cleanroom map.pdf

This document is a facility layout map depicting the floor plan and equipment arrangement of a research or laboratory facility. The layout shows five main bays (BAY 1, BAY 3, and BAY 5) along with a GOWN ROOM and IN CLEAN/AISLE areas, organized around central equipment zones labeled CHASE 3 and CHASE 5.

The facility contains numerous specialized equipment and instruments distributed throughout the bays, including Oxford Florida ICP systems, chillers, pumps (R-pumps, B-pumps, LL-pumps), cryogenic components, electron beam evaporators, benches for various applications (crossover benches, wet benches), storage racks, electronics racks, and environmental control systems. Notable equipment includes PVD (Physical Vapor Deposition) systems, graphene gas panels, etching chambers, spin rinse dryers, and temperature control units from manufacturers such as Lesker, Joe Tek, Technics Asher, and Pegasus. The facility also includes support infrastructure such as fire extinguishers, emergency phones, tool boxes, and storage cabinets. BAY 1 contains lockers, a changing suite, and laundry facilities. The GOWN ROOM includes shoe cleaners and personal protective equipment stations. This appears to be a semiconductor fabrication, materials processing, or advanced research laboratory facility with multiple specialized workstations and environmental controls.