Deep Silicon Etch (DSE) System
Added: Jun 27, 2013 5:05 pm THIS IS A COMBINED SYNOPSIS/SOLICITATION FOR COMMERCIALITEMS PREPARED IN ACCORDANCE WITH THE FORMAT IN FAR SUBPART 12.6-STREAMLINED PROCEDURES FOR EVALUATION AND SOLICITATION FOR COMMERCIAL ITEMS-AS SUPPLEMENTED WITH ADDITIONAL INFORMATION INCLUDED IN THIS NOTICE. THIS ANNOUNCEMENT CONSTITUTES THE ONLY SOLICITATION; QUOTATIONS ARE BEING REQUESTED, AND A SEPARATE WRITTEN SOLICITATION DOCUMENT WILL NOT BE ISSUED. THE SOLICITATION IS BEING ISSUED USING SIMPLIFIED ACQUISITION PROCEDURES UNDER THE AUTHORITY OF FAR 13.5 TEST PROGRAM FOR CERTAIN COMMERCIAL ITEMS.This solicitation is a Request for Quotation (RFQ). The solicitation document and incorporated provisions and clauses are those in effect tough Federal Acquisition Circular 2005-68, effective June 26, 2013.1352.215-72 INQUIRIES (APR 2010)Offerors must submit all questions concerning this solicitation in writing to the Contracting Officer. Questions should be received no later than ten calendar days after the issuance date of this solicitation. Any responses to questions will be made in writing, without identification of the questioner, and will be included in an amendment to the solicitation. Even if provided in other form, only the question responses included in the amendment to the solicitation will govern performance of the contract.(end of provision)The associated North American Industrial Classification System (NAICS) code for this procurement is 334516 with a small business size standard of 500 employees. This requirement is unrestricted and all interested Contractors may submit a quotation.All Offerors shall provide a quotation for the following line items:Line Item 0001: One (1) Deep Silicon Etch (DSE) SystemOPTION LINE ITEMS: The following items are option line items. The Contractor shall provide pricing for these items. Award of option line items is at the sole discretion of the Government in accordance with 52.217-7.Option Line Item 0002: One (1) Field Upgradable Cassette Loading OptionIntroductionThe contractor shall furnish the necessary personnel, material, equipment, and services to fabricate, install and test one Deep Silicon Etch (DSE) System.BackgroundThe National Institute of Standards and Technology (NIST) has a requirement for a deep silicon etch (DSE) System to support nanofabrication research and development in the Center for Nanoscale Science and Technology (CNST) user facility. The system will be sited and used as a shared resource in a class 100 clean-room in the CNST NanoFab, accessible to researchers from industry, academia, NIST, and other government agencies.A DSE System is a pattern transfer tool that uses plasma to fabricate tee-dimensional structures in silicon (Si). Applications include fabricating micro/nanoelectromechanical systems (MEMS/NEMS) such as accelerometers, ink jet heads, pressure sensors, gyroscopes, microphones, microactuators, and lab-on-chip devices. NIST currently operates a DSE System in the NanoFab that is heavily used to fabricate a wide variety of such MEMS/NEMS devices. In order to increase NIST's capacity to serve users and provide additional technical capabilities for deep silicon etching, NIST has a need for a new DSE System. The required tool shall be capable of creating micro- and nanoscale structures in silicon (Si) with vertical sidewalls of very high aspect ratio using a fast process that can be controlled and easily adjusted over a broad range of process parameters.System shall be automated and user-friendly; offering ease of use related to performance of maintenance procedures as well as the simplicity of the procedure to adapt to different substrate sizes. Quality of valves, mass flow controllers, filters, and other hardware provided shall be sufficient for the expected stress levels of the intended application.Minimum RequirementsThe system shall meet or exceed the technical specifications identified in this solicitation. All items must be new. Prototypes, demonstration models, used or refurbished instruments will not be considered for award.Line Item 0001: One (1) Deep Silicon Etch (DSE) System, which shall meet or exceed the specifications identified in the attachment, SB134113RQ0487.pdf.Option Line Item 0002: One (1) Field Upgradable Cassette Loading Option, which shall meet or exceed the specifications identified in the attachment, SB134113RQ0487.pdfInstallationThe system shall be installed by the Contractor and meet contract specifications no later than two weeks after delivery. Installation, at a minimum, shall include uncrating/unpacking of all