SATPC0034885 Tab 04 4 SOW.pdf
PDF 230 KB Posted
- Attached to
- Annual Service Agreement Federal contract opportunity
- Solicitation number
- 80NSSC24868038Q
About this file
This document is a Statement of Work (SOW) for a maintenance contract for a Canon 5x i-Line Stepper Photolithography system at the NASA Goddard Space Flight Center (GSFC) Detector Development Laboratory (DDL). The stepper is an essential tool for nearly all device fabrication projects under development and in production in the Detector Systems Branch at GSFC. The SOW outlines the requirements and deliverables for the preventive maintenance agreement, which includes periodic maintenance from a Canon factory qualified engineer to maintain proper operation of the tool. The related federal contract opportunity is a special notice for an Annual Service Agreement, which NASA/NSSC intends to award to Canon U.S.A., Inc. on a sole source basis under the authority of FAR 13.106-1(b)(1)(i). The period of performance is two years from the contract start date, and the place of performance is at NASA GSFC in Greenbelt, MD.
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Text version
Stepper Lithography System Service Contract
Statement of Work
PR: _ 4200868038
Background The GSFC Detector Development Laboratory (DDL) has a requirement for a maintenance contract for a Canon 5x i-Line Stepper Photolithography system (Stepper).
The system is used to define submicron scale geometry structures in polymer based photoresists. The stepper aligns and exposes patterns through a reticle transferring it onto the wafer under fabrication. The exposure is completed using a step and repeat pattern where a subset of the wafer is exposed followed by a new exposure at the next position of the wafer. This patterning process is continued to cover the entire wafer. The stepper is suitable for patterning wafers of 100, 150 and 200 mm diameter and has high resolution accuracy, repeatability of feature geometry, and nanoscale registration accuracy. The stepper is an essential tool for nearly all device fabrication projects under development and in production in the Detector Systems Branch at GSFC including the technology development and production of detectors for Cosmic Microwave Background Polarization technology, Microwave Kinetic Inductance Detectors, Far-Infrared Detectors, X-Ray Calorimeters, Large Format Magnetic Calorimeters, and Microfluidic Components, EUV and Far-IR/Sub-mm optical components, superconducting amplifiers, and MicroElectroMechanical Microshutters which are important to Goddard’s lines of business.
The stepper consists of an optical illumination and imaging system, motorized reticle and wafer handling system with submicron alignment and positioning accuracy, and a environmental control system.
All of these systems require periodic maintenance from a Canon factory qualified engineer to maintain proper operation of the tool.
Requirements and Deliverables
The requirements and deliverables of the preventive maintenance agreement is shown in the table below:
Government-Furnished Equipment and Government-Furnished Information
• none
Place of Performance
• NASA Goddard Space Flight Center Greenbelt MD USA.
Period of Performance
• Two years from contract start date.
File details come from the government source that posted it. Updated .