01. SOW _OXFORD Plasma Pro 100 RIE _ 20260611.pdf

STATEMENT OF WORK

FOR

PURCHASE OF OXFORD PLASMA PRO 100

WRIGHT-PATTERSON AFB

14 April 2026

1. DESCRIPTION OF SERVICES. The Contractor shall provide all personnel, equipment, tools, parts, and supervision necessary to perform installation, setup, testing and training of faculty, and staff, as well as support equipment; chillers and vacuum systems, listed in Appendix A (attached). Equipment is located in the Engineering Laboratory, Air Force Institute of Technology (AFIT), Wright-Patterson AFB OH. This will be a one-year purchase order. Service maintenance and repair tasks shall be in accordance with the procedures recommended by the respective equipment manufacturer. A periodic maintenance schedule shall be developed before the start of the contract.

1.1. PERIOD OF PERFORMANCE (POP): 120 days after Contract Award.

1.2. BASIC SERVICES. The Contractor shall install, setup, operate, train and ensure all supporting equipment processes are functional in accordance with manufacturer’s recommendations and standard commercial practices. Upon notification by the laboratory supervisor, the Contractor shall train required faculty and staff peronnel through the commissioning process and ensure items included in the price as quoted are adhered to as written in the quote.

• Process guarantee (to be agreed)

• Commissioning

• One system manual (USB memory stick)

• Packaging and crating included

• Service packages & credits

1.3. EQUIPMENT. Equipment being placed for the first time under preventative maintenance service shall be in good operating conditions and shall be subject to inspection and acceptance by the Contractor/System Manager at the time order is placed. The Contractor will notify the ordering agency of any machines not acceptable for maintenance within 30 days. Services required to bring equipment up to standard operating conditions will be performed under separate order. The Contractor shall obtain approval of the Government inspector or the laboratory supervisor before removing any item from its existing location.

1.4. NEW EQUIPMENT. This order/contract may be amended to include new machines and delete existing machines. Any addition or deletion of machines will result in a modification to the contract. The contractor will ensure the following product summary standards are included, installed, tested and fully operational:

• PlasmaPro 100 ICP Etch system

• 208V 60Hz 3phase supply configuration

• 10m process chamber cable

• PC & 22" monitor

• Chamber right hand build configuration

• RF low power bias kit

• ALE gas dose kit

• RF 600W generator & amu match for ETCH

• Cobra300 3kW ICP plasma etch source (inc RF generator & amu)

• Electrostatic Shield for ICP plasma source

• 100mT CM gauge

• Cryo-cooled / electrically-heated etch lower electrode kit

• Wafer clamping and helium backing kit

• Julabo FP51 chiller

• 5m chiller cable

• Quartz clamp with continuous contact - 100mm diameter wafer

• Standard Gas Pod externally mounted (12 lines max)

• Split gas manifold, 2 points, 1 chamber

• Gasline heating kit suitable for toxic gasline

• Gasline heating kit suitable for non-toxic gasline

• Gas pod wall mounted

• 5m gas pod power cable

• BP1C-GP-MFC-MKS

• 8x Standard gasline and MFC for non-toxic gases

• 2x By-passed gasline and MFC for toxic gases

• Adixen ATH1600MT turbo, ISO200 pipework, apc & heated backing valve kit

• Pfeiffer A124H ELT pump kit

• 10m pump cable

• PlasmaPro 100 Chamber and pump down pipe Heating Kit

• PlasmaPro 100 Pumping Foreline Heating Kit

• Variable wavelength Ocean Optics optical EPD Kit

• PlasmaPro100 Single loadlock kit

• Roughing only to Dry Pump - Isolation Valve included

• Loadlock soft pump kit

• Loadlock soft vent kit

• Pfeiffer ACP15G dry pump kit

1.5. GOVERNMENT REGULATIONS: All Contractor personnel performing work under this contract must comply with all applicable Air Force and local regulations. Of specific concern are regulations regarding wearing of badges, access lists, and safety.

a. The Contractor and Contractor personnel shall be required to register their privately owned vehicles and obtain vehicle passes and decals in accordance with Wright- Patterson AFB AFI 31-204. All passes and decals must be turned in to the Pass and Registration Section upon contract completion or termination of the contract.

b. The Contractor must maintain working areas in a clean and orderly fashion.

c. Where Government material is provided, the Contractor must protect such material.

