RFQ_80NSSC18Q0881_Questions_and_Answers.pdf

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Large Atomic Layer Deposition Chamber
Solicitation number
80NSSC18Q0881
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RFQ 80NSSC18Q0881 Questions and Answers

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RFQ_80NSSC18Q0881_.stp_files.pdf PDF
RFQ_80NSSC18Q0881.pdf PDF

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Questions & Answers

1. Mainly I would like to know if you could share the .stp files for the vessel, or possibly drawings as shown in the solicitation in their native file format?

A. Yes, we can share .stp files.

2. Additionally helium leak testing is mentioned, but there is no listing of what the acceptable leak rate is?

A. The leak rate needs to be less than 5x10^-5 Torr l/s.

3. Lastly, what material of O-ring is acceptable? I am guessing Buna-N is fine.

A. I should have mentioned this, but O-ring should be Viton.

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