Statement of Work.pdf

STATEMENT OF WORK

Title: Super High Resolution Darkfield Scattering-Confocal Raman Microscope For

Nanoparticle Detection and Characterization Lab: Materials Measurement Lab (Div 643.03)

I. BACKGROUND INFORMATION

The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps NIST will conduct the measurement science, or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing.

In response to the grand challenge 1 of the Chips Act, NIST is developing measurement methodologies for detection and identification of very low concentration of nanoparticle contaminants at extremely low concentration regimes. More than 75% of particles on an integrated chip are from liquid contaminates that are introduced during the fabrication process. Currently, the main approaches for single particle (sub-20nm) counting are ICP-MS, and laser scattering. Industry is unable to measure/control baseline impurities below 1 PPT (parts per trillion, based on dissolved ions). The BIG concern is distinguishing the instrument noise from the actual particle signal. To address this measurement challenge, we also aim at understanding the factors that govern the surface deposition of such nanoparticles to develop methods for their controlled and predictable deposition. These factors include chemical interactions and physical shape of the nanofeatures on the surface of interest. In part of this effort, we will use fluorescence, Raman and dark-field optical microscopies that are powerful tools for detecting nanoparticles down to few nanometers in size. These optical methods tandem with other high-resolution and high-sensitivity surface analytical instrumentations will be used to develop novel methods for rapid particle impurity detection on a chip.

In this regard Materials Measurement Science Division (MMSD) of NIST is planning to acquire a super resolution optical microscope with unique capabilities to meet the challenges of this project. MMSD has core expertise in multiscale materials characterization, atomic and nanoscale metrology to address national priorities and support critical and emerging technologies.

II. PURPOSE

The Contractor shall deliver a quantity of one (1) Super High Resolution Darkfield Scattering-Confocal Raman Microscope, inclusive of FOB Destination delivery, installation, and warranty.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered.

The use of “gray market” components are not acceptable. All line items shall be

2 | P a g e shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001: Horiba LabRAM Odyssey VIS-NIR with open space microscope or equivalent Description: Super High Resolution Darkfield Scattering-Confocal Raman Microscope for Nanoparticle Detection and Characterization Quantity: 1

A. Technical Specifications Main System

a. Fully Integrated High Resolution Darkfield-Confocal Raman Microscope, optimized for VIS-2200nm. Includes confocal Raman microscope, transfer optics, stigmatic spectrometer equipped with two gratings (600gr/mm and 1800gr/mm), multichannel CCD detector, 4 objectives (5x, 10x, 50x and 100x VIS) and computer package with high performance.

b. Spectroscopy software suite.

Key features shall include:

a. Czerney-Turner spectrograph based on all reflective optics to ensure the system is free of achromatic aberrations (seen with lens-based spectrographs), therefore allowing the coverage of a very wide spectral range.

b. Coupling optics to spectrograph must also be all reflective to avoid chromatic aberration and distortion.

c. Computer-controlled laser power selection from 9 different positions (100%, 50%, 25%, 10%, 5%, 3%, 1%, 0.1% and 0.01%), working from 400 nm to 2200nm.

d. Continuously adjustable motorized true confocal aperture for confocal visualization of samples and to allow for focused collection of the Raman signal at the focal plane of the sample. Slit and CCD cut-offs (sub-arrays) are unacceptable as they limit versatility and confocal performance.

e. Adjustable kinematic mount for Rayleigh rejection filter (Notch or Edge).