equipment, rigging, set-up and hook-up of the system, demonstration of all specifications, and removal of trash. Onsite installation and demonstration shall be done at Building 215, NIST, Gaithersburg, Maryland.The Contractor shall provide footprint and facility requirement information within 7 days of receipt of award.TrainingThe contractor shall provide tee (3) business days of application engineering and two (2) business days of basic operation and maintenance training following installation.The training shall include a thorough demonstration of all system/solution functions, maintenance, data administration, and basic troubleshooting. The training shall be completed at NIST no later than 30 days after installation.Express WarrantyThe contractor shall warrant the entire system for a period of at least one year. The warranty must include unlimited telephone/e-mail support for questions regarding operation. All costs including parts, labor, travel, and other expenses necessary to repair the system will be borne solely by the contractor at no additional cost to the U.S. Government.Inspection and AcceptanceIn addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance:Contractor acceptance testing: As noted in the Addendum to FAR 52.212-1, the Offeror shall provide NIST with a description of the factory acceptance testing plan with the quote. Contractor shall perform this testing at their site prior to deliveryand supply the test results to NIST prior to shipment. NIST reserves the right to witness such factory acceptance testing.Final acceptance testing: The Offeror shall provide NIST with a description of the final acceptance testing plan with the quote. Acceptance testing shall be performed at NIST within the environment that the system is to be operated and shall include at a minimum but not limited to:i) Vacuum system performance;ii) Wafer handling repeatability;iii) Process performance.Final acceptance testing shall occur within 30 days after installation. DeliveryFOB Destination delivery terms are required. Delivery and installation of the system shall be completed in accordance with Contractor's commercial schedule. The Contractor shall first deliver line item 0001 to NIST, Building 301, Shipping and Receiving, Gaithersburg, MD 20899-1640 prior to ultimate delivery and installation at Building 215.PROVISIONS AND CLAUSES:The following provisions and clauses apply to this acquisition and are hereby incorporated by reference. All FAR clauses may be viewed at http://acquisition.gov/comp/far/index.html.Provisions52.212-1, Instructions to Offerors-Commercial Items52.212-3 Offeror Representations and Certifications-Commercial Items52.217-5 Evaluation of Options52.225-18, Place of Manufacture;Offerors shall complete annual representations and certifications on-line at www.sam.gov in accordance with FAR 52.212-3 Offerors Representations and Certifications- Commercial Items. If paragraph (j) of the provision is applicable, a written submission is required.Representation by Corporations Regarding an Unpaid Delinquent Tax Liability or a Felony Conviction Under Any Federal Law (Class Deviation) (March 2012)(1) In accordance with Sections 543 and 544 of Public Law 112-55 Commerce, Justice, Science, and Related Agencies Appropriations Act 2012, Title V (General Provisions) none of the funds made available by that Act may be used to enter into a contract with any corporation that-(a) Was convicted of a felony criminal violation under any Federal law within the preceding 24 months, unless the agency has considered suspension or debarment of the corporation and made a determination that this further action is not necessary to protect the interests of the Government.(b) Has any unpaid Federal tax liability that has been assessed, for which all judicial and administrative remedies have been exhausted or have lapsed, and that is not being paid in a timely manner pursuant to an agreement with the authority responsible for collecting the tax liability, unless the agency has considered suspension or debarment of the corporation and made a determination that this further action is not necessary to protect the interests of the Government.(2) The Offeror represents that, as of the date of this offer -(a) It is [ ] is not [ ] a corporation that was convicted of a felony criminal violation under a Federal law within the preceding 24 months.(b) It is [ ] is not [ ] a corporation that has any unpaid Federal tax liability that has been assessed, for which all judicial and administrative remedies have been exhausted or have lapsed, and that is not being paid in a timely manner pursuant to an agreements with the authority responsible for collecting the tax liability.