Amended Statement of Work (SOW).docx

STATEMENT OF WORK

Calnet autoprober

CTL/672/01

BACKGROUND INFORMATION

NIST Communications Technology Laboratory (CTL), RF Technology Division, Guided Wave Electromagnetics Group requires an autonomous wafer probing. The autoprober will be used for on-wafer probing of integrated circuits. The objective of the requirement is to enable fully autonomous wafer-level probing. This requirement supports the NIST CHIPS program to develop and disseminate NIST best practices and algorithms for on-wafer measurement.

SCOPE

The goal of this requirement is to supply a fully autonomous wafer probing up to 110 GHz measurement for the microwave materials lab. The contractor shall deliver the autoprober system and maintenance agreement. Delivery will be to NIST Boulder. Installation and training required. Each item must include a 3-year extender warranty.

MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components are not authorized for sale in the U.S. by the Contractor is not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001: 100-micron pitch dc four probes Description: dc probes, 10 packages of probe tips, and a dc probe Quantity: 4 A. 10050 um pitch B. 110 GHz max frequency C. Operating temperature 40C to 175C D. Contact area 12 um x 5 um E. Rhodium tips F. Max voltage 250V G. DC probe tips H. 10 packages of DC probes tips

Line Item 0002: 100-micron pitch ground-signal-ground on-wafer probes with non-oxidizing solid rhodium tips Description: on-wafer probes Quantity: 2 A. Technical Specifications

a. 100 um pitch

b. 110 GHz max frequency

c. Operating temperature 40C to 175C

d. Contact area 12 um x 5 um

e. Rhodium tips or equivalent

f. Max voltage 250V

Line Item 0003: 50-micron pitch ground-signal-ground on-wafer probes with non-oxidizing solid rhodium tips Description: on-wafer probes Quantity: 4 A. 50 um pitch B. 110 GHz max frequency C. Operating temperature 40C to 175C D. Contact area 12 um x 5 um E. Rhodium tips or equivalent F. Max voltage 250V

Line Item 0004: 50-micron 110 GHz mTRL calibration substrate for 50 um pitch probes Description: calibration substrate Quantity: 1

Line Item 0005: 100-micron 110 GHz mTRL calibration substrate for 100 um pitch probes Description: calibration substrate Quantity: 1

Line Item 0006: Probe tip cleaning substrate Description: Probe tip cleaning substrate Quantity: 1

Line Item 0007: Fully autonomous rf measurement suite for 200 mm wafers Description: autonomous rf measurement suite Quantity: 1 A. Technical Specifications

a. Autonomous probe station compatible with Keysight 5291 VNA

b. Autonomous RF calibration

c. Autonomous RF analysis for S-parameters and Wave-parameters

d. Autonomous Probe Tip identification, cleaning, and verification

e. On-the-fly integration with Python

f. Real time probe tip position validation and accuracy to less than 1 um

g. Probe tip position stability to better than 1 um

h. Probe tip registration better than 1 um

i. Virtual position fencing

j. Stronger consideration will be given for a system that can demonstrate autonomous and unsupervised on-wafer calibration with a worst-case maximum error of less than -30 dB for successive back-to-back calibrations and two calibrations separated by 8 hours without manual intervention.

Line Item 0008: 4-axis Semiautomatic fully autonomous probe station Description: Semiautomatic probe station Quantity: 1 A. Technical Specifications

a. Precision 4-axis 200mm wafer stage & control system

b. Thermal range -60C to 300C

c. Automated wafer alignment to within 1 um

d. Automated probe alignment to within 1 um

e. X-Y stage resolution better than 0.2 um

f. X-Y stage accuracy better than 2 um

g. X-Y stage repeatability better than 1.5 um

h. Z stage resolution better than 1 um

i. Z stage repeatability better than 1 um

j. Integrated floor standing system.