This device must allow automated fine tuning of the filter operating angle to optimize low frequency cut-off performance.

f. Motorized exchange of excitation wavelengths

g. Software-controlled continuously adjustable confocal pinhole

h. 800 mm focal length astigmatic flat field spectrograph based on concave mirrors providing the highest spectral resolution on the market

i. One inch, 1024 x 256 pixels, CCD for maximum coverage, Microscope Options

a. The focus-mount modular microscope must offer a large free space under the objective turret. Thus, make it possible to use large sample holders like cryostats, high temperature cells, high pressure cells, or just large samples. For optimal stability, the sample stage must be hard coupled to the rest of the microscope-spectrometer, while focusing is achieved by adjusting the height of the microscope objectives instead of the sample

3 | P a g e stage. This microscope must offer all the functions of the standard microscope.

b. Must be capable of collecting reflectance/absorption spectral information using a white light source (Halogen-Deuterium 200-2500nm) for open space microscope (BxFM) with achromatic coupling. Must have a calibrated white light source to illuminate the sample surface via the objective of the BXFM microscope. The reflected light is then collected through the same objective and sent to the spectrometer. This option must Include white light Koehler device for illumination by transmission for BXFM open microscope.

Excitation Line Kits

a. 532 nm laser kit including air cooled frequency doubled Nd:Yag laser, narrow bandwidth (532nm / 100mW / 1MHz), Edge and Bandpass filters set at 532 nm for Raman measurements from 50 cm -1 and PL measurements up to CCD limit, motorized optics for commuting fully controlled by software, external back platform (for 1 laser) supplied with necessary coupling optics to spectrograph.

b. HeNe laser kit 633nm/17mW, including the Helium Neon laser internally mounted, Edge and Bandpass filters set at 633 nm for Raman measurements from 50 cm -1 and PL measurements up to CCD limit, and the motorized switching system to allow the laser commutation fully controlled by software.

c. 785 nm laser kit including air cooled intra cavity regulated laser diode with point source for maximal confocal performance (785 nm/ 100 mW), Edge and Bandpass filters set at 785 nm for Raman measurements from 50 cm -1 and PL measurements up to CCD limit, motorized optics for commuting fully controlled by software, one level external back platform supplied with necessary coupling optics to spectrograph.

XYZ Sample Positioning and Fast Mapping

a. UV-Visible-NIR area scanning mode based on the use of two XY scanners. It shall offer 2 modes of operation:

(1) Scanning Mode: for average Raman data recorded from a large area, thereby also preventing damages of photo sensitive materials.

(2) Stepping Mode (confocal): discrete motions of the XY scanners to acquire Raman maps. The minimum step size must be 50 nm.

b. Includes the rapid confocal Raman mapping software and necessary packages.

c. The Piezo scanner allows confocal mapping without stage movement, within the objective field of view, by moving the laser beam. The Piezo scanner must be able to map with nanometric steps over several tens of square micrometers without moving the sample.

d. The Piezo scanner must be capable of generating a macro spot. The system must be able to combine XYZ motorized stage capability with a macro spot capability to map large dimensions samples within a short time. The macro spot dimensions must be adjustable to the type of sample, from a line to a square or a rectangle.

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Full kit for sample positioning.

a. Must include motorized XY stage (X = 75mm, Y = 50mm) and motorized Z device in reflection and transmission modes controlled by software.

b. XY specifications: repeatability <= 1μm; accuracy +/-1μm; resolution (minimum step size) = 50 nm (10nm with encoder disabled)

c. Z specifications: resolution (minimum step size) = 0.01μm

d. Includes positioning joystick, external controller, software package and

Raman autofocus capability.

Software

a. Must include the necessary software packages including confocal Raman imaging package and high precision spectroscopy on a wafer scale.

b. Software will include mosaicking capability to generate large area extended image of the sample, and it shall permit low/high magnification video images to be simultaneously visualized to facilitate finding the region of interest in any sample.

c. A 3D topography map shall be realized using focus-stacking imaging technology even on large areas, independently from the Raman/PL acquisition map.

Stage Inserts and Filter Holders

a. Stage insert for one filter holder, 116 x 116 x 7 mm for 75 x 50 mm stage

b. Filter holder, 25 mm diameter, closed version, screw cap

c. Filter holder, 47 mm diameter, closed version, bayonet cap

d. Two holders for square silicon filter of different thicknesses (200nm and

500nm). The holders must be fully compatible with the VRM accessory.