(End of provision)Clauses52.212-4 Contract Terms and Conditions-Commercial Items52.212-5 Contract Terms and Conditions Required to Implement Statutes or Executive Orders-Commercial Items-Commercial Items including subparagraphs:52.203-6, Restrictions on Subcontractor Sales to the Government;52.204-10, Reporting Executive Compensation;52.209-6, Protecting the Government's Interest When Subcontracting with Contractors Debarred, Suspended, or Proposed for Debarment;52.209-10, Prohibition on Contracting with Inverted Domestic Corporations;52.217-7, Option for Increased Quantity52.219-8, Utilization of Small Business Concerns;52.219-9, Small Business Subcontracting Plan;52.219-28, Post Award Small Business Program Re-representation;52.222-3, Convict Labor; 52.222-19, Child Labor - Cooperation With Authorities And Remedies; 52.222-21, Prohibition of Segregated Facilities;52.222-26, Equal Opportunity;52.222-35, Equal Opportunity for Veterans;52.222-36, Affirmative Action for Workers with Disabilities;52.222-37, Employment Reports on Veterans;52.222-40, Notification of Employee Rights Under the National Labor Relations Act;52.223-18, Contractor Policy to Ban Text Messaging While Driving;52.225-5, Trade Agreements; 52.225-13, Restriction on Certain Foreign Purchases;52.225-25, Prohibition on Contracting with Entities Engaging in Sanctioned Activities Relating to Iran;52.232-33, Payment by Electronic Funds Transfer52.247-35, FOB Destination, within Consignee's Premises1352.201-70, Contracting Officer's Authority1352.201-72. Contracting Officer's Representative (COR)1352.209-73, Compliance With the Laws1352.209-74, Organizational conflict of interest1352.246-70, Place of Acceptance (APR 2010)(a) The Contracting Officer or the duly authorized representative will accept supplies and services to be provided under this contract.(b) The place of acceptance will be: NIST Building 215, 100 Bureau Drive, Gaithersburg, Maryland 20899INSTRUCTIONS:System for Award Management RegistrationIn accordance with FAR 52.204-99 (September 2012) (DEVIATION), the awardee must be registered in the System for Award Management (www.sam.gov) prior to award. Refusal to register shall forfeit award.Due Date for QuotationsOfferors shall submit their quotations so that NIST receives them not later than 3:00 p.m. Eastern Time on July 12, 2013. FAX quotations shall not be accepted. E-mail quotations shall be accepted at paula.wilkison@nist.gov. Please reference the RFQ number in the subject line of email communications. Offerors' quotations shall not be deemed received by the Government until the quotation is entered in the e-mail inbox set forth above.Quotations shall be sent to the National Institute of Standards and Technology, Acquisition Management Division, Attn: Paula Wilkison, 100 Bureau Drive, Mail Stop 1640, Gaithersburg, MD 20899-1640. All Offerors should ensure the RFQ number is visible on the outermost packaging.Because of heightened security, FED-EX, UPS, or similar delivery methods are the preferred method of delivery of quotes. If quotes are hand delivered, delivery shall be made on the actual due date tough Gate A, and a 48 hour (excluding weekends and holidays) prior notice shall be provided to Paula Wilkison, Contract Specialist on 301-975-8448.Addendum to FAR 52.212-1, Quotation Preparation Instructions1) Price Quotation: The Offeror shall submit an original and one copy of the completed price schedule. If the quotation is submitted electronically, additional copies are not required. The pricing quotation shall be separate from any other portion of the quotation. The Offeror shall propose a firm-fixed-price, FOB Destination, for each CLIN. Price quotations shall remain valid for a period of 90 days from the date quotations are due.2) Technical Quotation: The Offeror shall submit an original and one copy of the technical quotation. If the quotation is submitted electronically, additional copies are not required. The technical quotation shall address the following: Technical Capability: The Offeror shall submit a technical description or product literature for the equipment it is proposing, which clearly identifies the manufacturer, make and model. The Offeror must demonstrate that its proposed equipment meets or exceeds each minimum requirement described in list of minimum requirements by providing a citation to the relevant section of its technical description or product literature.If the Offeror is not the manufacturer, evidence that the Offeror is authorized