NIST Requirements Document .docx

Requirements Document VUV + EUV Spectrometer

PML 683.13

I. BACKGROUND INFORMATION

The National Institute of Standards and Technology’s (NIST) Nanoscale Device Characterization Division has need for a spectrometer for both the vacuum-ultraviolet (VUV) and the extreme-ultraviolet (EUV). This VUV+EUV Spectrometer will characterize both the output of a newly procured high-harmonic generation (HHG) EUV laser but also VUV and EUV light at NIST’s SURF-III synchrotron. This requirement is necessary to properly characterize the wavelength(s) and intensit(ies) used to interrogate semiconductor samples, as these must be measured to yield better information about periodic nanoscale dimensions as found in semiconductor metrology.

This is in direct support of the “EUV Scatterometry” Project under Grand Challenge 2, “Advanced Metrology for Future Microelectronics Manufacturing,” for NIST’s CHIPS Research & Develop Metrology. Semiconductor manufacturing requires optics to sample across 300 mm diameter wafers. Visible and ultraviolet wavelengths are used today, but with the onset of highly complex geometries and materials these wavelengths may be insufficient. To address the need for non-destructive optics-based metrology at shorter wavelengths, NIST is developing a novel measurement science approach in the vacuum and extreme ultraviolet as a new metrology that should prove critical to production methods in chip manufacturing. This CHIPS R&D Metrology Project requires this instrumentation to characterize the incident light from SURF-III and the in-laboratory HHG laser.

II. SCOPE

The goal of this contract is to supply (1) VUV+EUV Spectrometer that is compatible with an ultra-high-vacuum chamber, inclusive of FOB Destination shipping and warranty.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components are not authorized for sale in the U.S. by the Contractor is not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001:

Description: VUV+EUV Spectrometer Quantity: 1 A. Technical Specifications

a. Wavelength, grating, and resolution specifications.

i. The VUV+EUV Spectrometer (“Spectrometer”) shall allow the measurement of spectral bandwidths ranging across the 10 nm to 150 nm wavelength range. Multiple gratings (i.e., 2 or more) are envisioned as necessary to cover this range.

ii. The resolution of these gratings within the Spectrometer shall be no less than

1. 0.1 nm at wavelength 40 nm, and

2. 0.2 nm at wavelength 120 nm.

iii. Each included grating shall be an aberration-corrected flat-field grating.

iv. With multiple gratings envisioned, the spectrometer shall be configured for either in-lab removal and installation of these gratings to change the wavelength range and/or the spectrometer shall contain multiple gratings to allow changing the grating in use without breaking vacuum.

b. Vacuum and flanging specifications.

i. The Spectrometer shall be compatible in vacuum cleanliness and flanging for use with the NIST SURF-III synchrotron.

1. The Spectrometer shall be clean ultra-high vacuum (UHV) UHV compatible, where UHV here is defined as a pressure P < 1E-7 mbar.

2. The Spectrometer shall have an ISO CF 100 flange (6” diameter) or equivalent for mounting to SURF-III.

ii. The Spectrometer shall also be compatible in vacuum cleanliness and flanging for use with one of NIST’s EUV HHG laboratory light sources. The specifications for vacuum at the EUV HHG would be met fully by meeting the UHV pressure minimum above.

c. Aperture and filtering specifications

i. The Spectrometer shall be provided with an entrance slit that can be removed by NIST Staff.

ii. The entrance slit shall be removable, as the NIST SURF-III synchrotron has an exit slit for which an entrance slit may unnecessarily reduce the throughput.

iii. The entrance slit shall be provided, as the full unfocused output of the EUV HHG may be characterized.

iv. The Spectrometer shall allow the insertion and removal of at least one filter between the incident radiation and collected spectra.

d. Computer interface specifications

i. The Spectrometer shall be controlled via software running on NIST computer hardware.

e. Imaging specifications

i. The Spectrometer shall include an imaging camera to allow the capture of the resulting spectra measured.

ii. This imaging equipment shall interface with the control software described above (d.i)

iii. The imaging camera shall have at least 2056 x 512 pixels and likewise shall be UHV compatible as defined in (b.i.1).

iv. The camera shall image higher-order diffraction from each spectrometer grating. The light reflected (i.e., 0th order) off the grating shall be blocked from the imaging camera.

