Plasma Enhanced Chemical Vapor Deposition (PECVD) System
Closed Solicitation Posted
- Solicitation number
- 5-B176-Q-00304-00
- Agency
-
Office of Science
Department of Energy
- Responses due
- Set-aside
- No set-aside
Opportunity facts
- NAICS code
- 423490 Other Professional Equipment and Supplies Merchant Wholesalers
- PSC
- 6640 Laboratory Equipment And Supplies
- Place of performance
- Illinois 60439, United States
- Points of contact
Notice details come from SAM.gov. Updated .
About this opportunity
Argonne National Laboratory is seeking a Plasma Enhanced Chemical Vapor Deposition (PECVD) System through a solicitation issued by the Department of Energy Office of Science. The procurement requires a comprehensive system capable of depositing various thin films including SiO2, Si3N4, SiOCH, SiOF, SiC, and aSi-H on wafers up to 200mm in diameter. The solicitation emphasizes domestic manufacturing in compliance with the Buy American Act, with specific requirements for dual frequency power generators, a maintenance-free pressure control system, and precise film deposition performance metrics. Proposals will be evaluated using the Lowest Price, Technically Acceptable (LPTA) criteria, with all offers due by February 28, 2025, at 5:00 pm CST. Vendors must submit a completed ANL-70 Request for Quotation, ANL-70A Pre-Award Information, and evidence supporting technical requirement adherence.
The contract opportunity does not specify a specific set-aside designation and is open to competitive bidding. The place of performance is located in Lemont, IL 60439, with the procurement intended for the Center for Nanoscale Materials at Argonne National Laboratory. Delivery of the system is required by November 2025, with the procurement covering seven line items including the primary PECVD system, multiple substrate holders, an OEI endpoint, a 300W air-cooled LF generator, and a matching network system. While specific award values are not explicitly stated, the solicitation includes payment terms of Net 30 days and requires vendors to provide price justification through published price lists or comparable customer invoices. The technical specifications are rigorous, demanding specific performance characteristics such as SiO2 deposition rates above 40 nm/min and precise refractive index measurements.
Notice text
3 versions
Update #3 · Latest ·
PLEASE NOTE, ADDENDUMS HAVE BEEN ADDED TO THIS SOLICITATION. PLEASE PROVIDE ONE (1) SIGNED COPY OF EACH ADDENDUM WITH YOUR COMPLETED OFFER.
Argonne National Laboratory is seeking a provider of a Plasma Enhanced Chemical Vapor Deposition (PECVD) System that meets the technical requirements listed in the attached Statement of Work dated February 13, 2025.
Argonne National Laboratory is looking for domestic manufactured items that meet the requirements of the Buy American Act, but are open to review of all technically acceptable options. Offers will be reviewed under Lowest Price, Technically Acceptable Criteria.
Please provide the following with your offer no later than 5:00pm CST on February 28, 2025:
- Completed and signed ANL-70 Request for Quotation
- Completed ANL-70A Pre-Award Information, Representations and Certifications
- Evidence to support the adherance to the technical requirements listed in the Statement of Work
- Country of Origin per the requirements of the Buy American Act
- Price Justification (see ANL-70 for examples)
- Lead Time with FOB Destination, Lemont, IL freight terms
Please send all questions to the Contracting Officer.
Thank you!
Update #2 ·
PLEASE NOTE, AN ADDENDUM HAS BEEN ADDED TO THIS SOLICITATION. PLEASE PROVIDE ONE (1) SIGNED COPY OF THE ADDENDUM WITH YOUR COMPLETED OFFER.
Argonne National Laboratory is seeking a provider of a Plasma Enhanced Chemical Vapor Deposition (PECVD) System that meets the technical requirements listed in the attached Statement of Work dated February 13, 2025.
Argonne National Laboratory is looking for domestic manufactured items that meet the requirements of the Buy American Act, but are open to review of all technically acceptable options. Offers will be reviewed under Lowest Price, Technically Acceptable Criteria.
Please provide the following with your offer no later than 5:00pm CST on February 28, 2025:
- Completed and signed ANL-70 Request for Quotation
- Completed ANL-70A Pre-Award Information, Representations and Certifications
- Evidence to support the adherance to the technical requirements listed in the Statement of Work
- Country of Origin per the requirements of the Buy American Act
- Price Justification (see ANL-70 for examples)
- Lead Time with FOB Destination, Lemont, IL freight terms
Please send all questions to the Contracting Officer.
Thank you!
Update #1 ·
Argonne National Laboratory is seeking a provider of a Plasma Enhanced Chemical Vapor Deposition (PECVD) System that meets the technical requirements listed in the attached Statement of Work dated February 13, 2025.
Argonne National Laboratory is looking for domestic manufactured items that meet the requirements of the Buy American Act, but are open to review of all technically acceptable options. Offers will be reviewed under Lowest Price, Technically Acceptable Criteria.
Please provide the following with your offer no later than 5:00pm CST on February 28, 2025:
- Completed and signed ANL-70 Request for Quotation
- Completed ANL-70A Pre-Award Information, Representations and Certifications
- Evidence to support the adherance to the technical requirements listed in the Statement of Work
- Country of Origin per the requirements of the Buy American Act
- Price Justification (see ANL-70 for examples)
- Lead Time with FOB Destination, Lemont, IL freight terms
Please send all questions to the Contracting Officer.
Thank you!
Files
| File | Type | Posted |
|---|---|---|
| Addendum and Acknowledgement 2.doc | DOC document | |
| Addendum and Acknowledgement Doc.doc | DOC document | |
| ANL-70A Reps and Certs Short-04-FEB-2025.PDF | ||
| Appendix D8C-12-DEC-2023.PDF | ||
| ANL-70 Request for Quotation.doc | DOC document | |
| Appendix A-71COM-13-FEB-2023.PDF | ||
| PECVD SOW 2.13.25.pdf |
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