by the original equipment manufacturer to provide the item(s) in the quotation shall be included.The Offeror shall provide the following additional information in the technical quote:1. The Offeror shall provide a system acceptance testing plan with the quote.2. Supporting scanning electron micrographs (SEM) demonstrating the process capabilities shall be supplied in the technical quotation.3. Offeror shall demonstrate the ease of use of the system by providing a flow chart showing the steps necessary to load a recipe, load a sample, execute the recipe and unload the finished sample.4. Offeror shall demonstrate the ease of use of the system by providing a detailed procedure describing the steps necessary to adapt to a different wafer size.3) Experience: The Offeror shall demonstrate the extent to which it has recently manufactured, distributed, and installed similar equipment.4) Past Performance: The Offeror shall provide past performance information regarding relevant contracts over the past five (5) years with Federal, state, or local governments, or commercial customers. If the Offeror intends to subcontract with another firm(s) for part of this requirement, that firm's past performance information shall also be provided. If the Offeror has no relevant past performance, it may include a statement to that effect in its quotation. The government reserves the right to consider data obtained from sources other than those described by the Offeror in its quotation. It is recommended that approximately 3-5 contracts be referenced.The description of each contract/order described in this section shall not exceed one half page in length. For each contract/order, the Offeror shall provide the following information:1. Contract number;2. Description and relevance to solicitation requirements including dollar value;3. Period of Performance - indicate by month and year the state and completion (or "ongoing") dates for the contract;4. Reference Contact - If a non-Government contract, identify the name and address of the client with current telephone number and email address of a point of contact of the client responsible for the contract;5. Contracting Office - If a Government contract (Federal or state), identify the Procuring Contracting Officer (PCO), administrative Contracting Officer (ACO), and Contracting Officer's Representative (COR), and their names, current telephone numbers and email addresses.Problems Encountered - include information regarding information regarding any problems encountered on the contracts described above and corrective actions taken to resolve those problems.Acceptance of Terms and Conditions (Addendum to FAR 52.212-1 (b) (11)): This is an open-market solicitation for equipment as defined herein. The Government intends to award a Purchase Order as a result of this solicitation that will include the clauses set forth herein. The quotation should include one of the following statements:"The terms and conditions in the solicitation are acceptable to be included in the award document without modification, deletion, or addition."OR"The terms and conditions in the solicitation are acceptable to be included in the award document with the exception, deletion, or addition of the following:Offeror shall list exception(s) and rationale for the exception(s)Note: This procurement is not being conducted under the GSA Federal Supply Schedule (FSS) program or another Government-Wide Area Contract (GWAC). If an Offeror submits a quotation based upon an FSS or GWAC contract, the Government will accept the quoted price. However, the terms and conditions stated herein will be included in any resultant Purchase Order, not the terms and conditions of the Offeror's FSS or GWAC contract, and the statement required above shall be included in the quotation.QUOTATION EVALUATION:Evaluation FactorsAward shall be made to the Offeror whose quotation offers the best value to the Government price and other factors considered. The Government will evaluate quotations based on the following evaluation criteria: 1) Technical Capability 2) Experience, 3) Past Performance, and 4) Price. All non-price factors, when combined, are more important than price.Technical Capability: All items must be new. Prototypes, demonstration models, used or refurbished instruments are not eligible for award. Evaluation of technical capability shall be based on the information provided in the quotation. NIST will evaluate whether the Offeror has demonstrated that its proposed equipment meets or exceeds all minimum requirements. Quotations that do not demonstrate the