Similarly, the Contractor must protect the Government work areas and facilitates; where applicable.

d. The Contractor is expected to perform in a safe manner. Appropriate safety manuals are available for use and will be complied with. Should any injuries occur during the performance period of this contract, the Contractor must notify the Contracting Officer in writing within 24 hours of such injury.

e. The Contractor will notify the contracting officer in writing within 24 hours of any actual or potential labor disputes.

1.6. SERVICE CALL RESPONSE. The Contractor shall respond to a repair service request as written in the quoted contract agreement. Service repair calls will occur when appliances malfunction or fail to operate properly.

1.7. SERVICE RECORDS. The Contractor shall maintain service history records for the equipment items (by serial number) serviced. Each service record shall contain the following minimum information. These service records shall be made available to the Lab Supervisor upon request and shall be delivered to the System Manager upon termination or completion of the contract:

a. Dates of maintenance coverage under Monthly Maintenance.

b. Services performed on the item and copy of the Malfunction Report.

1.8. EQUIPMENT REPAIR. The Contractor shall return equipment to operational condition within 5 days after notification of service requirement, unless otherwise mutually agreed. The Contractor shall notify the Lab Supervisor when any replacement part must be ordered and repair delays are expected. The Contractor must sufficiently notify users of the expected delay.

2. SERVICE DELIVERY SUMMARY

~~~~Performance Objective SOW Para ~~~Performance Threshold.

Preventive and Remedial Maintenance of Lab Equipment

1.1 and 1.2. 90% of all lab equipment is properly working

Lab Equipment is in proper working order and maintained according to manufacturer recommendations.

Service Call Response Service is received within specified time. Customer is satisfied with response time.

1.5. 95% of all calls are satisfactorily completed within required time.

~~~~Performance Objective SOW Para ~~~Performance Threshold.

Equipment Control Equipment is not moved and stored unless approved by the Government.

1.2. Government approval is obtained

100% of the time before any lab equipment is moved or stored.

Equipment Repair Repairs are made in a timely manner.

Replacement of parts with appropriate parts.

1.7. 100% of all equipment is repaired in a timely manner. Replacement part is appropriate per manufacture specs.

3. GOVERNMENT FURNISHED PROPERTY AND SERVICES. The Government shall furnish or make available facilities described in paragraph 3.1, 3.2. Government facilities have been inspected for compliance with the Occupational Safety and Health Act (OSHA). No hazards have been identified for which work-arounds have been established. Should a hazard be subsequently identified, the Government corrects OSHA hazards according to base-wide Government developed and approved plans of abatement taking into account safety and health priorities. A higher priority for correction will not be assigned to the facilities provided there under merely because of this contracting initiative. The fact that no such conditions have been identified does not warrant or guarantee that no possible hazard exists, or that work-around procedures will not be necessary or that the facilities as furnished will be adequate to meet the responsibilities of the Contractor. Compliance with the OSHA and other applicable laws and regulations for the protection of employees is exclusively the obligation of the Contractor. Further, the Government will assume no liability or responsibility for the Contractor’s compliance or noncompliance with such requirements, with the exception of the aforementioned requirement to make corrections according to approved plans of abatement subject to base wide priorities. Before any modification of the facilities performed by the Contractor at his or her expense, the Contractor must furnish the contracting officer documentation describing, in detail, the modification requested. No alterations to the facilities shall be made without specific written permission from the contracting officer. In the case of alterations necessary for compliance with the OSHA, such permission shall not be unreasonably withheld. The Contractor shall return the facilities to the Government in the same condition as received, fair wear and tear and approved modifications excepted. These facilities shall only be used in performance of this contract.

3.1. GOVERNMENT-FURNISHED UTILITIES. AFIT will furnish 110 Volts, 60 Hz for calibration equipment and equipment needed for PMs and RMs. AFIT will provide an area for bench tests, component replacement, calibration and other out-of-system repair activities.

3.2. TELEPHONE SERVICES. AFIT will furnish a class C telephone service for on base job related use only.

4. GENERAL INFORMATION.

4.1. QUALITY CONTROL. Contractor shall develop and maintain a quality program to ensure services are performed in accordance with commonly accepted commercial practices for lab equipment maintenance and repair. The Contractor shall develop and implement procedures to identify and prevent defective services from recurring. As a minimum, the Contractor shall develop quality control procedures that address the areas identified in paragraph 2, Service Delivery Summary. The Government evaluator must have a specific quality control inspector to notify in case of customer complaints.

