NB687100-19-02420_IDIQ_SOW.pdf

Statement of Work BMF Precious Metal Sources and Reclaim IDIQ

1. Background Information

NIST-Boulder has a state-of-the-art research laboratory (the Katharine Bloggett Gebbie Building) to support the most sensitive research done at NIST. Included in this building is a Class 100 microelectronics fabrication facility, called the Boulder Micro-Fabrication Facility (BMF). Many of the devices that are made in the BMF require the deposition of thin films of precious metals. Additionally, the BMF collects spent sources and scraps and requires that this metal is reclaimed. The BMF requires a vehicle to procure and reclaim these precious metals.

2. Scope of Work

a. Objectives

i. The goal of this contract is to provide the Government with a vehicle to procure and reclaim these precious metals required for microfabrication.

b. Specific Requirements

i. The Government requires deposition sources composed of precious metals. These deposition sources shall be consistent with the industrial standard for the semiconductor, and micro- and nano- fabrication industries, such as thermal and e-beam evaporation materials (pellets) and sputter targets. The Contractor shall supply the required precious metal sources to the Government.

1. A precious metal is defined as any source that is composed of an element, or an alloy of multiple elements that includes one or more elements from the following list:

a. Gallium

b. Germanium

c. Gold

d. Indium

e. Iridium

f. Palladium

g. Platinum

h. Rhenium

i. Rhodium

j. Ruthenium

k. Silver

l. Titanium

m. Tantalum

2. The size of the required precious metal sources will vary, but examples of typical sizes are:

a. Evaporation Sources:

i. Rods: cylinders that are 0.125 to 0.25 inches high,

0.125 to 0.25 inch in diameter.

ii. Pellets: Roughly 1 – 3 mm in diameter.

b. Sputter Targets:

i. Disks from 2 to 4 inches in diameter, .125 to .25 inch thick.

c. The Government reserves the right to specify the exact shape and size of the required precious metal sources.

3. The quantity of the required precious metal sources will vary, but examples of typical amounts are:

a. Evaporation Sources:

i. 100 mg to 1 kg per request.

b. Sputter Targets:

i. 1 to 2 targets per request.

c. The Government reserves the right to specify the exact quantity of the required precious metal sources.

d. On a typical year, the government requires, 800 g of Au pellets, 200 g of PdAu pellets and one 3” diameter, 0.25-inch-thick, PdAu sputter target. However, the Government may require more or less precious metals on any given year.

4. The purity of the required precious metal sources shall be consistent with industry standards for electron and thermal evaporation sources and sputter targets and will vary by metal. For example, the Government typically requires 99.999% pure metals.

The Government understands that some metals cannot be purified to that level and will accept less pure metals in certain cases. The Government reserves the right to specify the exact purity of the required precious metal sources.

5. The precious metal sources shall be constructed to industrial standards for the corresponding source in a method that is compatible with ISO class 5 cleanrooms. The Contractor shall also bond sputter targets to backing targets upon the request of the BMF using industry-standard techniques such as indium bonding.

6. The precious metal sources shall be cleaned according to industrial standards (for example by chemical etching or CO2 snow clean) to remove any contamination introduced during the pellet fabrication process in a method that is compatible with ISO class 5 cleanrooms.

7. The sputter targets and pellets shall be packed in industrial standard packaging materials that are compatible with ISO class 5 cleanrooms. An example of this could include vacuum packing in a cleanroom compatible material.

8. The Contractor shall supply an analysis of purity indicating the contaminants in the actual post-production precious metal source that is shipped to the Government.

ii. When an order of precious metals is placed, the Contractor shall assay and reclaim the existing stock of the Government’s precious metals and apply the value as a credit towards the order.

1. The Contractor shall be able to reclaim the following materials in the form of pellets, e-beam evaporation crucibles, sputter targets, and general evaporator scrap that is composed of the following materials:

a. Gold

b. Palladium

c. Palladium/Gold Alloy (53 % PD / 47 % Au weight percentage)

d. Platinum

e. Silver

2. The Contractor shall be able to reclaim the precious metals from general evaporator scrap. The Contractor is not required to provide a credit for these materials, but must be able to separate the precious metals from scrap that also contains:

a. Aluminum

b. Copper

c. Titanium

d. Vanadium

3. The Government reserves the right to send the Contractor other materials for reclaim according to the Contractors’ abilities.

4. The Government will send the Contractor its precious metal stock separated by metal and labeled where possible.

5. The Contractor shall supply the Government with the results of the assay and the value of the reclaim.

6. In the event that the value of the Government’s metal reclaims is greater than the value of the metal sources that the Contractor supplies, the Contractor shall supply the Government with additionally specified precious metals as described in Section 2.b.i.

to make up the difference.