proposed equipment meets all requirements will are not eligible for award. If an Offeror does not indicate whether its proposed equipment meets a certain minimum requirement, NIST will determine that it does not. NIST will give preference to offerors who demonstrate that their proposed equipment exceeds NIST's requirements.Evaluation criteria will include ease of use, which will be determined by evaluation of the flow chart showing time required and the steps necessary to load a recipe, load a sample, execute the recipe and unload the finished sample, as well as the detailed procedure describing the steps necessary to adapt to a different wafer size. NIST will give preference to Offerors who demonstrate ease of use.Experience: NIST will evaluate the extent of the Offeror's experience providing similar equipment. NIST will give preference to Offerors who demonstrate they have experience delivering the same equipment they are proposing for the current requirement, a significant user base, and at least one instrument in use at a user facility.Past Performance: The Government will evaluate the Offeror's past performance information and, if appropriate, its proposed subcontractors' past performance to determine its relevance to the current requirement and the extent to which it demonstrates that the Offeror has successfully completed relevant contracts in the past five years. In assessing the Offeror's past performance information, NIST will evaluate, as appropriate, successful performance of contract requirements, quality and timeliness of delivery of goods and services, cost management, communications between contracting parties, proactive management and customer satisfaction.. Evaluation of this factor will be based on information contained in the technical portion of the quotation and information provided by references. The Government will evaluate past performance information by contacting appropriate references, including NIST references, if applicable. The Government may also consider other available information in evaluating the Offeror's past performance. The Government will assign a neutral rating if the Offeror has no relevant past performance information.Price: The Government will evaluate price for reasonableness.Options: The Government will evaluate offers for award purposes by adding the total price for all options to the total price for the basic requirement. Evaluation of options shall not obligate the Government to exercise the option(s).1352.233-70 AGENCY PROTESTS (APR 2010)(a) An agency protest may be filed with either (1) the Contracting Officer, or (2) at a level above the Contracting Officer, with the agency Protest Decision Authority. See 64 Fed. Reg. 16,651 (April 6, 1999).(b) Agency protests filed with the Contracting Officer shall be sent to the following address:NIST/ACQUISITION MANAGEMENT DIVISIONATTN: PATRICK STAINES, CONTRACTING OFFICER100 Bureau Drive, MS 1640Gaithersburg, MD 20899(c) Agency protests filed with the Protest Decision Authority shall be sent to the following address: NIST/ACQUISITION MANAGEMENT DIVISIONATTN: HEAD OF THE CONTRACTING OFFICE (HCO)100 Bureau Drive, MS 1640Gaithersburg, MD 20899(d) A complete copy of all agency protest, including all attachments, shall be served upon the Contract Law Division of the Office of the General Counsel within one day of filing a protest with either the Contracting Officer or the Protest Decision Authority.(e) Service upon the Contract law Division shall be made as follows:U.S. Department of CommerceOffice of the General CounselChief, Contract Law DivisionRoom 5893Herbert C. Hoover Building14th Street and Constitution Avenue, N.W.Washington, D.C. 20230FAX: (202) 482-58581352.233-71 GAO AND COURT OF FEDERAL CLAIMS PROTESTS (APR 2010)(a) A protest may be filed with either the Government Accountability Office (GAO) or the Court of Federal Claims unless an agency protest has been filed.(b) A complete copy of all GAO or Court of Federal Claims protests, including all attachments, shall be served upon (i) the Contracting Officer, and (ii) the Contract Law Division of the Office of the General Counsel, within one day of filing a protest with either GAO or the Court of Federal Claims. (c) Service upon the Contract Law Division shall be made as follows:U.S. Department of CommerceOffice of the General CounselChief, Contract Law DivisionRoom 5893Herbert C. Hoover Building14th Street and Constitution Avenue, N.W.Washington, D.C. 20230FAX: (202) 482-5858(End of clause)
SB1341-13-RQ-0487 Department of Commerce National Institute of Standards and Technology
6/27/13, 5:05 PM