k. High rigidity universal platen

l. System Controller

m. Single LCD screen 24"

n. Computer accessory mount kit

o. Prober Control Software

p. Shipping Restraint kit

q. Integrated MicroChamber or equivalent

r. Tophat mount for 5291or equivalent

Line Item 0009: Shelf and thermal control systems Description: thermal control and system Quantity: 1 A. Technical Specifications

a. Rear shelf

b. Thermal system for 200MM modular thermal chuck (air cooling technology)

c. 'LowNoise'' Precision Thermal Controller (VCF or VCD specification)

d. Fast Transition 2 stage Air Chiller

e. Integrated LCD touch screen

f. Local control & remote access tools

g. Controller/Chiller Interconnect cables

h. 20X objective required and 50X objective

Line Item 0010: Microscope Description: microscope control and system Quantity: 1 A. Technical Specifications

a. Multi-Z (Optical Z-Contact System, AutoFocus)

b. Multi-Cam (Wafer-Probe Navigation, Picture-in Picture)

c. Multi-View (Hi-Res Video, Probe Card Alignment, probe zoom views)

d. Large imager chip with 20MP

e. Variable zoom from 0.5X to 20X

f. 34 mm working distance.

g. Video imaging up to 20 fps

h. 40X Extended Zoom range

i. Sub-micron Programmable Remote Focus Stage

j. Integrated LED Illumination

k. Microscope mount, intelligent objective lens mount

l. Installation kit

m. Objective for the top hat environmental control

n. 20X objective

o. SL 50X objective

Line Item 0011: Motorized positions with 67 GHz probe arms Description: North/south positioners Quantity: 2 A. Technical Specifications

a. Motorized positioner with RF base and probe arm for north and south position. Accepts RF probes up to 67 GHz or multi-contact probes.

Line Item 0012: Hexapod north arm for photonics Description: hexapod north positioner Quantity: 1 A. Technical Specifications

a. Motorized hexapod position for a north arm.

b. 6 Axis Automated Fiber Positioning Solution with High Precision Piezo‐based Nanometer Resolution

Line Item 0013: 110 GHz RF Arm Storage Pod Description: RF Arm Storage Quantity: 2 A. Technical Specifications

a. Probe Arm can be stored whilst the probe, VNA Frequency extender and or tuners as appropriate are fitted, along with associated port savers and flex-shields for quick, easy and safe band swapping. One pod stores one populated probe arm. Hinged, anti-static, cleanroom safe window protects probes from accidental damage due to dropped objects from above and deters finger contact with probe tips but also allows safe ergonomic loading of the probe arm.Arm can be stored whilst the probe, VNA Frequency extender and or tuners as appropriate are fitted, along with associated port savers and flex-shields for quick, easy and safe band swapping. One pod stores one populated probe arm. Hinged, anti-static, cleanroom safe window protects probes from accidental damage due to dropped objects from above and deters finger contact with probe tips but also allows safe ergonomic loading of the probe arm.

Line Item 0014: 67 GHz RF Arm Storage Pod Description: RF Arm Storage Quantity: 2 A. Technical Specifications

a. Probe Arm can be stored whilst the probe, VNA Frequency extender and or tuners as appropriate are fitted, along with associated port savers and flex-shields for quick, easy and safe band swapping. One pod stores one populated probe arm. Hinged, anti-static, cleanroom safe window protects probes from accidental damage due to dropped objects from above and deters finger contact with probe tips but also allows safe ergonomic loading of the probe arm.can be stored whilst the probe, VNA Frequency extender and or tuners as appropriate are fitted, along with associated port savers and flex-shields for quick, easy and safe band swapping. One pod stores one populated probe arm. Hinged, anti-static, cleanroom safe window protects probes from accidental damage due to dropped objects from above and deters finger contact with probe tips but also allows safe ergonomic loading of the probe arm.

Line Item 0015: On-site installation Description: On-site installation Quantity: 1 A. Technical Specifications

a. On-site system installation of Probe Station by a Certified Service Engineer. Probe station unpackaging, assembly, and accessory setup. Probe station system verification, thermal calibration (if applicable), assist with station placement, Basic Software/Prober Training (Load, Align, Contact, Video). Contractor covers all travel, lodging, per-diem to/from customer site (one trip). Contractor is responsible for all shipping, unpackaging, and disposal of packaging materials. Customer Facility Connections based on current Station Facility. Customer guide. Customer equipment and/or personnel to lift/move station

Line Item 0016: On-site training Description: On-site training Quantity: 1 (optional + 1) A. Technical Specifications

a. Three-day training. Applications Engineer to train and/or optimize product solutions against the user's specific application(s). Service is done at the customer's site with their equipment. Benefits from training include increased accuracy, throughput, and efficiencies. Pricing includes all labor and all travel expenses.