Multichannel Detector Upgrade on Direct Exit

a. Must allow upgrade to air cooled open electrode 1024x256 pixels CCD - 70°C. Working from 200 up to 1100 nm - suitable for measurements in the UV, VIS and NIR.

Gratings

a. 600 gr/mm holographic grating blazed at 500 nm (spectral range 360-

1250nm) with pre-aligned holder, calibration and tests

b. 1800 gr/mm holographic grating for the range 450-850 nm with pre-aligned holder, calibration and tests Microscope Visualization Options

a. Unit must include one analyzer and two polarizers with holders to visualize the sample in polarized white light in reflection and transmission modes.

b. A powerful 150W white lamp is included.

c. DarkField illumination by reflection for Raman microscope

- Annular LED source with dedicated DF objective turret

- Replacement of the standard 5x and 10x objective with the DF versions

d. Universal Darkfield Condenser for Transmission Illumination for Darkfield Scattering

e. Illumination by transmission, made with:

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- Powerful LED fibered source (equal to 150W Halogen)

- Koehler illumination system with Abbe condenser (BrightField)

Microscope Objectives

a. 50X visible objective, NA = 0.75, WD = 0.37 mm

b. 100X visible objective, NA = 0.90, WD = 0.21 mm

c. 5X visible objective, NA = 0.1, WD = 12 mm (needed with DarkF-R option)

d. 10X visible objective, NA = 0.25, WD = 6.5 mm (needed with DarkF-R option)

e. 50X LWD visible objective, NA = 0.50, WD = 10.6 mm (needed with

DarkF-R option)

f. 100X visible objective, NA = 1.25, WD = 0.15 mm, oil immersion (no cover glass correction) Microscope Enclosure

a. Class 1 microscope enclosure for laser safety and ambient light control

IV. SCHEDULE OF DELIVERABLES

Deliverable

Number Description Quantity Due Date

Place of Delivery 1 Super High

Resolution Darkfield Scattering- Confocal Raman Microscope

No later than 180 calendar days after receipt of order.

NIST (Gaithersburg)

2 Installation of the Optical Microscope

1 No later than 180 calendar days after receipt of order.

NIST (Gaithersburg)

3 Operations and training for the Optical Microscope

1 No later than 194 calendar days after receipt of order.

NIST (Gaithersburg)

PLACE OF PERFORMANCE

Work (Installation of the instrument and training) will be performed on the Government site at NIST, Gaithersburg, Maryland. Normal duty hours are Monday through Friday, 8:30 a.m. to 5:00 p.m. with the exception of Federal holidays and NIST closures.

PERIOD OF PERFORMANCE

The period of performance shall be seven (7) months.

V. DELIVERY TERMS

Delivery shall be F.O.B Destination (or equivalent incoterms, such as DDP) and shall occur in accordance with the delivery due dates provided in the below table.

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FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

The contractor shall deliver all Line Items to:

National Institute of Standards and Technology 100 Bureau Drive Gaithersburg, MD 20899 C/O/ POC/COR (TBD, BLDG 217, Lab C112, Office, B103)

VI. INSTALLATION

The system shall be installed by the Contractor and meet contract specifications no later than 180 calendar days after award. Installation, at a minimum, shall include uncrating/unpackaging of all equipment, rigging, set-up and hook-up of the system, demonstration of all specifications, and removal of trash. Onsite installation and demonstration shall be done at NIST (Gaithersburg, MD- Building 217).

VII. TRAINING

The contractor shall conduct a training session at NIST. The training shall provide a thorough demonstration of all system/solution functions, maintenance, data administration, and basic troubleshooting. The training may be completed at NIST Monday – Friday during the operating hours of 9 AM-5 PM immediately after installation and demonstration of specifications and must be completed no later than 14 calendar days after installation. After the system is accepted, the contractor shall train users on the operation and maintenance of the system.

