Primenano INC will develop a measurement technology for in-line metrology, which has applications in materials purity, electrical properties, 3D device and next generation manufacturing

The National Institute of Standards and Technology (NIST) awarded a $259,848.73 Cooperative Agreement under the CHIPS Research and Development (CFDA 11.042) program to Primenano, Inc., a for-profit technology company, to develop an advanced prototype of a measurement technology for in-line metrology. The project aims to create a non-destructive, wafer-based measurement system with applications in materials purity, electrical properties, 3D device, and next-generation manufacturing. Primenano plans to subaward funds to support software integration and process development for modified probes as part of this effort. The project has an expected completion date of October 31, 2026 and is intended to benefit researchers and the U.S. semiconductor industry involved in metrology and advanced packaging.

Activities

The awardee will research, develop and create an advanced prototype of their measurement technology for in-line metrology.

Expected outcomes

The measurement technology will allow for direct, non-destructive wafer-based measurements of electrical material properties.

Intended beneficiaries

Researchers and U.S. Semiconductor industry involved in metrology and advanced packaging.

Subrecipient activities

The recipient plans to subaward funds for software integration and process development for modified probes.