Sigray INC seeks to develop a novel linear accumulation x-RAY source (laxs) based on the proposing company's existing ultrahigh brightness micro-structured x-RAY source to achieve a >30X brightness…

The National Institute of Standards and Technology (NIST) awarded a $289,703 Cooperative Agreement under the CHIPS Research and Development (CFDA 11.042) program to Sigray, Inc., a minority-owned technology company in Concord, California. The purpose of this award is for Sigray to develop a novel Linear Accumulation X-Ray Source (LAXS) based on their existing ultrahigh brightness micro-structured X-ray source technology. This new LAXS system is expected to achieve over a 30x brightness gain compared to leading X-ray sources, enabling improved laboratory transmission critical dimension small angle X-ray scattering (T-CDSAXS) capabilities for semiconductor research and manufacturing. The project has a performance period from October 1, 2024 to April 30, 2027.

Activities

Develop a novel linear accumulation x-RAY source.

Expected outcomes

The outcomes will provide 30X higher performance than the high brightness rotating anode x-RAY source used in existing laboratory critical dimension small angle scattering.

Intended beneficiaries

Researchers and manufacturers of semiconductor transistors.

Subrecipient activities

The recipient does not intend to subaward funds.