Planar junction deposition system (SPUTTER)
Active Purchase Order Awarded Last action
- Contract number
- 1333ND25PNB670030
- Awardee
-
Angstrom Engineering Inc. UEI RT71JJ8AE5M3
- Awarding agency
-
National Institute of Standards and Technology
Department of Commerce
- Obligated
- $695,426
Award facts
- Opportunity
-
- Planar Junction Deposition System Pre-Solicitation · NB6720602500012 · Posted Jul 17, 2024
- Contract value 100% obligated
- $695,425.50 Current and potential, with all options
- Completion date 95% complete
- Current and potential, with all options
- Contracting staff
- NAICS code
- 333242 Semiconductor Machinery Manufacturing
- Set-aside
- No set-aside
- Competition
- Competed under SAP · 3 offers Simplified Acquisition
- Pricing
- Firm Fixed Price
- Place of performance
- 2323 Riverside Dr., Ottawa, ON K1H 1A1, Canada
Award details come from SAM.gov/FPDS.
Transactions
| Action | Obligated | Date |
|---|---|---|
| Supplemental Agreement for work within scope | $10,626 | |
| Original award | $684,800 |
About this award
The National Institute of Standards and Technology awarded a purchase order to Angstrom Engineering Inc. for a Planar Junction Deposition System (sputter) valued at $695,425.50 on January 29, 2025. The modification extends the delivery date to December 12, 2026 and incorporates changes to the Statement of Work specifications. No set-aside applies. Place of performance is 2323 Riverside Drive, Ottawa, Ontario, Canada. The system must deposit metal films using standard semiconductor industry techniques in an ISO Class 5 cleanroom at high altitude, with advanced sputter deposition sources, in-chamber metrology, improved uniformity, and wafer temperature control. The system accommodates 3-inch and 150mm wafers of various materials without part changes, and includes a load lock subsystem, main chamber subsystem, transfer arm, and computer-controlled automation with recipe storage and logging.
Quick answers
Who was awarded contract 1333ND25PNB670030?
1333ND25PNB670030 was awarded to Angstrom Engineering Inc. by National Institute of Standards and Technology (Department of Commerce) on January 29, 2025.
How much is contract 1333ND25PNB670030 worth?
The government has obligated $695,426 on 1333ND25PNB670030.
Was contract 1333ND25PNB670030 competed?
The extent of competition for 1333ND25PNB670030 was competed under sap. The government received 3 offers.
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