4.2. QUALITY ASSURANCE. The Government will periodically evaluate the Contractor’s performance in accordance with industry standards for load cells, and lvdt’s calibration procedures.

4.3. GOVERNMENT REMEDIES. The contracting officer shall follow the requirements of FAR 52.2 12-4, Contract Terms and Conditions for Commercial Items (Oct 2018), for Contractor’s failure to correct nonconforming services.

4.4. HOURS OF OPERATION. Normal Hours of Operation: The Contractor shall perform the services required under this contract during the following hours: Monday through Friday (0800-1700).

NOTE: The Contractor may be required to work extended hours or emergency service

Holidays. The Contractor is not required to provide service on the following days:

New Years Day Memorial Day Veterans Day Martin Luther King Day Independence Day Thanksgiving Presidents Day Labor Day Christmas Juneteenth Columbus Day

4.5. SECURITY REQUIREMENTS. The Contractor shall be responsible for safeguarding all Government property provided for Contractor use. At the end of each work period, all Government facilities, equipment and materials shall be secured.

4.5.1. KEY CONTROL. The Contractor shall establish and implement methods of making sure all keys issued to the Contractor by the Government are not lost or misplaced and are not used by unauthorized persons. The Contractor shall not duplicate any keys issued by the Government.

4.5.1.1. The Contractor shall immediately report to the contracting officer any occurrences of lost or duplicated keys.

4.5.1.2. In the event keys, other than master keys, are lost or duplicated, the Contractor may be required, upon written direction of the contracting officer, to re-key or replace the affected lock or locks without cost to the Government. The Government may, however, at its option, replace the affected lock or locks or perform re-keying and deduct the cost of such from the monthly payment due the Contractor. In the event a master key is lost or duplicated, all locks and keys for that system shall be replaced by the Government and the total cost deducted from the monthly payment due the Contractor.

4.5.1.3. The Contractor shall prohibit the use of keys issued by the Government by any person other than the Contractor’s employees and the opening of locked areas by Contractor employees to permit entrance of persons other than Contractor employees engaged in performance of contract work requirements in those areas.

4.5.2. LOCK COMBINATIONS. The Contractor shall control access to all Government provided lock combinations to preclude unauthorized entry.

4.5.3 SECURITY REQUIREMENTS. The contract manager or alternate shall complete a “Request for Identification Credential” (AFMC Form 496) for each employee of the Contractor requiring access to Wright-Patterson Air Force Base. The requests shall be submitted to Pass and Registration Building 268. The Government will provide a completed “Identification Credential” (AFMC Form 87), which shall be issued, displayed and surrendered as directed in AF 131-209.

4.6. SPECIAL QUALIFICATIONS. The Contractor shall provide a contract manager who shall be responsible for the performance of the work. The name of this person, and an alternate or alternates, who shall act for the Contractor when the manager is absent, shall be designated in writing to the contracting officer.

4.6.1. The contract manager or alternate shall have full authority to act for the Contractor on all contract matters relating to daily operation of this contract.

4.6.2. The contract manager or alternate shall be available during normal duty hours. The contract manager or designated alternate will be available to respond via telephone within 4 hours during normal business hours.

4.6.3. The contract manager and alternate or alternates must be able to read, write, speak, and understand English.

4.6.4. The Contractor shall not employ persons for work on this contract if such employee is identified to the Contractor by the contracting officer as a potential threat to the health, safety, security, general well being or operational mission of the installation and its population.

4.6.5 The Contractor shall supply employee resumes and/or experience that will provide information necessary for determination of qualifications. The Contractor shall provide written documentation of technicians with a two-year technical degree in the area of electronics or electro-mechanics and three years of experience on troubleshooting, preventive maintenance, and calibration on MTS servo-hydraulic equipment. Alternative qualification is five years of experience on troubleshooting, preventive maintenance and calibration on MTS servo-hydraulic equipment. During the actual contract any employee changes that will affect the contract will be made available to the CO. Resume and/or experience will be provided by the Contractor for continuing evaluation of qualifications.