Line Item 0017: On-site maintenances and Description: On-site service and maintenance agreement Quantity: 1 B. Technical Specifications

a. Maintenance services for three years.

b. Includes one annual on-site maintenance.

DELIVERABLES

Standards of Acceptance: The NIST SME or COR shall review (list deliverable) and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within XX days/weeks of receipt of deliverable. This section applies to deliverables which must be reviewed and approved for acceptances (draft plans, drawings, etc.)

I. PLACE OF PERFORMANCE

NIST Boulder, Building 81-1E117 All work shall be performed at the 325 Broadway, Boulder Colorado, 80305 The government will provide access to Building 81 to the contractor for the entire period of performance of this contract.

The day-to-day supervision and direct control over the work performed by the on-site contractor personnel shall be the sole responsibility of the contractor.

PERIOD OF PERFORMANCE/LEAD TIME

The period of performance will take approximately 16 weeks ARO.

II. DELIVERY TERMS

Delivery shall be F.O.B Destination and shall occur in accordance with the delivery due dates provided in the above table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver all Line Items to:

DOC/NIST

Shipping & Receiving 100 Bureau Dr.

Gaithersburg, MD 20899

INSTALLATION

The system shall be installed by the Contractor and meet contract specifications no later than 90 days after delivery. Installation, at a minimum, shall include uncrating/unpackaging of all equipment, rigging, set-up and hook-up of the system, demonstration of all specifications, and removal of trash. Onsite installation and demonstration shall be done at NIST in room 1-4635 Boulder Colorado.

TRAINING

The contractor shall conduct training session for up to 6 users at NIST. The training shall provide a thorough demonstration of all system/solution functions, maintenance, data administration, and basic troubleshooting. The training may be completed at NIST Monday – Friday during the operating hours of (provide hours or revise to remote) immediately after installation and demonstration of specifications and must be completed no later than (number of days after installation) after installation.

a. After the system passes the site acceptance test, the contractor shall train users on the operation and maintenance of the system.

b. The contractor shall supply the initial installation manual, utility requirements, full system design schematics, and a diagram showing the tool footprint, measurements, and wall penetrations for the system at the time of award.

c. Contractor shall demonstrate a calibration on a NIST supplied calibration kit with software.

d. NIST will perform calibration comparison to demonstrate acceptance.

III. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

1. On-wafer calibration with NIST provided calibration kit with multiline thru-reflect-line calibration and a series resistor calibration

a. NIST will validate the calibration by quantifying at the capacitance per unit length from a series resistor and validating that it agrees with earlier measurements to within 3 times the standard deviation from 1 GHz to 5 GHz.

b. NIST will validate the calibration by quantifying the worst case error in the corrected S-parameters (calibration comparison) and confirming that the repeatability of multiline thru-reflect-line is less than -60 dB up to 110 GHz, and series resistor to multiline thru-reflect-line is less than -30 dB to 110 GHz.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST COR to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within (insert working days it will take to inspect, accept, or reject) of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

IV. WARRANTY

The contractor shall warranty the entire system for a period of a minimum of three years after receipt of the equipment and shall be in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government and at a minimum shall include the following:

V. PAYMENT SCHEDULE

Advance payment is not authorized. The Contractor must invoice in arrears according to the payment schedule. The Contractor shall be paid, in accordance with Net 30-day payment terms, upon receipt and acceptance of a proper invoice, in accordance with the following schedule:

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer. Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

TRAVEL

The contractor shall be responsible for all travel expenses.

CONTRACTOR SUPPLIED MATERIALS

a. The contractor shall supply all parts, hardware, equipment, and labor required to perform the tasks listed.

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