Perform research into new mechanisms for chemical mechanical planarization (CMP) process steps used throughout semiconductor manufacturing processes with the procurement of advanced equipment, to…
Ended Project Grant Awarded Last action
- Award ID
- 60NANB24D256
- Recipient
-
Lewis University UEI EHUHEAQXWAU5
- Awarding agency
-
National Institute of Standards and Technology
Department of Commerce
- Obligated
- $949,994
Award facts
- Assistance listing
- 11.617 Congressionally-Identified Projects
- Completion date
- Place of performance
- Romeoville, IL 60446, USA
Award details come from USAspending.gov.
Description
- Purpose
- The purpose of this grant is to perform research into new mechanisms for chemical mechanical planarization (CMP) process steps used throughout semiconductor manufacturing processes with the procurement of advanced equipment, to establish community outreach activities, and to establish courses for students and professionals in CMP methods.
- Activities
- The research team will conduct investigations, using the procured equipment, to investigate new modes for CMP targeted at semiconductor materials that are not as widely used in the industry, but have promise to enhance device performance, such as silicon carbide (SIC). Studies will include non-contact modes for CMP cleaning (megasonic) and new chemistries (supramolecular complexes).the team will establish programs to extend the semiconductor talent base through outreach to middle school and high school students that are focused on experiential learning workshops. Short course on CMP will also be developed for students and professionals.
- Expected outcomes
- New research will be performed on new CMP methods that could expand the range of materials available to semiconductor manufacturers. Students and professionals will be introduced to semiconductor technology principles and to in-depth technical training.
- Intended beneficiaries
- Lewis university students and community stakeholders will be the primary beneficiaries. Professionals that take the short courses developed will also benefit.
- Subrecipient activities
- The recipient does not intend to subaward funds.
Transactions
| Action | Obligated | Date |
|---|---|---|
| Amendment | -$6 | |
| Original award | $950,000 |
Quick answers
Who received award 60NANB24D256?
60NANB24D256 was awarded to Lewis University by National Institute of Standards and Technology (Department of Commerce) on October 1, 2024.
How much is award 60NANB24D256 worth?
$949,994 has been obligated on 60NANB24D256.
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