09-ACQ0042073_9axes-Sources Sought Notice.docx

Notice ID Number: NIST-SS26-CHIPS-20

Title: Sources Sought Notice for High Vacuum Motorized Stage

Response Date: December 9,2025

The purpose of this sources sought notice is to conduct market research and identify potential sources of commercial products/services that satisfy the Government’s anticipated needs.

BACKGROUND

To meet mission requirements, the NDCD needs to acquire motorized stages for the computerized control of nine axes within a vacuum chamber. These stages will allow the precise positioning of five rotary axes, three linear axes, and one goniometric rotation axis; these are integral components for a new experimental apparatus that will harness short extreme-ultraviolet (EUV) light for the non-destructive measurement of the smallest features of computer chips, their transistors.

All stages will be utilized within a high-vacuum environment for a new apparatus. Our experiment will have two modes of operation: “calibration” and “sample measurement”. In the calibration, EUV radiation passes through three aligned, rotating NIST-designed polarization modules to characterize EUV polarization states with respect to the three rotary axes; this set of three rotary stages is the “Calibration Set”. In the sample measurement, the central polarizer & stage is removed and replaced by a sample mounted to a six-axis stack of motion stages; this set of six axes is the “Measurement Set”. Note that the sample measurement also utilizes two of the three stages in the “Calibration Set,” and NIST plans to utilize the one linear lift axis to support both sample positioning and calibration, emphasizing the need for stage interoperability.

The application of these sets of stages is in the accurate reconstruction of dimensional information from the nondestructive reflection and diffraction off a sample under test using polarized light. The “Calibration Set” stages enable the characterization and then harnessing of EUV polarization. The “Measurement Set” is essential for precise sample positioning relative to six axes: correcting tilt, aligning the sample’s orientation, adjusting grazing angle, and positioning in 3-D space relative to the two colinear rotated polarization modules.

The objective of the required stages is the repeatable measurement of the sample under test using EUV radiation with precise control of not just polarization state but also the grazing angle with respect to the sample. In addition, two linear stages will further enable indexing of several locations on the sample, allowing the sequential measurement of multiple targets on the sample under test under the same experimental conditions. Precise control and foreknowledge of the experimental conditions are required to optimally convert measurements of the reflection and diffraction into dimensional information with uncertainties.

NIST is seeking information from sources that may be capable of providing a solution that will achieve the objectives described above, in addition to the following essential requirements:

TECHNICAL REQUIREMENTS FOR ALL STAGES:

A. Vacuum requirements:

a. Each stage shall be compatible with a high vacuum system, defined here as having a base pressure below 10^(-6) Torr.

b. The stages shall be able to connect electrically to external electronics and power supplies through vacuum feedthrough(s). Vacuum feedthrough(s) are addressed as Line Item 0008.

B. Electronics requirements:

a. Each stage shall have vacuum-compatible cabling at least 60 cm (24 inches) long (extension cabling OK) with individual stages connectorized compatible with the vacuum feedthrough(s).

b. Each stage shall have a power supply and a controller for each stage axis (multi-axis OK).

c. Cabling shall be provided between power supplies and controllers to the feedthroughs.

d. Power supplies for these stages shall accept 120 VAC, 60 Hz.

e. Cabling shall be provided between the controllers and a NIST-provided computer (e.g., GPIB, USB, etc.) for coordinated movement of the axes.

C. Encoder requirements:

a. Each stage shall have encoders readable using these electronics.

b. Vendors shall indicate the available technologies for the encoders (e.g., optical, inductive, etc.).

D. Software requirements:

a. LabView VI’s SDK and generic GUI (Windows) required.

E. Condition and packaging:

a. Stages and in-vacuum accessories must be cleaned and bagged for high-vacuum service.

Line Item 0001:

Description: Calibration Set of rotary stages Quantity: 1 set of 3 identical rotary stages A. Technical Specifications for these three stages:

f. Face shall allow screw mounting of rotating components.

g. Stage shall be able to be mounted vertically such that the axis of rotation is horizontal.

h. Stage shall be able to support and operate with a radial load of 1.5 kg or more when the stage is mounted vertically.

i. Mounting plates/brackets: None. Will be designed by NIST.

j. Vendor shall provide mechanical drawings (or 3D models) of these stages.