3. Period of Performance

Base one-year plus four, one-year option, if exercised.

4. Government Furnished Property The Government will send the Contractor its precious metal stock, as listed in Section 2, separated by metal and labeled where possible.

5. Deliverables

a. The Contractor shall supply the Government with the results of the assay and the value of the reclaim.

b. The Contractor shall supply an analysis of purity indicating the contaminants in the actual post-production precious metal source that is shipped to the Government.

6. Attachments Refining Schedule shall be used for all Delivery Order quotes.

7. Performance Requirement Summary

Task Performance

Indicators Performance Standards

Acceptable Quality Level

Surveillance Method

The Contractor shall provide the Government precious metal sources and assay and reclaim the Governments current precious metal stock according to the specifications in Section 2.

The Contractor provides the Government with precious metal sources that meet the specifications in Section 2 and provide the Government with a credit in accordance with the guidelines in Section 2

The technical requirements defined in the statement of work Section 2 are performed in a timely manner as defined in Section 2.c.

The precious metal sources that the Contractor provides the Government are of a quality as defined in Section 2.

The Contractor shall supply the Government with the results of the assay and the value of the reclaim and a report that shows the major contaminants in the representative stock material of the precious metal sources.

8. Fair Opportunity

Reference FAR 16.505(b), Ordering under Multiple Award Contracts – Fair Opportunity.

The Contractor shall assume all costs (as an indirect charge) associated with quote preparation for delivery order awards under the fair opportunity process.

9. Exceptions to the fair opportunity process Reference FAR 16.505(b), Ordering under Multiple Award Contracts – Fair Opportunity.

10. Refinement Schedule The Contracting Officer shall issue a delivery order setting forth the completion date and a firm-fixed-price or establish not-to-exceed (NTE) price for the supplies which are mutually agreeable per the Refinement Schedule. It is the responsibility of the Contractor to submit revised Refinement Schedule on the first day of the month due to price fluctuations in the market. Any changes to the NTE or fixed price will be issued in writing, will set forth any additional obligation incurred by the Government, and will be signed by the Contracting Officer.

11. No Response

If a Contractor is unable to or chooses not to respond to a requirement, a NO BID notification must be submitted by the Contractor. All NO BIDS shall include a brief explanation as to why the Contractor has elected to forego the opportunity (e.g., conflict of interest). A NO BID notification shall be submitted via e-mail to the Contracting Officer.

12. Evaluation of Delivery Orders

a. Lowest Price Technically Acceptable (LPTA)

i. Technical Capability

1. Defined as the vendor's demonstration of the understanding and capability to provide the required items and services as identified in the specifications / statement of work. This includes the authority to provide the required items (i.e., authorized dealer/seller/reseller), authority to provide maintenance and repair services, capability and method to successfully meet all contract requirements; this include required a delivery schedule, warranty, and all other requirements.

ii. Submittal Requirements

1. The vendor shall submit technical approach and capability documentation which may include a narrative, charts, graphs, tables, drawings, product / service literature, and demonstrated authority to provide the necessary items and perform the required services identified in the specification / statement of work. The documentation shall clearly describe, in sufficient detail, the vendor's authority, proposed items, resources and methods to successfully fulfill the requirements including specifications, performance capability requirements, delivery schedules, warranties and all service requirements per the Request for Quotations.

iii. Basis of Evaluation

1. Evaluation of this factor is a subjective evaluation of the vendor's demonstrated resources, capability, and methods to meet all requirements. This factor will be evaluated on an Acceptable / Unacceptable basis. The vendor’s submittals will be evaluated to determine whether the proposed technical approach demonstrates a clear and unambiguous understanding and a demonstrated ability to meet the minimum requirements. Failure to demonstrate a clear and unambiguous technical approach to meeting the requirements will result in an “Unacceptable” rating for this factor.

13. Completion of Delivery Order

Each delivery order will be considered to be completed when all materials and other delivery order requirement(s) have been delivered to the TPOC, and the invoice has been approved for final payment.

14. Contractor Performance Monitoring/Reporting Reference FAR 16.505(a)(9) and 42.1502. The Contractor’s performance will be documented, evaluated, and monitored in the Contractor Performance Automated Reporting System (CPARS) at http://www.cpars.gov/ as required.

15. Travel:

The Contractor shall cover all travel expenses, if applicable.

http://www.cpars.gov/ http://www.cpars.gov/

16. Contractor Supplied Materials N/A

17. Contractor’s Minimum Qualifications

a. The Contractor shall have the ability to provide the required precious metals to the Government

b. The Contractor shall have the ability to assay and reclaim the precious metals that the Government will provide to the Contractor.

18. Confidentiality:

The information developed under this contract is the property of the U.S. Government and shall be kept in strict confidence.