VIII. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in the FAR, the Government reserves the right to perform such performance tests and evaluations as to ensure compliance with the published technical specifications of the microscope and verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST DGO to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the

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Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 14 working days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

IX. WARRANTY

The contractor shall warranty the entire system for a period of a minimum of one year after installation of the equipment and shall be in accordance with terms in FAR 52.212-

4. Warranty shall commence upon acceptance of the system by the Government.

X. PAYMENT SCHEDULE

The Contractor will be paid, in accordance with the payments clause in the contract and as otherwise noted in this document, upon receipt of a proper invoice:

1. 100% after installation and acceptance by the POC of fully installed system, AND

2. After the successful completion of the testing requirements set forth in this document under section set forth in this document, AND

3. After successful demonstration by the instrumentation that it performs in accordance with the requirements set forth in this document.

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer.

Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

XI. CYBERSECURITY PRIVACY REQUIREMENTS

NIST seeks a solution that provides security and privacy protection consistent with requirements defined by applicable federal laws, regulations, policies, and standards (e.g., the Federal Information Security Management Act (FISMA), OMB Circular A-130, and FIPS Publication 200). The solution provider (including subcontractors) may meet these requirements through various means, including but not limited to FedRAMP

8 | P a g e authorization, current third-party assessments (e.g., SSAE, PCI), and/or responses to NIST special publication control set SP 800-171.

Minimally Acceptable Controls

• System security plan describing physical, technical, and administrative controls implemented to protect systems and sensitive personally identifiable information

(SPII).

• IT management processes to establish and manage secure configuration baselines including routine patching for all operating systems and applications.

• Access to SPII is restricted to those with a need to know. Personnel with access to SPII have background investigations performed (e.g. criminal, financial etc.), and are trained on secure handling of SPII.

• Access Controls for SPII meet or exceed industry best practices for access and identification control including, but not limited to, connectivity to servers and databases, multi-factor authentication for remote accesses for administration, secure configurations for any devices accessing the system, and strong physical security for any place where the data is accessed.

• The solution supports multifactor authentication for users and/or supports integration with customer federation services for Single-Sign capability.

• Processes for scanning on a continual basis for vulnerabilities and proper configurations for all aspects of the system, as well as processes for timely mitigation of findings.

• Auditing and Incident Response processes including customer notification of suspected or actual incidents and logging with sufficient information to perform forensics on any incident. Processes for notifying and providing appropriate mitigations, including but not limited to credit monitoring services, for subsidy applicants in the event of suspected or actual incidents.

• SPII is encrypted in transit using TLS 1.2 or better and encrypted at rest in all places the SPII is stored. All encryption algorithms and modules are FIPS 140- 2/140-3 validated.

If unable to meet any of the requirements listed above, the solution provider may provide details of mitigations or alternative protections in place to ensure the appropriate handling and protection of SPII.

If the solution provider provides services to other Federal agencies, provide a general description of the security risk management approach and client point of contact.

XII. REQUIREMENTS FOR CONTRACTOR PERSONNEL

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Safety: The Contractor employee must be responsible for knowing and complying with all installation safety prevention regulations. Such regulations include, but are not limited to, general safety, fire prevention, and waste disposal.

Security: NIST is a restricted campus. An identification badge is required for access for entry into buildings and is shown to the armed Security Police when entering the campus.

Identification Badges: Contractor employees must comply with NIST identification and access requirements. Each Contractor employee must wear a visible identification badge provided by the NIST Security Office.

Vehicle Registration: All Contractor employees must register their vehicles with the NIST Security Office to gain access to the campus. A valid driver’s license, Government-furnished civilian ID, proof of insurance and current registration must be presented to the NIST Security Office, at which time a NIST vehicle pass will be issued.

The pass must be displayed on the vehicle in accordance with NIST Security Office instructions.

Media Inquiries: The Contractor shall not respond to any media inquiries. Any inquiries from the media shall be immediately relayed to the NIST COR and/or Contracting Officer (CO). There shall be no interviews, comments, or any other response without the knowledge and approval of the NIST COR or Designated Government Official.