Attachment 1 - SOW (1).docx

STATEMENT OF WORK

Title: Commercial semiautomatic probe stations

I. BACKGROUND INFORMATION

Silicon carbide field effect transistors (FETs) have emerged as a superior solution to silicon FETs for high power semiconductor applications. In recent years, the silicon carbide FET industry has grown at a significant rate with applications in photovoltaics, the power grid, electric vehicles, energy storage, and more. Despite the commercial success of these devices, the industry is plagued by reliability problems, often leading to the need for redundancy in integrated systems. Arguably most important among these issues is the extrinsic breakdown characteristics of the FET gate oxide. Studying this problem requires a deep statistical understanding of device behavior, and innovative solutions for pre-screening from the factory. A large-scale, multi-faceted reliability testing platform is required in order to find solutions.

The CHIPS R&D Program Office intends to purchase a 300 mm wafer probing station which will facilitate the study of transistor characteristics, leakage currents, and breakdown behavior of silicon carbide FET gate dielectrics. This purchase aligns with the CHIPS R&D Programs Office’s mission to standardize new materials, processes, and equipment for microelectronics research. The resulting data will be compared to statistical breakdown data obtained through our effort to create a massively parallel testing platform. The data will also be compared to that of industry standard pre-screening tests on identical samples in order to verify or dispute their accuracy. Similar methodology may be applied to other gate oxide reliability problems in the future.

II. PURPOSE

NIST intends to deliver verified test methods for wide-bandgap semiconductor power device breakdown and threshold instability. This effort requires a stand-alone, versatile probing station for all-purpose measurements in both transistors and capacitors. This procurement will directly fulfill this role.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components are not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001:

Description: Insert brief description of item (e.g. Optical Table, Part Number) Quantity: 1 A. Technical Specifications

a. Must be a semiautomatic wafer probing station capable of probing wafers up to 300 mm in diameter

b. Must be capable of probing both whole wafers and pre-diced dies

c. Must be four probes capable of probing pad sizes as small as 40 µm x 40 µm, with a pitch of 60 µm. Probes must have magnetic bases.

d. Must be compatible with and include low-noise, blade-style probe tips

e. Must include a heated wafer chuck capable of reaching temperatures of at least 200 degrees Celsius

f. Must include digital microscope capable of imaging 5 µm features

g. Must include user-friendly software for control of probing and microscope manipulation

h. Must include vibration isolation

IV. SCHEDULE OF DELIVERABLES

Place of Delivery

Standards of Acceptance: The NIST POC or COR shall review all the above deliverables and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within 4 weeks of receipt of deliverable.

PLACE OF PERFORMANCE

Manufacturing of the product will take place solely at the contractor’s site. Final assembly and setup may occur at either the contractor’s or government’s site. Training and any continued contractor support must occur at the government’s site.

Regular Business Hours (usually pertains if work is being performed onsite at NIST; otherwise, delete if not needed).

Regular business hours are Monday through Friday, 8:00 am to 5:00 pm Eastern Time, excluding Federal holidays and NIST closures.

PERIOD OF PERFORMANCE

Seven months from the date of award.

V. DELIVERY TERMS

Delivery shall be F.O.B Destination (or equivalent incoterms, such as DDP) and shall occur in accordance with the delivery due dates provided in the below table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

The contractor shall deliver all Line Items to:

National Institute of Standards and Technology Shipping and Receiving 100 Bureau Drive, Building 225 Gaithersburg, MD 20899 Stephen Moxim, Building 225

VI. INSTALLATION

The system shall be installed by the Contractor and meet contract specifications no later than two weeks after delivery. Installation, at a minimum, shall include uncrating/unpackaging of all equipment, rigging, set-up and hook-up of the system, demonstration of all specifications, and removal of trash. Onsite installation and demonstration shall be done at NIST, (Gaithersburg, MD- Building 225.)

VII. TRAINING

The contractor shall conduct training session for up to 3 users at NIST. The training shall provide a thorough demonstration of all system/solution functions, maintenance, data administration, and basic troubleshooting. The training may be completed at NIST Monday – Friday during the operating hours of 8am to 5pm Eastern Standard Time immediately after installation and demonstration of specifications and must be completed no later than 7 days after installation. Further training requirements are identified below:

a. After the system passes the site acceptance test, the contractor shall train users on the operation and maintenance of the system.

b. The contractor shall supply the initial installation manual, utility requirements, full system design schematics, and a diagram showing the tool footprint, measurements, and wall penetrations for the system at the time of award.

