Sbir phase II: high-resolution, high-precision 193-NM photomask phase metrology system
Ended Project Grant Awarded Last action
- Award ID
- 0450620
- Recipient
-
Actinix UEI G2VLC911XF93
- Awarding agency
-
National Science Foundation
- Obligated
- $236,342
Award facts
- Assistance listing
- 47.041 Engineering
- Completion date
- Place of performance
- Scotts Valley, CA, USA
Award details come from USAspending.gov.
Quick answers
Who received award 0450620?
0450620 was awarded to Actinix by National Science Foundation on February 1, 2005.
How much is award 0450620 worth?
$236,342 has been obligated on 0450620.
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