Dry etching of combined gallium nitride epitaxial layer and silicon carbide substrate
Ended Purchase Order Awarded Last action
- Contract number
- 80NSSC26P1008
- Awardee
-
Biotronics, Inc. UEI CQJVMMKCYYR5
- Awarding agency
-
Shared Services Center
National Aeronautics and Space Administration
- Obligated
- $85,000
Award facts
- Opportunity
-
- Dry etching of Combined Gallium Nitride Epitaxial Layer and Silicon Carbide Substrate Solicitation · 80NSSC26936816Q · Posted Jul 6, 2026
- Contract value 100% obligated
- $85,000.00 Current and potential, with all options
- Completion date 100% complete
- Current and potential, with all options
- NAICS code
- 334413 Semiconductor and Related Device Manufacturing
- PSC
- AJ12 General Science And Technology R&D Services; General Science And Technology; Applied Research
- Set-aside
- No set-aside
- Competition
- Not Competed under SAP · 1 offer Simplified Acquisition
- Pricing
- Firm Fixed Price
- Place of performance
- North Olmsted, OH 44070, USA
Award details come from SAM.gov/FPDS.
About this award
NASA's Shared Services Center awarded a purchase order to Biotronics, Inc. on July 15, 2026, for dry etching of combined Gallium Nitride epitaxial layer and Silicon Carbide substrate, valued at $85,000, firm fixed price. Performance occurs in North Olmsted, Ohio, with ultimate completion by August 19, 2026. The vendor shall dry-etch one 3-inch diameter, approximately 350-micron thick 4H-SiC wafer to 280 microns depth, creating a diaphragm with approximately 70-micron thickness and achieving diaphragm thickness uniformity of 5% across the wafer. Deliverables include smooth surfaces with fewer than 5 micro mask artifacts per surface, features free of scallops, reasonable radius at diaphragm base-to-sidewall intersection without notching, no edge-wall trenching artifacts, and aspect ratio of no less than 5. The vendor shall also dry-etch the top side p-GaN layer to 3 micrometers using provided SiO2 etch mask, confirm etched depth measurements, perform solvent cleaning in acetone and isopropanol, and provide depth confirmations. The solicitation posted July 6, 2026, with responses due July 10, 2026 (NAICS 334413, PSC AJ12).
Quick answers
Who was awarded contract 80NSSC26P1008?
80NSSC26P1008 was awarded to Biotronics, Inc. by Shared Services Center (National Aeronautics and Space Administration) on July 15, 2026.
How much is contract 80NSSC26P1008 worth?
The government has obligated $85,000 on 80NSSC26P1008.
Was contract 80NSSC26P1008 competed?
The extent of competition for 80NSSC26P1008 was not competed under sap. The government received 1 offer.
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