STATEMENT OF WORK.pdf
PDF 129 KB Posted
- Attached to
- PREVENTATIVE MAINTENANCE Federal contract opportunity
- Solicitation number
- 80NSSC249725
About this file
This statement of work and related federal contract opportunity outline requirements for preventative maintenance services. The statement of work calls for a 12-month preventative maintenance plan including travel, labor, and replacement parts for a deep reactive ion etch system. Additional maintenance needs include replacing a deionized bead in a chiller, addressing various leaks, fixing gauges, replacing temperature controllers and valves. The location of work is a detector development lab at NASA's Goddard Space Flight Center. The period of performance is 12 months from date of award. The federal contract opportunity is a pre-solicitation notice for these preventative maintenance services to be provided soley by Hawks Technical Services as the sole source, with responses due by January 16, 2024 to potentially make this a competitive procurement. The procuring agency is NASA's Shared Services Center.
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STATEMENT OF WORK (Sample)
1. Objective/Requirements NASA-GSFC owns and a Deep RIE (reactive ion etch) system built by SPTS. SPTS has declared this equipment end-of-life and no longer provides any form of maintenance or spare parts on this system. This is a high precision tools used in fabrication of silicon devices that are processed in the Code 553 Detector Development Lab. These systems require maintenance and replacement of critical parts on a regular basis. These systems are an integral part of the Detector Development Laboratory, which produces semiconductor detectors for various NASA missions, such as ATHENA, HIRMES, CLASS, FORTIS, LUVOIR, Landsat and others. The equipment is critical for the production of semiconductor/MEMS devices, and maintenance is essential to keep these systems operational, and avoid unplanned breakdowns and down time.
2. Characteristics, Scope, and Specs
Provide a site visit for a 12 Month PM, including travel, labor, daily expenses and a 12 Month PM Kit, including all o-rings, valve rebuild kits, view ports, bearings.
a. 12 month PM: Disassemble chamber and clean all chamber parts.
Replace all o-rings and view ports. Rebuild VAT pendulum valve.
Separate load lock from chamber clean VAT slot valve. Pull turbo pump replace DN250 seal o-ring. Reassemble and run standard etch and deposition tests. Replace load lock o-rings and replace carousel slide bearings.
Provide a site visit for one week of service to address the list of issues provided below, including travel, labor, daily expenses and needed parts.
a. Additional Maintenance Needs:
b. 1. Replace DI bead in Chiller
2. Align the wafer to the center of the chamber
3. CDA solenoid valves are leaking, fix all leaks
4. Rebuild foreline valve for chamber (if not already performed as part of 12 month maintenance)
5. Fix Foreline Gauge as it is not ranging correctly (replace MKS 750B11TGA2GA if needed)
6. Checked chamber heaters found the main chamber block temperature controller display was blank but the chamber was hot. Recommend replacing the temperature controller.
7. Fix leak in load lock
8. Replace load lock gate valve (install new plate)
9. Replace or rebuild hi-vacuum AIM gauge -- Edwards AIM-S-NW25 D14641000
10. Fix leaking coolant under the chamber (syltherm leaking)
11. Check Service chamber gate valve
12. Fix high helium pressure – problem is the heater tape is not working and line to relieve pressure from Helium backside cooling is clogged. We can clean the line manually with IPA, but Bob says it will clog again if the heater tape is not working to prevent residue buildup in plumbing.
13. Adjust CDA pressure sensor to 80 psi.
3. Place of Performance Detector Development Lab, Building 30, Goddard Space Flight Center
4. Period of Performance 12 months, beginning date of award.
File details come from the government source that posted it. Updated .