4.6.6 The Contractor shall not employ any person who is an employee of the US Government if employing that person would create a conflict of interest. Additionally, the Contractor shall not employ any person who is an employee of the Department of the Air Force, either military or civilian, unless such person seeks and receives approval according to the Joint Ethics Regulation, DOD 5500.7R. The Contractor shall not employ any person who is an employee of the Department of the Air Force if such employment would be contrary to the policies in AFR 79-1.

4.7. PARTNERING AGREEMENT. The contracting officer may require a partnering agreement between the Government and the Contractor to ensure joint cooperation and a sound partnership of all parties involved in the execution of this contract. Partnering is the creation of a Government-Contractor relationship that promotes achievement of mutually beneficial goals. It involves an agreement in principle to share the risks involved in completing the project and to establish and promote a nurturing partnership environment. Representatives from each organization are encouraged to participate in developing the partnering agreement. Suggested representation is the civil engineer manager, the Government inspector, the Government contract administrator, the Contractor’s manager and the Contractor’s quality control person. All costs for the partnership agreement should be shared equally between the Government and Contractor. This group is responsible for developing a formal partnering agreement that should be signed by all parties involved. The agreement should contain as a minimum: specific goals to be reached and a list of objectives to reach the goals, a set of metrics to evaluate the objectives, a frequency for meetings to review the metrics, and a statement of cooperation to execute the terms of the agreement.

4.8. ENVIRONMENTAL and HAZARD MATERIALS HANDLING. The Contractor shall be knowledgeable of and comply with all applicable Interstate, Federal, State, and Local laws, regulations, and requirements regarding environmental protection. In the event environmental laws or regulations change during the term of this contract, the Contractor is required to comply as such laws come into effect.

4.8.1. NOTIFICATION OF ENVIRONMENTAL SPILLS. If the Contractor spills or releases any substance contained in CFR 302 into the environment, the Contractor or its agent shall immediately report the incident to the Base Civil Engineers at 257-6764. The liability for the spill or release of such substances rests solely with the Contractor and its agent.

4.8.2. MATERIAL STORAGE AND USE. The Contractor shall follow manufacturer’s guidelines and professional recommendations for control of humidity, temperature, cleanliness, and materials handling.

4.8.3. PURCHASE OR USE OF HAZARDOUS MATERIALS. Preapproval from the HAZMAT Cell (88 SUPS/LGSCH, 257-9716, Bldg. 1 Area C) is required prior to Contractor purchase of hazardous materials for work performed under contract to the Government. Form “HM

Cell 013” must be submitted for each material to be brought into WPAFB. In addition to approving purchase and use of hazardous materials, the HAZMAT cell shall track the Material Safety Data Sheets (MSDS) accompanying the materials, and maintain an inventory. A separate form “HM Cell 013” is required for each material proposed for use. The form contains information on major stock classes that can be considered to be hazardous as well as those chemicals on the EPA-17 list and class I ozone depleting substances. Contractor must also comply with AFOSH Standard 161- 21, Hazard Communication.

4.8.4. Provide protection to Government property to prevent damage during the period of time the property is under the control or in the possession of the Contractor.

4.8.5. Include a clause in all subcontracts to require subcontractors to comply with the safety provisions of this contract as applicable.

4.8.6. Record and report within 1 hour to the CO or designated Government representative (GR) all available facts relating to each instance of damage to Government property or injury to either Contractor or Government personnel.

4.8.7. In the event of an accident, take reasonable and prudent action to establish control of the accident scene, prevent further damage to persons or property, and preserve evidence until released by the accident investigative authority through the contracting officer.

4.8.8. If the Government elects to conduct an investigation of the accident or mishap, the Contractor shall cooperate fully and assist Government personnel in the conduct of investigation until the investigation is completed.

4.8.9. Include a clause in each applicable subcontract requiring the subcontractor’s cooperation and assistance in accident or mishap reporting and investigation.

4.8.10. Comply with safety provisions listed in the technical publications within the Statement of Work.

4.8.11. The Contractor shall provide a list of all hazardous materials to be used in the project prior to starting work to the Wright-Patterson AFB Hazardous Materials Cell (HM CELL). The Contractor shall also provide a weekly list of exact quantities and types of hazardous materials brought on base, used, and removed to the HM CELL. No hazardous materials shall be stored on Wright-Patterson AFB at anytime. All hazardous materials shall be removed from Wright- Patterson AFB at the end of each workday.