Maskless lithography system
Ended Definitive Contract Awarded Last action
- Contract number
- FA875122C0014
- Awardee
-
Heidelberg Instruments Inc. UEI UB7PM2A1F9A1
- Awarding agency
-
Air Force Research Laboratory
Air Force Materiel Command, Department of Defense
- Obligated
- $715,305
Award facts
- Opportunity
-
- Maskless Lithography System Pre-Solicitation · FA875122R0014 · Posted May 11, 2022
- Contract value 100% obligated
- $715,305.00 Current and potential, with all options
- Completion date 100% complete
- Current and potential, with all options
- Contracting staff
- NAICS code
- 334516 Analytical Laboratory Instrument Manufacturing
- PSC
- 6640 Laboratory Equipment And Supplies
- Set-aside
- No set-aside
- Competition
- Not Competed under SAP · 1 offer Simplified Acquisition
- Pricing
- Firm Fixed Price
- Place of performance
- Torrance, CA 90505, USA
Award details come from SAM.gov/FPDS.
Transactions
| Action | Obligated | Date |
|---|---|---|
| Supplemental Agreement for work within scope | $0 | |
| Supplemental Agreement for work within scope | $0 | |
| Original award | $715,305 |
About this award
The Air Force Research Laboratory awarded a $715,305 definitive contract on July 20, 2022, to Heidelberg Instruments Inc. for the procurement of a maskless ultraviolet photolithography system. The award, which carries a firm fixed price and no set-aside designation, is scheduled for completion by August 31, 2026, and will be performed at the contractor's facility in Torrance, California. The solicitation sought a specialized UV photolithography system capable of operating within a class 1000 cleanroom environment, featuring a UV laser with greater than 60 milliwatt output and the ability to achieve minimum feature sizes of 0.3 micrometers in both vector and raster write modes. The system was required to support automatic line width and roughness analysis, perform dual-layer exposures with precision within 400 nanometers over 100-millimeter areas, and accommodate substrates up to 9 inches in size across multiple file types.
Heidelberg Instruments Inc., a foreign-owned manufacturer of advanced photolithography and laser systems, was identified as the sole source provider based on its existing expertise and system specifications uniquely meeting the Air Force's technical requirements. The company, headquartered in Torrance and registered in SAM.gov since 2005, has an established track record of delivering sophisticated laser and lithography equipment to defense and research agencies, including prior work with the Department of Defense, NASA, and the National Institute of Standards and Technology. This contract supports the Air Force's research and development capabilities in advanced nanofabrication and precision manufacturing technologies.
Quick answers
Who was awarded contract FA875122C0014?
FA875122C0014 was awarded to Heidelberg Instruments Inc. by Air Force Research Laboratory (Air Force Materiel Command) on July 20, 2022.
How much is contract FA875122C0014 worth?
The government has obligated $715,305 on FA875122C0014.
Was contract FA875122C0014 competed?
The extent of competition for FA875122C0014 was not competed under sap. The government received 1 offer.
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