Chips-ultraviolet (EUV) scatterometry

Ended Purchase Order Awarded Last action

Contract number
1333ND24PNB030342
Awardee
Awarding agency
Obligated
$112,345

Award facts

Opportunity
Contract value 100% obligated
$112,345.00 Current and potential, with all options
Completion date 100% complete
Current and potential, with all options
Contracting staff
Set-aside
Total Small Business
Competition
Competed under SAP · 2 offers Simplified Acquisition
Pricing
Firm Fixed Price
Place of performance
Germany

Award details come from SAM.gov/FPDS.

Transactions

Action Obligated Date
Funding Only Action P26001 · Mat lab software -$1,265
Original award $113,610

About this award

The National Institute of Standards and Technology (NIST) awarded a purchase order to Pembroke Instruments, LLC for $112,345 on August 29, 2024, for a VUV+EUV spectrometer compatible with an ultra-high-vacuum chamber, set aside for Total Small Business.

The spectrometer will characterize output from a high-harmonic generation (HHG) EUV laser and support VUV and EUV light analysis at NIST's SURF-III synchrotron for the EUV Scatterometry project under the CHIPS Research & Development Metrology program. The instrument must measure spectral bandwidths from 10 nanometers to 150 nanometers with resolution of at least 0.1 nanometers at 40 nanometers and 0.2 nanometers at 120 nanometers, and include software-controlled operation with an imaging camera. Place of performance is Germany. The order carries a firm-fixed-price structure and ultimate completion date of January 2, 2025, with a one-year minimum warranty required on the spectrometer.

Quick answers

Who was awarded contract 1333ND24PNB030342?

1333ND24PNB030342 was awarded to Pembroke Instruments, LLC by National Institute of Standards and Technology (Department of Commerce) on August 29, 2024.

How much is contract 1333ND24PNB030342 worth?

The government has obligated $112,345 on 1333ND24PNB030342.

Was contract 1333ND24PNB030342 competed?

The extent of competition for 1333ND24PNB030342 was competed under sap. The government received 2 offers. It was set aside: Total Small Business.

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