VIII. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in the specific FAR clause that allows the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

1. Whole-wafer semiautomatic probing of 300 mm wafer

2. Demonstration of semiautomatic probing features

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST POC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 30 days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

IX. WARRANTY (Remove if no warranty is required) The contractor shall warranty the entire system for a period of a minimum of one year after receipt of the equipment and shall be in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government.

X. PAYMENT SCHEDULE

A payment of 50% of the total award amount can be processed upon delivery of the complete system (by 12 weeks after the date of award).

The remaining 50% of the total award amount can be processed upon the Government’s acknowledgement that the system passed all performance tests and training has been completed. (by 16 weeks after the date of award).

XI. CYBERSECURITY PRIVACY REQUIREMENTS

NIST seeks a solution that provides security and privacy protection consistent with requirements defined by applicable federal laws, regulations, policies, and standards (e.g., the Federal Information Security Management Act (FISMA), OMB Circular A-130, and FIPS Publication 200). The solution provider (including subcontractors) may meet these requirements through various means, including but not limited to FedRAMP authorization, current third-party assessments (e.g., SSAE, PCI), and/or responses to NIST special publication control set SP 800-171.

Minimally Acceptable Controls

· System security plan describing physical, technical, and administrative controls implemented to protect systems and sensitive personally identifiable information (SPII).

· IT management processes to establish and manage secure configuration baselines including routine patching for all operating systems and applications.

· Access to SPII is restricted to those with a need to know. Personnel with access to SPII have background investigations performed (e.g. criminal, financial etc.), and are trained on secure handling of SPII.

· Access Controls for SPII meet or exceed industry best practices for access and identification control including, but not limited to, connectivity to servers and databases, multi-factor authentication for remote accesses for administration, secure configurations for any devices accessing the system, and strong physical security for any place where the data is accessed.

· The solution supports multifactor authentication for users and/or supports integration with customer federation services for Single-Sign capability.

· Processes for scanning on a continual basis for vulnerabilities and proper configurations for all aspects of the system, as well as processes for timely mitigation of findings.

· Auditing and Incident Response processes including customer notification of suspected or actual incidents and logging with sufficient information to perform forensics on any incident. Processes for notifying and providing appropriate mitigations, including but not limited to credit monitoring services, for subsidy applicants in the event of suspected or actual incidents.

· SPII is encrypted in transit using TLS 1.2 or better and encrypted at rest in all places the SPII is stored. All encryption algorithms and modules are FIPS 140-2/140-3 validated.

If unable to meet any of the requirements listed above, the solution provider may provide details of mitigations or alternative protections in place to ensure the appropriate handling and protection of SPII.

If the solution provider provides services to other Federal agencies, provide a general description of the security risk management approach and client point of contact.

XII. REQUIREMENTS FOR CONTRACTOR PERSONNEL

Identify all qualifications that the Contractor and/or their personnel working on this contract must possess.

Safety: The Contractor employee must be responsible for knowing and complying with all installation safety prevention regulations. Such regulations include, but are not limited to, general safety, fire prevention, and waste disposal.

Security: NIST is a restricted campus. An identification badge is required for access for entry into buildings and is shown to the armed Security Police when entering the campus.

Identification Badges: Contractor employees must comply with NIST identification and access requirements. Each Contractor employee must wear a visible identification badge provided by the NIST Security Office.

Vehicle Registration: All Contractor employees must register their vehicles with the NIST Security Office to gain access to the campus. A valid driver’s license, Government-furnished civilian ID, proof of insurance and current registration must be presented to the NIST Security Office, at which time a NIST vehicle pass will be issued. The pass must be displayed on the vehicle in accordance with NIST Security Office instructions.

Media Inquiries: The Contractor shall not respond to any media inquiries. Any inquiries from the media shall be immediately relayed to the NIST COR and/or Contracting Officer (CO). There shall be no interviews, comments, or any other response without the knowledge and approval of the NIST COR or Designated Government Official.

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