The National Institute of Standards and Technology (NIST) awarded a $259,848.73 Cooperative Agreement under the CHIPS Research and Development (CFDA 11.042) program to Primenano, Inc., a for-profit technology company, to develop an advanced prototype of a measurement technology for in-line metrology. The project aims to create a non-destructive, wafer-based measurement system with applications in materials purity, electrical properties, 3D device, and next-generation manufacturing. Primenano plans to subaward funds to support software integration and process development for modified probes as part of this effort. The project has an expected completion date of October 31, 2026 and is intended to benefit researchers and the U.S. semiconductor industry involved in metrology and advanced packaging.
Mod # | Description | Reason For Modification | Federal Obligation (Click to sort descending) | Date (Click to sort ascending) |
|---|---|---|---|---|
| Not listed | $259.8k | 9/17/24 |