Line Item 0002: Measurement Set of stages Quantity: 1 set of up to 6 stages for 6 axes of motion A. Definition of the Set:

a. The Measurement Set of stages shall be comprised of up to six stages to allow motion control of six axes:

i. A linear Y axis,

ii. A rotary Yaw axis,

iii. A linear X axis,

iv. A linear Z axis,

v. A goniometric Pitch axis, and

vi. A rotary Roll axis, and

b. The Measurement Set of stages shall also be comprised of up to five brackets/mounting plates to allow the stacking of these stages.

i. Multi-axis stages may be utilized to reduce the number of total stages and mounting plates/brackets required.

c. The Measurement Set of stages’ geometry and axes definitions are shown in attachment labeled “High Vacuum Motorized Stages Specifications.pdf” B. Technical Specifications of the Set:

a. The Measurement Set shall fit within a footprint (not including cables) within a cylindrical envelope 135 mm diameter by 400 mm in height.

b. Sample height (center of roll axis) shall lie in range of 150 mm to 250 mm from bottom of the Measurement Set.

c. Load rating: Measurement Set shall accommodate the following:

i. NIST-provided sample size: 25.4 mm dia. x 25.4 mm thickness, mass: 25 g

ii. NIST-provided sample mount: To be designed by NIST when final vendor design is approved. Estimated size: 25.5 mm dia. x 25.5 mm thick, mass estimate: 60 g.

iii. Required load rating safety factor: 2

d. NIST-provided sample mount compatibility: Roll stage must allow direct attachment of NIST-provided sample mount with screws.

e. Mounting plates/brackets: Vendor must provide mounting plates/brackets to accommodate aligned assembly of the system’s individual stages and shall:

i. Allow assembly of the system’s stages such that the rotation axes (roll, pitch, and yaw) align to a single point to which the samples front surface center will be aligned to a tolerance of ±0.05 mm in all dimensions when linear axes are at center of travel.

ii. Linear axes alignment: X,Y,& Z axes must be aligned to ± 0.5 mrad of normal to each other and the corresponding rotation axes.

iii. Include pin/pin accepting holes (g6/H7 tolerance respectively) for aligned assembly.

iv. NIST is planning a future expansion in which a NIST-designed mounting plate/bracket is utilized to position the center Calibration Set rotary stage along the Y-axis as well as the sample positioning stage. This bracket is not included in this order.

C. Technical Specifications per individual axis:

a. Roll, rotary axis, label: “face rotation”

b. Pitch, goniometric rotary axis, label: “gonio”

c. X-axis, linear stage, label “X”

d. Y-axis, elevation linear stage, label “Y”

NOTE : NIST is planning a future expansion in which a NIST-designed mounting plate/bracket is utilized to position the center Calibration Set rotary stage along the Y-axis as well as the sample positioning stage. Thus, this axis alone has an additional load requirement.

e. Z-axis, linear stage, label “Z”

b. Yaw Rotary motion stage (“theta”)

Line Item 0003:

Description: Computer-aided drawings of Line Items 0001-0002 Quantity: 1 Vendor shall provide mechanical drawings (or 3D models) of these stages. For the Measurement Set, the drawings shall include the mounting planes/brackets and the stages as a single set for NIST review prior to assembly and fabrication.

Line Item 0004:

Description: Controllers for stages Quantity: 1 controller per axis (multi-axis OK) A. Technical Specifications:

a. Suitable for software-controlled operation of Line Items 0001 and 0002.

b. Operates in atmosphere.

c. Includes Windows compatible GUI software and LabView Virtual Instruments (SDK) for end user integration.

d. Controller to computer communication done via USB, Ethernet, GPIB or serial connection(s).

e. 120 VAC, 60 Hz operated Power supply included.

f. Includes power and control cabling for atmosphere side of Line Item 0005. Minimum length: 3 m

g. Required communication cable(s) included.

Line Item 0005:

Description: Vacuum Feedthroughs Quantity: up to 3 A. Technical Specifications:

a. DN100 CF (6-inch ConFlat) flanges with electrical feedthroughs to accommodate all nine axes.

b. Suitable for connection of Line item 0001 to 0004 and Line item 0002 to 0004.

c. Condition and packaging: Stages and in-vacuum accessories must be cleaned and bagged for high-vacuum service.

HOW TO RESPOND TO THIS NOTICE

In responding to this notice, please DO NOT PROVIDE PROPRIETARY INFORMATION. Please include only the following information, readable in either Microsoft Word 365, Microsoft Excel 365, or .pdf format, in the response: Submit the response by email to the Primary Point of Contact and, if specified, to the Secondary Point of Contact listed in this notice as soon as possible, and preferably before the closing date and time of this notice. Please note that to be considered for award under any official solicitation, the entity must be registered and “active” in SAM at the time of solicitation response.

