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All Federal Contract Awards
Purchase Order DOCSB134117SU0263
Award Date
5/3/17
Potential Completion Date
8/11/17
Potential Value
$45K
Overview
Contacts
Activity
2
Transactions
2
Subawards
Opportunity Stack
Similar Awards
Federal Agency
National Institute of Standards and Technology
Awardee
Technical Equipment Sales Inc. H2JNBHPTF6G3
Ultimate Awardee
Not listed
NAICS Category
334413 - Semiconductor and Related Device Manufacturing
PSC Category
6640 - Laboratory Equipment And Supplies
Federal Contract Vehicle
Not listed
Set-Aside Type
Total Small Business
Extent Competed
Competed under SAP
Major Defense Program
Not listed
Pricing Type
Firm Fixed Price
Place of Performance
Fountain Hills, AZ 85268, USA
Solicitation Procedures
Simplified Acquisition
Number Of Offers Received
5
Legislative Mandate
Not listed
National Interest Action
Not listed
Research Type
Not listed
Primary Consortia Member
Not listed
Update #1
Update #2
POLYIMIDE CURING OVEN
Posted 5/3/17
5
1
Name
Description
Solicitation Number
FederalAgency
Type
PostedDate
Polyimide Curing Oven
Added: Apr 06, 2017 5:57 pm This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; proposals are being requested and a written solicitation will not be issued.This solicitation, NB687100-17-02075, is issued as a request for quotation (RFQ). All communications and documents must include the solicitation number in their quote.The potential quoter shall submit a Quote to be received no later than Thursday, April 13, 2017, at 2:00 pm Mountain, which must include the following: Company name, address, phone numbers, DUNS number, itemized quote including all minimum specifications and options. Quotes shall be delivered via email to Angela Hitt, Contracting Specialist, at angela.hitt@nist.gov.This solicitation document and incorporated provisions and clauses are those in effect tough Federal Acquisition Circular 2005-95.The associated North American Industrial Classification System (NAICS) code for this procurement is 334413, with a small business size standard of 1,250 employees. This is a total small business set-aside. It is being issued using the simplified acquisition procedures under the authority of FAR 13.5 Certain Commercial Items.This combined synopsis/solicitation is for the following commercial item(s):CLIN 0001: Polyimide Curing Oven and all parts per attached Specifications. Cost shall also include all packaging, shipping, and handling.Description of requirements for the items to be acquired:The National Institute of Standards and Technology's (NIST), Boulder Microfabrication Facility (BMF) is an 18,000 square feet Class 100 cleanroom located in the Katharine Blodgett Gebbie Laboratory. It is operated by the MicroFabrication Group in the Quantum Electromagnetics Division of the Physical Measurement Laboratory, who is responsible for providing the NIST-Boulder staff with state-of-the-art microelectronic and microelectromechanical systems (MEMS) fabrication capability.The BMF requires a polyimide curing oven for use in developing new wafers processes. This oven will be used to cure photo-definable polyimide films after deposition on silicon wafers. In a typical process polyimide precursor is applied to a wafer using existing spin coating equipment. The wafer is then soft-baked using existing vented vacuum hot plates at temperature near 120ºC. The wafer is then exposed to ultraviolet (UV)light in an existing wafer stepper and developed using tetramethylammonium hydroxide (TMAH) in an existing puddle development tool. After these steps the polyimide film is cured by baking it in a N2 atmosphere. During the bake, the temperature of the oven undergoes a thermal profile that typically consists of a controlled ramp to an intermediate temperature (roughly 200ºC) where it is held for 30 minute. The temperature is then ramped again to the final cure temperature (350ºC) where it is held for an hour or more. The temperature is then ramped slowly to ambient, and the wafers are removed from the oven.There are two variants in oven design that are envisioned to be proposed - HEPA filtered N2 atmospheric-pressure ovens and HEPA filtered N2 vacuum ovens. Either variant is acceptable.TECHNICAL SPECIFICATIONS: The Contractor shall provide one polyimide curing oven and all parts per the attached Specifications.DELIVERY: 12 weeks AROYour quote must also meet the following information:• Information sufficient to demonstrate you can meet or exceed the requirements in the Specifications.