternative write tool generated 1X Master product, 5-inch quartz grade material (5090EQAR 2C), minimum feature size of 1 micrometer, critical dimension size of 1 micrometer or greater with ±0.1 micrometer tolerance, and registration of 0.25 micrometer with zero defects at 1 micrometer or greater. The vendor must accept partial orders with separate billing for each delivery. Key vendor responsibilities include providing a secure platform for NASA GSFC data intake and output, processing data into visualizable format for inspection, delivering data for inspection within two working days of order receipt, delivering approved mask plates within three working days, providing tracking information upon request, and managing suitable packaging and shipping. Payment is due upon receipt of items. The period of performance is one year from the date of award, with work performed at the vendor's location and delivery to NASA GSFC in Greenbelt, Maryland 20771. Selection criteria include vendor ability to meet all mask plate specifications, prior experience providing masks for prototypes, established data protection systems, and capability to meet the specified delivery schedule.
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Other files
| File | Type | Posted |
|---|---|---|
| SATPC0040734 Tab 10 1 RFQ Open Market.pdf | ||
| SATPC0040734 Tab 10 2 BNJ_Redacted.pdf |
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Text version
STATEMENT OF WORK
For
Customized Five Inch Quartz Mask Plates
PCN:_______________________
Background:
NASA GSFC (Code 521) requires customized 5” quartz mask plates in order to produce large format arrays of sensitive x-ray detector elements for the ATHENA X-IFU project and other instruments. The arrays are produced on silicon wafers in the Detector Development Laboratory (DDL) with semiconductor processing methods. Each array consists of over 1000 intricate detector elements with each element connected via fine wires to the edge of the substrate. The success of GSFC’s Detector Systems Branch in producing working array devices depends on achieving the highest available level of performance for the 5” mask plates as well as availability of the production of masks on a timely basis, including rapid delivery of the mask plates.
Objectives:
The purpose of this contract is for NASA GSFC to procure customized 5” quartz mask plates
Additionally, some of the custom 5” quartz mask plates will be provided with a Teflon coating
The vendor will provide data intake from NASA GSFC and output to NASA GSFC in a protected server
The vendor will provide rapid turnaround time for data processing for NASA GSFC inspection and delivery of the mask plates
Scope:
This document will describe a contract for the procurement of 5” quartz mask plates. The details of the specifications of mask plates, the coating of the mask plate if requested, the handling of data, and the delivery times will be described. Expectations for the period of performance and quantities of the plates will be indicated.
Tasks/Requirements:
Mask plates shall be provided with the following specifications:
Product: Core 2564 (Laser) or Alternative Write Tool Generated 1X Master Grade: 5" QTZ Min Feature Size: 1 um Material: 5090EQAR 2C Address Size: ≥ 0.1 um Critical Dimension Size: ≥ 1 um Critical Dimension Tolerance: ± 0.1 um Registration Guaranteed: Y Registration: 0.25 um
Defect Criteria: 0 DPA ≥ 1 um
The vendor shall be able to coat the custom 5” quartz mask plate with a Teflon coating.
The quantity of quartz plates to be provided is 45
The quantity of Teflon coatings to be provided is 10
The vendor shall accept orders for fewer than the total number of mask plates and coatings and provide separate billing for each delivery made to NASA GSFC.
The vendor shall provide a platform for receipt of customized data from NASA GSFC to be printed on the mask plates
The vendor shall process the data into a form that can be visualized for inspection by NASA
GSFC
The vendor shall provide a platform for inspection of the data and notify NASA GSFC of the availability of the data on the platform
Upon request, the vendor shall provide tracking information for a specific delivery
Suitable packaging and shipping will be provided by the vendor to the technical contact at NASA GSFC (information provided below)
PAYMENT TERMS AND CONDITIONS consisting of:
NASA GSFC provides payment upon receipt of items.
Delivery Schedule: Data will be provided to NASA GSFC within two days to allow for inspection of the pattern to be printed on the mask
After receipt of approval of the data by NASA GSFC, the mask will be delivered to GSFC within 3 days
Other Requirements: None
Data Security: None
Selection Criteria:
Vendor proposal meets all specifications for the mask plate production
Vendor has provided the masks for the earlier prototypes
Vendor has the data intake and output set up to protect NASA GSFC data
Vendor can make the delivery schedule
Delivery Schedule:
Vendor provides remote access to view file of mask data within 2 working days of receipt of order
Vendor prints mask plate, inspects, and delivers to NASA within three working days of receipt of approval of mask data.
Point of contact and delivery address at GSFC is:
NASA GSFC
Greenbelt, MD 20771
Government Furnished Equipment and Information:
None
Security none
Place of Performance:
The work for this procurement is to be performed at the vendor location
Period of Performance:
The period of performance for this procurement shall be one year from date of award
3/25/2026
Signature and Title Date
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