· Provide the complete name of your company, address, name of contact for follow-up questions, their email, their phone number and, if your company has an active registration in https://sam.gov, your company’s Unique Entity ID (UEI).

· Identify the equipment that your company sells that can meet the objectives addressed in the BACKGROUND section of this notice. For each product recommended to meet the Government’s requirement, provide the following:

· Manufacturer name

· Model number

· Technical specifications

· If your company is not the manufacturer, provide information on your company’s status as an authorized reseller of the product(s)

· Describe performance capabilities of the product(s) your company recommends to meet the Government’s requirements. Additionally, if there are other features or functions that you believe would assist NIST in meeting its objectives described above, please discuss in your response.

· Discuss whether the equipment that your company sells and which you describe in your response to this notice may be customized to specifications and indicate any limits to customization.

· Identify any aspects of the NIST market research notice, including instructions, and draft minimum specifications in the BACKGROUND section you cannot meet and state why. Please offer suggestions for how the market research notice and draft minimum specifications could be made more competitive.

· State whether the proposed equipment is manufactured in the United States and, if not, state the name of the country where the equipment is manufactured.

· Identify any plans/possibilities for changes in manufacturing location of the aforementioned equipment and provide relevant details, including timeline.

· For the NAICS code listed in this notice:

· Indicate whether your company is (a) a small business or (b) other than small business. See the Table of Small Business Size Standards and the associated .pdf download file for small business size standards and additional information.

· If you believe the NAICS code listed in this notice is not the best NAICS code for the type of product addressed in this notice, identify an alternative NAICS code that you believe would be more appropriate for the planned procurement.

· Describe services that are available with the purchase of the aforementioned equipment from your company such as installation, training, and equipment maintenance.

· Describe standard terms and conditions of sale offered by your company for the recommended equipment such as: delivery time after your company accepts the order; FOB shipping terms; manufacturer warranty (including details regarding nature and duration); if available, description(s) of available extended warranty; equipment setup and test; operator and service instruction manual(s); cleanup after installation; and if applicable, other offered services. Provide a copy of manufacturer standard terms and conditions that typically relate to the sale of the specified equipment, if available.

· State whether your company offers facility renovation services related to installation of the recommended equipment at its delivery destination, if required per the NIST-identified minimum specifications, and provide description of said services. Indicate if your company performs the facility renovation services or typically subcontracts the work to another company. Indicate if your company would be interested in inspecting the intended installation site during the market research phase.

· State published price, discount, or rebate arrangements for recommended equipment and/or provide link to access company’s published prices for equipment and services.

· If the recommended equipment and related services are available for purchase on any existing Federal Supply Schedule contract(s) or other contracts against which NIST may be able to place orders, identify the contract number(s) and other relevant information.

· Identify any customers in the public or private sectors to which you provided the recommended or similar equipment. Include customer(s) information: company name, phone number, point of contact, email address.

· Provide any other information that you believe would be valuable for NIST to know as part of its market research for this requirement.

· State if you require NIST to provide additional information to improve your understanding of the government’s requirement and/or would like to meet with NIST representatives to discuss the requirement and the capabilities of the identified equipment.

QUESTIONS REGARDING THIS NOTICE

Questions regarding this notice may be submitted via email to the Primary Point of Contact and the Secondary Point of Contact listed in this notice. Questions should be submitted so that they are received 5 days prior to the response date. If the Contracting Officer determines that providing a written amendment to this notice to document question(s) received would benefit other potential respondents, the questions would be anonymized, and a written response to such question(s) would be provided via an amendment to this notice.

IMPORTANT NOTES

This notice is for market research purposes and should not be construed as a commitment by NIST to issue a solicitation or ultimately award a contract. There is no solicitation available at this time.

This notice does not obligate the Government to award a contract or otherwise pay for the information provided in response.

NIST reserves the right to use information provided by respondents for any purpose deemed necessary and legally appropriate.

Any organization responding to this notice should ensure that its response is complete and sufficiently detailed to allow the Government to determine the organization’s capability.

Respondents are advised that the Government is under no obligation to acknowledge receipt of the information received or provide feedback to respondents with respect to any information submitted.

After a review of the responses received, a synopsis and solicitation may be published on GSA’s eBuy or SAM.gov. However, responses to this notice will not be considered an adequate response to any such solicitation(s).

The responses shall not exceed 20 pages including all attachments, charts, etc.

Thank you for taking the time to submit a response to this request.