• Firm fixed price quote for the Polyimide Curing Oven and all parts including shipping and handling per the attached Specifications.• Payment Terms: Net 30. • The delivery is 12 weeks after receipt of the order (ARO) or sooner• FOB Destination including delivery cost for delivery to NIST, 325 Broadway, Boulder, CO 80305. Delivery point of contact will be provided upon award.• Company DUNS No. In order to be eligible for this award, the offeror must have and maintain an active registration at the System for Award Management at www.sam.gov., and have completed Representations and Certifications therein.BASIS OF AWARD:Award shall be made to the lowest priced, technically acceptable quoter. This will be a firm fixed price purchase order to the responsible contractor submitting a quote that meets all of the requirements of this RFQ and who has the lowest price.TECHNICAL CAPABILITY: Evaluation of Technical Capability will be based on the information provided in the quotation. Documentation submitted in the quotation shall be evaluated to determine that the proposed equipment meets or exceeds the Governments minimum required specifications. Failure to clearly and unambiguously demonstrate this will result in an "unacceptable" technical rating.PRICE: Price shall be evaluated for reasonableness.The provision at FAR 52.212-1, Instructions to Offerors-Commercial, applies to this acquisition. Offerors shall meet the technical specifications and deliverable schedule.FAR 52.212-2, Evaluation -- Commercial Items, applies to this acquisition. (Quotes shall be evaluated in accordance with the criteria shown above).The quoter must have completed the provision at FAR 52.212-3, Offeror Representations and Certifications -- Commercial Items. Reps and certs must be uploaded to the System for Award Management at www.sam.gov.FAR 52.212-4, Contract Terms and Conditions -- Commercial Items, applies to this acquisition.FAR 52.212-5, Contract Terms and Conditions Required To Implement Statutes Or Executive Orders -- Commercial Items applies to this acquisition. Additional FAR 52.212-5 clauses cited in the clause applicable to this acquisition are:52.204-10, Reporting Executive compensation and First-Tier Subcontract Awards52.209-6, Protecting the Government's Interest When Subcontracting Debarred, Suspended, or Proposed for Debarment52.209-10, Prohibition on Contracting with Inverted Domestic Corporations52.219-6, Notice of Total Small Business Aside52.219-13, Notice of Set-Aside of Orders52.219-28, Post Award Small Business Program Representation52.222-3, Convict Labor 52.222-19, Child Labor - Cooperation With Authorities And Remedies52.222-21, Prohibition of Segregated Facilities52.222-26, Equal Opportunity52.222-35, Equal Opportunity for Veterans52.222-36, Equal Opportunity for Workers with Disabilities52.222-27, Employee Reports for Veterans52.222-50, Combating Trafficking in Persons52.223-18, Contractor Policy to Ban Text Messaging While Driving52.225-5, Trade Agreements52.225-13, Restrictions on Certain Foreign Purchases52.232-33, Payment by Electronic Funds TransferFAR 52.252-1, Solicitation Provisions Incorporated by Reference (Feb 1998)This solicitation incorporates one or more solicitation provisions by reference, with the same force and effect as if they were given in full text. Upon request, the Contracting Officer will make their full text available. The offeror is cautioned that the listed provisions may include blocks that must be completed by the offeror and submitted with its quotation or offer. In lieu of submitting the full text of those provisions, the