Cooperative Agreement FA86500825517

Award Date 11/30/07
Completion Date 2/28/11
Dollars Obligated $8.1M
Federal Agency
Air Force
Federal Grant Program
12.800
Assistance Type
Cooperative Agreement
Place of Performance
Andover, MA 01810, USA

ATOMIC LAYER DEPOSITION (ALD) HERMETIC COATINGS FOR MICROELECTRONICS

Posted 11/30/07, 12:00 AM