OPTION LINE ITEMS: THE FOLLOWING SUPPLIES ARE OPTION LINE ITEMS.

The Contractor shall provide pricing for any additional expenses for offered (1) Software Development Kit (SDK) for CLIN 0001 by computer language, if available:

OPTION: CLIN 0002: (1) Software development kit, MATLAB OPTION: CLIN 0003: (1) Software development kit, C++ OPTION: CLIN 0004: (1) Software development kit, python OPTION: CLIN 0005: (1) Software development kit, LabVIEW

IV. DELIVERABLES

V. PLACE OF PERFORMANCE

a. All work shall be performed at 100 Bureau Dr. Building 217, Gaithersburg, MD 20899.

b. The government will provide access to Building 217 to the contractor for the entire period of performance of this contract.

c. The day-to-day supervision and direct control over the work performed by the on-site contractor personnel shall be the sole responsibility of the contractor.

VI. PERIOD OF PERFORMANCE/LEAD TIME

The period of performance will take approximately 18 weeks ARO.

VII. DELIVERY TERMS

Delivery shall be F.O.B Destination and shall occur in accordance with the delivery due dates provided in the above table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver all Line Items to:

DOC/NIST

Shipping & Receiving 100 Bureau Dr.

Attn: Bryan Barnes, 217/E116 Gaithersburg, MD 20899

***Due to ongoing limited site access of the NIST facilities, the Awardee SHALL confirm with the Designated Government Official and the Contracting Officer prior to ANY shipment to NIST***

VIII. INSTALLATION

The system shall be installed by the Contractor and meet contract specifications no later than 2 weeks after delivery. Installation, at a minimum, shall include uncrating/unpackaging of all equipment, set-up and hook-up of the system, demonstration of all specifications, and removal of trash. Onsite installation and demonstration shall be done at NIST, Gaithersburg, MD- Building 217.

IX. TRAINING

The contractor shall conduct one (1) training session for a minimum of one (1) day for up to two (2) users at NIST. Training is at NIST immediately after installation/set-up and on-site measurements. The training shall provide a demonstration of spectroscopic functions, maintenance, and basic troubleshooting. Training will be provided during normal business hours, between 8:30am and 6:00pm Eastern Time, Monday through Friday, except Federal Holidays, and will be coordinated with the NIST Technical Point of Contact (TPOC) to ensure maximum availability of NIST personnel.

a. After the system passes the site acceptance test, the contractor shall train users on the operation and maintenance of the system.

X. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

Performance tests will coincide with installation “demonstration of all specifications”. Tested specifications for performance testing will be measurement of spectral bandwidth within the wavelength range (A.a.i), changing gratings (A.a.iv), pressure testing (A.b.i.1), and command and control using software (A.d.i, A.e.ii).

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST COR to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 7 working days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

XI. WARRANTY

The contractor shall warranty the entire system for a period of a minimum of 1 year after receipt of the equipment and shall be in accordance with terms in FAR 52.212-4.

XII. PAYMENT SCHEDULE

Advance payment is not authorized. The Contractor must invoice in arrears according to the payment schedule. The Contractor shall be paid, in accordance with Net 30-day payment terms, upon receipt and acceptance of a proper invoice, in accordance with the following schedule:

Advance payment is not authorized. The Contractor must invoice in arrears according to the payment schedule. The Contractor shall be paid, in accordance with Net 30-day payment terms, upon receipt and acceptance of a proper invoice, in accordance with the following schedule:

1. 100% after installation and acceptance by the TPOC of fully installed system, AND

1. After the successful completion of the testing requirements set forth in this document under section set forth in this document, AND

1. After successful demonstration by the instrumentation that it performs IAW the technical requirements set forth in this document AND

1. After receiving an invoice submitted properly, IAW the purchase order terms and conditions.

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer. Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

XIII. TRAVEL

The contractor shall be responsible for all travel expenses.

XIV. CONTRACTOR SUPPLIED MATERIALS

The contractor shall supply all parts, hardware, equipment, and labor required to perform the tasks listed.

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