offeror may identify the provision by paragraph identifier and provide the appropriate information with its quotation or offer. Also, the full text of a solicitation provision may be accessed electronically at this/these address(es): at http://acquisition.gov/comp/far/index.html and http://www.osec.doc.gov/oam/acquistion_management/policy/default.htmFAR 52.225-18 - Place of ManufactureFAR 52.232-15, Progress Payments Not IncludedCAR 1352.213-70, Evaluation Utilizing Simplified Acquisition ProceduresCAR 1352.215-70, Proposal PreparationCAR 1352.233-70, Agency ProtestsCAR 1352.233-71, GAO and Court of Federal Claims ProtestsFAR 52.252-2, Clauses Incorporated by Reference (Feb 1998)This contract incorporates one or more clauses by reference, with the same force and effect as if they were given in full text. Upon request, the Contracting Officer will make their full text available. Also, the full text of a clause may be accessed electronically at this/these address(es): http://acquisition.gov/comp/far/index.html and http://www.osec.doc.gov/oam/acquistion_management/policy/default.htmFAR 52.232-40, Providing Accelerated Payments to Small Business Subcontractors. FAR 52.247-34, FOB DestinationCAR 1352.201-70, Contracting Officer's AuthorityCAR 1352.209-73, Compliance with the LawsCAR 1352.209-74, Organizational Conflict of InterestCAR 1352.246-70, Place of Acceptance (a) The Contracting Officer or the duly authorized representative will accept supplies and services to be provided under this contract.(b) The place of acceptance will be: NIST325 BroadwayShipping and ReceivingBoulder, CO 80305 NIST LOCAL-04 BILLING INSTRUCTIONS(a) NIST prefers electronic Invoice/Voucher submissions and they should be emailed to INVOICE@NIST.GOV.(b) Each Invoice or Voucher submitted shall include the following: (1) Contract Number. (2) Contractor Name and Address. (3) Date of Invoice. (4) Invoice Number. (5) Amount of Invoice and Cumulative Amount Invoiced to-date. (6) Contract Line Item Number (CLIN). (7) Description, Quantity, Unit of Measure, Unit Price, and Extended Price of Supplies/Services Delivered. (8) Prompt Payment Discount Terms, if Offered. (9) Any other information or documentation required by the contract.(c) In the event electronic submissions are not used, The Contractor shall submit an original invoice or voucher in accordance with the payment provisions of this contract to:NIST: Accounts Payable Office100 Bureau Drive, Mail Stop 1621Gaithersburg, MD 20899-1621NIST LOCAL-39 Marking/Packing InstructionsIf the total contract/order includes multiple quantities of the same or like item(s), segregated as separate CLIN/Item numbers, deliverables shall be packed accordingly. Each individual package/container in the shipment shall include deliverables on a per-CLIN or Item basis.For each shipment made under this contract/order, the Contractor shall furnish itemized packing list(s), enumerating the specific contents of each shipping container and what specific individual components constitute a full and complete "unit" for each bid item. The packing list shall include the brief description of each item found in the schedule. If more than one container is required for each unit, each container should be marked accordingly, e.g., "Box 1 of 2," "Box 2 of 2" and the boxes, where feasible, should be taped or sink-wrapped together as an issuable unit.The contract number and CONTRACT LINE ITEM NUMBER (CLIN) OR ORDER ITEM NUMBER shall be placed on the exterior of all containers.Please direct any questions regarding this solicitation to Angela Hitt at angela.hitt@nist.gov no later than 11:00 a.m. Mountain Time, Tuesday, April 11, 2017.
NB687100-17-02075
Department of Commerce National Institute of Standards and Technology
Award Notice 1/1
4/6/17, 5:57 PM
5
1
Mod #
Description
ReasonForModification
Federal Obligation
Date
PCLOSE
POLYIMIDE CURING OVEN. ORDER IS PHYSICALLY COMPLETE. FINAL INVOICE HAS BEEN RECEIVED AND PAID. UDO BALANCE IS $0.00. CONTRACT CLOSED.
Close Out
$0
5/3/17
Not listed
POLYIMIDE CURING OVEN
Not listed
$44.9k
5/3/17